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1. 发明申请

US20210181458A1 LENS BARREL 有权
公开(公告)号：US20210181458A1
公开(公告)日：2021-06-17
申请号：US17256471
申请日：2019-06-04
申请人： NIKON CORPORATION , TOCHIGI NIKON CORPORATION
发明人： Kunihiko SHIMIZU , Satoshi WAIZUMI , Takehiro KOIZUMI
IPC分类号： G02B7/10 , G03B17/14 , G02B7/02 , G02B15/14
摘要： A lens barrel capable of increasing the moving range of a lens includes: a lens retainer frame for holding a lens; a drive unit for driving the lens retainer frame along the optical axis direction; a first cylinder that holds the drive unit and has a cam follower; a second cylinder that has a cam groove for engaging the cam follower; and a bias part for biasing the first cylinder along the optical axis.

2. 发明申请

US20040223132A1 Mask exchanging method and exposure apparatus 失效
标题翻译：面膜交换方法和曝光装置
公开(公告)号：US20040223132A1
公开(公告)日：2004-11-11
申请号：US10781661
申请日：2004-02-20
申请人： Nikon Corporation , Sendai Nikon Corporation
发明人： Kenji Nishi , Katsunobu Ogura , Hidekazu Kikuchi
IPC分类号： G03B027/00
CPC分类号： G03F7/70733 , G03F7/70741
摘要： When a reticle stage capable of moving while holding a reticle is at a predetermined unloading position, an unloading arm performs unloading of a reticle. Also, the instant or immediately after the reticle is separated from the reticle stage by the unloading arm, the reticle stage is moved to a predetermined loading position where a reticle is loaded onto the reticle stage by a loading arm. This allows the reticle to be loaded onto the reticle stage before the unloading arm completely withdraws from the unloading position, which reduces the downtime between the retile unloading and the reticle loading. Accordingly, the throughput of the exposure apparatus can be improved, since the time required for reticle exchange is reduced.
摘要翻译：当保持掩模版时能够移动的标线片台处于预定的卸载位置时，卸载臂执行掩模版的卸载。此外，在通过卸载臂将掩模版与刻划台分隔开之后或之后，通过装载臂将标线片载物台移动到预定的装载位置，在该装载位置将掩模版装载到标线片台上。这样就可以在卸载臂从卸载位置完全退出之前，将掩模版加载到标线片台上，从而减少了沉淀物卸载与掩模版加载之间的停机时间。因此，由于减少了掩模版交换所需的时间，因此能够提高曝光装置的生产量。

3. 发明申请

US20040057030A1 Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same 失效
标题翻译：用于保持薄的圆形掩模版和使用其的掩模版处理系统的掩模保持盒和方法
公开(公告)号：US20040057030A1
公开(公告)日：2004-03-25
申请号：US10635803
申请日：2003-08-05
申请人： Nikon Corporation , Sendai Nikon Corporation
发明人： Yukiharu Okubo , Hidekazu Kikuchi
IPC分类号： G03B027/42
CPC分类号： G03F1/66 , G03F7/70741 , Y10S414/11 , Y10S414/137
摘要： Reticle-holding devices (reticle nullpodsnull) are disclosed for holding circular reticles as used microlithography systems that use circular reticles. An exemplary reticle pod includes a base and cover. Mounted to the base are multiple (desirably three) reticle-support blocks providing three respective, equally spaced, reticle-contact surfaces that support a reticle in the peripheral nullhandling zonenull of the reticle. Mounted to the inside surface of the cover are corresponding compliant pressure-application members (desirably respective flat springs terminating with respective reticle-contact members) that apply a holding force to the reticle. A respective portion of the reticle is situated between each pressure-application member and a respective reticle-support surface. Thus, the reticle, configured as a SEMI standard wafer, is stably held at three points in the handling zone of the reticle without damaging the reticle.
摘要翻译：公开了用于保持圆形掩模版的标线片保持装置（掩模版“荚”），这是使用环形掩模版的微光刻系统。示例性掩模托架包括底座和盖。安装到基座上是多个（期望地三个）掩模版支撑块，其提供三个相应的，等间隔的光罩接触表面，其支撑掩模版的外围“处理区”中的掩模版。安装到盖的内表面的是相应的柔性压力施加构件（期望地相应于各个标线接触构件的平板弹簧），其将保持力施加到掩模版。标线片的相应部分位于每个压力施加构件和相应的掩模版支撑表面之间。因此，配置为SEMI标准晶片的掩模版被稳定地保持在掩模版的处理区域中的三个点处，而不会损坏掩模版。

4. 发明申请

US20010029436A1 Semiconductor electrical characteristics evaluation apparatus and semiconductor electrical characteristics evaluation method 审中-公开
标题翻译：半导体电气特性评估装置及半导体电气特性评估方法
公开(公告)号：US20010029436A1
公开(公告)日：2001-10-11
申请号：US09816085
申请日：2001-03-26
申请人： TOCHIGI NIKON CORPORATION, NIKON CORPORATION
发明人： Ryoichi Fukasawa
IPC分类号： G06F019/00 , G01R027/28 , G01R031/00 , G01R031/14
CPC分类号： G01N21/3581 , G01N21/3563 , G01R31/2831 , G01R31/311
摘要： An electrical characteristics evaluation apparatus comprises a terahertz pulse light source that irradiates terahertz pulse light onto a semiconductor material, a light detector that detects pulse light having been transmitted through or having been reflected by the semiconductor material, a measurement device that obtains a spectral transmittance or a spectral reflectance by using a time-series waveform of the electric field intensity of the transmitted pulse light or the reflected pulse light and an arithmetic operation unit that calculates an electrical characteristics parameter of the semiconductor material based upon the spectral transmittance or the spectral reflectance. By adopting this electrical characteristics evaluation apparatus and the corresponding electrical characteristics evaluation method, the electrical material quantities (such as the carrier density, the mobility, the resistivity and the electrical conductivity) of the measurement target, i.e.,the semiconductor material, can be measured and inspected without contaminating or damaging the semiconductor material.
摘要翻译：电特性评估装置包括将太赫兹脉冲光照射到半导体材料上的太赫兹脉冲光源，检测已被透过或被半导体材料反射的脉冲光的光检测器，获得光谱透射率的测量装置或通过使用发射脉冲光或反射脉冲光的电场强度的时间序列波形的光谱反射率和基于光谱透射率或光谱反射率计算半导体材料的电特性参数的算术运算单元。通过采用该电特性评价装置和相应的电特性评价方法，可以测量测量对象（即，半导体材料）的电气材料量（诸如载流子密度，迁移率，电阻率和电导率）并且在不污染或损坏半导体材料的情况下检查。

5. 发明申请

US20230139849A1 IMAGE PROCESSING METHOD, IMAGE PROCESSING DEVICE, AND IMAGE PROCESSING PROGRAM 有权
公开(公告)号：US20230139849A1
公开(公告)日：2023-05-04
申请号：US17769313
申请日：2019-10-17
申请人： NIKON CORPORATION
发明人： Mariko HIROKAWA , Yasushi TANABE
IPC分类号： G06T5/50 , G06T7/11 , G06T7/136 , A61B3/12 , A61B3/10
摘要： An image processing method including acquiring a fundus image, extracting a first area including a first feature from the fundus image, extracting a second area including a second feature different from the first feature from the fundus image, and generating a combined image in which the extracted first area and the extracted second area are combined.

6. 发明授权

US11641522B2 Image-capturing device and image processing device 有权
公开(公告)号：US11641522B2
公开(公告)日：2023-05-02
申请号：US17355991
申请日：2021-06-23
申请人： NIKON CORPORATION
发明人： Takashi Shionoya , Toshiyuki Kanbara , Naoki Sekiguchi
IPC分类号： H04N5/235 , H04N5/353 , H04N9/04 , G06T3/40 , H04N5/355 , H01L27/146 , H04N5/232 , H04N5/369 , H04N5/367 , H04N5/357 , H04N5/351 , H04N5/341
摘要： An image-capturing device includes: an image sensor that includes an image capturing area where an image of a subject is captured; a setting unit that sets image capturing conditions to be applied to the image-capturing area; a selection unit that selects pixels to be used for interpolation from pixels present in the image-capturing area; and a generation unit that generates an image of the subject captured in the image-capturing area with signals generated through interpolation executed by using signals output from the pixels selected by the selection unit, wherein: the selection unit makes a change in selection of at least some of the pixels to be selected depending upon the image-capturing conditions set by the setting unit.

7. 发明授权

US11641519B2 Focus detection device, imaging device, and interchangeable lens 有权
公开(公告)号：US11641519B2
公开(公告)日：2023-05-02
申请号：US17261979
申请日：2019-07-19
申请人： NIKON CORPORATION
发明人： Sinsuke Sambongi , Akira Kinoshita , Yuki Kita
IPC分类号： H04N5/232 , G03B13/36 , G03B17/14 , H04N5/225
摘要： A focus detection device includes: an imaging unit having a first and second pixel each of which receives light transmitted through an optical system and outputs signal used for focus detection, and a third pixel which receives light transmitted through the optical system and outputs signal used for image generation; an input unit to which information regarding the optical system is input; a selection unit that selects one of the first and second pixel based on the information to the input unit; a readout unit that reads out the signal from one of the first and second pixel based on a selection result at a timing different from reading out the signal from the third pixel to be read out; and a focus detection unit that performs the focus detection based on at least one of the signals of the first and second pixel read out by the readout unit.

8. 发明申请

US20230130244A1 IMAGE PROCESSING METHOD, IMAGE PROCESSING DEVICE, AND PROGRAM 有权
公开(公告)号：US20230130244A1
公开(公告)日：2023-04-27
申请号：US17769299
申请日：2019-10-15
申请人： NIKON CORPORATION
发明人： Mariko HIROKAWA , Yasushi TANABE
IPC分类号： G06T7/00 , G06T7/11 , G06T7/194 , G06T7/155 , G06T11/00 , A61B3/12 , A61B5/02
摘要： A processor divides a fundus region of an ultra-wide field fundus image into plural areas including at least a first area and a second area, generates first attribute information indicating an attribute of the first area and second attribute information indicating an attribute of the second area, and generates first mode instruction information to instruct display of the first area in a first mode corresponding to the first attribute information, and generates second mode instruction information to instruct display of the second area in a second mode corresponding to the second attribute information.

9. 发明申请

US20230122763A1 BUILD SYSTEM, BUILD METHOD, COMPUTER PROGRAM, RECORDING MEDIUM AND CONTROL APPARATUS 有权
公开(公告)号：US20230122763A1
公开(公告)日：2023-04-20
申请号：US18085787
申请日：2022-12-21
申请人： NIKON CORPORATION
发明人： Kazuki UENO
IPC分类号： B29C64/393 , B33Y30/00 , B33Y50/02 , B29C64/321 , B29C64/153 , B29C64/209 , B29C64/268 , B22F12/44
摘要： A build system is provided with: a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation system; and a change apparatus that is configured to change a relative position between the energy beam and the target object, wherein the build system differentiates a condition of the build process that is performed at a first area of the target object and a condition of the build process that is performed at a second area of the target object.

10. 发明授权

US11629950B2 Detection device, detection system, detection method, and storage medium 有权
公开(公告)号：US11629950B2
公开(公告)日：2023-04-18
申请号：US16126312
申请日：2018-09-10
申请人： NIKON CORPORATION
发明人： Yoshihiro Nakagawa , Takeaki Sugimura , Yoshiyuki Yamariku
IPC分类号： G01B11/24 , G06T7/73 , H04N5/247 , G06T7/40 , H04N5/232 , G06T7/521 , G06T17/00 , G06T7/514 , G01B11/25 , G06T7/70 , G01B11/245 , G06T7/55 , H04N5/225
摘要： A detection device includes: a detector that detects an object from a first viewpoint; an information calculator that calculates first model information including shape information on the object from the first viewpoint by using detection results of the detector; a light source calculator that calculates light source information on the light source by using a first taken image obtained by imaging a space including a light source that irradiates the object with illumination light and including the object; and a position calculator that calculates a positional relation between the first viewpoint and the object by using the light source information as information used to integrate the first model information and second model information including shape information obtained by detecting the object from a second viewpoint different from the first viewpoint.

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