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1. 发明申请

US20180286732A1 ELECTROSTATIC CHUCK 审中-公开
公开(公告)号：US20180286732A1
公开(公告)日：2018-10-04
申请号：US15937126
申请日：2018-03-27
申请人： TOTO LTD.
发明人： Jumpei UEFUJI , Hitoshi SASAKI , Kosuke YAMAGUCHI , Kengo MAEHATA , Yuichi YOSHII , Tetsuro ITOYAMA
IPC分类号： H01L21/683 , H01L21/67 , H05B3/28
CPC分类号： H01L21/6833 , H01L21/67103 , H01L21/67109 , H01L21/6831 , H01L21/68785 , H05B3/283
摘要： According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, an electrode layer, a base plate, and a heater plate. The ceramic dielectric substrate has a first major surface where a processing object is placed. The electrode layer is provided in the ceramic dielectric substrate. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the base plate and the first major surface. The heater plate includes a first heater element and a second heater element. The first heater element emits heat due to a current flowing. The second heater element emits heat due to a current flowing. When viewed along a direction perpendicular to the first major surface, bends of the first heater element is more than bends of the second heater element, and the first heater element includes a portion positioned at a gap of the second heater element.

2. 发明申请

US20180277352A1 Multiple Zone Heater 审中-公开
公开(公告)号：US20180277352A1
公开(公告)日：2018-09-27
申请号：US15955693
申请日：2018-04-18
申请人： Component Re-Engineering Company, Inc.
发明人： Alfred Grant Elliot , Brent Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/02 , H01L21/67 , H05B3/28 , H01L21/687
CPC分类号： H01L21/02002 , H01L21/67103 , H01L21/67248 , H01L21/68792 , H05B3/283 , H05B2203/002 , H05B2203/037
摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

3. 发明申请

US20180204748A1 CERAMIC HEATER 审中-公开
公开(公告)号：US20180204748A1
公开(公告)日：2018-07-19
申请号：US15909040
申请日：2018-03-01
申请人： NGK INSULATORS, LTD.
发明人： Yutaka Unno , Hiroshi Takebayashi
IPC分类号： H01L21/67 , H01L21/687 , H05B3/28 , H05B3/74
CPC分类号： H01L21/67103 , H01L21/68792 , H05B3/283 , H05B3/74 , H05B2203/002 , H05B2203/013
摘要： A ceramic heater includes a disk-shaped ceramic plate with an upper surface defining a wafer placement surface on which a wafer is to be placed. One or more inner-peripheral-side heater elements are embedded in an inner peripheral zone of the ceramic plate, and one or more outer-peripheral-side heater elements are embedded in an outer peripheral zone of the ceramic plate. A thickness of the ceramic plate in a predetermined zone is 3.9% or less of a diameter of the ceramic plate. The predetermined zone is a zone including a boundary line between the inner peripheral zone and the outer peripheral zone.

4. 发明申请

US20180040498A1 PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATION MATERIALS ON GREEN SHEET CERAMIC 审中-公开
公开(公告)号：US20180040498A1
公开(公告)日：2018-02-08
申请号：US15667281
申请日：2017-08-02
申请人： APPLIED MATERIALS, INC.
发明人： Shih-Ying Huang , Steven E. Babayan , Phillip Criminale , Stephen Prouty , Anthony Huang
IPC分类号： H01L21/683 , H05K3/00 , H05B3/28 , H05K1/02 , H05K1/16 , H05K1/18 , H05K3/12 , H01L21/67
CPC分类号： H01L21/6833 , B41F15/423 , B41P2200/40 , H01L21/67103 , H01L21/6831 , H01L21/68785 , H05B3/283 , H05B2203/017 , H05K1/0201 , H05K1/0212 , H05K1/0306 , H05K1/165 , H05K1/167 , H05K1/181 , H05K3/0097 , H05K3/1233 , H05K3/1291 , H05K2203/0139 , H05K2203/162 , H05K2203/163 , H05K2203/166
摘要： Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

5. 发明授权

US09775196B2 Self-heating concrete using carbon nanofiber paper 有权
公开(公告)号：US09775196B2
公开(公告)日：2017-09-26
申请号：US13186770
申请日：2011-07-20
申请人： Gangbing Song , Christiana Chang , Yi Lung Mo
发明人： Gangbing Song , Christiana Chang , Yi Lung Mo
IPC分类号： H05B1/00 , H05B3/00 , H05B3/28
CPC分类号： H05B3/0004 , H05B3/283 , H05B2214/02
摘要： Electric, self-heating concrete systems that uses embedded carbon macrofiber or nanofibers paper as electric resistance heating elements are disclose. The self-heating concrete systems may utilize the conductive properties of carbon macrofiber or nanofiber materials to heat a surface overlay of concrete with various admixtures to improve the concrete's thermal conductivity. The self-heating concrete systems allow concrete roadways or the like to be heated to above freezing temperatures in a freezing environment in a reasonable amount of time.

6. 发明授权

US09392647B2 Window glass sheet fitted with seal member 有权
公开(公告)号：US09392647B2
公开(公告)日：2016-07-12
申请号：US14656859
申请日：2015-03-13
申请人： NIPPON SHEET GLASS CO., LTD.
发明人： Takumitsu Sakamoto , Haruyoshi Kurogi
IPC分类号： B60L1/02 , H05B3/86 , B60J1/02 , H01Q1/12 , B60J1/00 , H05B3/04 , H05B3/28
CPC分类号： H05B3/86 , B60J1/002 , B60J1/02 , B60J10/30 , B60J10/70 , H01Q1/1271 , H05B3/04 , H05B3/283
摘要： Provided is a window glass sheet fitted with a seal member and incorporated with a device such as a deicer which facilitates the device and the seal member to be installed in a proper manner. The automotive window glass sheet comprises a laminated glass sheet including a first glass sheet and a second glass sheet placed on an outboard side of the first glass sheet, and a seal member fitted on a peripheral part of the laminated glass sheet. The automotive window glass sheet further comprises a cutout formed on an edge of the first glass sheet, an electrode provided on a part of the inboard side of the second glass sheet corresponding to the cutout, a lead wire connected to the electrode and a spacer extending along an edge of the second glass sheet on the inboard side of the second glass sheet in a part thereof corresponding to the cutout and defining a flat and smooth inboard surface, wherein the inboard surface of the spacer is flush with a plane extrapolated from an inboard side of the first glass sheet, and the seal member is attached to a peripheral part of the inboard side of the first glass sheet and is attached to the inboard surface of the spacer in the cutout.

7. 发明授权

US09351344B2 Ceramic heater 有权
标题翻译：陶瓷加热器
公开(公告)号：US09351344B2
公开(公告)日：2016-05-24
申请号：US14161725
申请日：2014-01-23
申请人： SHIN-ETSU CHEMICAL CO., LTD.
发明人： Shoji Kano
IPC分类号： H05B3/08 , H05B3/03 , H05B3/28 , H05B3/06
CPC分类号： H05B3/03 , H05B3/06 , H05B3/283
摘要： A ceramic heater is proposed in which in the vicinities of the heating element's terminals where a bolt and a washer are used to fix and effect the electric supply connection to the heating element, the cover layer which covers most of the heating element is flush with an immediately neighboring part of the heating element layer so that the cover layer is not stepped at its edge and thus the washer does not scratch or otherwise damage the cover layer; a preferred embodiment adopts an electrically conductive protective film which is laid on this flush plane covering an area extending from the bolt hole to substantially beyond the line where the cover layer meets with the heating element layer.
摘要翻译：提出了一种陶瓷加热器，其中在加热元件端子附近使用螺栓和垫圈固定并实现与加热元件的电力供应连接，覆盖大部分加热元件的覆盖层与立即相邻的加热元件层的一部分，使得覆盖层在其边缘处没有台阶，因此垫圈不会刮伤或以其他方式损坏覆盖层; 优选实施例采用导电保护膜，该导电保护膜铺设在该平面上，覆盖从螺栓孔延伸到覆盖层与加热元件层相交的线的区域。

8. 发明授权

US09287144B2 Heating device 有权
标题翻译：加热装置
公开(公告)号：US09287144B2
公开(公告)日：2016-03-15
申请号：US13863803
申请日：2013-04-16
申请人： NGK INSULATORS, LTD.
发明人： Nobuyuki Kondo , Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
IPC分类号： H05B3/02 , H01L21/67 , C04B35/581 , H05B1/00 , B32B18/00 , H05B3/28 , H01L21/683 , C04B35/58 , C04B35/626 , C04B35/645 , C04B37/00 , C23C14/34
CPC分类号： H01L21/67 , B32B18/00 , C04B35/58 , C04B35/581 , C04B35/6261 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3865 , C04B2235/5445 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2237/08 , C04B2237/34 , C04B2237/343 , C04B2237/36 , C04B2237/366 , C04B2237/58 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C23C14/3414 , H01L21/6831 , H05B1/00 , H05B3/283 , Y10T428/24942
摘要： A heating apparatus 1A includes a susceptor part 9A having a heating face 9a of heating a semiconductor W, and a ring shaped part 6A provided in the outside of the heating face 9a. The ring shaped part 6A is composed of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° taken by using CuKα ray.
摘要翻译：加热装置1A包括具有加热半导体W的加热面9a的基座部9A和设置在加热面9a的外侧的环状部6A。环形部6A由以镁，铝，氧，氮为主要成分的陶瓷材料构成。陶瓷材料包括主相，其包含镁 - 铝氧氮化物相，其表现出至少2％的XRD峰; =通过使用CuKα射线摄取47至50°。

9. 发明授权

US09202718B2 Electrostatic chuck 有权
标题翻译：静电吸盘
公开(公告)号：US09202718B2
公开(公告)日：2015-12-01
申请号：US13864467
申请日：2013-04-17
申请人： NGK INSULATORS, LTD.
发明人： Kenichiro Aikawa , Morimichi Watanabe , Asumi Jindo , Yuji Katsuda , Yosuke Sato , Yoshinori Isoda
IPC分类号： H01L21/683 , H01L21/67 , C04B35/581 , H05B1/00 , B32B18/00 , H05B3/28 , C04B35/58 , C04B35/626 , C04B35/645 , C04B37/00 , C23C14/34
CPC分类号： H01L21/67 , B32B18/00 , C04B35/58 , C04B35/581 , C04B35/6261 , C04B35/62655 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3865 , C04B2235/5445 , C04B2235/77 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , C04B2237/08 , C04B2237/34 , C04B2237/343 , C04B2237/36 , C04B2237/366 , C04B2237/58 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C23C14/3414 , H01L21/6831 , H05B1/00 , H05B3/283 , Y10T428/24942
摘要： An electrostatic chuck 1A includes a susceptor 11A having an adsorption face 11a of adsorbing a semiconductor, and an electrostatic chuck electrode 4 embedded in the susceptor. The susceptor 11A includes a plate shaped main body 3 and a surface corrosion resistant layer 2 including the adsorption face 2. The surface corrosion resistant layer 2 is made of a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The ceramic material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
摘要翻译：静电吸盘1A包括具有吸附半导体的吸附面11a的基座11A和嵌入基座的静电卡盘电极4。基座11A包括板状主体3和包括吸附面2的表面耐腐蚀层2.表面耐腐蚀层2由以镁，铝，氧和氮为主要成分的陶瓷材料制成。陶瓷材料包括主相，其包含镁 - 铝氧氮化物相，其表现出至少2％的XRD峰;通过CuKαX射线显示47至50°。

10. 发明授权

US09161392B2 Heating apparatus for X-ray inspection 有权
标题翻译： X射线检查加热装置
公开(公告)号：US09161392B2
公开(公告)日：2015-10-13
申请号：US12737851
申请日：2010-02-25
申请人： Yoshinobu Anbe
发明人： Yoshinobu Anbe
IPC分类号： F27B9/36 , F27B9/40 , F27D7/04 , F27D11/00 , H05B3/02 , H05B3/30 , G01N23/02 , H05B3/28 , H05B3/26 , G01N23/20
CPC分类号： H05B3/283 , G01N23/02 , G01N23/20033 , H05B3/262 , H05B2203/002 , H05B2203/003 , H05B2203/004 , H05B2203/017 , H05B2203/022 , H05B2203/033
摘要： In a heating apparatus for X-ray inspection which heats at least one surface of a sample (7) by convection to perform an X-ray inspection, a planar heater 1 formed of an X-ray transmitting material having an opening 1b for passing gas is provided at a window part 22 for making an X-ray observation of the sample. Thereby, a board can be subjected to convection heating uniformly without enlarging or complicating the apparatus.
摘要翻译：在通过对流加热试样（7）的至少一个表面进行X射线检查的X射线检查用加热装置中，由具有用于通过气体的开口1b的X射线透射材料形成的平面加热器1 设置在用于进行样品的X射线观察的窗口部22。由此，能够均匀地对板进行对流加热，而不会使装置扩大或复杂化。

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