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1. 发明授权

US11508558B2 Thermal repeatability and in-situ showerhead temperature monitoring 有权
公开(公告)号：US11508558B2
公开(公告)日：2022-11-22
申请号：US16834814
申请日：2020-03-30
申请人： Applied Materials, Inc.
发明人： Timothy Joseph Franklin , Steven E. Babayan , Philip Allan Kraus
IPC分类号： H01J37/32 , B05B1/00 , B05B1/18 , B05B12/10 , H01L21/67
摘要： Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.

2. 发明授权

US10410900B2 Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic 有权
公开(公告)号：US10410900B2
公开(公告)日：2019-09-10
申请号：US15667281
申请日：2017-08-02
申请人： APPLIED MATERIALS, INC.
发明人： Shih-Ying Huang , Steven E. Babayan , Phillip Criminale , Stephen Prouty , Anthony Huang
IPC分类号： H05K3/12 , B41F15/42 , H01L21/683 , H01L21/687 , H01L21/67 , H05B3/28 , H05K1/02 , H05K1/16 , H05K1/18 , H05K3/00 , H05K1/03
摘要： Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

3. 发明申请

US20160345384A1 AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK 审中-公开
标题翻译： AZIMUTHALLY TUNABLE多区静电切割机
公开(公告)号：US20160345384A1
公开(公告)日：2016-11-24
申请号：US14997842
申请日：2016-01-18
申请人： Applied Materials, Inc.
发明人： Chunlei Zhang , Philip Criminale , Steven E. Babayan , David Ullstrom
IPC分类号： H05B1/02 , H01L21/67 , H01L21/66 , H01L21/683
CPC分类号： H05B1/0233 , H01L21/67103 , H01L21/67248 , H01L21/6831 , H01L22/20
摘要： Implementations described herein provide a method for processing a substrate on a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a substrate. The method includes processing a first substrate using a first temperature profile on the ESC having primary heaters and spatially tunable heaters. A deviation profile is determined from a result of processing the first substrate from a target result profile. The first temperature profile is adjusted to a second temperature profile on the ESC based on the deviation profile. Adjusting to the second temperature profile includes incrementing the power to one or more spatially tunable heaters in one or more discrete locations corresponding to the deviations profile. A second substrate is then processed on the ESC using the second temperature profile.
摘要翻译：本文所述的实施方案提供了一种用于处理衬底支撑组件上的衬底的方法，该衬底支撑组件能够实现静电卡盘和衬底之间的热传递的侧向和方位调节。该方法包括使用具有初级加热器和空间可调谐加热器的ESC上的第一温度曲线来处理第一基板。从目标结果轮廓处理第一基底的结果确定偏差分布。基于偏差曲线，第一温度曲线被调整到ESC上的第二温度曲线。调整到第二温度曲线包括在对应于偏差轮廓的一个或多个离散位置中增加对一个或多个空间可调谐加热器的功率。然后使用第二温度曲线在ESC上处理第二衬底。

4. 发明授权

US11569114B2 Semiconductor processing with cooled electrostatic chuck 有权
公开(公告)号：US11569114B2
公开(公告)日：2023-01-31
申请号：US17174591
申请日：2021-02-12
申请人： Applied Materials, Inc.
发明人： Yogananda Sarode Vishwanath , Steven E. Babayan , Andreas Schmid , Stephen Donald Prouty , Andrew Antoine Noujaim
IPC分类号： B29C65/00 , H01L21/683 , H05K7/20 , B29C65/56 , B29C65/02 , B29C65/48
摘要： Embodiments described herein relate to a substrate support assembly. The substrate support assembly includes an ESC base assembly having a base channel disposed therein, a facility plate, the facility plate coupled to the ESC base assembly with a vacuum region therebetween, and a seal assembly. The seal assembly includes an upper flange coupled to the base channel of the ESC base assembly, the upper flange disposed in the facility plate, a lower flange coupled to the upper flange, the lower flange disposed in the facility plate, a gasket disposed between the upper flange and the lower flange, and an insulator tube coupled to the lower flange. A passage is connected to the base channel, the passage is defined by connected openings of the upper flange, the gasket, the lower flange, the insulator tube, and the base assembly.

5. 发明授权

US11075105B2 In-situ apparatus for semiconductor process module 有权
公开(公告)号：US11075105B2
公开(公告)日：2021-07-27
申请号：US16103531
申请日：2018-08-14
申请人： Applied Materials, Inc.
发明人： Yogananda Sarode Vishwanath , Steven E. Babayan , Stephen Prouty , Andreas Schmid
IPC分类号： H01L21/687 , C23C16/458 , H01J37/32 , H01L21/677 , H01L21/683
摘要： Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

6. 发明申请

US20190391602A1 METHODS AND APPARATUS FOR ENHANCED FLOW DETECTION REPEATABILITY OF THERMAL-BASED MASS FLOW CONTROLLERS (MFCS) 审中-公开
公开(公告)号：US20190391602A1
公开(公告)日：2019-12-26
申请号：US16563774
申请日：2019-09-06
申请人： Applied Materials, Inc.
发明人： Ming Xu , Sushant S. Koshti , Michael R. Rice , Steven E. Babayan , Jennifer Y. Sun
IPC分类号： G05D7/06 , C23C14/54 , C23C16/52 , G01F1/684 , G01F15/14 , G01F15/18 , G01F1/696
摘要： An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.

7. 发明申请

US20180040498A1 PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATION MATERIALS ON GREEN SHEET CERAMIC 审中-公开
公开(公告)号：US20180040498A1
公开(公告)日：2018-02-08
申请号：US15667281
申请日：2017-08-02
申请人： APPLIED MATERIALS, INC.
发明人： Shih-Ying Huang , Steven E. Babayan , Phillip Criminale , Stephen Prouty , Anthony Huang
IPC分类号： H01L21/683 , H05K3/00 , H05B3/28 , H05K1/02 , H05K1/16 , H05K1/18 , H05K3/12 , H01L21/67
CPC分类号： H01L21/6833 , B41F15/423 , B41P2200/40 , H01L21/67103 , H01L21/6831 , H01L21/68785 , H05B3/283 , H05B2203/017 , H05K1/0201 , H05K1/0212 , H05K1/0306 , H05K1/165 , H05K1/167 , H05K1/181 , H05K3/0097 , H05K3/1233 , H05K3/1291 , H05K2203/0139 , H05K2203/162 , H05K2203/163 , H05K2203/166
摘要： Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

8. 发明授权

US11622419B2 Azimuthally tunable multi-zone electrostatic chuck 有权
公开(公告)号：US11622419B2
公开(公告)日：2023-04-04
申请号：US16595801
申请日：2019-10-08
申请人： Applied Materials, Inc.
发明人： Chunlei Zhang , Phillip Criminale , Steven E. Babayan , David Ullstrom
IPC分类号： H05B3/68 , H05B1/02 , H01L21/67 , H01L21/683 , H01L21/66
摘要： Implementations described herein provide a method for processing a substrate on a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a substrate. The method includes processing a first substrate using a first temperature profile on a substrate support assembly having primary heaters and spatially tunable heaters. A deviation profile is determined from a result of processing the first substrate. The spatially tunable heaters are controlled in response to the deviation profile to enable discrete lateral and azimuthal tuning of local hot or cold spots on the substrate support assembly in forming a second temperature profile. A second substrate is then processed using the second temperature profile.

9. 发明申请

US20210335631A1 SUBSTRATE CARRIER WITH ARRAY OF INDEPENDENTLY CONTROLLABLE HEATER ELEMENTS 有权
公开(公告)号：US20210335631A1
公开(公告)日：2021-10-28
申请号：US17365931
申请日：2021-07-01
申请人： Applied Materials, Inc.
发明人： Steven E. Babayan , Phillip Criminale , Zhiqiang Guo
IPC分类号： H01L21/67 , H05B1/02
摘要： A substrate carrier is described with an array of independently controllable heater elements. In one example an apparatus includes a substrate carrier to carry a substrate for processing, a plurality of resistive heating elements in the carrier to heat the substrate by heating the carrier, a power supply to supply power to the heating elements, a power controller to provide a control signal, the control signal to control an amount of current applied to each of the heating elements, and a plurality of power interfaces in the carrier each coupled to a heating element to receive the power from the power supply and the control signal from the controller and to modulate the power applied to a respective coupled heating element in response to the control signal.

10. 发明申请

US20190273008A1 PRECISION SCREEN PRINTING WITH SUB-MICRON UNIFORMITY OF METALLIZATION MATERIALS ON GREEN SHEET CERAMIC 审中-公开
公开(公告)号：US20190273008A1
公开(公告)日：2019-09-05
申请号：US16414642
申请日：2019-05-16
申请人： Applied Materials, Inc.
发明人： Shih-Ying Huang , Steven E. Babayan , Phillip Criminale , Stephen Prouty , Anthony Huang
IPC分类号： H01L21/683 , H05K1/16 , H05K3/12 , H05K3/00 , H05K1/02 , H05K1/18 , H01L21/67 , B41F15/42 , H01L21/687 , H05B3/28
摘要： Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

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