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1. 发明授权

US09992313B2 Electronic device 有权
公开(公告)号：US09992313B2
公开(公告)日：2018-06-05
申请号：US15032875
申请日：2014-10-30
申请人： KYOCERA Corporation
发明人： Takaaki Watanabe
IPC分类号： H04R25/00 , H04M1/03 , H01L41/09 , H04R1/02 , H04R17/00 , B06B1/06 , H04M1/02 , H04R17/08 , H04R1/00 , H04R7/04
CPC分类号： H04M1/03 , B06B1/0644 , H01L41/09 , H01L41/0973 , H01L41/098 , H04M1/0266 , H04M1/0268 , H04R1/00 , H04R1/02 , H04R7/04 , H04R7/045 , H04R17/00 , H04R17/08 , H04R2440/05 , H04R2499/11
摘要： An electronic device 1 includes: a panel 10; a housing 60 holding the panel 10; and a piezoelectric element 30 attached to the panel 10, wherein the deformation of the piezoelectric element 30 causes the panel 10 to vibrate, to transmit human body vibration sound to an object in contact with the panel 10, and the perpendicular line or normal to the main surface of the panel 10 and the surface of the piezoelectric element 30 attached to the panel 10 are not orthogonal to each other.

2. 发明授权

US06584660B1 Method of manufacturing a piezoelectric device 失效
标题翻译：制造压电元件的方法
公开(公告)号：US06584660B1
公开(公告)日：2003-07-01
申请号：US08257020
申请日：1994-06-08
申请人： Natsumi Shimogawa , Koji Kimura , Yukihisa Takeuchi
发明人： Natsumi Shimogawa , Koji Kimura , Yukihisa Takeuchi
IPC分类号： H04R1700
CPC分类号： H01L41/0973 , B41J2/14233 , H01L41/314 , H04R17/08 , Y10T29/42 , Y10T29/49401
摘要： A method for making a piezoelectric device wherein residual stresses in the piezoelectric transducer element of the piezoelectric device are relieved by forming a groove or grooves extending into a thick-walled region of the peripheral wall of a ceramic substrate in the piezoelectric device. The stresses to be relieved are caused by a difference in shrinkage between the ceramic substrate and the piezoelectric transducer as a result of sintering the substrate and the transducer to form an integral product.
摘要翻译：一种制造压电器件的方法，其中压电器件的压电换能器元件中的残余应力通过在压电器件中形成延伸到陶瓷衬底的周壁的厚壁区域中的沟槽而被释放。要缓解的应力是由于烧结基板和换能器以形成整体产品而导致陶瓷基板和压电换能器之间收缩的差异引起的。

3. 发明申请

US20020101253A1 Method and device for vibration control 失效
标题翻译：振动控制方法及装置
公开(公告)号：US20020101253A1
公开(公告)日：2002-08-01
申请号：US09803320
申请日：2001-03-09
发明人： Baruch Pletner , Richard Perkins , Leonard Lublin
IPC分类号： G01R029/22
CPC分类号： G03F7/70725 , F16F15/005 , F16F15/02 , F16F15/0275 , F16F2230/08 , G03F7/70825 , G03F7/70833 , G03F7/709 , G05D19/02 , H04R17/08
摘要： A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.
摘要翻译：一种振动控制系统，包括致动器和用于控制用于制造电子设备的系统中的振动的传感器。致动器可以包括结合到电镀片材上的电活性材料的一个或多个板或元件。

4. 发明申请

US20020047499A1 Packaged strain actuator 审中-公开
标题翻译：包装应变致动器
公开(公告)号：US20020047499A1
公开(公告)日：2002-04-25
申请号：US09837773
申请日：2001-04-18
发明人： Kenneth B. Lazarus , Mark E. Lundstrom , Jeffrey W. Moore , Edward Crawley
IPC分类号： H05K003/20 , H02N002/00
CPC分类号： H01L41/23 , G03F7/70725 , G03F7/70758 , G03F7/709 , H01L41/047 , H01L41/053 , H01L41/0926 , H01L41/0933 , H01L41/094 , H01L41/0953 , H01L41/0993 , H04R17/08 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/49146
摘要： A modular actuator assembly includes one or more plates or elements of electro-active material bonded to an electroded sheet, preferably by a structural polymer to form a card. The card is sealed, and may itself constitute a practical device, such as a vane, shaker, stirrer, lever, pusher or sonicator for direct contact with a solid or immersion in a fluid, or may be bonded by a stiff adhesive to make a surface-to-surface mechanical coupling with a solid workpiece, device, substrate, machine or sample. The structural polymer provides a bending stiffness such that the thin plate does not deform to its breaking point, and a mechanical stiffness such that shear forces are efficiently coupled from the plate to the workpiece. In further embodiments, the card may include active circuit elements for switching, powering or processing signals, and/or passive circuit elements for filtering, matching or damping signals, so that few or no connections to outside circuitry are required. The actuator assembly can be manufactured in quantity, to provide a versatile actuator with uniform mechanical and actuation characteristics, that introduces negligible mass loading to the workpiece. The cards themselves may be arranged as independent mechanical actuators, rather than strain-transfer actuators, in which the induced strain changes the position of the card. Various arrangements of pinned or cantilevered cards may act as a pusher, bender or other motive actuator, and structures such as powered bellows may be formed directly by folding one or more suitably patterned cards.
摘要翻译：模块化致动器组件包括一个或多个电活性材料的板或元件，其结合到电镀片材上，优选地通过结构聚合物形成卡片。该卡被密封，并且本身可以构成用于与固体直接接触或浸入流体中的实际装置，例如叶片，摇动器，搅拌器，杠杆，推动器或超声波器，或者可以通过刚性粘合剂粘合以形成与实体工件，器件，基板，机器或样品的表面到表面的机械耦合。结构聚合物提供弯曲刚度，使得薄板不会变形到其断裂点，并且具有机械刚度，使得剪切力从板有效地耦合到工件。在另外的实施例中，卡可以包括用于切换，供电或处理信号的有源电路元件，和/或用于滤波，匹配或阻尼信号的无源电路元件，使得很少或者不需要与外部电路的连接。致动器组件可以大量制造，以提供具有均匀机械和致动特性的通用致动器，其将可忽略的质量负载引入到工件中。卡本身可以被布置为独立的机械致动器，而不是应变传递致动器，其中感应应变改变卡的位置。钉扎或悬臂卡的各种布置可以用作推动器，弯曲机或其它动作致动器，并且诸如动力波纹管的结构可以通过折叠一个或多个适当图案化的卡直接形成。

5. 发明授权

US06217979B1 Piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩膜元件
公开(公告)号：US06217979B1
公开(公告)日：2001-04-17
申请号：US09085853
申请日：1998-05-27
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： C04B3700
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , C04B2235/3225 , C04B2235/6025 , H01L41/0973 , H01L41/314 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

6. 发明授权

US6111967A Multi-segmented high deformation piezoelectric array 失效
标题翻译：多段高变形压电阵列
公开(公告)号：US6111967A
公开(公告)日：2000-08-29
申请号：US963415
申请日：1997-11-03
申请人： Samuel A Face, Jr. , Norvell S. Rose, Jr.
发明人： Samuel A Face, Jr. , Norvell S. Rose, Jr.
IPC分类号： G10K9/12 , H01L41/09 , H04R17/00 , H04R17/08 , H04R25/00
CPC分类号： G10K9/121 , H01L41/0933 , H04R17/00 , H04R17/08
摘要： A multi-segmented flextensional transducer includes a plurality of electroplated electroactive members which deform in concert when energized by an electrical field. Each electroactive member has a convex surface at both ends. A connection member with opposing concave surfaces is disposed between adjacent electroactive members. The electroactive members are arranged such that the convex faces of each intermediate electroactive member engage a concave face of an adjacent connection member, thus forming a cooperative array or "train" of electroactive members and connection members. The opposite ends of the train of electroactive members and connection members is received by a frame which holds the end electroactive members in fixed relative position. The electroactive members are high deformation flextensional piezoelectric elements. When energized, each electroactive member individually deforms, and the entire array deforms in concert an amount significantly exceeding that of the individual electroactive members.
摘要翻译：多分段屈曲变换器包括多个电镀电活性部件，当通过电场激励时，它们一起变形。每个电活性构件在两端具有凸面。具有相对的凹面的连接构件设置在相邻的电活性构件之间。电活性构件被布置成使得每个中间电活性构件的凸面接合相邻连接构件的凹面，从而形成电活性构件和连接构件的协作阵列或“列车”。电活性构件和连接构件的列的相对端由保持端电动构件固定在相对位置的框架接收。电活性物质是高变形力的压电元件。当通电时，每个电活性元件单独变形，并且整个阵列一致地显着超过单个电活性元件的量的变化。

7. 发明授权

US6028389A Micromachined piezoelectric transducer 失效
标题翻译：微加工压电传感器
公开(公告)号：US6028389A
公开(公告)日：2000-02-22
申请号：US84142
申请日：1998-05-26
申请人： Jonathan J. Bernstein
发明人： Jonathan J. Bernstein
IPC分类号： H04R17/00 , H04R17/08 , H01L41/08
CPC分类号： H04R17/00 , H01L2224/48463 , H01L2224/49107 , H01L2924/10158 , H04R17/08
摘要： A micromachined piezoelectric acoustic transducer includes a substrate; at least one piezoelectric actuator means attached at at least one proximal edge to the substrate; a gap around at least a portion of the remaining edges of the piezoelectric actuator means; and a flexible corrugated membrane in at least a portion of the gap and interconnecting the actuator means with at least one of the substrate or a neighboring actuator means.
摘要翻译：微加工压电声换能器包括基板; 至少一个压电致动器装置，其连接到至少一个近侧边缘到基底; 围绕所述压电致动器装置的剩余边缘的至少一部分的间隙; 以及在所述间隙的至少一部分中的柔性波纹膜，并且使所述致动器装置与所述基板或相邻致动器装置中的至少一个相互连接。

8. 发明授权

US5956292A Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same 失效
标题翻译：单片微加工压电声换能器和换能器阵列及其制作方法
公开(公告)号：US5956292A
公开(公告)日：1999-09-21
申请号：US931226
申请日：1997-09-16
申请人： Jonathan J. Bernstein
发明人： Jonathan J. Bernstein
IPC分类号： H04R17/00 , H04R17/08 , H01L41/08
CPC分类号： H04R17/00 , H04R17/08 , Y10T29/42
摘要： A monolithic micromechanical piezoelectric acoustic transducer with integrated control circuit includes a support member; a piezoelectric medium disposed on the support member; first and second electrodes engaging the piezoelectric medium; and a control circuit monolithically integrated with the piezoelectric medium and electrodes on the support member and including a switching circuit for selectively interconnecting the electrodes with an I/O bus and a signal processing circuit for conditioning signals propagating between the electrodes and the I/O bus; an array of such acoustic transducers that form an acoustic retina; and a method of making such transducers and arrays.
摘要翻译：具有集成控制电路的单片微机械压电声换能器包括支撑构件; 设置在所述支撑构件上的压电介质; 与压电介质接合的第一和第二电极; 以及控制电路，与压电介质和支撑构件上的电极单片集成，并且包括用于选择性地将电极与I / O总线相互连接的开关电路和用于调节在电极和I / O总线之间传播的信号的信号处理电路 ; 形成声视网膜的这种声换能器阵列; 以及制造这种换能器和阵列的方法。

9. 发明授权

US5853514A Method of producing a piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩薄膜元件的制造方法
公开(公告)号：US5853514A
公开(公告)日：1998-12-29
申请号：US716876
申请日：1996-09-20
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： G01L1/16 , C04B35/49 , C04B35/493 , H01L41/09 , H01L41/22 , H04R17/00 , H04R17/08 , C04B37/00 , H01L41/08
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , H01L41/0973 , H01L41/314 , C04B2235/3225 , C04B2235/6025 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

10. 发明授权

US5802684A Process for producing a vibration angular-velocity sensor 失效
标题翻译：振动角速度传感器的制造方法
公开(公告)号：US5802684A
公开(公告)日：1998-09-08
申请号：US504725
申请日：1995-07-20
申请人： Takamitsu Fujiu , Shunji Watanabe
发明人： Takamitsu Fujiu , Shunji Watanabe
IPC分类号： G01C19/56 , G01P9/04 , G01P15/08 , H04R17/08 , H04R17/00
CPC分类号： G01P15/0802 , G01C19/5642 , G01C19/5656 , H04R17/08 , Y10T29/42
摘要： A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the silicon-processing procedure. When an ac field of a frequency near the resonance frequency of the transverse vibration of the vibrator is applied to the thin film of the piezoelectric material, the piezoelectric reverse effect excites characteristic vibration in the vibrator. If a rotational motion is generated along the axis of the beam in that state, the Coriolis' force is generated in a direction perpendicular to both the axial direction and the vibration direction of the beam. This force deforms the beam in that direction. Detecting inductive charges produced in another piezoelectric thin film fixed on the vibrator because of the piezoelectric normal effect due to the deformation, the rotational, angular velocity can be obtained.
摘要翻译：通过硅处理工序在硅衬底上形成振动器以成为基底，并通过与硅加工步骤匹配的方法在衬底上形成压电材料薄膜。当振动器的横向振动的共振频率附近的交流场被施加到压电材料的薄膜时，压电反向效应激发振动器中的特征振动。如果在该状态下沿着轴的轴线产生旋转运动，则在与梁的轴向和振动方向垂直的方向上产生科里奥利力。该力使梁在该方向变形。检测由于变形引起的压电正常效应，旋转角速度可以获得固定在振动器上的另一个压电薄膜产生的感应电荷。

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