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1. 发明授权

US6088893A Method for producing a piezoelectric/electrostrictive film-type element 失效
标题翻译：压电/电致伸缩薄膜型元件的制造方法
公开(公告)号：US6088893A
公开(公告)日：2000-07-18
申请号：US57398
申请日：1998-04-09
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： H04R17/00 , H01L41/09 , H01L41/22 , H04R17/08 , H01L41/08
CPC分类号： H01L41/0973 , H01L41/314 , H01L41/1875 , H04R17/08 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween.Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics.
摘要翻译：压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底，其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分，其由根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极，压电和/或电致伸缩层和上电极，其中至少一部分周缘压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分，以构成相对于隔膜部分设置的伸出部分，并且伸出部分处于与部分区域不完全连接的状态通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分允许尖晶石颗粒介入其间。因此，可以有效地改善例如位移量和谐振频率特性等压电和/或电致伸缩特性。

2. 发明授权

US5814920A Piezoelectric/electrostrictive film-type element and method for producing the same 失效
标题翻译：压电/电致伸缩薄膜型元件及其制造方法
公开(公告)号：US5814920A
公开(公告)日：1998-09-29
申请号：US777953
申请日：1996-12-23
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： H04R17/00 , H01L41/09 , H01L41/22 , H04R17/08 , H01L41/08
CPC分类号： H01L41/0973 , H01L41/314 , H01L41/1875 , H04R17/08 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween. Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics.
摘要翻译：压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底，其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分，其由根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极，压电和/或电致伸缩层和上电极，其中至少一部分周缘压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分，以构成相对于隔膜部分设置的伸出部分，并且伸出部分处于与部分区域不完全连接的状态通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分允许尖晶石颗粒介入其间。因此，可以有效地改善例如位移量和谐振频率特性等压电和/或电致伸缩特性。

3. 发明授权

US06263552B1 Method of producing piezoelectric/electrostrictive film-type element 有权
标题翻译：制造压电/电致伸缩薄膜型元件的方法
公开(公告)号：US06263552B1
公开(公告)日：2001-07-24
申请号：US09567067
申请日：2000-05-08
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： B23P1500
CPC分类号： H01L41/0973 , H01L41/1875 , H01L41/314 , H04R17/08 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween.
摘要翻译：压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底，其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分，其由根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极，压电和/或电致伸缩层和上电极，其中至少一部分周缘压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分，以构成相对于隔膜部分设置的伸出部分，并且伸出部分处于与部分区域不完全连接的状态通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分允许尖晶石颗粒介入其间。

4. 发明授权

US06217979B1 Piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩膜元件
公开(公告)号：US06217979B1
公开(公告)日：2001-04-17
申请号：US09085853
申请日：1998-05-27
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： C04B3700
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , C04B2235/3225 , C04B2235/6025 , H01L41/0973 , H01L41/314 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

5. 发明授权

US5853514A Method of producing a piezoelectric/electrostrictive film element 失效
标题翻译：压电/电致伸缩薄膜元件的制造方法
公开(公告)号：US5853514A
公开(公告)日：1998-12-29
申请号：US716876
申请日：1996-09-20
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Nobuo Takahashi
IPC分类号： G01L1/16 , C04B35/49 , C04B35/493 , H01L41/09 , H01L41/22 , H04R17/00 , H04R17/08 , C04B37/00 , H01L41/08
CPC分类号： C04B35/486 , C04B35/4885 , C04B35/6264 , H01L41/0973 , H01L41/314 , C04B2235/3225 , C04B2235/6025 , H04R17/08 , Y10T428/24273 , Y10T428/24322 , Y10T428/24331
摘要： A method of producing a piezoelectric/electrostrictive film element is disclosed. The film element includes a zirconia substrate having a window which is closed by a diaphragm portion, and a piezoelectric or electrostrictive unit formed on the substrate and including a piezoelectric or electrostrictive layer between upper and lower electrodes. The method comprises the steps of: (a) preparing the substrate which has been sintered and in which at least the diaphragm portion contains alumina in an amount of 1.1-5.0 parts by weight; (b) forming, by a film-forming process, the lower electrode on the diaphragm portion, and the piezoelectric/electrostrictive layer on the lower electrode by using a piezoelectric/electrostrictive material which contains magnesia or a component which gives magnesia, in an independent form or in a compound form; and (c) firing the piezoelectric/electrostrictive layer, so as to deposit particles consisting principally of a compound of alumina and magnesia at least on an interface between the diaphragm portion and the lower electrode, the interface being located right under the piezoelectric/electrostrictive layer.
摘要翻译：公开了制造压电/电致伸缩薄膜元件的方法。薄膜元件包括具有由隔膜部分封闭的窗口的氧化锆基板，以及形成在基板上并且在上部和下部电极之间包括压电或电致伸缩层的压电或电致伸缩单元。该方法包括以下步骤：（a）制备已经烧结的衬底，其中至少隔膜部分含有1.1-5.0重量份的氧化铝; （b）通过使用含有氧化镁或氧化镁的成分的压电/电致伸缩材料，通过成膜工艺在隔膜部分上形成下电极和下电极上的压电/电致伸缩层，在独立的形式或复合形式; 和（c）对压电/电致伸缩层进行烧制，至少在隔膜部分和下电极之间的界面上沉积主要由氧化铝和氧化镁组成的颗粒，界面位于压电/电致伸缩层的正下方。

6. 发明申请

US20050082946A1 Actuator Device 有权
标题翻译：执行机构
公开(公告)号：US20050082946A1
公开(公告)日：2005-04-21
申请号：US10896769
申请日：2004-07-22
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
IPC分类号： B81B3/00 , G02B26/08 , H01L41/04 , H01L41/09
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.
摘要翻译：致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极其表面面向板构件。当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。

7. 发明授权

US06476539B1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US06476539B1
公开(公告)日：2002-11-05
申请号：US09642861
申请日：2000-08-21
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/43 , H01L41/0946
摘要： Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions and at least two piezoelectric/electrostrictive elements each comprising at least one or more pairs of electrodes and a piezoelectric/electrostrictive layer provided on the thin plate portions.
摘要翻译：本发明提供一种压电/电致伸缩器件，其特征在于，包括：驱动部，其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部，以及用于保持所述驱动部和可动部分，固定部分和可动部分经由驱动部分联接，以及由驱动部分的内壁，可移动部分的内壁和固定部分的内壁形成的孔。驱动部分包括一对相互相对的薄板部分和至少两个压电/电致伸缩元件，每个压电/电致伸缩元件包括至少一对或多对电极和设置在薄板部分上的压电/电致伸缩层。

8. 发明授权

US06455984B1 Piezoelectric/electrostrictive device and method of manufacturing same 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06455984B1
公开(公告)日：2002-09-24
申请号：US09671587
申请日：2000-09-27
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masahiko Namerikawa , Koji Kimura , Kazuyoshi Shibata
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masahiko Namerikawa , Koji Kimura , Kazuyoshi Shibata
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/273 , Y10T29/42 , Y10T29/435 , Y10T29/49078 , Y10T29/49126
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism includes a cavity portion formed in the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, wherein the forward end of the stopper member extends into the cavity portion.
摘要翻译：压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。压电/电致伸缩装置具有用于限制薄板部分的振幅的机构。该机构包括形成在可动部分的内壁中的空腔部分和设置在固定部分的内壁上的止动部件，其中止动件的前端延伸到空腔部分中。

9. 发明授权

US06452309B1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US06452309B1
公开(公告)日：2002-09-17
申请号：US09627260
申请日：2000-07-28
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/27
摘要： A piezoelectric/electrostrictive device is disclosed comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by a drive of the driving portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions, and a piezoelectric/electrostrictive element including a piezoelectric/electrostrictive operating portion comprising at least a pair or more of electrodes and a piezoelectric/electrostrictive layer formed on at least a part of the outer surface of at least one thin plate portion out of the thin plate portions, one end of the piezoelectric/electrostrictive operating portion in a direction in which the fixing portion is connected with the movable portion exists on the fixing portion or the movable portion, and the other end of the piezoelectric/electrostrictive operating portion is arranged on the thin plate portion, and at least a piezoelectric/electrostrictive layer of the piezoelectric/electrostrictive element exists extending over the movable portion and the fixing portion. The device of the present invention, having high rigidity in the width direction of the thin plate portions, namely in the Y-axis direction, enables rigid joining when functional parts such as sensors, magnetic heads, or the like are fixed to the present device, and further when the present device per se is fixed to another structure.
摘要翻译：公开了一种压电/电致伸缩器件，其包括驱动部分，该驱动部分由压电/电致伸缩元件的位移驱动，通过驱动部分的驱动而操作的可动部分，用于保持驱动部分和可动部分的固定部分所述可移动部分经由所述驱动部分与所述固定部分联接，以及由所述驱动部分的内壁，所述可移动部分的内壁和所述固定部分的内壁形成的孔。驱动部分包括一对相互相对的薄板部分，以及包括压电/电致伸缩操作部分的压电/电致伸缩元件，所述压电/电致伸缩操作部分包括至少一对或多个电极和形成在外部的至少一部分上的压电/电致伸缩层至少一个薄板部分的表面在薄板部分之外，压电/电致伸缩操作部分的固定部分与可动部分连接的方向的一端存在于固定部分或可移动部分上，并且压电/电致伸缩操作部分的另一端设置在薄板部分上，至少压电/电致伸缩元件的压电/电致伸缩层存在于可移动部分和固定部分上方延伸。本发明的薄板部的宽度方向的刚性即Y轴方向的本发明的装置能够在诸如传感器，磁头等功能部件被固定在本装置上时进行刚性接合并且当本装置本身固定到另一结构时。

10. 发明授权

US06351056B1 Piezoelectric/electrostrictive device having mutually opposing thin plate portions 失效
标题翻译：具有相互相对的薄板部分的压电/电致伸缩器件
公开(公告)号：US06351056B1
公开(公告)日：2002-02-26
申请号：US09494075
申请日：2000-01-28
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
IPC分类号： H01L4104
CPC分类号： H01L41/43 , H01L41/0946 , H01L41/314
摘要： A piezoelectric/electrostrictive device including a driving portion, a movable portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, movable portion, and fixing portion. The driving portion includes a pair of mutually opposing thin plate portions and a piezoelectric/electrostrictive (P/E) element. A P/E operating portion of the P/E element is arranged on at least a part of an outer surface of at least one of the thin plate portions, such that one end thereof exists on the fixing portion or the movable portion and the other end thereof is arranged on the thin plate portion. At least one end of a P/E layer of the P/E element exists on the fixing portion or the movable portion, and the other end is arranged on the thin plate portion. The Young's modulus Y1 of a material composing the thin plate portions and the Young's modulus Y2 of a material composing the P/E layer have a relationship satisfying 1
摘要翻译：一种压电/电致伸缩装置，包括驱动部分，可动部分，用于保持驱动部分和可动部分的固定部分，可动部分通过驱动部分与固定部分相连，以及由内壁形成的孔驱动部分，可动部分和固定部分。驱动部分包括一对相互相对的薄板部分和压电/电致伸缩（P / E）元件。 P / E元件的AP / E操作部分布置在至少一个薄板部分的外表面的至少一部分上，使得其一端存在于固定部分或可移动部分上，另一端布置在薄板部分上。 P / E元件的P / E层的至少一端存在于固定部或可动部上，另一端配置在薄板部上。构成薄板部分的材料的杨氏模量Y1和构成P / E层的材料的杨氏模量Y2具有满足1

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