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    • 5. 发明授权
    • Electrically pumped Group IV semiconductor micro-ring laser
    • 电泵IV组半导体微环激光器
    • US07391801B1
    • 2008-06-24
    • US11286010
    • 2005-11-25
    • Richard A. SorefStephen J. Emelett
    • Richard A. SorefStephen J. Emelett
    • H01S3/08H01S5/00
    • H01S5/1071H01S5/021H01S5/026H01S5/0425H01S5/1032H01S5/2231H01S5/3223H01S5/3224
    • An electrically pumped semiconductor laser is provided as including a waveguide structure disposed on the substrate. An optical coupling layer is disposed on the substrate and the waveguide. A resonator layer is disposed on the optical coupling layer and may be adapted to include a photonic crystal lattice having a plurality of substantially cylindrical pores extending downwardly into the resonator layer. An insulating cap layer may be disposed on the resonator layer which operatives to seal the photonic crystal lattice. A first plug filled vias is formed on a central region of the cap layer, which extends downwardly to permit a bottom portion of the first plug to communicate with the photonic crystal lattice. Further, a second plug filled vias is formed on an edge region of the cap layer and extends downwardly to permit a bottom portion of the second plug to communicate with the photonic crystal lattice.
    • 提供电泵浦的半导体激光器,其包括设置在基板上的波导结构。 光耦合层设置在基板和波导上。 谐振器层设置在光学耦合层上,并且可以适于包括具有向下延伸到谐振器层中的多个基本圆柱形孔的光子晶格。 绝缘盖层可以设置在谐振器层上,操作者可以密封光子晶格。 在盖层的中心区域上形成第一插塞填充的通孔,其向下延伸以允许第一插头的底部与光子晶格格栅连通。 此外,第二插头填充的通孔形成在盖层的边缘区域上并且向下延伸以允许第二插头的底部与光子晶格连接。