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    • 4. 发明申请
    • MANIPULATOR AUTO-TEACH AND POSITION CORRECTION SYSTEM
    • 操纵器自动教学和位置校正系统
    • US20130345858A1
    • 2013-12-26
    • US13914397
    • 2013-06-10
    • Brooks Automation, Inc.
    • Martin Hosek
    • G05B19/418
    • G05B19/4189G05B19/402G05B19/421G05B2219/36414G05B2219/36461H01L21/67294H01L21/68Y02P90/28Y10S901/00
    • A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
    • 一种基板处理系统,包括用于容纳处理装置的至少一部分的壳体,附着到处理装置的至少一个目标,所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点,至少 一个发射机位于所述外壳内,并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标,以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器,所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号,并基于所述数据信号来控制所述处理设备的操作特性。
    • 5. 发明授权
    • Manipulator auto-teach and position correction system
    • 机械手自动教学和位置校正系统
    • US08459922B2
    • 2013-06-11
    • US12651160
    • 2009-12-31
    • Martin Hosek
    • Martin Hosek
    • G06F19/00
    • G05B19/4189G05B19/402G05B19/421G05B2219/36414G05B2219/36461H01L21/67294H01L21/68Y02P90/28Y10S901/00
    • A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
    • 一种基板处理系统,包括用于容纳处理装置的至少一部分的壳体,附着到处理装置的至少一个目标,所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点,至少 一个发射机位于所述外壳内,并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标,以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器,所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号,并基于所述数据信号来控制所述处理设备的操作特性。
    • 7. 发明授权
    • Manipulator auto-teach and position correction system
    • 机械手自动教学和位置校正系统
    • US08892248B2
    • 2014-11-18
    • US13914397
    • 2013-06-10
    • Brooks Automation, Inc.
    • Martin Hosek
    • G06F7/00H01L21/68H01L21/67G05B19/421G05B19/402G05B19/418
    • G05B19/4189G05B19/402G05B19/421G05B2219/36414G05B2219/36461H01L21/67294H01L21/68Y02P90/28Y10S901/00
    • A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
    • 一种基板处理系统,包括用于容纳处理装置的至少一部分的壳体,附着到处理装置的至少一个目标,所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点,至少 一个发射机位于所述外壳内,并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标,以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器,所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号,并基于所述数据信号来控制所述处理设备的操作特性。
    • 9. 发明申请
    • MANIPULATOR AUO-TEACH AND POSITION CORRECTION SYSTEM
    • 辅助教学和位置校正系统
    • US20110118875A1
    • 2011-05-19
    • US12651160
    • 2009-12-31
    • Martin Hosek
    • Martin Hosek
    • B25J9/00G05B19/04G05B13/02
    • G05B19/4189G05B19/402G05B19/421G05B2219/36414G05B2219/36461H01L21/67294H01L21/68Y02P90/28Y10S901/00
    • A substrate processing system including a housing for housing at least part of a processing device, at least one target affixed to the processing device, the processing device having a first processing device reference point in a known relationship with the at least one target, at least one transmitter located within the housing and configured to transmit an identification signal identifying the at least one transmitter to the at least one target and a controller operably connected to the at least one target and the at least one transmitter, the controller being configured to receive data signals, based on the identification signal, from one of the at least one target and the at least one transmitter and control an operational characteristic of the processing device, based on the data signals.
    • 一种基板处理系统,包括用于容纳处理装置的至少一部分的壳体,附着到处理装置的至少一个目标,所述处理装置具有与所述至少一个目标已知关系的第一处理装置参考点,至少 一个发射机位于所述外壳内,并被配置为将识别所述至少一个发射机的识别信号发射到所述至少一个目标,以及可操作地连接到所述至少一个目标和所述至少一个发射机的控制器,所述控制器被配置为接收数据 基于所述识别信号从所述至少一个目标和所述至少一个发射机之一发送信号,并基于所述数据信号来控制所述处理设备的操作特性。