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1. 发明申请

US20220351994A1 SUBSTRATE MAPPING DEVICE, METHOD OF MAPPING BY THE DEVICE, AND METHOD OF TEACHING THE MAPPING 有权
公开(公告)号：US20220351994A1
公开(公告)日：2022-11-03
申请号：US17622238
申请日：2020-04-03
申请人： Kawasaki Jukogyo Kabushiki Kaisha
发明人： Masaya YOSHIDA , Shinya KITANO , Hiroyuki OKADA , Ippei SHIMIZU
IPC分类号： H01L21/67 , G01B11/25 , H01L21/687 , G05B19/421
摘要： A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

2. 发明授权

US5459384A Method and apparatus for controlling coordinate displacements of a platform 失效
标题翻译：用于控制平台的坐标位移的方法和装置
公开(公告)号：US5459384A
公开(公告)日：1995-10-17
申请号：US53057
申请日：1993-04-26
申请人： Peter D. Engelse , Alexander Flipse , Walter Janus
发明人： Peter D. Engelse , Alexander Flipse , Walter Janus
IPC分类号： G02B21/00 , G02B21/26 , G02B21/36 , G05B19/10 , G05B19/23 , G05B19/421 , G05D3/00 , G05D3/10 , G01B21/00 , G02B21/24
CPC分类号： G02B21/26 , G05B19/106 , G05B19/231 , G05B19/421 , G05B2219/35459 , G05B2219/35477 , G05B2219/36465 , G05B2219/37396 , G05B2219/43186 , G05B2219/45182 , G05B2219/45238
摘要： The apparatus includes a combination of a microscope and an interative image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
摘要翻译：该装置包括显微镜和包括相机和计算机工作站的间隔图像分析系统的组合。该装置的目的是促进显微镜的阶段的坐标位移的交互控制。对于每个坐标x和y，建立机电控制通道。在控制通道的输入端，同轴装置中的两个级联的车轮和两个角度编码器被用作独立的独立工具，其不与运动学上相连。在控制通道的中间，角度编码器的脉冲经历非线性变换。处理器执行计算，其区分慢位移和快速位移。在控制通道的末端，显微镜平台的平坦，易于访问的平台有两个工作区域，一个用于手动预览，一个用于样本的交互式扫描。

3. 发明授权

US4674928A Milling machine controller 失效
标题翻译：铣床控制器
公开(公告)号：US4674928A
公开(公告)日：1987-06-23
申请号：US793655
申请日：1985-10-31
申请人： George Lyman
发明人： George Lyman
IPC分类号： B23Q1/00 , G05B19/421 , G05B19/425 , B23C1/16
CPC分类号： B23Q1/0009 , G05B19/421 , G05B19/425 , G05B2219/41032 , G05B2219/50168 , Y10T409/300896
摘要： The controller attaches to a milling machine such as the well-known Bridgeport miller so as to adapt the machine to programmed automatic operation. Controls are associated with all axes of operation, however, the control is described herein with regard to X and Y axis control. A control panel for all operations is physically mounted in association with the X axis table. The basic components of the system include power motors for respectively controlling lead screws associated with X and Y axis control, electrical relays which in turn control the power motors, optical encoders which essentially read lead screw rotation, and a microprocessor. The electrical relays are used to start, stop, and set the directional rotation of the power motors upon commands from the microprocessor. The microprocessor has two basic modes of operation including a program mode in which the steps performed by the machinist are recorded for subsequent repeatability. The other mode is a run mode during which the microprocessor progresses through the previously established program from start to finish to thus reproduce a part.
摘要翻译：控制器连接到诸如众所周知的Bridgeport铣床之类的铣床，以使机器适应于编程的自动操作。控制与所有操作轴相关联，但是这里关于X和Y轴控制来描述控制。所有操作的控制面板与X轴表相关联地物理安装。系统的基本部件包括用于分别控制与X和Y轴控制相关的导螺杆的电动马达，继电器控制功率马达，基本上读取螺杆旋转的光学编码器以及微处理器。电气继电器用于根据微处理器的命令启动，停止和设置功率电机的定向旋转。微处理器具有两种基本操作模式，包括程序模式，其中记录由机械师执行的步骤用于随后的可重复性。另一种模式是一种运行模式，在此模式下，微处理器从开始到结束进行先前建立的程序，从而再现零件。

4. 发明授权

US3451050A Memory system for machine control 失效
标题翻译：机器控制记忆系统
公开(公告)号：US3451050A
公开(公告)日：1969-06-17
申请号：US3451050D
申请日：1966-10-28
申请人： SIEMENS AG
发明人： HEISSMEIER WALTER , WAGNERBERGER WOLFGANG
IPC分类号： B23B39/08 , G05B19/16 , G05B19/421 , G11B5/48 , G11B5/52 , G11B5/00
CPC分类号： G11B5/52 , B23B39/08 , G05B19/16 , G05B19/421 , G11B5/48 , Y10T409/300896

5. 发明授权

US3217331A Method of recording a control program 失效
标题翻译：记录控制程序的方法
公开(公告)号：US3217331A
公开(公告)日：1965-11-09
申请号：US29372663
申请日：1963-07-09
申请人： KEARNEY & TRECKER CORP
发明人： WETZEL THEODORE A , STONER THOMAS A
IPC分类号： G05B19/421
CPC分类号： G05B19/421

6. 发明授权

US11670534B2 Transport apparatus and adapter pendant 有权
公开(公告)号：US11670534B2
公开(公告)日：2023-06-06
申请号：US17158523
申请日：2021-01-26
申请人： Brooks Automation, Inc.
发明人： Dana L. Atwood , Jairo Moura
IPC分类号： H01L21/677 , H01L21/687 , G05B19/421 , H01L21/67 , B25J9/16 , G05B19/042
CPC分类号： H01L21/68707 , B25J9/16 , G05B19/421 , H01L21/67167 , H01L21/67196 , H01L21/67201 , H01L21/67253 , H01L21/67276 , H01L21/67706 , H01L21/67742 , G05B19/0423 , G05B2219/2602
摘要： A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

7. 发明申请

US20190019719A1 TRANSPORT APPARATUS AND ADAPTER PENDANT 审中-公开
公开(公告)号：US20190019719A1
公开(公告)日：2019-01-17
申请号：US16029320
申请日：2018-07-06
申请人： Brooks Automation, inc.
发明人： Dana L ATWOOD , Jairo MOURA
IPC分类号： H01L21/687 , H01L21/677 , G05B19/042 , G05B19/421
摘要： A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

8. 发明授权

US5900708A Method and apparatus for controlling coordinate displacements of a platform 失效
标题翻译：用于控制平台的坐标位移的方法和装置
公开(公告)号：US5900708A
公开(公告)日：1999-05-04
申请号：US851609
申请日：1997-05-06
申请人： Peter Den Engelse , Alexander Flipse , Walter Janus
发明人： Peter Den Engelse , Alexander Flipse , Walter Janus
IPC分类号： G02B21/00 , G02B21/26 , G02B21/36 , G05B19/10 , G05B19/23 , G05B19/421 , G05D3/00 , G05D3/10 , G01B21/00 , G02B21/24
CPC分类号： G02B21/26 , G05B19/106 , G05B19/231 , G05B19/421 , G05B2219/35459 , G05B2219/35477 , G05B2219/36465 , G05B2219/37396 , G05B2219/43186 , G05B2219/45182 , G05B2219/45238
摘要： The apparatus includes a combination of a microscope and an interactive image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.
摘要翻译：该装置包括显微镜和包括相机和计算机工作站的交互式图像分析系统的组合。该装置的目的是促进显微镜的阶段的坐标位移的交互控制。对于每个坐标x和y，建立机电控制通道。在控制通道的输入端，同轴装置中的两个级联的车轮和两个角度编码器被用作独立的独立工具，其不与运动学上相连。在控制通道的中间，角度编码器的脉冲经历非线性变换。处理器执行计算，其区分慢位移和快速位移。在控制通道的末端，显微镜平台的平坦，易于访问的平台有两个工作区域，一个用于手动预览，一个用于样本的交互式扫描。

9. 发明授权

US5828198A Method and apparatus for controlling coordinate displacements of a platform 失效
公开(公告)号：US5828198A
公开(公告)日：1998-10-27
申请号：US852068
申请日：1997-05-06
申请人： Peter Den Engelse , Alexander Flipse , Walter Janus
发明人： Peter Den Engelse , Alexander Flipse , Walter Janus
IPC分类号： G02B21/00 , G02B21/26 , G02B21/36 , G05B19/10 , G05B19/23 , G05B19/421 , G05D3/00 , G05D3/10 , G01B21/00 , G02B21/24
CPC分类号： G02B21/26 , G05B19/106 , G05B19/231 , G05B19/421 , G05B2219/35459 , G05B2219/35477 , G05B2219/36465 , G05B2219/37396 , G05B2219/43186 , G05B2219/45182 , G05B2219/45238
摘要： The apparatus includes a combination of a microscope and an interactive image analysis system comprising a camera and a computer work station. The purpose of the apparatus is to facilitate the interactive control of coordinate displacements of the stage of the microscope. For each coordinate x and y an electromechanical control channel is established. At the input of the control channel two cascaded wheels in a coaxial arrangement and two angle encoders are used as a detached, independent tool which is not kinematically linked to the stage. In the middle of the control channel, the pulses of the angle encoders undergo a non-linear transformation. A processor performs a calculation which discriminates between slow displacements and fast displacements. At the end of the control channel, a flat, easily accessible platform of the microscope stage has two working areas, one for manual previewing and one for interactive scanning of a specimen.

10. 发明授权

US3072834A Automatic programming system 失效
标题翻译：自动编程系统
公开(公告)号：US3072834A
公开(公告)日：1963-01-08
申请号：US15754161
申请日：1961-12-06
申请人： GENEVOISE INSTR PHYSIQUE
发明人： MOTTU ANDRE H , ROBERT VIRET
IPC分类号： G05B19/39 , G05B19/421
CPC分类号： G05B19/39 , G05B19/421 , Y10T408/08 , Y10T409/30084

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