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    • 6. 发明授权
    • Method for triggering dependent spectra for data acquisition
    • 触发依赖光谱数据采集的方法
    • US09513232B2
    • 2016-12-06
    • US13995816
    • 2011-12-22
    • David M. CoxStephen A. TateMatthias Glueckmann
    • David M. CoxStephen A. TateMatthias Glueckmann
    • H01J49/00G01N23/00H01J49/02
    • G01N23/00H01J49/0031H01J49/0045H01J49/025
    • Methods and systems are provided for triggering an information dependent mass spectrometry scan in real time. A mass spectrometry scan of a separating sample mixture is performed by a mass spectrometer at each time interval of a time period. The mass spectrometer receives the separating sample mixture from a separation device. It is determined at a certain time interval that a received mass spectrometry scan at the time interval and one or more preceding received mass spectrometry scans include two or more time-varying ion signals that represent two or more fragment ion transitions of a known compound. If a characteristic of the two or more time-varying ion signals meets a selection criterion, the mass spectrometer is instructed to perform a dependent mass spectrometry scan of the separating sample mixture for a precursor ion of the known compound at the time interval.
    • 提供了实时触发信息依赖质谱扫描的方法和系统。 分离样品混合物的质谱扫描由质谱仪在每个时间段的每个时间间隔进行。 质谱仪从分离装置接收分离样品混合物。 在一定时间间隔确定在时间间隔和一个或多个先前接收质谱扫描的接收质谱扫描包括表示已知化合物的两个或更多个片段离子转变的两个或更多个时变离子信号。 如果两个或更多个时变离子信号的特征满足选择标准,则指示质谱仪以时间间隔对已知化合物的前体离子进行分离样品混合物的依赖性质谱扫描。
    • 9. 发明申请
    • MULTI-BEAM STEREOSCOPIC X-RAY BODY SCANNER
    • 多光束立体X射线体扫描仪
    • US20160143601A1
    • 2016-05-26
    • US15014237
    • 2016-02-03
    • ADANI Systems, Inc.
    • VLADIMIR N. LINEV
    • A61B6/00A61B6/04A61B6/06
    • A61B6/4014A61B6/02A61B6/022A61B6/04A61B6/06A61B6/12A61B6/4078A61B6/4241A61B6/4405G01N23/00G01N23/02G01N2223/03G01V5/0016G01V5/0058
    • An X-ray examination station includes a first source of X-ray radiation for whole body scanning of a human body using a first fan beam of X-ray radiation; a first vertical linear radiation detector configured to detect the first fan beam; a second source of X-ray radiation installed at mid-height of a person being examined, for scanning a central portion of the human body using a second fan beam of X-ray radiation; a second vertical detector of X-ray radiation configured to detect the second fan beam; and a control unit configured to turn on each of the X-ray radiation sources. The first and the second radiation fan beams are emitted in parallel planes. The first X-ray radiation source is turned on for the whole body scanning. The second X-ray radiation source is turned on for scanning the central portion of the body.
    • X射线检查站包括使用X射线辐射的第一扇形束对人体进行全身扫描的第一X射线源; 第一垂直线性辐射检测器,被配置为检测第一扇形光束; 安装在正在检查的人的中间高度处的X射线辐射的第二源,用于使用X射线辐射的第二扇形束扫描人体的中心部分; 配置成检测第二扇形束的X射线辐射的第二垂直检测器; 以及控制单元,被配置为接通每个X射线辐射源。 第一和第二辐射扇形光束在平行平面上发射。 第一个X射线辐射源被打开以进行全身扫描。 第二X射线辐射源被打开以扫描身体的中心部分。
    • 10. 发明授权
    • Pattern dimension measurement method and charged particle beam apparatus
    • 图案尺寸测量方法和带电粒子束装置
    • US09297649B2
    • 2016-03-29
    • US14001433
    • 2011-12-12
    • Hiroki KawadaNorio HasegawaToru Ikegami
    • Hiroki KawadaNorio HasegawaToru Ikegami
    • G01B15/06G01N23/225H01J37/28H01J37/22G01N23/00H01J37/244
    • G01B15/06G01N23/00H01J37/222H01J37/244H01J37/28H01J2237/24578H01J2237/2816H01J2237/2817
    • The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.
    • 本发明的目的在于提供一种图形尺寸测量方法,用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。 为了实现上述目的,提出了一种图案尺寸测量方法和带电粒子束装置,其特征在于:在对包含图案的样品进行束扫描之后,在包含该图案的样品上形成薄膜至第一部分 模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。