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1. 发明授权

US10845191B2 System and method for a displacement measurement 有权
公开(公告)号：US10845191B2
公开(公告)日：2020-11-24
申请号：US16379512
申请日：2019-04-09
申请人： Nikon Corporation
发明人： Eric Peter Goodwin
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/0209 , G01B9/02032 , G01B9/02049 , G01B9/02085 , G01B2290/50
摘要： System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. Determination of height profile of a region-of-interest that is incomparably larger than a FOV of the interferometer objective is performed in time reduced by at least an order of magnitude as compared to time required for the same determination by a vertical scanning interferometer.

2. 发明申请

US20190154427A1 MEASURING DEVICE FOR INTERFEROMETRIC DETERMINATION OF A SHAPE OF AN OPTICAL SURFACE 审中-公开
公开(公告)号：US20190154427A1
公开(公告)日：2019-05-23
申请号：US16251703
申请日：2019-01-18
申请人： Carl Zeiss SMT GmbH
发明人： Jochen HETZLER
IPC分类号： G01B9/02 , G01B11/24 , G01M11/02
CPC分类号： G01B9/02039 , G01B9/02057 , G01B11/2441 , G01B2290/50 , G01M11/025 , G01M11/0264 , G01M11/0271
摘要： A measurement apparatus (10) for determining a shape of an optical surface. An illumination module (16) produces an illumination wave (34), an interferometer (18) splits the wave into a test wave (50), which is directed onto the optical surface, and a reference wave (52). The relative tilt between the waves produces a multi-fringe interference pattern (66) in a detection plane (62) of the interferometer when the waves are superposed. A pupil plane (28) of the illumination module is arranged in a Fourier plane of the detection plane and the illumination module is configured to produce the illumination wave so that the intensity distribution thereof in the pupil plane includes at least one spatially isolated and contiguous surface region (38) such that a rectangle (74) with the smallest possible area fitted to the surface region or the totality of surface regions has an aspect ratio of at least 1.5:1.

3. 发明申请

US20130100458A1 MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASUREMENT METHOD 有权
标题翻译：多波长干涉仪，测量装置和测量方法
公开(公告)号：US20130100458A1
公开(公告)日：2013-04-25
申请号：US13657631
申请日：2012-10-22
申请人： CANON KABUSHIKI KAISHA
发明人： Akihiro Yamada
IPC分类号： G01B9/02 , G01B11/24 , G01B11/26
CPC分类号： G01B9/02007 , G01B9/02002 , G01B9/02061 , G01B9/02067 , G01B9/0207 , G01B9/02082 , G01B2290/45 , G01B2290/50 , G01B2290/70
摘要： A multi-wavelength interferometer includes a beam splitter configured to split plural light fluxes into a reference beam and a measurement beam, a frequency shifter configured to shift a frequency of at least one of the reference beam and the measurement beam to make the frequencies of the reference beam and the measurement beam different from each other, an optical system configured to cause the measurement beam to be incident on a measurement surface and to cause the measurement beam reflected from the measurement surface to interfere with the reference beam to obtain interference light, a dividing unit configured to divide the interference light into a plurality of light beams, and a detection unit configured to detect the plurality of light beams divided by the dividing unit.
摘要翻译：多波长干涉仪包括：分束器，被配置为将多个光束分成参考光束和测量光束;频移器，被配置为移动参考光束和测量光束中的至少一个的频率，参考光束和测量光束彼此不同;光学系统，被配置为使得测量光束入射到测量表面上并且使得从测量表面反射的测量光束干涉参考光束以获得干涉光，被配置为将干涉光分成多个光束的分割单元和被配置为检测由分割单元划分的多个光束的检测单元。

4. 发明授权

US07948636B2 Interferometer and method for measuring characteristics of optically unresolved surface features 有权
标题翻译：用于测量光学未解析表面特征的干涉仪和方法
公开(公告)号：US07948636B2
公开(公告)日：2011-05-24
申请号：US12701690
申请日：2010-02-08
申请人： Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

5. 发明申请

US20070229833A1 High-sensitivity surface detection system and method 审中-公开
标题翻译：高灵敏度表面检测系统及方法
公开(公告)号：US20070229833A1
公开(公告)日：2007-10-04
申请号：US11708802
申请日：2007-02-20
申请人： Allan Rosencwaig , David Willenborg , Li Chen
发明人： Allan Rosencwaig , David Willenborg , Li Chen
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01B9/02002 , G01B11/303 , G01B2290/50 , G01N21/474
摘要： An inspection system and method for inspecting a sample surface, with a light source for generating a probe beam of light, a high NA lens for focusing the probe beam onto a sample surface, and collecting a scattered probe beam from the sample surface, optics for imaging the scattered probe beam onto a detector having a plurality of detector elements that generate output signals in response to the scattered probe beam, and a processor for analyzing the output signals to identify defects on the sample surface. Shaping the beam into a stripe shape increases intensity without sacrificing throughput. Offsetting the beam from the center of the high NA lens provides higher angle illumination. Crossed polarizers also improve signal quality. A homodyne or heterodyne reference beam (possibly using a frequency altering optical element) can be used to create an interferometric signal at the detector for improved signal to noise ratios.
摘要翻译：一种用于检测样品表面的检查系统和方法，具有用于产生探测光束的光源，用于将探针束聚焦到样品表面上的高NA透镜，以及从样品表面收集散射的探测光束，用于将分散的探测光束成像到具有响应于分散探测光束产生输出信号的多个检测器元件的检测器，以及用于分析输出信号以识别样品表面上的缺陷的处理器。将光束成形为条状可增加强度，而不会牺牲吞吐量。从高NA透镜的中心偏移光束提供更高的角度照明。交叉偏振器也提高信号质量。可以使用零差或外差参考光束（可能使用变频光学元件）在检测器处产生干涉信号，以提高信噪比。

6. 发明授权

US07239398B2 Profiling complex surface structures using height scanning interferometry 有权
公开(公告)号：US07239398B2
公开(公告)日：2007-07-03
申请号：US11520031
申请日：2006-09-12
申请人： Peter J. De Groot , Robert Stoner , Xavier Colonna De Lega
发明人： Peter J. De Groot , Robert Stoner , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

7. 发明申请

US20070046953A1 Interferometer and method for measuring characteristics of optically unresolved surface features 有权
标题翻译：用于测量光学未解析表面特征的干涉仪和方法
公开(公告)号：US20070046953A1
公开(公告)日：2007-03-01
申请号：US11525355
申请日：2006-09-21
申请人： Peter De Groot , Michael Darwin , Robert Stoner , Gregg Gallatin , Xavier De Lega
发明人： Peter De Groot , Michael Darwin , Robert Stoner , Gregg Gallatin , Xavier De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中，多个模型通过一系列与一个或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

8. 发明申请

US20050088663A1 Scanning interferometry for thin film thickness and surface measurements 有权
标题翻译：用于薄膜厚度和表面测量的扫描干涉测量
公开(公告)号：US20050088663A1
公开(公告)日：2005-04-28
申请号：US10974466
申请日：2004-10-27
申请人： Peter De Groot , Xavier De Lega
发明人： Peter De Groot , Xavier De Lega
IPC分类号： G01B9/02 , G01B11/06 , G02F1/1333 , G02F1/1339
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/0207 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G02F1/13392 , G02F2001/133354
摘要： A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
摘要翻译：一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

9. 发明授权

US10488176B2 Edge registration for interferometry 有权
公开(公告)号：US10488176B2
公开(公告)日：2019-11-26
申请号：US15624222
申请日：2017-06-15
申请人： Corning Incorporated
发明人： Thomas James Dunn , Paul Francis Michaloski
IPC分类号： G01B9/02 , G01B11/30
CPC分类号： G01B9/02078 , G01B9/02043 , G01B11/306 , G01B2290/50
摘要： A metrology apparatus has an illumination source that directs collimated light to a reference surface and to an optical component having a test surface that is in parallel with the reference surface. A first imaging lens defines a Fourier transform plane for light reflected from the reference surface and the test surface. A spatial filtering element is actuable to a blocking position that blocks specular light at the transform plane. A second imaging lens forms, at an image plane, an image of the test surface. A sensor array generates image data from received light at the image plane.

10. 发明申请

US20180328711A1 INTERFEROMETER USING TILTED OBJECT WAVES AND COMPRISING A FIZEAU INTERFEROMETER OBJECTIVE 审中-公开
公开(公告)号：US20180328711A1
公开(公告)日：2018-11-15
申请号：US15775973
申请日：2016-11-14
申请人： UNIVERSITAET STUTTGART
发明人： Goran Baer , Christof Pruss , Wolfgang Osten
IPC分类号： G01B9/02 , G01M11/02
CPC分类号： G01B9/02027 , G01B9/02007 , G01B9/02032 , G01B9/02039 , G01B9/02057 , G01B2290/50 , G01M11/005 , G01M11/0207
摘要： An interferometer for areally measuring an optically smooth surface is presented, including means for illuminating a surface region with a plurality of discrete object waves from different directions and comprising means which, on a detector, superimpose object waves reflected at the surface onto a reference wave that is coherent with a plurality of object waves in order to form an interferogram. The interferometer is distinguished by virtue of it being configured to illuminate the surface with a plurality of object waves at the same time and produce the reference wave by way of a Fizeau beam splitter plate or a Fizeau objective, and by virtue of the interferometer including an interferometer stop that is arranged in the beam path upstream of the detector, and imaging optics, wherein the interferometer stop is situated within, or slightly outside of, the Fourier plane of the imaging optics and said interferometer stop filters the object waves reflected by the surface.

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