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1. 发明申请

US20190113333A1 CALIBRATION METHOD OF IMAGE MEASURING DEVICE 审中-公开
公开(公告)号：US20190113333A1
公开(公告)日：2019-04-18
申请号：US16161571
申请日：2018-10-16
申请人： MITUTOYO CORPORATION
发明人： Yasuhiro TAKAHAMA
IPC分类号： G01B11/24 , H04N5/225 , G01B9/02
CPC分类号： G01B11/2441 , G01B5/003 , G01B9/02068 , G01B9/02085 , G01B11/24 , G01B21/042 , G01B2210/52 , H04N5/2258 , H04N17/002
摘要： The present invention includes a preparatory step of providing a calibration work piece having a flat reflecting surface as a work piece, and arranging the reflecting surface to be parallel to a standard optical axis and orthogonal or parallel to pixel array directions of an image capture element; a rotation step of rotating a prism centered on the standard optical axis; a brightness detection step of detecting the brightness of an image captured by the image capture element at each of a plurality of rotation positions of the prism; and a positioning step of aligning the prism at a rotation position where the brightness detected by the brightness detection step is greatest.

2. 发明授权

US09816801B2 System and a method for quantitative sample imaging using off-axis interferometry with extended field of view or faster frame rate 有权
公开(公告)号：US09816801B2
公开(公告)日：2017-11-14
申请号：US15072756
申请日：2016-03-17
申请人： RAMOT AT TEL-AVIV UNIVERSITY LTD.
发明人： Pinhas Girshovitz , Natan Tzvi Shaked
IPC分类号： G01B9/02 , G01B9/04 , G02B21/00 , G02B21/14 , G03H1/26 , G01B11/06 , G02B5/12 , G02B17/08 , G02B27/10 , G02B27/28 , G03H1/04
CPC分类号： G01B9/0203 , G01B9/02011 , G01B9/02027 , G01B9/02028 , G01B9/02041 , G01B9/02047 , G01B9/02085 , G01B9/02097 , G01B9/04 , G01B11/06 , G02B5/12 , G02B17/08 , G02B21/0056 , G02B21/14 , G02B27/106 , G02B27/283 , G03H1/0443 , G03H1/265 , G03H2001/0445 , G03H2001/0456 , G03H2001/046
摘要： The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.

3. 发明授权

US09759544B2 Methods of reducing motion artifacts for optical coherence tomography angiography 有权
公开(公告)号：US09759544B2
公开(公告)日：2017-09-12
申请号：US14821535
申请日：2015-08-07
申请人： Carl Zeiss Meditec, Inc. , University of Washington through its Center for Commercialization
发明人： Lin An , Ruikang Wang , Utkarsh Sharma
IPC分类号： G01B11/02 , G01B9/02 , A61B3/10 , A61B3/00
CPC分类号： G01B9/02077 , A61B3/0025 , A61B3/102 , G01B9/02085 , G01B9/02091
摘要： A method for reducing motion artifacts in optical coherence tomography (OCT) angiography images is disclosed. The method is applied to the intensity or complex OCT data prior to applying the motion contrast analysis and involves determining sub-pixel level shifts between at least two B-scans repeated approximately at the same location and applying the sub-pixel level shifts to the B-scans to be able to correct for motion and accurately determine motion contrast signal. A preferred embodiment includes the use of 2D cross correlations to register a series of B-scans in both the axial (z-) and lateral (x-) dimensions and a convolution approach to achieve sub-pixel level frame registration.

4. 发明授权

US09335155B2 Imaging apparatus, image processing apparatus, and image processing method 有权
标题翻译：成像装置，图像处理装置和图像处理方法
公开(公告)号：US09335155B2
公开(公告)日：2016-05-10
申请号：US14011363
申请日：2013-08-27
申请人： CANON KABUSHIKI KAISHA
发明人： Hiroki Uchida
IPC分类号： G01B9/02 , A61B3/10
CPC分类号： G01B9/02091 , A61B3/102 , G01B9/0203 , G01B9/02044 , G01B9/02085
摘要： An imaging apparatus includes a reconstruction unit configured to reconstruct a tomographic image of a predetermined range of a measurement object based on interference light produced by interference between returning light of measurement light from the measurement object and reference light, and a generation unit configured to, for each pixel value row in a depth direction of the tomographic image, generate a two-dimensional image based on a pixel value selected in order of magnitude of the pixel values.
摘要翻译：一种成像装置，包括：重建单元，被配置为基于由来自测量对象的测量光的返回光与参考光之间的干涉产生的干涉光，重建测量对象的预定范围的断层图像;以及生成单元，在断层图像的深度方向上的每个像素值行，基于以像素值的大小顺序选择的像素值生成二维图像。

5. 发明授权

US09115977B2 Near-null compensator and figure metrology apparatus for measuring aspheric surfaces by subaperture stitching and measuring method thereof 有权
标题翻译：用于通过子孔缝合测量非球面的近零补偿器和图形计量装置及其测量方法
公开(公告)号：US09115977B2
公开(公告)日：2015-08-25
申请号：US14123962
申请日：2012-07-20
申请人： Shanyong Chen , Yifan Dai , Shengyi Li , Xiaoqiang Peng , Chao Xie , Yanglin Peng
发明人： Shanyong Chen , Yifan Dai , Shengyi Li , Xiaoqiang Peng , Chao Xie , Yanglin Peng
IPC分类号： G01B9/021 , G01M5/00 , G01M11/02 , G01B9/02
CPC分类号： G01B9/021 , G01B9/02039 , G01B9/02058 , G01B9/02085 , G01M5/005 , G01M11/025 , G01M11/0271
摘要： A variable near-null compensator for measuring aspheric surfaces by subaperture stitching includes a pair of counter-rotating CGH phase plates, each of the phase plates having a phase function including two terms Z5 and Z7 of Zernike polynomials. The phase plates are mounted on a pair of precision rotary center-through tables, wherein rotational axes of the pair of precision rotary center-through tables coincide with the optical axes of the phase plates. A figure metrology apparatus includes a wavefront interferometer, the test mirror mount, the near-null compensator and the mechanical adjustment components therefor. The optical axis of the near-null compensator coincides with the optical axis of the interferometer. A method for measuring aspheric surfaces by subaperture stitching includes the steps of mounting the test mirror, measuring the subapertures with the figure metrology apparatus, and finally processing the data by stitching.
摘要翻译：用于通过子孔缝合测量非球面的可变近零补偿器包括一对反向旋转CGH相位板，每个相位板具有包括Zernike多项式的两个项Z5和Z7的相位函数。相位板安装在一对精密旋转中心贯通台上，其中一对精密旋转中心贯通台的旋转轴线与相位板的光轴重合。图形计量装置包括波前干涉仪，测试镜安装座，近零补偿器及其机械调节部件。近零补偿器的光轴与干涉仪的光轴重合。通过子孔缝合测量非球面的方法包括安装测试镜，用图形测量装置测量子孔径的步骤，并且最后通过缝合处理数据。

6. 发明申请

US20150153163A1 INTERFEROMETER AND METHOD FOR MEASURING ASYMMETRIC SURFACE TOPOGRAPHY 有权
标题翻译：用于测量不对称表面地形的干涉仪和方法
公开(公告)号：US20150153163A1
公开(公告)日：2015-06-04
申请号：US14559257
申请日：2014-12-03
申请人： Zygo Corporation
发明人： Thomas Dresel
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01B11/2441 , G01B9/02039 , G01B9/02085
摘要： Methods and systems for measuring asymmetric surface topology are described. In one aspect, a method includes directing a test beam including a spherical wave front along an optical axis to reflect from a test surface; combining the test beam reflected from the test surface with a reference beam to form an interferogram on a detector, where the test and reference beams are derived from a common source; and recording the interferogram for each of multiple lateral displacements of the test surface relative to the optical axis. For each recorded interferogram, the curvature of the spherical wave front at the test surface substantially matches a local curvature of the test surface along a first axis orthogonal to the optical axis, and the multiple lateral displacements of the test surface each include a component along a second axis orthogonal to each of the first axis and the optical axis.
摘要翻译：描述了用于测量不对称表面拓扑的方法和系统。一方面，一种方法包括沿着光轴引导包括球面波前的测试光束以从测试表面反射; 将从测试表面反射的测试光束与参考光束组合，以在检测器上形成干涉图，其中测试和参考光束源自公共源; 并且相对于光轴记录测试表面的多个横向位移中的每一个的干涉图。对于每个记录的干涉图，测试表面处的球面波前的曲率基本上与沿着与光轴正交的第一轴线的测试表面的局部曲率匹配，并且测试表面的多个横向位移各自包括沿着第二轴与第一轴和光轴各自正交。

7. 发明授权

US08855750B2 Optical three-dimensional structure measuring device and structure information processing method therefor 有权
标题翻译：光学三维结构测量装置及其结构信息处理方法
公开(公告)号：US08855750B2
公开(公告)日：2014-10-07
申请号：US13257573
申请日：2010-03-03
申请人： Yuichi Teramura
发明人： Yuichi Teramura
IPC分类号： A61B5/00 , G01B9/02 , A61B3/00 , A61B3/10 , G01N21/47
CPC分类号： G01B9/02069 , A61B3/00 , A61B3/1005 , A61B3/102 , A61B5/0059 , A61B5/0066 , A61B5/0084 , A61B5/7203 , A61B5/7264 , G01B9/02004 , G01B9/02085 , G01B9/02088 , G01B9/02091 , G01B2290/65 , G01N21/4795
摘要： An optical three-dimensional structure measuring device including: optical three-dimensional structure information storing device (91) for storing optical three-dimensional structure information; specific layer extracting device (121) for comparing information values of the optical three-dimensional structure information stored in the optical three-dimensional structure information storing device with a predetermined threshold and extracting, as a specific layer area of the measurement target, an area equal to or greater than a predetermined range where the information values of the optical three-dimensional structure information equal to or greater than the predetermined threshold continue; missing area extracting device (122) for extracting, as missing areas, areas where the information values of the optical three-dimensional structure information are smaller than the predetermined threshold in the specific layer area; missing area range calculating device (123) for calculating sizes of ranges of the missing areas; and region-of-interest classifying device (124) for comparing the sizes of the ranges of the missing areas with a plurality of predetermined range determination reference values and classifying the missing areas into a plurality of types of regions of interest.
摘要翻译：一种光学三维结构测量装置，包括：用于存储光学三维结构信息的光学三维结构信息存储装置（91）; 特征层提取装置（121），用于将存储在光学三维结构信息存储装置中的光学三维结构信息的信息值与预定阈值进行比较，并提取作为测量对象的特定层面积的区域相等达到或大于光学三维结构信息的信息值等于或大于预定阈值的预定范围; 丢失区域提取装置（122），用于将特定层区域中的光学三维结构信息的信息值小于预定阈值的区域提取为缺失区域; 缺少区域范围计算装置（123），用于计算缺失区域的范围的大小; 和区域感兴趣分类装置（124），用于将缺失区域的范围的大小与多个预定范围确定参考值进行比较，并将缺失区域分类为多种类型的感兴趣区域。

8. 发明申请

US20140218740A1 Method and System for Optical Coherence Tomography 有权
标题翻译：光学相干断层扫描的方法和系统
公开(公告)号：US20140218740A1
公开(公告)日：2014-08-07
申请号：US14009363
申请日：2012-03-30
申请人： Rainer Nebosis , Geert Wellens
发明人： Rainer Nebosis , Geert Wellens
IPC分类号： G01B9/02
CPC分类号： G01B9/02091 , A61B5/0066 , A61B2560/0437 , G01B9/02063 , G01B9/02085 , G01B9/02089 , G01N21/4795
摘要： The present invention relates to a method as well as a corresponding system (50) for optical coherence tomography in which a first image (60) is acquired in the region of a first plane of an object (1) by means of an optical coherence tomography equipment, and the first image (60) is displayed on a display device (52).To facilitate a reliable and time-saving examination with straightforward handling, provision is made that a second plane of the object (1) is selected on the basis of the first image (60) that is displayed on the display device (52), wherein the second plane of the object (1) is different from the first plane of the object (1), and a second image (61) is acquired in the region of the selected second plane of the object (1) by means of the optical coherence tomography equipment.
摘要翻译：本发明涉及一种用于光学相干断层摄影的相应系统（50），其中通过光学相干断层扫描在物体（1）的第一平面的区域中获取第一图像（60）设备，并且第一图像（60）被显示在显示设备（52）上。为了便于直接处理的可靠且省时的检查，提供了基于显示在显示装置（52）上的第一图像（60）选择对象（1）的第二平面，其中，物体（1）的第二平面不同于物体（1）的第一平面，并且在物体（1）的所选择的第二平面的区域中通过光学器件（1）获取第二图像（61）相干层析成像设备。

9. 发明授权

US08348426B2 Optical image measurement device and image processing device 有权
标题翻译：光学图像测量装置和图像处理装置
公开(公告)号：US08348426B2
公开(公告)日：2013-01-08
申请号：US12052187
申请日：2008-03-20
申请人： Hisashi Tsukada , Hiroyuki Aoki , Yasufumi Fukuma , Tsutomu Kikawa
发明人： Hisashi Tsukada , Hiroyuki Aoki , Yasufumi Fukuma , Tsutomu Kikawa
IPC分类号： A61B3/14
CPC分类号： A61B3/102 , G01B9/0203 , G01B9/02044 , G01B9/02085 , G01B9/02087 , G01B9/02091 , G01B2290/65 , G06T3/4007
摘要： An optical image measurement device is configured to form a tomographic image at each of a plurality of cross sections of a measurement object, and the optical image measurement device comprises: an image processor configured to execute an arithmetic operation based on a tomographic image at one cross section of the plurality of cross sections and another tomographic image at each of one or more cross sections other than the one cross section, thereby forming a new tomographic image at the one cross section.
摘要翻译：光学图像测量装置被配置为在测量对象的多个横截面中的每一个处形成断层图像，并且所述光学图像测量装置包括：图像处理器，被配置为在一个十字交叉处执行基于断层图像的算术运算所述多个横截面的截面和在所述一个横截面以外的一个或多个横截面中的每一个处的另一断层图像，从而在所述一个横截面处形成新的断层图像。

10. 发明授权

US08317326B2 Optical tomographic imaging method and apparatus 有权
标题翻译：光学断层成像方法和装置
公开(公告)号：US08317326B2
公开(公告)日：2012-11-27
申请号：US13101075
申请日：2011-05-04
申请人： Koji Nozato , Mitsuro Sugita , Futoshi Hirose , Akihiro Katayama
发明人： Koji Nozato , Mitsuro Sugita , Futoshi Hirose , Akihiro Katayama
IPC分类号： A61B3/14
CPC分类号： G01B9/02063 , A61B3/102 , G01B9/02002 , G01B9/02085 , G01B9/02091
摘要： An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.
摘要翻译：提供了一种光学断层摄影方法，其中来自光源的光被分成测量光束和参考光束，测量光束被扫描光学系统移动并被引导到被检查物体，参考光束被引导到参考镜，其中由物体反射或散射的测量光束的返回光束和由参考反射镜反射的参考光束产生物体的断层图像。该方法包括获取关于物体的纵截面信息，从纵向剖面信息计算物体上的深度位置信息，以及通过控制由参考镜定义的参考路径长度和获取对象的三维表面图像，以及根据关于物体的深度位置信息扫描光学系统的扫描操作。

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