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    • 5. 发明授权
    • Temperature control system for a thermal reactor
    • 热反应器的温度控制系统
    • US06222164B1
    • 2001-04-24
    • US09387001
    • 1999-08-31
    • Kevin StoddardPaul R. McHughKonstantinos Tsakalis
    • Kevin StoddardPaul R. McHughKonstantinos Tsakalis
    • H05B102
    • H01L21/67248C23C16/52C30B25/10C30B25/16C30B31/12C30B31/18F27B9/024F27B9/063F27B9/40F27D19/00F27D21/0014H01L21/67109
    • A temperature control system for a thermal reactor is disclosed that addresses many of the problems in the art. In accordance with one aspect of the disclosed control system, a plurality of temperature controllers are employed. Each temperature controller employs one or more dynamic models that are optimized for a given temperature range. The temperature range over which a particular controller is optimized is preferably generally exclusive of the temperature ranges over which other controllers of the plurality of temperature controllers are optimized. In accordance with another aspect of the control system the control system employs enhanced ramp trajectory logic. In accordance with another aspect of the control system, the control system employs a virtual temperature sensor in the event of a hardware failure of the corresponding non-virtual temperature sensor. Upon the detection of a failure of the non-virtual temperature sensor, the temperature control system automatically substitutes a virtual temperature sensor in its place as a control system input. In accordance with a still further aspect of the temperature control system, the control system is provided with control logic that switches the control mode of the system in the event of a failure of a heating element. All of the foregoing aspect of the present invention may be combined into a single temperature controller. Alternatively, these temperature control system improvements may be incorporated as individual elements, without reliance on the other inventive aspects disclosed herein.
    • 公开了一种用于热反应器的温度控制系统,其解决了本领域的许多问题。 根据所公开的控制系统的一个方面,采用多个温度控制器。 每个温度控制器都使用一个或多个针对给定温度范围进行优化的动态模型。 特定控制器优化的温度范围优选地通常不超过多个温度控制器中的其它控制器被优化的温度范围。 根据控制系统的另一方面,控制系统采用增强的斜坡轨迹逻辑。 根据控制系统的另一方面,在对应的非虚拟温度传感器发生硬件故障的情况下,控制系统采用虚拟温度传感器。 在检测到非虚拟温度传感器的故障时,温度控制系统自动地将虚拟温度传感器替代为控制系统输入。 根据温度控制系统的另一方面,控制系统设置有控制逻辑,其在加热元件发生故障的情况下切换系统的控制模式。 本发明的所有前述方面可以组合成单个温度控制器。 或者,这些温度控制系统改进可以作为单独的元件并入,而不依赖于本文公开的其它发明方面。