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1. 发明授权

US06236021B1 Substrate transport assembly for rapid thermal processing system 失效
标题翻译：用于快速热处理系统的基板运输组件
公开(公告)号：US06236021B1
公开(公告)日：2001-05-22
申请号：US09344314
申请日：1999-06-24
申请人： James E. Fair , Fritz B. Harris
发明人： James E. Fair , Fritz B. Harris
IPC分类号： C03B524
CPC分类号： C03B35/163 , C03B29/08 , C03B35/16 , F26B3/30 , F26B13/008 , F26B15/10 , F27B9/024 , F27D19/00 , F27D21/0014 , F27D99/0006 , F27D2099/0008 , G01K13/06
摘要： A rapid thermal processing system for large area substrates, such as glass panels for flat panel displays, includes a processing chamber having a loading/unloading zone and a processing zone, a heating assembly for heating a substrate in the processing zone, and a transport assembly for transporting the substrate through the processing chamber. The transport assembly includes a feed conveyor for transporting the substrate from the loading/unloading zone through the processing zone and a substrate return assembly for transporting the substrate from the feed conveyor to the loading/unloading zone after the substrate is transported through the processing zone. The substrate return assembly may include a return conveyor for transporting the substrate to the loading/unloading zone and a substrate reverser for transferring the substrate from the feed conveyor to the return conveyor.
摘要翻译：用于大面积基板的快速热处理系统，例如用于平板显示器的玻璃面板，包括具有加载/卸载区域和处理区域的处理室，用于加热处理区域中的基板的加热组件和传送组件用于将衬底输送通过处理室。运输组件包括用于从装载/卸载区域通过处理区域运送基材的进料输送机和用于在将基材输送通过处理区域之后将基材从进料输送器输送到加载/卸载区域的基板返回组件。基板返回组件可以包括用于将基板输送到装载/卸载区域的返回输送器和用于将基板从进给输送器传送到返回输送器的基板反向器。

2. 发明授权

US06204483B1 Heating assembly for rapid thermal processing system 失效
标题翻译：加热组件用于快速热处理系统
公开(公告)号：US06204483B1
公开(公告)日：2001-03-20
申请号：US09344311
申请日：1999-06-24
申请人： James E. Fair , Fritz B. Harris
发明人： James E. Fair , Fritz B. Harris
IPC分类号： F27B924
CPC分类号： C03B35/163 , C03B29/08 , C03B35/16 , F26B3/30 , F26B13/008 , F26B15/10 , F27B9/024 , F27D19/00 , F27D21/0014 , F27D99/0006 , F27D2099/0008 , G01K13/06
摘要： A rapid thermal processing system for large area substrates, such as glass panels for flat panel displays, includes a processing chamber, a transport assembly for transporting a substrate through the processing chamber, and a heating assembly for heating the substrate. The heating assembly includes a bank of elongated heating elements disposed in the processing chamber. The heating elements have longitudinal axes aligned with the substrate transport direction. In one embodiment, heating elements on one side of the substrate have longitudinal axes aligned perpendicular to the substrate transport direction and heating elements on the opposite side of the substrate have longitudinal axes aligned parallel to the substrate transport direction.
摘要翻译：用于大面积基板的快速热处理系统，例如用于平板显示器的玻璃面板，包括处理室，用于通过处理室输送基板的输送组件和用于加热基板的加热组件。加热组件包括设置在处理室中的一组细长的加热元件。加热元件具有与基板输送方向对准的纵轴。在一个实施例中，衬底一侧上的加热元件具有垂直于衬底输送方向的纵向轴线，并且在衬底的相对侧上的加热元件具有平行于衬底输送方向排列的纵向轴线。

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