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1. 发明授权

US5205870A Vapor deposition apparatus 失效
标题翻译：蒸镀装置
公开(公告)号：US5205870A
公开(公告)日：1993-04-27
申请号：US890145
申请日：1992-05-29
申请人： Yuusuke Sato , Akio Ui , Keiichi Akagawa , Toshimitsu Ohmine
发明人： Yuusuke Sato , Akio Ui , Keiichi Akagawa , Toshimitsu Ohmine
IPC分类号： H01L21/205 , C23C16/48
CPC分类号： C23C16/483
摘要： An argon (Ar.sup.+) laser has a resonator. A reaction chamber is integrally formed in the resonator. A voltage is applied to electrodes, which discharge electricity to excite argon atoms in the resonator to produce a laser beam. The laser beam is continuously oscillated between total reflection mirrors disposed at opposite ends of the resonator. A substrate is disposed in the reaction chamber into which a material gas is introduced. The material gas absorbs the laser beam, to decompose and deposit as a thin film over the substrate.
摘要翻译：氩（Ar +）激光器具有谐振器。在谐振器中一体地形成反应室。电压被施加到电极，其放电以激发谐振器中的氩原子以产生激光束。激光束在设置在谐振器的相对端的全反射镜之间连续振荡。基板被设置在反应室中，材料气体被引入到该反应室中。材料气体吸收激光束，在衬底上分解和沉积成薄膜。

2. 发明授权

US5002011A Vapor deposition apparatus 失效
标题翻译：蒸镀装置
公开(公告)号：US5002011A
公开(公告)日：1991-03-26
申请号：US181091
申请日：1988-04-13
申请人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
发明人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
IPC分类号： C23C16/458
CPC分类号： C23C16/4588
摘要： A vapor deposition apparatus for forming thin films on substrates with reactive gases, by rotating and revolving the substrates while heating the substrates in a reactor vessel, comprises a hollow susceptor carrier rotatably disposed inside the reactor vessel, susceptors rotatably disposed on the susceptor carrier to hold the substrates respectively, a driving motor for rotating the susceptor carrier such that the substrates held by the susceptors are revolved with respect to the reactor vessel, and a converting mechanism for converting a rotating motion of the susceptor carrier rotated by the driving motor into a motion for rotating the susceptors together with the substrates around themselves. The converting mechanism is disposed within the hollow of the susceptor carrier.
摘要翻译：一种用于在具有反应气体的基板上形成薄膜的气相沉积设备，通过在反应器容器中加热基板的同时旋转和旋转基板，包括可旋转地设置在反应器容器内的中空基座托架，可旋转地设置在基座托架上的托架所述基板分别用于使所述基座托架旋转使得由所述基座保持的基板相对于所述反应堆容器旋转的驱动马达;以及用于将由所述驱动马达旋转的所述基座托架的旋转运动转换成运动的转换机构用于使基座与其周围的基板一起旋转。转换机构设置在基座托架的中空部内。

3. 发明授权

US5151133A Vapor deposition apparatus 失效
标题翻译：蒸镀装置
公开(公告)号：US5151133A
公开(公告)日：1992-09-29
申请号：US639182
申请日：1991-01-09
申请人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
发明人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
IPC分类号： C23C16/458
CPC分类号： C23C16/4588
摘要： A vapor deposition apparatus for forming thin films on substrates with reactive gases, by rotating and revolving the substrates while heating the substrates in a reactor vessel, comprises a hollow susceptor carrier rotatably disposed inside the reactor vessel, susceptors rotatably disposed on the susceptor carrier to hold the substrates respectively, a driving motor for rotating the susceptor carrier such that the substrates held by the susceptors are revolved with respect to the reactor vessel, and a converting mechanism for converting a rotation motion of the susceptor carrier rotated by the driving motor into a motion for rotating the susceptors together with the substrates around themselves. The converting mechanism is disposed within the hollow of the susceptor carrier.
摘要翻译：一种用于在具有反应气体的基板上形成薄膜的气相沉积设备，通过在反应器容器中加热基板的同时旋转和旋转基板，包括可旋转地设置在反应器容器内的中空基座托架，可旋转地设置在基座托架上的托架所述基板分别用于使所述基座托架旋转使得由所述基座保持的基板相对于所述反应堆容器旋转的驱动马达和用于将由所述驱动马达旋转的所述基座托架的旋转运动转换为运动的转换机构用于使基座与其周围的基板一起旋转。转换机构设置在基座托架的中空部内。

4. 发明授权

US5088444A Vapor deposition system 失效
标题翻译：蒸气沉积系统
公开(公告)号：US5088444A
公开(公告)日：1992-02-18
申请号：US487188
申请日：1990-03-01
申请人： Toshimitsu Ohmine , Keiichi Akagawa
发明人： Toshimitsu Ohmine , Keiichi Akagawa
IPC分类号： C23C16/54 , H01L21/677
CPC分类号： H01L21/67748 , C23C16/54
摘要： A vapor deposition system deposits a semiconductor film on a substrate. The system comprises a susceptor on which the substrate is positioned, and a reactor tube in which the susceptor having the substrate is positioned and the semiconductor film is deposited on the substrate. The reactor tube is composed of two parts to be fitted to and separated from each other. An airtight vessel airtightly covers the reactor tube. The system further comprises a mover for moving at least one of the two parts of the reactor tube relative to the other part, thereby fitting and separating the two parts to and from each other. A carrying device is provided for the system to carry the susceptor having the substrate from the airtight vessel into the reactor tube through an opening to be opened by separating the two parts of the reactor tube from each other, and to carry the susceptor from the reactor tube to the airtight vessel through the opening.
摘要翻译：蒸镀系统将半导体膜沉积在基板上。该系统包括其上定位有基底的感受体，以及反应器管，其中具有基底的基座被定位并且半导体膜沉积在基底上。反应器管由两部分组成，以便彼此装配和分离。气密的船舶气密地覆盖反应管。该系统还包括用于相对于另一部分移动反应器管的两个部分中的至少一个的移动器，从而将两个部件彼此配合和分离。提供了一种承载装置，用于将具有基材的基座从气密容器通过打开的开口携带到反应器管中，该开口通过将反应器管的两个部分彼此分离，并将基座从反应器通过开口管到气密的容器。

5. 发明授权

US07002730B2 Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method 失效
标题翻译：镜装置，光开关，薄膜弹性结构，薄弹性结构制造方法
公开(公告)号：US07002730B2
公开(公告)日：2006-02-21
申请号：US10473532
申请日：2002-04-18
申请人： Tohru Ishizuya , Keiichi Akagawa
发明人： Tohru Ishizuya , Keiichi Akagawa
IPC分类号： G02B26/08 , G02F1/29
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/032 , B81B2201/045 , B81B2203/053 , B81B2203/055 , B81B2203/058
摘要： The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.
摘要翻译：镜装置具有反射镜2和支撑机构，其以反射镜从基板1浮起的状态将基板1上的反射镜2弹性支撑，使得反射镜能够在任意方向上倾斜。支撑机构具有机械地连接基板1和反射镜2的三个支撑部分3A，3B和3C。每个支撑部分3A，3B和3C具有一个或多个由一层或多层构成的薄膜构成的板簧部分5。每个板簧部分5的一个端部经由腿部9连接到基板1，腿部9具有从基板1上升的上升部分。板簧部5的另一端部经由具有从该另一端部上升的上升部的连接部与镜2机械连接。反射镜2仅通过相应的3A，3B和3C的板簧部分5支撑在基板1上。因此，可以在保持优异的光学特性的同时，大大提高紧凑性和批量生产特性。

6. 发明申请

US20050018955A1 Light-beam switching/adjusting apparatus and manufacturing method thereof 失效
标题翻译：光束切换/调节装置及其制造方法
公开(公告)号：US20050018955A1
公开(公告)日：2005-01-27
申请号：US10500086
申请日：2002-12-12
申请人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
发明人： Keiichi Akagawa , Yoshihiko Suzuki , Tohru Ishizuya , Junji Suzuki , Katsuhiko Kurumada , Masatoshi Kanaya , Toshiaki Tamamura
IPC分类号： G02B6/35 , H01L25/065 , H04Q11/00 , G02B6/26
CPC分类号： G02B6/3596 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B6/3582 , G02B6/3584 , H04Q11/0005 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0058
摘要： The light guide substrate 2 has mirror receiving grooves 24 and light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrors 31 with respect to the grooves 24. The actuator substrate 4 has mirrors 31 and actuators which place the mirrors 31 in a state in which the mirrors are drawn in toward the substrate 4, or a state in which the mirrors protrude from the substrate 4. The light guide substrate 2 and actuator substrate 4 are aligned using alignment marks and joined with a spacer 3 interposed so that the mirrors 31 retract from the grooves 24 when the mirrors 31 are drawn in toward the substrate 4, and so that the mirrors 31 advance into the grooves 24 when the mirrors 31 protrude from the substrate 4. This alignment is performed in a state in which all of the mirrors 31 are drawn in toward the substrate 4.
摘要翻译：导光基板2具有反射镜容纳槽24和光导。根据反射镜31相对于凹槽24的前进和后退，导光板将输入到输入端口的光输入到选定的输出端口。致动器基板4具有反射镜31和将反射镜31放置在其中的致动器反射镜朝向基板4的状态，或反射镜从基板4突出的状态。导光基板2和致动器基板4使用对准标记对齐，并且与间隔件3相接合，当反射镜31朝向基板4被拉入时，反射镜31从凹槽24缩回，并且当反射镜31从基板4突出时，反射镜31前进到凹槽24中。该对准在所有反射镜31被朝向基板4拉入。

7. 发明授权

US6137407A Humanoid detector and method that senses infrared radiation and subject size 有权
标题翻译：人形探测器和感测红外辐射和物体大小的方法
公开(公告)号：US6137407A
公开(公告)日：2000-10-24
申请号：US441389
申请日：1999-11-16
申请人： Keiichi Akagawa , Hitoshi Nomura
发明人： Keiichi Akagawa , Hitoshi Nomura
IPC分类号： G08B13/191 , G01J1/02 , G01V8/20 , G08B13/19 , G08B13/18
CPC分类号： G08B13/19
摘要： A humanoid detector for detecting a humanoid in a surveillance area that substantially reduces false intruder indications by having two types of sensors that provide two types of information of the surveillance area, is disclosed. A first sensor detects light images and determines a size of a moving object within the surveillance area and compares the size of detected moving objects to a threshold size to reduce intruder detection caused by small animals. A second sensor detects infrared radiation from the surveillance area provides a detected infrared radiation signal. A decision circuit receives the sensor signals and provides a decision signal that indicates a human intruder in the surveillance area when, simultaneously, the size of the moving body is greater than that of a small animal and the detected infrared radiation indicates that the moving body is a heat producing body. In order to compensate for differences in the sensors and to account for different physical properties in the surveillance area, the decision circuit holds high an intruder signal for a predetermined time from each sensor. Thus, if a signal occurs that indicates a moving body is larger than a small animal, that signal is held for a predetermined time interval and if a signal indicates a sufficient increase in the infrared radiation occurs while the moving body signal is being held, then the decision circuit determines that a human intruder has entered the surveillance area. The decision signal may be used to trigger an audible or visible indication.
摘要翻译：公开了一种用于检测监视区域中的人形生物的人形检测器，其通过具有提供监视区域的两种类型的信息的两种类型的传感器来大大减少假入侵者的指示。第一传感器检测光图像并确定监视区域内的移动物体的大小，并将检测到的移动物体的大小与阈值尺寸进行比较，以减少由小动物引起的入侵者检测。第二个传感器检测来自监控区域的红外辐射，提供检测到的红外辐射信号。决定电路接收传感器信号，并且当同时移动体的大小大于小动物的大小时，提供指示人入侵者在监视区域中的判定信号，并且检测到的红外辐射表示移动体是一个发热体。为了补偿传感器的差异并考虑监视区域中的不同物理特性，判定电路从每个传感器保持高达一个预定时间的入侵者信号。因此，如果发生指示移动体大于小动物的信号，则该信号保持预定时间间隔，并且如果信号表示在保持移动体信号时发生红外辐射的充分增加，则决定电路确定人入侵者已进入监视区域。判定信号可用于触发可听或可见的指示。

8. 发明授权

US5757008A Infrared-ray image sensor 失效
标题翻译：红外线图像传感器
公开(公告)号：US5757008A
公开(公告)日：1998-05-26
申请号：US747077
申请日：1996-11-08
申请人： Keiichi Akagawa , Tetsuya Tomofuji
发明人： Keiichi Akagawa , Tetsuya Tomofuji
IPC分类号： H01L27/146 , H04N3/15 , H04N5/33 , G01J1/02
CPC分类号： H01L27/14649 , H04N3/1512 , H04N5/33
摘要： A power source is electrically connected to a capacitance element arranged corresponding to either a Shottky barrier diode (SBD) or a bolometer at a predetermined timing through a resistor by a driving pulse provided from a horizontal scanning circuit and a driving pulse provided from a vertical scanning circuit. At this time, charges charged by a voltage of the power source in the Shottky barrier diode are discharged by either a reverse current of the Shottky barrier diode or a current through the bolometer, immediately after the power source is disconnected from the capacitance element, arranged for either the Shottky barrier diode or the bolometer. After a storing period of time, when the power source and the capacitance element are connected, the charges corresponding to the charge amount discharged for the storing period of time are charged in the capacitance element. At this time, a voltage according to the charge amount is provided. Thus, an infrared-ray image sensor can be obtained using a Shottky barrier diode or a bolometer.
摘要翻译：电源通过由水平扫描电路提供的驱动脉冲和从垂直扫描提供的驱动脉冲通过电阻器以预定的定时与肖特基势垒二极管（SBD）或测辐射热计相对布置的电容元件电连接电路。此时，由肖特基势垒二极管的电源的电压充电的电荷在电源与电容元件断开之后立即由肖特基势垒二极管的反向电流或通过测辐射热计的电流放电，用于肖特基势垒二极管或测辐射热计。在存储时间段之后，当电源和电容元件连接时，与存储时间段中放电的电荷量对应的电荷被充电在电容元件中。此时，提供根据充电量的电压。因此，可以使用肖特基势垒二极管或测辐射热计获得红外线图像传感器。

9. 发明授权

US06936950B2 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same 有权
标题翻译：使用静电和洛伦兹力的微型致动器，以及使用其的微型致动器装置，光学开关和光学开关阵列
公开(公告)号：US06936950B2
公开(公告)日：2005-08-30
申请号：US10792427
申请日：2004-03-02
申请人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
发明人： Keiichi Akagawa , Junji Suzuki , Tohru Ishizuya , Yoshihiko Suzuki
IPC分类号： G02B26/08 , B81B3/00 , B81B7/02 , G02B6/12 , G02B6/35 , H04Q11/00 , H02N1/00 , G02B26/10
CPC分类号： G02B6/358 , B81B3/0037 , B81B2201/045 , B81B2203/0109 , B81B2203/053 , G02B6/3514 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B2006/12104
摘要： The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.
摘要翻译：可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗小尺寸。

10. 发明授权

US06828557B2 Radiation-detection devices 有权
标题翻译：辐射检测装置
公开(公告)号：US06828557B2
公开(公告)日：2004-12-07
申请号：US10000179
申请日：2001-11-30
申请人： Tohru Ishizuya , Junji Suzuki , Keiichi Akagawa
发明人： Tohru Ishizuya , Junji Suzuki , Keiichi Akagawa
IPC分类号： G01J538
CPC分类号： G01J5/40 , G01J5/0853
摘要： Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two “effecting” elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be “electrical capacitance” or “optical-readout” types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly. Other displaceable members are not heated and do not bend. The displaceable members are formable simultaneously during respective fabrication steps.
摘要翻译：公开了包括至少一个元件（像素）的辐射检测器。在一个像素中，保持两个“有效”元素之间的期望位置关系，而不管温度变化或其他主要变量。检测器可以是“电容”或“光学读出”类型。电容型的像素包括彼此相对并且在它们之间具有设定间隙的两个电极（参考电极和响应电极）。电极连接到具有相同结构的相应的可移位构件（配置为热双压电晶片）。光学读出型的像素包括半反射镜和反射镜，它们彼此面对并且在它们之间具有设定的间隙。半反射镜和反射器连接到相应的可移位构件。辐射被辐射吸收器吸收，辐射吸收器将热量转移到相应地弯曲倾斜的某些可移位构件。其他可移位构件不加热并且不弯曲。可移动构件在相应的制造步骤期间可同时成形。

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