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    • 5. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • 基板处理装置和基板处理方法
    • US20110206486A1
    • 2011-08-25
    • US12971171
    • 2010-12-17
    • Kenichirou MATSUYAMATakeshi Matsumoto
    • Kenichirou MATSUYAMATakeshi Matsumoto
    • H01L21/67
    • H01L21/67225H01L21/67196
    • Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module.
    • 即使构成多模块的模块成为不可用模块,也可以迅速地进行基板的转印,同时限制劣质产品的产生。 当在将基板传送到目的地模块之前,多模块的目的地模块变得不可用时,将基板的目的地改变为要在基板之后的基板被加载到的模块。 在生成不可用模块之前,在传送单元在传送周期的上游端访问模块之前,传送周期继续进行,直到先前的基板准备好从改变的目的地模块卸载。 或者,当生成不可用模块时,当传送单元位于传送周期中的不可用模块的上游侧时,传送单元的传送操作被备用直到先前的基板准备好在改变后的装载中被卸载 目的地模块。
    • 7. 发明授权
    • Wavelength displacement correcting system
    • 波长位移校正系统
    • US07705983B2
    • 2010-04-27
    • US12020797
    • 2008-01-28
    • Kenji ImuraTakeshi Matsumoto
    • Kenji ImuraTakeshi Matsumoto
    • G01J3/28
    • G01J3/18G01J3/02G01J3/027G01J3/28G01J3/2803G01J2003/2866
    • A wavelength displacement correcting system and method where a monochromatic beam from an LED is incident through an incident slit of a spectral device and is diffracted on a diffraction grating to form a dispersed light image. Information relating to the dispersed light image is outputted and a wavelength displacement is calculated, using a forward voltage value corresponding to the constant current, and a forward voltage initial value. Wavelength displacement amounts of at least two diffracted beams are calculated, using output values of the at least two diffracted beams, and diffracted beam output initial values with respect to the dispersed light image. A dispersion width is calculated, using the calculated wavelength displacement amount of the beam, and the calculated wavelength displacement amounts of at least two diffracted beams.
    • 一种波长位移校正系统和方法,其中来自LED的单色光束通过光谱器件的入射狭缝入射并衍射在衍射光栅上以形成分散的光图像。 输出与分散的光图像相关的信息,并且使用与恒定电流对应的正向电压值和正向电压初始值来计算波长位移。 使用至少两个衍射光束的输出值和相对于分散光图像的衍射光束输出初始值来计算至少两个衍射光束的波长位移量。 使用计算出的波束位移量和至少两个衍射光束的计算波长位移量来计算色散宽度。
    • 10. 发明申请
    • WAVELENGTH DISPLACEMENT CORRECTING SYSTEM
    • 波长偏移校正系统
    • US20080212092A1
    • 2008-09-04
    • US12020797
    • 2008-01-28
    • Kenji IMURATakeshi Matsumoto
    • Kenji IMURATakeshi Matsumoto
    • G01J3/28
    • G01J3/18G01J3/02G01J3/027G01J3/28G01J3/2803G01J2003/2866
    • In a wavelength displacement correcting system and method of the invention, a monochromatic beam from a light emitting diode driven by a constant current is incident through an incident slit of a spectral device. The incident beam is diffracted on a diffraction grating to form a dispersed light image, and information relating to the dispersed light image of the incident slit is outputted from the spectral device. A wavelength displacement amount of the monochromatic beam is calculated, using a forward voltage value corresponding to the constant current, and a forward voltage initial value. Wavelength displacement amounts of at least two diffracted beams are calculated, using output values of the at least two diffracted beams, and diffracted beam output initial values with respect to the dispersed light image. A dispersion width displacement amount of the spectral device is calculated, using the calculated wavelength displacement amount of the monochromatic beam, and the calculated wavelength displacement amounts of at least two diffracted beams, whereby a wavelength displacement of the spectral device is corrected.
    • 在本发明的波长位移校正系统和方法中,来自由恒定电流驱动的发光二极管的单色光束通过光谱器件的入射狭缝入射。 入射光束在衍射光栅上衍射以形成分散的光图像,并且从光谱装置输出与入射狭缝的分散光图像有关的信息。 使用与恒定电流对应的正向电压值和正向电压初始值来计算单色光束的波长位移量。 使用至少两个衍射光束的输出值和相对于分散光图像的衍射光束输出初始值来计算至少两个衍射光束的波长位移量。 使用所计算的单色光束的波长位移量和所计算的至少两个衍射光束的波长位移量来计算光谱器件的色散宽度位移量,从而校正光谱器件的波长位移。