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1. 发明申请

US20070181163A1 Electronic device cleaning equipment and electronic device cleaning method 审中-公开
标题翻译：电子设备清洗设备和电子设备清洗方法
公开(公告)号：US20070181163A1
公开(公告)日：2007-08-09
申请号：US11583847
申请日：2006-10-20
申请人： Yukihisa Wada , Masayuki Watanabe , Kazuhide Saito
发明人： Yukihisa Wada , Masayuki Watanabe , Kazuhide Saito
IPC分类号： C23G1/00 , B08B3/00
CPC分类号： H01L21/67051 , H01L21/0206 , H01L21/31111
摘要： Electronic device cleaning equipment includes a cleaning stage having a processing face on which a substrate having an obverse face at which an electronic device is formed is to be placed, a vapor supply nozzle for supplying vapor to the obverse face of the substrate, and chemical solution supply means for supplying a chemical solution to the obverse face of the substrate. Accordingly, static electricity present on the obverse face of the substrate is diselectrified.
摘要翻译：电子设备清洁设备包括：清洁台，其具有处理面，在其上放置有形成电子器件的正面的基板，用于向基板的正面供应蒸气的蒸气供给喷嘴，以及化学溶液用于将化学溶液供给到基板的正面的供给装置。因此，存在于基板的正面的静电变得不均匀。

2. 发明申请

US20060137712A1 Cleaning apparatus and method for electronic device 审中-公开
标题翻译：电子设备清洗装置及方法
公开(公告)号：US20060137712A1
公开(公告)日：2006-06-29
申请号：US11260568
申请日：2005-10-28
申请人： Yukihisa Wada , Masayuki Watanabe
发明人： Yukihisa Wada , Masayuki Watanabe
IPC分类号： C23G1/00 , B08B7/04 , B08B3/00 , C03C15/00 , B08B3/12 , C23F1/00 , H01L21/306
CPC分类号： B08B3/08 , H01L21/02063 , H01L21/31111 , H01L21/6708 , H01L21/67253
摘要： A method for cleaning electronic devices including the step of cleaning a target substrate placed in a cleaning chamber by etching using a cleaning solution which is circulated for reuse in a cleaning solution circulation path including at least the cleaning chamber and a cleaning solution circulation line, the method further including the steps of: (a) determining etch time based on data concerning variations in amount of a target film on the target substrate etched by the cleaning solution, the variations depending on time elapsed since the cleaning solution was fed into the cleaning solution circulation path; (b) etching the target substrate in the cleaning chamber using the cleaning solution for the determined etch time; and (c) rinsing the target substrate with water.
摘要翻译：一种清洁电子设备的方法，包括以下步骤：通过使用在至少包括清洁室和清洁溶液循环管线的清洁溶液循环路径中循环再循环的清洁溶液进行蚀刻来清洁放置在清洁室中的目标基板的步骤，方法还包括以下步骤：（a）基于关于由清洁溶液蚀刻的目标衬底上的目标膜的量的变化的数据确定蚀刻时间，这取决于从清洁溶液被供给到清洁溶液中经过的时间的变化循环路径; （b）使用所述清洁溶液在所述清洁室中蚀刻所述目标衬底以确定蚀刻时间; 和（c）用水冲洗目标底物。

3. 发明授权

US07267127B2 Method for manufacturing electronic device 有权
标题翻译：电子设备制造方法
公开(公告)号：US07267127B2
公开(公告)日：2007-09-11
申请号：US11222749
申请日：2005-09-12
申请人： Masayuki Watanabe , Yukihisa Wada
发明人： Masayuki Watanabe , Yukihisa Wada
IPC分类号： B08B6/00 , H01L21/302
CPC分类号： H01L21/02071 , H01L21/0206 , H01L21/31122 , H01L21/32136 , H01L28/40
摘要： A method for manufacturing an electronic device comprising the steps of: dry-etching a Ti-containing metal film formed on a substrate with a gas containing fluorine; and treating the substrate with a chemical solution containing fluorine ions after the dry etching step.
摘要翻译：一种电子器件的制造方法，包括以下步骤：用含有氟的气体对形成在基板上的含Ti金属膜进行干法蚀刻; 以及在干蚀刻步骤之后用含有氟离子的化学溶液处理该衬底。

4. 发明申请

US20060118516A1 Method for manufacturing electronic device 有权
标题翻译：电子设备制造方法
公开(公告)号：US20060118516A1
公开(公告)日：2006-06-08
申请号：US11222749
申请日：2005-09-12
申请人： Masayuki Watanabe , Yukihisa Wada
发明人： Masayuki Watanabe , Yukihisa Wada
IPC分类号： B44C1/22
CPC分类号： H01L21/02071 , H01L21/0206 , H01L21/31122 , H01L21/32136 , H01L28/40
摘要： A method for manufacturing an electronic device comprising the steps of: dry-etching a Ti-containing metal film formed on a substrate with a gas containing fluorine; and treating the substrate with a chemical solution containing fluorine ions after the dry etching step.
摘要翻译：一种电子器件的制造方法，包括以下步骤：用含有氟的气体对形成在基板上的含Ti金属膜进行干法蚀刻; 以及在干蚀刻步骤之后用含有氟离子的化学溶液处理该衬底。

5. 发明授权

US08274654B2 Apparatus for measuring nanoparticles 失效
标题翻译：用于测量纳米颗粒的装置
公开(公告)号：US08274654B2
公开(公告)日：2012-09-25
申请号：US12663772
申请日：2007-06-13
申请人： Yukihisa Wada
发明人： Yukihisa Wada
IPC分类号： G01N15/02 , G01N21/00
CPC分类号： G01N21/4788 , G01N15/0211 , G01N2015/0038 , G01N2015/0216
摘要： A dielectric sheet 3 is arranged between a pair of electrodes 2a and 2b for forming an electric field in a cell 1 that stores therein a sample having particles dispersed movably in a medium, the dielectric sheet 3 being formed to include multiple mutually parallel slits 3a to form a diffraction grating, and a parallel light flux is applied to the diffraction grating to generate diffracted light. A gradient electric field in the vicinity of the slits 3a generated by applying a voltage between the electrodes 2a and 2b causes the particles P to migrate in such a manner as to cover the slits 3a or away from the slits 3a and thereby the contrast of the diffraction grating to vary, and whereby the diffusion coefficient and/or size of the particles P can be calculated from the temporal change of the diffracted light when the particles diffuse freely after stopping the application of the voltage. In this measurement apparatus, the particles P might not migrate toward the electrodes 2a and 2b and are not absorbed there, which can prevent damage of the electrodes 2a and 2b and also the occurrence of an electrode reaction.
摘要翻译：在一对电极2a和2b之间设置电介质片3，用于在其中存储有可移动地分散在介质中的颗粒的电池1中形成电场，电介质片3形成为包括多个相互平行的狭缝3a至形成衍射光栅，并且将平行光束施加到衍射光栅以产生衍射光。在通过在电极2a和2b之间施加电压而产生的狭缝3a附近的梯度电场使得颗粒P以覆盖狭缝3a或远离狭缝3a的方式迁移，由此，衍射光栅变化，从而可以在停止施加电压之后颗粒自由扩散时由衍射光的时间变化计算出粒子P的扩散系数和/或尺寸。在该测定装置中，粒子P不会向电极2a，2b移动，不会吸收，能够防止电极2a，2b的损伤以及电极反应的发生。

6. 发明申请

US20100177311A1 APPARATUS FOR MEASURING NANOPARTICLES 失效
标题翻译：用于测量纳米颗粒的装置
公开(公告)号：US20100177311A1
公开(公告)日：2010-07-15
申请号：US12663772
申请日：2007-06-13
申请人： Yukihisa Wada
发明人： Yukihisa Wada
IPC分类号： G01N15/02
CPC分类号： G01N21/4788 , G01N15/0211 , G01N2015/0038 , G01N2015/0216
摘要： A dielectric sheet 3 is arranged between a pair of electrodes 2a and 2b for forming an electric field in a cell 1 that stores therein a sample having particles dispersed movably in a medium, the dielectric sheet 3 being formed to include multiple mutually parallel slits 3a to form a diffraction grating, and a parallel light flux is applied to the diffraction grating to generate diffracted light. A gradient electric field in the vicinity of the slits 3a generated by applying a voltage between the electrodes 2a and 2b causes the particles P to migrate in such a manner as to cover the slits 3a or away from the slits 3a and thereby the contrast of the diffraction grating to vary, and whereby the diffusion coefficient and/or size of the particles P can be calculated from the temporal change of the diffracted light when the particles diffuse freely after stopping the application of the voltage. In this measurement apparatus, the particles P might not migrate toward the electrodes 2a and 2b and are not absorbed there, which can prevent damage of the electrodes 2a and 2b and also the occurrence of an electrode reaction.
摘要翻译：在一对电极2a和2b之间设置电介质片3，用于在其中存储有可移动地分散在介质中的颗粒的电池1中形成电场，电介质片3形成为包括多个相互平行的狭缝3a至形成衍射光栅，并且将平行光束施加到衍射光栅以产生衍射光。在通过在电极2a和2b之间施加电压而产生的狭缝3a附近的梯度电场使得颗粒P以覆盖狭缝3a或远离狭缝3a的方式迁移，由此，衍射光栅变化，从而可以在停止施加电压之后颗粒自由扩散时由衍射光的时间变化计算出粒子P的扩散系数和/或尺寸。在该测定装置中，粒子P不会向电极2a，2b移动，不会吸收，能够防止电极2a，2b的损伤以及电极反应的发生。

7. 发明申请

US20090251695A1 OPTICAL MEASURING DEVICE 有权
标题翻译：光学测量装置
公开(公告)号：US20090251695A1
公开(公告)日：2009-10-08
申请号：US11996057
申请日：2006-01-17
申请人： Naoji Moriya , Yuzo Nagumo , Yukihisa Wada , Naofumi Sakauchi , Fujio Inoue , Masahiro Takebe , Kenji Takubo , Shinichiro Totoki
发明人： Naoji Moriya , Yuzo Nagumo , Yukihisa Wada , Naofumi Sakauchi , Fujio Inoue , Masahiro Takebe , Kenji Takubo , Shinichiro Totoki
IPC分类号： G01N15/02 , G01N21/47
CPC分类号： G01N15/0211 , G01N21/4788 , G01N2021/1721
摘要： Within a container 1 which is storing a sample is generated a regularly arranged electric field distribution by an impression of a voltage upon an electrode pair 2 provided within the container 1, thereby generating diffraction grating formed by a density modulation of particles within the sample within the container 1, there is obtained information upon a diffusion of the particles based upon a temporal change in an extinction process of an intensity of a diffracted light beam obtained by irradiating a light beam upon the diffraction grating formed by the density modulation of the particles, the electrodes 21, 22 constituting the electrode pair 2 are configured to have multiple linear electrode teeth 21a, 22a parallel with each other, the electrodes 21, 22 are arranged such that the electrode teeth 21a of one electrode 21 are inserted between the electrode teeth 22a of the other electrode 22, thereby increasing the width of the diffraction grating formed by the density modulation of the particles, and a ratio of a component of the diffracted light beam thereof included in an entire diffracted light beam is increased to increase sensitivity of a measurement. As a result, there is provided an optical measuring device which can measure the information upon the diffusion of the particles movably dispersed within a medium at a high sensitivity and with an excellent S/N ratio.
摘要翻译：在存储样品的容器1内通过设置在容器1内的电极对2上的电压印制产生规则排列的电场分布，从而产生通过在样品内的颗粒的密度调制形成的衍射光栅容器1根据粒子的密度调制形成的衍射光栅照射光束而获得的衍射光束的强度的消光处理中的时间变化，获得了粒子扩散的信息，构成电极对2的电极21,22被配置为具有彼此平行的多个线状电极齿21a，22a，电极21,22被布置成使得一个电极21的电极齿21a插入到电极齿22a 另一个电极22，从而增加由t的密度调制形成的衍射光栅的宽度并且包括在整个衍射光束中的衍射光束的分量的比率增加，以增加测量的灵敏度。结果，提供了一种光学测量装置，其可以以高灵敏度和良好的S / N比来测量可移动地分散在介质中的颗粒的扩散的信息。

8. 发明授权

US07413625B2 Bonding method of ceramic honeycomb structure 有权
标题翻译：陶瓷蜂窝结构的粘结方法
公开(公告)号：US07413625B2
公开(公告)日：2008-08-19
申请号：US10541841
申请日：2004-01-14
申请人： Jun Fujita , Takahisa Kaneko , Yukihisa Wada
发明人： Jun Fujita , Takahisa Kaneko , Yukihisa Wada
IPC分类号： C09J5/00
CPC分类号： B01D46/0001 , B01D46/2418 , B01D46/2459 , C04B35/565 , C04B35/62625 , C04B35/6263 , C04B35/632 , C04B35/806 , C04B37/005 , C04B38/008 , C04B2111/00793 , C04B2111/0081 , C04B2235/3418 , C04B2235/3826 , C04B2235/5228 , C04B2235/668 , C04B2235/80 , C04B2235/96 , C04B2237/083 , Y10T428/24149 , C04B38/0006
摘要： Respective pieces of the porous honeycomb segments (2) are stacked while interposing the adhesive layers between respective adhered surfaces (2a), and are bonded together by performing main pressurization (F1, F2) on the whole through the porous honeycomb segments (2) located on an outermost layer after stacking a predetermined number of pieces. Main pressurization force at this time is simultaneously applied to all the honeycomb segments (2) and does not act as a separating force against any of the honeycomb segments (2).
摘要翻译：多孔蜂窝片段（2）的各个片段被叠置在粘合剂层之间，并且通过主要加压（F 1，F 2）通过多孔蜂窝片段（F 1，F 2）粘合在一起，并粘合在一起 2）在堆叠预定数量的片之后位于最外层。此时的主加压力同时施加到所有蜂窝段（2）上，并且不作为与任何蜂窝段（2）的分离力。

9. 发明授权

US07294304B2 Die for forming honeycomb structure and method of manufacturing honeycomb structure 有权
标题翻译：用于形成蜂窝结构的模具和蜂窝结构体的制造方法
公开(公告)号：US07294304B2
公开(公告)日：2007-11-13
申请号：US11268598
申请日：2005-11-08
申请人： Yukihisa Wada , Tomohiro Iida , Jiro Maeda
发明人： Yukihisa Wada , Tomohiro Iida , Jiro Maeda
IPC分类号： B28B3/06 , B29C47/12
CPC分类号： B28B3/269 , B28B3/26 , B29C47/0028 , B29C47/12 , B29L2031/60
摘要： There is disclosed a die for forming a honeycomb structure and a method of manufacturing the honeycomb structure by use of the die, in which variations of cell pitches are suppressed in a central portion and the vicinity of an outer periphery after drying and firing an extruded honeycomb structure, and the honeycomb structure having a uniform cell pitch can be manufactured. A die 1 for forming a honeycomb structure has a front surface provided with groovy slits 2 formed between cell blocks 3 and a back surface provided with back holes 4a communicating with the slits 2. The die 1 has a structure in which a pitch P of the adjacent cell blocks 3 is enlarged from a central portion of the front surface toward an outer periphery in a stepwise manner.
摘要翻译：公开了一种用于形成蜂窝结构的模具和使用该模具制造蜂窝结构体的方法，其中干燥和烧制挤出蜂窝体之后的中心部分和外周附近抑制了单元间距的变化可以制造具有均匀电池间距的蜂窝结构体。用于形成蜂窝结构的模具1具有设置有形成在单元块3之间的格子狭缝2的前表面和设置有与狭缝2连通的后孔4a的后表面。模具1具有这样的结构，其中相邻单元块3的间距P从分段的前表面的中心部分向外周增大。

10. 发明授权

US07040327B2 Die cleaning method 有权
标题翻译：模具清洗方法
公开(公告)号：US07040327B2
公开(公告)日：2006-05-09
申请号：US10506970
申请日：2003-01-31
申请人： Yukihisa Wada , Takahisa Kaneko , Masayuki Nate
发明人： Yukihisa Wada , Takahisa Kaneko , Masayuki Nate
IPC分类号： B08B7/00
CPC分类号： B08B7/0071 , B08B3/02 , B08B5/02 , B08B2220/04 , B28B7/386 , B28B2003/203 , B29C47/0028 , B29C47/0877 , B29C47/12 , B29L2031/60
摘要： There is disclosed a die cleaning method for removing a forming-material from a die used in forming the forming-material containing a binder, comprising the steps of: removing a part or all of the binder contained in the forming-material from the die; and removing the forming-material from the die, whereby the forming-material in the die can be removed without damaging or deforming the die for use in forming the forming-material containing the binder.
摘要翻译：公开了一种用于从用于形成含有粘合剂的成型材料的模具中除去成形材料的模具清洁方法，包括以下步骤：从模具中去除包含在成形材料中的部分或全部粘合剂; 并且从模具中去除成形材料，从而可以去除模具中的成形材料，而不会损坏或变形用于形成含有粘合剂的成形材料的模具。

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