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    • 3. 发明授权
    • Circuit board production method and its apparatus
    • 电路板生产方法及其设备
    • US07355143B1
    • 2008-04-08
    • US09763735
    • 1999-12-27
    • Hiroyuki NakanoToshihiko NakataMasayoshi SerizawaHideaki Sasazawa
    • Hiroyuki NakanoToshihiko NakataMasayoshi SerizawaHideaki Sasazawa
    • B23K10/00B23K26/00
    • G01N15/0227G01N15/0211G01N2015/0216
    • Making it possible to execute the detection of the particles floating inside a processing chamber with the use of an optical system including one observing window and one unit (An object of the present invention is, by using an optical system including one observing window and one unit, to make it possible to execute the detection of the particles floating inside a processing chamber.) Also, in order to be able to detect exceedingly feeble particle scattered-lights with a high-accuracy, when performing a desired thin-film forming or thin-film processing treatment toward a to-be-processed target inside the processing chamber, the following method is employed: First, the irradiation with a beam is executed into the processing chamber through the observing window. Here, the beam is P-polarized and is intensity-modulated with a frequency differing from an exciting source's frequency and its integer-multiples, and the observing window has an inclination that forms Brewster angle toward the P-polarized incident beam. Next, backward scattered-lights scattered by the particles inside the processing chamber are received and image-photographed at a detecting optical system through the above-described one and the same observing window. Moreover, the above-described frequency component and a wavelength component of the above-described intensity-modulated beam are detected out of the received signals. Finally, the detected components and the image-photographed image information are used so as to judge the number, the size, and the distribution of the particles.
    • 通过使用包括一个观察窗口和一个单元的光学系统,可以执行浮动在处理室内的颗粒的检测。本发明的目的是通过使用包括一个观察窗口和一个单元的光学系统 ,使得可以执行浮在处理室内的颗粒的检测。)此外,为了能够以高精度检测到极度​​微弱的粒子散射光,当进行所需的薄膜形成或薄 对处理室内的待处理靶材进行膜处理,采用以下方法:首先,通过观察窗口将光束照射进入处理室。 这里,光束是P偏振光并且以不同于激发光源的频率和其整数倍的频率进行强度调制,并且观察窗口具有朝向P偏振入射光束形成布鲁斯特角的倾斜度。 接下来,通过上述同一观察窗口,在检测光学系统中接收并处理由处理室内的颗粒散射的向后散射光并进行图像拍摄。 此外,从接收信号中检测出上述强度调制波束的上述频率分量和波长分量。 最后,使用检测到的分量和图像拍摄图像信息来判断粒子的数量,大小和分布。
    • 4. 发明授权
    • Non-invasive method and low-coherence apparatus system analysis and process control
    • 非侵入性方法和低相干装置系统分析和过程控制
    • US06738144B1
    • 2004-05-18
    • US09465586
    • 1999-12-17
    • Aristide Dogariu
    • Aristide Dogariu
    • G01B902
    • G01N21/474G01B9/02002G01B9/02005G01B9/02007G01B9/02014G01B9/02027G01B9/0209G01N15/0211G01N21/45G01N2015/0216
    • The disclosure relates to measuring devices that are particularly suited for the purpose of in-situ characterization of particles present in fluid substances or in air using a low-coherence interferometer. Specifically, the characterization includes average size, size distribution, volumetric density, and composition. The low-coherence interferometer utilizes a split band of radiation to illuminate a sample probe and a reference probe then combines the reflected radiation from both probes to determine the photon pathlength distribution of the tested particulate or colloidal containing stream and from this information determine the size characteristics of said stream. The methodology is relevant to possible spatially distributed control of chemical processes such as emulsion polymerization to produce paints, coatings, synthetic rubbers, or crystallization processes in pharmaceuticals, food, and bulk chemicals industries. Another application relates to on-line control of particle size and volumetric density is in combustion for diagnostics. The invention can be used for the characterization of coal particles, dense sprays and solid propellants or any other system, which is too dense for conventional optical measurement techniques. Beside the intrinsic particulate nature of these systems, random index of refraction variations are also created due to turbulence/temperature interactions. The remote optical characterization of systems with high-concentration of suspended solids is also important for water quality control and pollution monitoring.
    • 本公开涉及特别适用于使用低相干干涉仪在流体物质或空气中存在的颗粒进行原位表征的目的的测量装置。 具体来说,表征包括平均尺寸,尺寸分布,体积密度和组成。 低相干干涉仪利用分离的辐射带照射样品探针,然后参考探针组合来自两个探针的反射辐射,以确定测试的颗粒或胶体流的光子路径长度分布,并从该信息确定尺寸特征 的流。 该方法与化学过程的可能的空间分布控制相关,例如乳液聚合以在药物,食品和散装化学工业中生产油漆,涂料,合成橡胶或结晶过程。 另一个应用涉及在线控制颗粒尺寸和体积密度是用于诊断的燃烧。 本发明可用于表征煤颗粒,致密喷雾剂和固体推进剂或任何其它系统,其对于常规光学测量技术来说太致密。 除了这些系统的固有颗粒性质外,由于湍流/温度相互作用,也产生随机折射率变化。 具有高浓度悬浮固体的系统的远程光学表征对于水质控制和污染监测也很重要。
    • 5. 发明申请
    • Optical detection of particles in a liquid medium
    • 液体介质中颗粒的光学检测
    • US20040070756A1
    • 2004-04-15
    • US10416780
    • 2003-11-06
    • Stanislav Rastopov
    • G01N021/00
    • G01N15/0211G01N15/06G01N2015/0216G01N2015/0693G01N2021/479
    • Particles in a liquid medium are detected by directing a source of laser light through a container containing a liquid sample with a concentration of microscopic particles in suspension. An optical detector located off the optical axis receives scattered light from the particles and provides a signal with a dc component and a varying component. The DC component is removed to provide a filtered signal representing the varying component. Movement is produced in the sample liquid, e.g., by convective stirring, to extend the band of frequencies of the varying component towards higher frequencies. The apparatus can be used for growth curve detection of biological samples and provides increased sensitivity.
    • 通过将激光源引导通过含有悬浮液中微量颗粒浓度的液体样品的容器来检测液体介质中的颗粒。 位于光轴外的光学检测器接收来自颗粒的散射光,并提供具有直流分量和变化分量的信号。 去除DC分量以提供表示变化分量的滤波信号。 在样品液体中产生运动,例如通过对流搅拌,将变化组分的频带扩展到更高的频率。 该装置可用于生物样品的生长曲线检测,并提供增加的灵敏度。
    • 6. 发明授权
    • Fluorescence intensity and lifetime distribution analysis
    • 荧光强度和寿命分布分析
    • US06690463B2
    • 2004-02-10
    • US09779704
    • 2001-02-09
    • Peet Kask
    • Peet Kask
    • G01J330
    • G01N21/6458G01J3/4406G01N21/6408G01N21/6445G01N2015/0216
    • The present invention relates to a method for characterizing samples having fluorescent particles, comprising the steps of: exciting particles in a measurement volume to emit fluorescence by a series of excitation pulses, monitoring the emitted fluorescence by detecting sequences of photon counts using a detector, determining numbers of photon counts in counting time intervals of given width, determining in the counting time intervals detection delay times of the photon counts relative to the corresponding excitation pulses, determining a function of the detection delay times, determining a probability function of at least two arguments, {circumflex over (P)}(n, t, . . . ), wherein at least one argument is the number of photon counts and another argument is the function of detection delay times, and determining from the probability function {circumflex over (P)}(n, t, . . . ) a distribution of particles as a function of at least two arguments, wherein one argument is a specific brightness of the particles, or a measure thereof, and another argument is a fluorescence lifetime of the particles, or a measure thereof.
    • 本发明涉及一种用于表征具有荧光颗粒的样品的方法,包括以下步骤:激发测量体积中的颗粒以通过一系列激发脉冲发射荧光,通过使用检测器检测光子计数序列来监测发射的荧光,确定 在给定宽度的计数时间间隔中的光子计数的数量,在计数时间间隔中确定光子计数相对于相应的激励脉冲的检测延迟时间,确定检测延迟时间的函数,确定至少两个参数的概率函数 ,P(n,t,...),其中至少一个参数是光子计数的数量,另一个参数是检测延迟时间的函数,并且从概率函数P(n,t,...)a 作为至少两个参数的函数的粒子的分布,其中一个参数是粒子的特定亮度或其度量,以及 另一个观点是颗粒的荧光寿命或其测量。
    • 7. 发明申请
    • Fluorescence intensity and lifetime distribution analysis
    • 荧光强度和寿命分布分析
    • US20020063863A1
    • 2002-05-30
    • US09779704
    • 2001-02-09
    • Peet Kask
    • G01N021/64
    • G01N21/6458G01J3/4406G01N21/6408G01N21/6445G01N2015/0216
    • The present invention relates to a method for characterizing samples having fluorescent particles, comprising the steps of: exciting particles in a measurement volume to emit fluorescence by a series of excitation pulses, monitoring the emitted fluorescence by detecting sequences of photon counts using a detection means, determining numbers of photon counts in counting time intervals of given width, determining in said counting time intervals detection delay times of the photon counts relative to the corresponding excitation pulses, determining a function of said detection delay times, determining a probability function of at least two arguments, {circumflex over (P)}(n, t, . . . ), wherein at least one argument is the number of photon counts and another argument is said function of detection delay times, and determining from said probability function {circumflex over (P)}(n, t, . . . ) a distribution of particles as a function of at least two arguments, wherein one argument is a specific brightness of the particles, or a measure thereof, and another argument is a fluorescence lifetime of the particles, or a measure thereof.
    • 本发明涉及一种用于表征具有荧光颗粒的样品的方法,包括以下步骤:通过一系列激发脉冲激发测量体积中的颗粒以发射荧光,通过使用检测装置检测光子计数序列来监测发射的荧光, 确定给定宽度的计数时间间隔中的光子计数的数量,在所述计数时间间隔中确定相对于相应的激励脉冲的光子计数的检测延迟时间,确定所述检测延迟时间的函数,确定至少两个 其中至少一个参数是光子计数的数量,另一个参数是所述检测延迟时间的函数,并且根据所述概率函数确定所述概率函数(r,f,..., (P)}(n,t,...)作为至少两个参数的函数的粒子分布,其中一个参数是指定 颗粒的亮度或其度量,另一个参数是颗粒的荧光寿命或其度量。
    • 8. 发明授权
    • Optical detection system and method for determining particle size distribution in an oscillating flow field
    • US06281973B1
    • 2001-08-28
    • US09406944
    • 1999-09-28
    • Michael N. Trainer
    • Michael N. Trainer
    • G01N2100
    • G01N15/0205G01N2015/0216
    • An optical detection system and method is disclosed comprising a first light guide for conveying light energy from a light source to a first light guide face end that is immersed in a dispersant medium. A first portion of the light energy exits the face end to irradiate particles contained in the dispersant medium and a second portion of the light energy is reflected by the face end back into the first light guide. A frequency transducer mounted to the first light guide receives at least one specific frequency from a range of frequencies generated by a frequency oscillator and oscillates the first light guide face end at the applied specific frequency. The transducer oscillations are further coupled into the dispersant medium, causing the dispersant medium and the particles contained therein to oscillate at the oscillation frequency of the first light guide face end. The light energy scattered by the oscillating particles is captured by the first light guide face end and is mixed within the first light guide with the reflected light energy, producing an optical Doppler beat signal for the applied specific frequency. A second light guide, optically connected to the first light guide, conveys the optical Doppler beat signal to a light detection device that produces an output signal representative of the optical Doppler beat signal. A mixer circuit receives the specific frequency signal from the frequency oscillator and the output signal from the detection device and produces a plurality of derived harmonics for the input specific frequency signal. The mixer circuit further generates frequency components for the input Doppler beat signal producing a total power value signal for each derived harmonic of the frequency. The total power value signals are applied to a signal processing system that calculates a particle motion amplitude signal for each applied specific frequency. The particle motion amplitude signal is used to determine the percentage of the total particles which are following the oscillations of the dispersant fluid at the applied specific frequency.