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    • 5. 发明授权
    • Recipe design to prevent tungsten (W) coating on wafer backside for those wafers with poly Si on wafer backside
    • 配方设计,以防止晶圆背面上的钨(W)涂层用于晶圆背面的多晶硅晶圆
    • US06191035B1
    • 2001-02-20
    • US09313303
    • 1999-05-17
    • Kuo-Hsien ChengChen-Mei Fan
    • Kuo-Hsien ChengChen-Mei Fan
    • H01L2144
    • H01L21/28568
    • In a CVD vacuum chamber processing system for depositing a blanket of refractory material, such as tungsten, upon a frontside of a semiconductor wafer, an inert gas, such as argon is directed to the backside of the wafer in a manner so as to prevent the chamber reaction gases from reacting with polysilicon or other materials on the backside of the wafer as well as to prevent the deposition of the blanket material on the backside of the wafer. This method alleviates the problems of particulate generation and loss of wafer backside datum surface due to the inadvertent buildup of unwanted materials. The wafer is placed on a heater platen and is secured by a specified range of vacuum pressures. The wafer is exposed to specified ranges of chamber pressure during the deposition phase. During the purge phase, the chamber pressure is reduced and the wafer chucking pressure is increased to a specified range. The method is terminated with the equalization of pressure between the front and backside of the wafer.
    • 在CVD真空室处理系统中,用于在半导体晶片的前侧沉积耐火材料(例如钨)的毯子,惰性气体例如氩气以这样的方式被引导到晶片的背面,以防止 室反应气体与晶片背面的多晶硅或其他材料反应,以及防止覆盖材料沉积在晶片的背面。 该方法由于无意的材料的无意积累而减轻了颗粒产生和晶片背面基准表面损失的问题。 将晶片放置在加热器台板上并通过特定范围的真空压力固定。 在沉积阶段,晶片暴露于规定范围的室压力。 在清洗阶段期间,腔室压力降低,并且晶片夹紧压力增加到指定范围。 该方法通过晶片的前侧和后侧之间的压力均衡来终止。
    • 6. 发明授权
    • Cleaning container and method for cleaning LP furnace thermocouple sleeves
    • 清洗容器及清洗LP炉热电偶套筒的方法
    • US06742532B2
    • 2004-06-01
    • US10043859
    • 2002-01-09
    • Yung-Pin LinChung-Ray ChenChen-Mei FanChan-Chung Shu
    • Yung-Pin LinChung-Ray ChenChen-Mei FanChan-Chung Shu
    • B08B304
    • B08B3/04H01L21/67057H01L21/6735
    • A cleaning container and method for using the same for chemically cleaning elongated members including quartz thermocouple sleeves including a first body member and a second body member said first body member and second body member respectively forming a first containing space and a second containing space including a first means for reversibly compressively sealing the first body member and the second body member to a form a combined containing space for sealably holding a cleaning solution level; a cap member disposed at a distal end of the first body member said cap member including a second means for reversibly compressively sealing a first opening in communication with the first containing space; and, a second opening centrally disposed in a distal end of the second containing space said second opening including a third means for reversibly compressively sealing around at least one elongated member penetrating through said second opening.
    • 一种清洁容器及其用于化学清洁细长构件的方法,包括石英热电偶套管,包括第一主体构件和第二主体构件,所述第一主体构件和第二主体构件分别形成第一容纳空间和第二容纳空间,所述第二容纳空间包括第一 用于将第一本体构件和第二本体构件可逆地压缩密封成用于密封地保持清洁溶液水平的组合容纳空间的装置; 帽构件,其设置在所述第一主体构件的远端处,所述盖构件包括用于可逆地压缩地密封与所述第一容纳空间连通的第一开口的第二装置; 并且中心地设置在所述第二容纳空间的远端中的第二开口,所述第二开口包括用于可逆地压缩地密封穿透所述第二开口的至少一个细长构件的第三装置。