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1. 发明授权

US06385011B1 Air bearing slider and manufacturing method therefor 有权
标题翻译：空气轴承滑块及其制造方法
公开(公告)号：US06385011B1
公开(公告)日：2002-05-07
申请号：US09303011
申请日：1999-04-30
申请人： Yu-En Percy Chang , Jack Dana Cook , Cherngye Hwang , Sanford J. Lewis
发明人： Yu-En Percy Chang , Jack Dana Cook , Cherngye Hwang , Sanford J. Lewis
IPC分类号： G11B1732
CPC分类号： G11B5/6005
摘要： An air bearing slider embodiment of the present invention includes a body portion having an air bearing surface (ABS) side and a flexure surface side. The ABS side has at least one air bearing surface and at least one recessed area. A thin film composed of a compressive force material is deposited within the recessed area. The compressive force material produces an omnidirectional outward force within the recessed area that creates a positive crown and camber. Preferably, the thin film has a thickness range from 10 nm to 200 nm, and is composed of diamond-like carbon (DLC). An alternative air bearing slider includes a body portion with an ABS side and a flexure surface side. A thin film composed of a tensile force material is deposited upon said flexure side. The tensile force material creates an onmidirectional inward force on the flexure side which results in positive crown and camber. The manufacturing method for the improved sliders utilizes semiconductor processing techniques. The basic slider body is appropriately masked and etched to create the air bearing surfaces, air pressure surfaces and recessed area of the ABS side. Thereafter, the compressive material thin film is deposited within the recessed area. An improved manufacturing method utilizes the preexisting photomask of a prior art slider design, such that additional photomasking steps are not required to achieve the deposition of the compressive material thin film. Manufacturing of the tensile force material embodiment requires the step of depositing the film upon the flexure side.
摘要翻译：本发明的空气轴承滑块实施例包括具有空气轴承面（ABS）侧和弯曲面侧的主体部。 ABS侧具有至少一个空气支承表面和至少一个凹陷区域。在凹陷区域内沉积由压缩力材料构成的薄膜。压缩力材料在凹陷区域内产生全向向外的力，产生正冠和弧度。优选地，薄膜的厚度范围为10nm至200nm，并且由类金刚石碳（DLC）组成。替代的空气轴承滑块包括具有ABS侧和弯曲表面侧的主体部分。由抗张力材料构成的薄膜沉积在所述弯曲面上。张力材料在弯曲面上产生向内的向内力，导致正冠和弯度。改进的滑块的制造方法利用半导体处理技术。基本的滑块体被适当地屏蔽和蚀刻，以产生ABS侧的空气轴承表面，空气压力表面和凹陷区域。此后，压缩材料薄膜沉积在凹陷区域内。改进的制造方法利用现有技术的滑块设计的预先存在的光掩模，使得不需要额外的光掩模步骤来实现压缩材料薄膜的沉积。张力材料实施例的制造需要在弯曲侧上沉积薄膜的步骤。

2. 发明授权

US06427319B1 Method for protecting magnetic read/write transducers against electrostatic discharge during disk drive manufacturing 失效
标题翻译：在磁盘驱动器制造期间保护磁读/写转换器防止静电放电的方法
公开(公告)号：US06427319B1
公开(公告)日：2002-08-06
申请号：US09570620
申请日：2000-05-15
申请人： Jack Dana Cook , Grace Lim Gorman , Cherngye Hwang
发明人： Jack Dana Cook , Grace Lim Gorman , Cherngye Hwang
IPC分类号： G11B5127
CPC分类号： G11B5/3903 , G11B5/3133 , G11B5/3163 , G11B5/3967 , G11B5/40 , G11B5/4806 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49064
摘要： A method for protecting magnetic read/write head assembly against electrostatic discharge during disk drive manufacturing are disclosed. The magnetic head assembly is supported on a substrate having a magnetoresistive sensor element disposed in spaced relationship between several magnetic shield elements. Before a focused ion beam fabrication operation, at least a portion of an air bearing surface of the magnetic head assembly is coated with a thin and transparent layer of conductive material. This layer of conductive material is subsequent removed after the focused ion beam fabrication operation.
摘要翻译：公开了一种在磁盘驱动器制造期间保护磁读/写头组件防止静电放电的方法。磁头组件被支撑在具有以几个磁屏蔽元件之间隔开的关系设置的磁阻传感器元件的基板上。在聚焦离子束制造操作之前，磁头组件的空气轴承表面的至少一部分涂覆有薄且透明的导电材料层。在聚焦离子束制造操作之后，该导电材料层随后被去除。

3. 发明授权

US09349395B2 System and method for differential etching 有权
标题翻译：差分蚀刻的系统和方法
公开(公告)号：US09349395B2
公开(公告)日：2016-05-24
申请号：US13601739
申请日：2012-08-31
申请人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang , Andrew C. Ting
发明人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang , Andrew C. Ting
IPC分类号： G11B5/31 , H01J37/32
CPC分类号： H01J37/32825 , G11B5/3163 , H01J37/32816 , H01J37/3411 , H01J2237/334
摘要： A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.
摘要翻译：根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底，其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。

4. 发明申请

US20140061033A1 SYSTEM AND METHOD FOR DIFFERENTIAL ETCHING 有权
标题翻译：用于差异蚀刻的系统和方法
公开(公告)号：US20140061033A1
公开(公告)日：2014-03-06
申请号：US13601739
申请日：2012-08-31
申请人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang , Andrew C. Ting
发明人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang , Andrew C. Ting
IPC分类号： C23F1/00 , C23F1/08
CPC分类号： H01J37/32825 , G11B5/3163 , H01J37/32816 , H01J37/3411 , H01J2237/334
摘要： A method according to one embodiment includes placing a substrate in a chamber; and plasma sputtering the substrate in a presence of a non-zero pressure of a vapor, wherein the vapor at the non-zero pressure is effective to diminish an etch rate of a first material of the substrate. A plasma sputtering apparatus according to one embodiment includes a chamber; a reservoir in the chamber for releasing a vapor at an established rate; a mount for a substrate; and a plasma source.
摘要翻译：根据一个实施例的方法包括将衬底放置在腔室中; 以及在非零压力蒸汽的存在下等离子体溅射所述衬底，其中所述非零压力下的蒸气有效地降低所述衬底的第一材料的蚀刻速率。根据一个实施例的等离子体溅射装置包括室; 用于以确定的速率释放蒸气的室中的储存器; 用于衬底的安装件; 和等离子体源。

5. 发明授权

US08611049B2 Magnetic heads having magnetic films that are more recessed than insulating films, and systems having such heads 失效
标题翻译：具有比绝缘膜更凹陷的磁性膜的磁头以及具有这种磁头的系统
公开(公告)号：US08611049B2
公开(公告)日：2013-12-17
申请号：US12975208
申请日：2010-12-21
申请人： Robert Glenn Biskeborn , Cherngye Hwang , Calvin Shyhjong Lo , Andrew C. Ting
发明人： Robert Glenn Biskeborn , Cherngye Hwang , Calvin Shyhjong Lo , Andrew C. Ting
IPC分类号： G11B5/127
CPC分类号： G11B5/00826 , G11B5/3116 , G11B5/3163
摘要： A structure according to one embodiment includes a substrate having a media facing side; and a thin film stack formed on the substrate, the thin film stack including magnetic films and insulating films, wherein the thin film stack is recessed from a plane extending along the media facing side of the substrate, wherein the magnetic films are recessed more than the insulating films, wherein the magnetic films each have a substantially flat media facing surface, wherein the insulating films each have a substantially flat media facing surface.
摘要翻译：根据一个实施例的结构包括具有介质面向侧的基板; 以及形成在所述基板上的薄膜叠层，所述薄膜叠层包括磁性膜和绝缘膜，其中所述薄膜叠层从沿着所述基板的面向介质侧延伸的平面凹陷，其中所述磁性膜比所述绝缘膜，其中所述磁性膜各自具有基本上平坦的介质面向表面，其中所述绝缘膜各自具有基本平坦的介质面向表面。

6. 发明授权

US08220136B2 Forming a planarized surface for at least one bar of sliders 有权
标题翻译：形成用于至少一个滑块的平坦化表面
公开(公告)号：US08220136B2
公开(公告)日：2012-07-17
申请号：US11800127
申请日：2007-05-03
申请人： Cherngye Hwang , Jorge Goitia , Kenneth L. Larson , Dennis R. McKean
发明人： Cherngye Hwang , Jorge Goitia , Kenneth L. Larson , Dennis R. McKean
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/4853 , G11B5/102 , G11B5/3163 , G11B5/3173 , Y10T29/49027 , Y10T29/49039 , Y10T29/49041 , Y10T29/49055 , Y10T29/53165 , Y10T156/10
摘要： A method for forming a planarized surface for at least one bar of sliders for utilization in a hard disk drive is disclosed. In general, at least one bar of sliders is placed on an adhesive layer. A single thermoplastic layer is then provided above the at least one bar of sliders. The single thermoplastic layer is then heated to a softening temperature such that the single thermoplastic layer will flow between the at least one bar of sliders. The single thermoplastic layer is then cooled to form a planarized surface of both said single thermoplastic layer and said at least one bar of sliders at said adhesive layer.
摘要翻译：公开了一种用于形成至少一个用于硬盘驱动器的滑块的平面化表面的方法。通常，将至少一个滑杆放置在粘合剂层上。然后在至少一个滑杆上方设置单个热塑性层。然后将单个热塑性层加热到软化温度，使得单个热塑性层将在至少一个滑块之间流动。然后将单个热塑性层冷却以在所述粘合剂层处形成所述单一热塑性层和所述至少一个滑块条的平坦化表面。

7. 发明授权

US08191234B2 Method of manufacturing a magnetic head with reinforcing islands 失效
标题翻译：制造具有加强岛的磁头的方法
公开(公告)号：US08191234B2
公开(公告)日：2012-06-05
申请号：US12184357
申请日：2008-08-01
申请人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang
发明人： Robert G. Biskeborn , Calvin S. Lo , Cherngye Hwang
IPC分类号： G11B5/23 , B44C1/22
CPC分类号： G11B5/3106 , G11B5/3163 , G11B5/3169 , Y10T29/49039 , Y10T29/49041 , Y10T29/49048
摘要： A method for protecting a thin film structure including fabricating a plurality of island structures in a recording gap of a magnetic recording head, exposing a substantial portion of the plurality of island structures by removing at least a portion of the surrounding recording gap material via at least one etching process, including ion milling, coating the magnetic recording head containing the plurality of island structures with a coating material, including silicon nitride or aluminum oxide, and removing at least a portion of the coating material via a removal process, including chemical-mechanical polishing or lapping, to expose an uppermost region of at least a portion of said plurality of island structures.
摘要翻译：一种用于保护薄膜结构的方法，包括在磁记录头的记录间隙中制造多个岛状结构，通过至少除去周围的记录间隙材料的至少一部分而暴露多个岛结构的大部分一个蚀刻工艺，包括离子铣削，用包括氮化硅或氧化铝的涂层材料涂覆包含多个岛状结构的磁记录头，以及通过去除工艺去除至少一部分涂层材料，包括化学机械抛光或研磨，以暴露所述多个岛结构的至少一部分的最上部区域。

8. 发明申请

US20110256423A1 HEAD COMPRISING A CRYSTALLINE ALUMINA LAYER 有权
标题翻译：包括结晶铝氧化铝层的头
公开(公告)号：US20110256423A1
公开(公告)日：2011-10-20
申请号：US12761394
申请日：2010-04-16
申请人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo , Andrew C. Ting
发明人： Robert G. Biskeborn , Cherngye Hwang , Calvin S. Lo , Andrew C. Ting
IPC分类号： G11B5/33 , C23C14/00 , B05D5/00
CPC分类号： G11B5/255 , G11B5/127 , G11B5/3106 , G11B5/3133
摘要： A magnetic head produced at low ambient temperatures that comprise a crystalline alumina layer for increasing the durability of the head is provided. According to one embodiment, a magnetic head for at least one of reading and writing data on to a magnetic data storage media. The magnetic head comprises a substrate, an at least partially crystalline alumina layer formed on the substrate, at least one of a write transducer and a read transducer formed on the substrate, and a surface for engaging the magnetic data storage media. In another embodiment, a method for forming an at least partially crystalline alumina film. The method comprises providing a substrate, and depositing alumina onto the substrate at an ambient temperature to form the at least partially crystalline alumina film.
摘要翻译：提供了一种在低环境温度下产生的包含结晶氧化铝层以提高头部耐久性的磁头。根据一个实施例，一种用于读取和写入数据到磁数据存储介质中的至少一个的磁头。磁头包括衬底，形成在衬底上的至少部分结晶的氧化铝层，形成在衬底上的写换能器和读换能器中的至少一个以及用于接合磁数据存储介质的表面。在另一个实施方案中，形成至少部分结晶的氧化铝膜的方法。该方法包括在环境温度下提供衬底和将氧化铝沉积到衬底上以形成至少部分结晶的氧化铝膜。

9. 发明授权

US06969625B2 CMP assisted liftoff micropatterning 失效
标题翻译： CMP辅助提升微图案
公开(公告)号：US06969625B2
公开(公告)日：2005-11-29
申请号：US10949433
申请日：2004-09-24
申请人： Marie-Claire Cyrille , Frederick H. Dill , Cherngye Hwang , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick H. Dill , Cherngye Hwang , Jui-Lung Li
IPC分类号： G11B5/39 , G11B5/31 , H01L21/304 , H01L43/08 , H01L21/00 , H01L21/44
CPC分类号： G11B5/313
摘要： A method and structure for a microelectronic device comprises a first film over a substrate, a first polish resistant layer over the first film, a second film over the first polish resistant layer, a second polish resistant layer over the second film, wherein the first and second polish resistant layers comprise diamond-like carbon. The first film comprises an electrically resistive material, while the second film comprises low resistance conductive material. The first film is an electrical resistor embodied as a magnetic read sensor. The electrically resistive material is sensitive to magnetic fields. The device further comprises a generally vertical junction between the first and second films and a dielectric film abutted to the electrically resistive material.
摘要翻译：微电子器件的方法和结构包括：衬底上的第一膜，第一膜上的第一耐抛光层，第一耐抛光层上的第二膜，第二膜上的第二耐光层，其中第一和第二膜第二耐光层包括类金刚石碳。第一膜包括电阻材料，而第二膜包括低电阻导电材料。第一个胶片是一个实现为磁读取传感器的电阻器。电阻材料对磁场敏感。该装置还包括在第一和第二膜之间的大致垂直的接合点和邻接于电阻材料的电介质膜。

10. 发明申请

US20050041341A1 CMP assisted liftoff micropatterning 失效
公开(公告)号：US20050041341A1
公开(公告)日：2005-02-24
申请号：US10949433
申请日：2004-09-24
申请人： Marie-Claire Cyrille , Frederick Dill , Cherngye Hwang , Jui-Lung Li
发明人： Marie-Claire Cyrille , Frederick Dill , Cherngye Hwang , Jui-Lung Li
IPC分类号： G11B5/39 , G11B5/31 , H01L21/304 , H01L43/08 , G11B5/33 , G11B5/127 , H01L21/302 , H01L21/461
CPC分类号： G11B5/313
摘要： A method and structure for a microelectronic device comprises a first film over a substrate, a first polish resistant layer over the first film, a second film over the first polish resistant layer, a second polish resistant layer over the second film, wherein the first and second polish resistant layers comprise diamond-like carbon. The first film comprises an electrically resistive material, while the second film comprises low resistance conductive material. The first film is an electrical resistor embodied as a magnetic read sensor. The electrically resistive material is sensitive to magnetic fields. The device further comprises a generally vertical junction between the first and second films and a dielectric film abutted to the electrically resistive material.

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