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    • 2. 发明授权
    • Air bearing slider and manufacturing method therefor
    • 空气轴承滑块及其制造方法
    • US06385011B1
    • 2002-05-07
    • US09303011
    • 1999-04-30
    • Yu-En Percy ChangJack Dana CookCherngye HwangSanford J. Lewis
    • Yu-En Percy ChangJack Dana CookCherngye HwangSanford J. Lewis
    • G11B1732
    • G11B5/6005
    • An air bearing slider embodiment of the present invention includes a body portion having an air bearing surface (ABS) side and a flexure surface side. The ABS side has at least one air bearing surface and at least one recessed area. A thin film composed of a compressive force material is deposited within the recessed area. The compressive force material produces an omnidirectional outward force within the recessed area that creates a positive crown and camber. Preferably, the thin film has a thickness range from 10 nm to 200 nm, and is composed of diamond-like carbon (DLC). An alternative air bearing slider includes a body portion with an ABS side and a flexure surface side. A thin film composed of a tensile force material is deposited upon said flexure side. The tensile force material creates an onmidirectional inward force on the flexure side which results in positive crown and camber. The manufacturing method for the improved sliders utilizes semiconductor processing techniques. The basic slider body is appropriately masked and etched to create the air bearing surfaces, air pressure surfaces and recessed area of the ABS side. Thereafter, the compressive material thin film is deposited within the recessed area. An improved manufacturing method utilizes the preexisting photomask of a prior art slider design, such that additional photomasking steps are not required to achieve the deposition of the compressive material thin film. Manufacturing of the tensile force material embodiment requires the step of depositing the film upon the flexure side.
    • 本发明的空气轴承滑块实施例包括具有空气轴承面(ABS)侧和弯曲面侧的主体部。 ABS侧具有至少一个空气支承表面和至少一个凹陷区域。 在凹陷区域内沉积由压缩力材料构成的薄膜。 压缩力材料在凹陷区域内产生全向向外的力,产生正冠和弧度。 优选地,薄膜的厚度范围为10nm至200nm,并且由类金刚石碳(DLC)组成。 替代的空气轴承滑块包括具有ABS侧和弯曲表面侧的主体部分。 由抗张力材料构成的薄膜沉积在所述弯曲面上。 张力材料在弯曲面上产生向内的向内力,导致正冠和弯度。 改进的滑块的制造方法利用半导体处理技术。 基本的滑块体被适当地屏蔽和蚀刻,以产生ABS侧的空气轴承表面,空气压力表面和凹陷区域。 此后,压缩材料薄膜沉积在凹陷区域内。 改进的制造方法利用现有技术的滑块设计的预先存在的光掩模,使得不需要额外的光掩模步骤来实现压缩材料薄膜的沉积。 张力材料实施例的制造需要在弯曲侧上沉积薄膜的步骤。