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    • 2. 发明授权
    • Process for producing unsaturated group-terminated isobutylene polymer
    • 制备不饱和基团的异丁烯聚合物的方法
    • US5811501A
    • 1998-09-22
    • US671198
    • 1996-06-27
    • Takeshi ChibaHiroshi FujisawaYoshimichi YamanakaYoshikuni DeguchiKazuya Yonezawa
    • Takeshi ChibaHiroshi FujisawaYoshimichi YamanakaYoshikuni DeguchiKazuya Yonezawa
    • C08F2/06C08F10/10
    • C08F10/10Y10S525/918
    • The present invention provides a novel halogen-free solvent system which can produce a good isobutylene polymer and can be easily reused. A novel process for the production of an isobutylene polymer is provided which comprises using a hydrocarbon solvent having a boiling point of not lower than 105.degree. C. and a melting point of not higher than -90.degree. C. Heretofore, a solvent system containing a halogenated hydrocarbon such as methylene chloride has been used for the production of an isobutylene polymer. However, such a solvent system has a great adverse effect on the environment. Therefore, a non-halogenated solvent is desirable. The present invention is characterized by the use of a hydrocarbon solvent as a reaction solvent. The resulting polymer has good properties. Further, compounds which are produced as by-products during the reaction can be easily removed, enabling the recycling of the solvent used. Thus, the production cost can be reduced.
    • 本发明提供了一种新型的无卤素溶剂体系,其可以产生良好的异丁烯聚合物并且可以容易地重复使用。 提供了一种生产异丁烯聚合物的新方法,其包括使用沸点不低于105℃,熔点不高于-90℃的烃溶剂。迄今为止,含有 卤代烃如二氯甲烷已被用于生产异丁烯聚合物。 然而,这种溶剂体系对环境有很大的不利影响。 因此,非卤化溶剂是理想的。 本发明的特征在于使用烃溶剂作为反应溶剂。 所得聚合物具有良好的性能。 此外,可以容易地除去在反应期间作为副产物生成的化合物,使得所用溶剂的再循环。 因此,可以降低生产成本。
    • 3. 发明授权
    • Process for isolation of isobutylene polymer
    • 异丁烯聚合物分离方法
    • US5739267A
    • 1998-04-14
    • US704607
    • 1996-09-16
    • Hiroshi FujisawaYoshikuni DeguchiKouji NodaMasakazu IsurugiMasanobu TamuraJunichi HazamaTsutomu IkedaShun Wachi
    • Hiroshi FujisawaYoshikuni DeguchiKouji NodaMasakazu IsurugiMasanobu TamuraJunichi HazamaTsutomu IkedaShun Wachi
    • C08F6/02C08F8/26C08F6/08C08F10/10
    • C08F6/02C08F8/26
    • Processes for the isolation of a telechelic isobutylene polymer in a non-aqueous system to prevent the generation of waste water having a solvent dissolved therein and processes for the preparation of a telechelic isobutylene polymer having more advantageous unsaturated groups. A process for the isolation of an isobutylene polymer includes a cationic polymerization reaction in a non-aqueous system in the presence of a catalyst MX.sub.n wherein M represents a metallic atom and X may be the same or different and represents a halogen atom or a monovalent hydrocarbon group. The process comprises conducting the cationic polymerization reaction, conducting a ligand exchange reaction of said catalyst, and then removing a component containing M. Another process for the isolation includes a cationic polymerization in a non-aqueous system in the presence of the catalyst, the process comprises producing a telechelic isobutylene polymer and at the same time removing the catalyst with an adsorption material capable of adsorbing an acid. Another process for the isolation comprises conducting a cationic polymerization reaction in a non-aqueous system in the presence of the catalyst; adding a compound represented by the general formula Q(OR).sub.m where Q is a metallic atom and R is hydrogen or a monovalent organic group to effect the dehydrochlorination reaction at the ends of the polymer and the ligand exchange reaction of the catalyst so as to produce a telechelic isobutylene polymer having an unsaturated group; and removing a component containing M.
    • PCT No.PCT / JP95 / 00486 Sec。 371日期1996年9月16日 102(e)1996年9月16日PCT PCT 1995年3月17日PCT公布。 WO95 / 25754 PCT出版物 日期1995年9月28日在非水系统中分离遥爪异丁烯聚合物的方法,以防止溶解有溶剂的废水的产生和制备具有更有利的不饱和基团的远电离子异丁烯聚合物的方法。 用于分离异丁烯聚合物的方法包括在非水系统中在催化剂MXn存在下的阳离子聚合反应,其中M表示金属原子,X可以相同或不同,表示卤素原子或一价烃 组。 该方法包括进行阳离子聚合反应,进行所述催化剂的配体交换反应,然后除去含有M的组分。另一种分离方法包括在催化剂存在下在非水系统中的阳离子聚合,该方法 包括制造遥爪异丁烯聚合物,同时用能够吸附酸的吸附材料除去催化剂。 另一种分离方法包括在催化剂存在下,在非水系统中进行阳离子聚合反应; 加入由通式Q(OR)m表示的化合物,其中Q是金属原子,R是氢或一价有机基团,以在聚合物的末端进行脱氯化氢反应和催化剂的配体交换反应,从而 产生具有不饱和基团的遥爪异丁烯聚合物; 并除去含有M的成分。
    • 7. 发明授权
    • Electrostatic chuck
    • 静电吸盘
    • US08411408B2
    • 2013-04-02
    • US13062427
    • 2009-09-14
    • Yoshiaki TatsumiHiroshi Fujisawa
    • Yoshiaki TatsumiHiroshi Fujisawa
    • H01L21/687
    • H01L21/6833
    • Provided is an electrostatic chuck (8) of self power supply type, which is capable of supplying power while generating power to be used by an attraction electrode (3) during processing of a substrate. The electrostatic chuck (8) attracts and holds a substrate in a substrate processing apparatus (11) that processes the substrate while generating optical energy. The electrostatic chuck (8) includes: an electrode sheet (5) including an attraction electrode (3); a metal base (1) having the electrode sheet (5) laminated on an upper surface side thereof; an internal power supply for obtaining power to be supplied to the attraction electrode (3); and a voltage boost circuit (7) for boosting voltage of the power obtained by the internal power supply. The internal power supply includes a solar cell (6), and converts the optical energy into the power during the processing of the substrate, to thereby cause the electrode sheet (5) to attract and hold the substrate.
    • 提供一种自供电型静电卡盘(8),其能够在基板的加工过程中产生吸引电极(3)使用的电力的同时供电。 静电吸盘(8)吸引并保持基板处理装置(11),该基板处理装置(11)在产生光能的同时处理基板。 静电吸盘(8)包括:包括吸引电极(3)的电极片(5); 具有层叠在其上表面侧的电极片(5)的金属基体(1) 用于获得供给到所述吸引电极(3)的电力的内部电源; 以及用于升压由内部电源获得的电力的电压的升压电路(7)。 内部电源包括太阳能电池(6),并且在基板的处理期间将光能转换成电力,从而使电极片(5)吸引并保持基板。
    • 8. 发明授权
    • Bipolar electrostatic chuck
    • 双极静电吸盘
    • US08238072B2
    • 2012-08-07
    • US12691613
    • 2010-01-21
    • Hiroshi FujisawaKinya Miyashita
    • Hiroshi FujisawaKinya Miyashita
    • H01L21/683
    • H01L21/6833H02N13/00
    • A bipolar electrostatic chuck which has excellent dielectric breakdown strength and provides excellent attracting performance. The bipolar electrostatic chuck eliminates difficulty in dismounting a sample from a sample attracting plane as much as possible after application of a voltage to electrodes is finished. The bipolar electrostatic chuck is provided with a first electrode and a second electrode in an insulator and permits a surface of the insulator to be the sample attracting plane. The insulator has the first electrode, an interelectrode insulating layer and the second electrode in this order from the sample attracting plane in the depth direction. The second electrode has a region not overlapping with the first electrode in a normal line direction of the sample attracting plane.
    • 一种双极性静电卡盘,具有优良的介电击穿强度,并具有优良的吸引性能。 双极静电卡盘消除了在对电极施加电压完成之后尽可能多地从样品吸附面上拆下样品的困难。 双极静电卡盘在绝缘体中设置有第一电极和第二电极,并且允许绝缘体的表面成为样品吸引平面。 绝缘体在深度方向上从样品吸引面起依次具有第一电极,电极间绝缘层和第二电极。 第二电极在样品吸引面的法线方向上具有与第一电极不重叠的区域。
    • 9. 发明申请
    • BIPOLAR ELECTROSTATIC CHUCK
    • 双极静电卡
    • US20110102965A1
    • 2011-05-05
    • US12997826
    • 2009-06-30
    • Hiroshi FujisawaYoshiaki Tatsumi
    • Hiroshi FujisawaYoshiaki Tatsumi
    • H01L21/683
    • H02N13/00H01L21/6833
    • Provided is a bipolar electrostatic chuck, which has excellent substrate attracting/holding performance when a voltage is applied, and excellent residual charges reducing performance when voltage application is stopped. The bipolar electrostatic chuck includes at least an electrode layer including a first electrode and a second electrode, and an upper insulating layer which forms a substrate attracting surface for attracting a substrate. In a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction.
    • 提供一种双极性静电卡盘,其在施加电压时具有优异的基板吸附/保持性能,并且在施加电压时停止优异的残留电荷降低性能。 双极性静电卡盘至少包括具有第一电极和第二电极的电极层,以及形成用于吸引基板的基板吸附面的上部绝缘层。 在电极层的表面被认为在x方向和ay方向上被划分为具有预定宽度(L)的多个虚拟单元的情况下,形成第一电极的第一电极部分和形成第二电极部分的第二电极部分 电极在x方向上交替排列在多个虚拟单元中,并且在y方向上交替配置在多个虚拟单元中。