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1. 发明授权

US08428336B2 Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
标题翻译：检查方法，检查系统和电子设备制造方法
公开(公告)号：US08428336B2
公开(公告)日：2013-04-23
申请号：US11431709
申请日：2006-05-11
申请人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
发明人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
IPC分类号： G06K9/00
CPC分类号： G06F3/0486 , G06F2203/04803 , G06T7/0004 , G06T2200/24 , G06T2207/30148
摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.
摘要翻译：一种用于对缺陷进行分类的方法，包括：通过对样品上的缺陷进行成像而获得的缺陷图像的特征量化计算; 通过使用关于计算的特征量的信息将缺陷图像分类成分类的类别; 在分类的类别的显示屏幕上的区域中显示分类的缺陷图像; 将分类类别的信息添加到所显示的缺陷图像; 将所述分类类别中的信息添加到所述其他类别中的所显示的缺陷图像，并且将所传送的缺陷图像显示在所述显示屏幕上定义为所述其他类别之一的区域中; 并更改关于该类别的信息。

2. 发明授权

US07068834B1 Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
标题翻译：检查方法，检查系统和电子设备制造方法
公开(公告)号：US07068834B1
公开(公告)日：2006-06-27
申请号：US09452149
申请日：1999-12-01
申请人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
发明人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
IPC分类号： G06K9/00
CPC分类号： G06F3/0486 , G06F2203/04803 , G06T7/0004 , G06T2200/24 , G06T2207/30148
摘要： The present invention has an analyzing unit including an image detection device for producing a plurality of images of a workpiece, a storage for storing detected images produced by the image detection device, and a display having a screen with a first area for displaying a plurality of detected images stored in the storage and a plurality of second areas for classifying the detected images according to features of the detected images, whereby the plurality of detected images are moved on the screen from the first area to selected second areas to classify the plurality of detected images in the second areas.
摘要翻译：本发明具有一种分析单元，包括用于产生工件的多个图像的图像检测装置，用于存储由图像检测装置产生的检测图像的存储器以及具有用于显示多个图像的第一区域的屏幕的显示器检测存储在存储器中的图像和多个第二区域，用于根据检测到的图像的特征对检测到的图像进行分类，由此多个检测图像在屏幕上从第一区域移动到选定的第二区域，以对多个检测到的图像进行分类图像在第二个区域。

3. 发明申请

US20060274932A1 Inspecting method, inspecting system, and method for manufacturing electronic devices 有权
公开(公告)号：US20060274932A1
公开(公告)日：2006-12-07
申请号：US11431709
申请日：2006-05-11
申请人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
发明人： Yoko Ikeda , Junko Konishi , Hisafumi Iwata , Yuji Takagi , Kenji Obara , Ryo Nakagaki , Seiji Isogai , Yasuhiko Ozawa
IPC分类号： G06K9/00 , G06K9/62 , G06K9/46
CPC分类号： G06F3/0486 , G06F2203/04803 , G06T7/0004 , G06T2200/24 , G06T2207/30148
摘要： A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

4. 发明授权

US06611728B1 Inspection system and method for manufacturing electronic devices using the inspection system 有权
标题翻译：使用检查系统制造电子设备的检查系统和方法
公开(公告)号：US06611728B1
公开(公告)日：2003-08-26
申请号：US09389230
申请日：1999-09-03
申请人： Natsuyo Morioka , Hisafumi Iwata , Junko Konishi , Yoko Ikeda , Kazunori Nemoto , Makoto Ono , Yasuhiro Yoshitake
发明人： Natsuyo Morioka , Hisafumi Iwata , Junko Konishi , Yoko Ikeda , Kazunori Nemoto , Makoto Ono , Yasuhiro Yoshitake
IPC分类号： G06F1900
CPC分类号： G01N21/9501 , H01L22/12 , H01L22/20
摘要： An inspection system comprises an inspection machine for inspecting a work which is processed in one of the manufacturing processes of a manufacturing line and an analysis system for outputting an inspection history list obtained by making calculations from the inspected result. The inspection history list shows a matrix of first information as the inspection processes in which the work is inspected or the manufacturing processes corresponding to the inspection processes in which the work is inspected and second information as to the works inspected by the inspection machine.
摘要翻译：检查系统包括检查机器，用于检查在生产线的一个制造过程中处理的工件和用于输出通过从检查结果进行计算而获得的检查履历表的分析系统。检查历史列表显示作为检查工作的检查过程的第一信息矩阵或与检查工作相关的检查过程对应的制造过程以及由检查机检查的工件的第二信息。

5. 发明授权

US08779360B2 Charged particle beam device, defect observation device, and management server 有权
标题翻译：带电粒子束装置，缺陷观察装置和管理服务器
公开(公告)号：US08779360B2
公开(公告)日：2014-07-15
申请号：US13809923
申请日：2011-06-22
申请人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
发明人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , G01N23/00 , H01J37/28 , H01J2237/24592 , H01J2237/2817
摘要： Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an operation abnormality affecting the performance of the device or a possibility of such an abnormality in the middle of a processing sequence of a sample and giving a feedback in real time. In each processing step of the charged particle beam device, monitoring items representing the operating status of the device (control status of the electron beam, an offset amount at the time of wafer positioning, a defect coordinate error offset amount, etc.) are monitored during the processing sequence of a sample and stored as history information. In the middle of the processing sequence, a comparative judgment between the value of each monitoring item and the past history information corresponding to the monitoring item is made according to preset judgment criteria. When the width of fluctuation from the past history information deviates from a reference range, an alert is issued.
摘要翻译：提供了一种带电粒子束装置，其通过检测影响装置的性能的操作异常或在中间的这种异常的可能性来防止由于检查性能的劣化（例如，忽视缺陷）引起的加工故障的增加样品的处理顺序并实时提供反馈。在带电粒子束装置的每个处理步骤中，监视表示装置的运行状态（电子束的控制状态，晶片定位时的偏移量，缺陷坐标误差偏移量等）的监视项目在样品的处理顺序期间并存储为历史信息。在处理顺序的中间，根据预先设定的判断基准，进行各监视项目的值与对应于监视项目的过去历史信息的比较判断。当过去历史信息的波动宽度偏离参考范围时，发出警报。

6. 发明申请

US20130112893A1 CHARGED PARTICLE BEAM DEVICE, DEFECT OBSERVATION DEVICE, AND MANAGEMENT SERVER 有权
标题翻译：充电颗粒光束装置，缺陷观察装置和管理服务器
公开(公告)号：US20130112893A1
公开(公告)日：2013-05-09
申请号：US13809923
申请日：2011-06-22
申请人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
发明人： Kozo Miyake , Junko Konishi , Takehiro Hirai , Kenji Obara
IPC分类号： G01N23/00
CPC分类号： H01J37/153 , G01N23/00 , H01J37/28 , H01J2237/24592 , H01J2237/2817
摘要： Provided is a charged particle beam device that prevents the increase in processing trouble caused by deterioration in the reviewing performance (e.g., overlooking of defects) by detecting an operation abnormality affecting the performance of the device or a possibility of such an abnormality in the middle of a processing sequence of a sample and giving a feedback in real time. In each processing step of the charged particle beam device, monitoring items representing the operating status of the device (control status of the electron beam, an offset amount at the time of wafer positioning, a defect coordinate error offset amount, etc.) are monitored during the processing sequence of a sample and stored as history information. In the middle of the processing sequence, a comparative judgment between the value of each monitoring item and the past history information corresponding to the monitoring item is made according to preset judgment criteria. When the width of fluctuation from the past history information deviates from a reference range, an alert is issued.
摘要翻译：提供了一种带电粒子束装置，其通过检测影响装置的性能的操作异常或在中间的这种异常的可能性来防止由于检查性能的劣化（例如，忽视缺陷）引起的加工故障的增加样品的处理顺序并实时提供反馈。在带电粒子束装置的每个处理步骤中，监视表示装置的运行状态（电子束的控制状态，晶片定位时的偏移量，缺陷坐标误差偏移量等）的监视项目在样品的处理顺序期间并存储为历史信息。在处理顺序的中间，根据预先设定的判断基准，进行各监视项目的值与对应于监视项目的过去历史信息的比较判断。当过去历史信息的波动宽度偏离参考范围时，发出警报。

7. 发明授权

US09020237B2 Method for optimizing observed image classification criterion and image classification apparatus 有权
标题翻译：优化观察图像分类标准和图像分类装置的方法
公开(公告)号：US09020237B2
公开(公告)日：2015-04-28
申请号：US13702674
申请日：2011-05-13
申请人： Takehiro Hirai , Kozo Miyake , Junko Konishi
发明人： Takehiro Hirai , Kozo Miyake , Junko Konishi
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/30148
摘要： A first object is to use both ADC (automatic defect classification) and MDC (manual defect classification) and reduce the amount of MDC operation. A second object is to prevent a DOI (defect of interest) from being missed.The first object is achieved by displaying judgment information on a screen. The judgment information is necessary when part of the classification is performed by ADC and part of the classification is performed by MDC and used to judge which classification is used, ADC or MDC. In the display operation, ADC classification results and MDC classification results are also displayed in the form of matrix. Further, a missed DOI rate is calculated for each classification threshold used in the defect classification and displayed on the screen.
摘要翻译：第一个目的是使用ADC（自动缺陷分类）和MDC（手动缺陷分类），并减少MDC操作的数量。第二个目的是防止DOI（感兴趣的缺陷）被遗漏。通过在屏幕上显示判断信息来实现第一个目的。当部分分类由ADC执行时，判断信息是必需的，部分分类由MDC执行，用于判断使用哪种分类，ADC或MDC。在显示操作中，ADC分类结果和MDC分类结果也以矩阵的形式显示。此外，针对在缺陷分类中使用并显示在屏幕上的每个分类阈值计算错失的DOI率。

8. 发明授权

US08625906B2 Image classification standard update method, program, and image classification device 有权
标题翻译：图像分类标准更新方法，程序和图像分类装置
公开(公告)号：US08625906B2
公开(公告)日：2014-01-07
申请号：US13142812
申请日：2009-12-28
申请人： Yuya Isomae , Fumiaki Endo , Tomohiro Funakoshi , Junko Konishi , Tsunehiro Sakai
发明人： Yuya Isomae , Fumiaki Endo , Tomohiro Funakoshi , Junko Konishi , Tsunehiro Sakai
IPC分类号： G06K9/62 , G06K9/54
CPC分类号： G06K9/6263 , G01N21/94 , G01N21/95607 , G01N2021/8854 , G06K9/033 , G06K9/6254 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The objective is to improve a classification standard. Classification standard data, in which is registered image data information that is the standard when image data is classified, and classification data, in which is registered image data information that is the result when newly input image data is classified using the classification standard data, are stored in a storage unit. An image classification device is characterized in that when any image data information of the image data that is registered in the classification data is selected by means of an input unit, and an instruction to additionally register the selected image data information in the classification standard data is input by means of the input unit, the selected image data information is additionally registered in the classification standard data.
摘要翻译：目标是提高分类标准。分类标准数据，其中作为分类图像数据时的标准的登记图像数据信息，以及分类数据，其中作为新输入图像数据使用分类标准数据分类的结果的登记图像数据信息是分类数据，存储在存储单元中。图像分类装置的特征在于，当通过输入单元选择登记在分类数据中的图像数据的任何图像数据信息，并且在分类标准数据中附加地注册所选择的图像数据信息的指令是通过输入单元输入，所选择的图像数据信息被附加地登记在分类标准数据中。

9. 发明授权

US08209135B2 Wafer inspection data handling and defect review tool 有权
标题翻译：晶圆检查数据处理和缺陷检查工具
公开(公告)号：US08209135B2
公开(公告)日：2012-06-26
申请号：US13040794
申请日：2011-03-04
申请人： Tomohiro Funakoshi , Junko Konishi , Yuko Kariya , Noritsugu Takahashi , Fumiaki Endo
发明人： Tomohiro Funakoshi , Junko Konishi , Yuko Kariya , Noritsugu Takahashi , Fumiaki Endo
IPC分类号： H04N7/18
CPC分类号： G03F7/7065 , G01N21/8851 , G01N21/9501 , G01N2021/8861 , G03F1/84
摘要： A defect detected by a wafer inspection tool is reliably captured by a defect review tool. A defect review condition in the defect review tool is varied depending on defect attributes provided by the wafer inspection tool so as to optimize the review process. For example, review magnification is varied depending on the size of the defect, or the frame addition number is varied depending on the maximum gray level difference.
摘要翻译：由晶片检查工具检测到的缺陷由缺陷检查工具可靠地捕获。缺陷检查工具中的缺陷检查条件根据晶片检查工具提供的缺陷属性而变化，以优化审查过程。例如，根据缺陷的尺寸来改变复查倍率，或者根据最大灰度差来改变帧相加数。

10. 发明申请

US20120117010A1 DEVICE FOR CLASSIFYING DEFECTS AND METHOD FOR ADJUSTING CLASSIFICATION 有权
标题翻译：用于分类缺陷的装置和调整分类的方法
公开(公告)号：US20120117010A1
公开(公告)日：2012-05-10
申请号：US13376390
申请日：2010-07-08
申请人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
发明人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
IPC分类号： G06F15/18
CPC分类号： G06T7/001 , G06T2207/10056 , G06T2207/20076 , G06T2207/30148
摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
摘要翻译：公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据分类为第一类组的缺陷的特征量。并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。

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