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    • 1. 发明授权
    • Pulse welding apparatus
    • 脉冲焊接设备
    • US5726419A
    • 1998-03-10
    • US571187
    • 1995-12-12
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatoOsamu Nagano
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatoOsamu Nagano
    • B23K9/09G05F1/08
    • B23K9/092B23K9/093G05F1/08
    • In pulse welding apparatus of arc welding or short-circuit transfer type arc welding in which a pulse discharge created on the tip of a wire electrode is utilized to perform welding, when a molten droplet produced on the tip of wire electrode is late to separate from the wire due to variations of welding conditions and external disturbances, the wire-supplying speed at which the wire is supplied to the weld zone changes causing undercut. To prevent this, pulse current supplied to the base metal is divided into a plurality of pulse groups and the average current reaches the maximum peak value at a predetermined time after beginning of outputting the pulses, and the group of pulse currents is of a hill-shape in its envelope in accordance with the separation phenomenon of molten droplet, and the group of pulse currents is arranged to have different pulse period, pulse width, and pulse interval. In sort-circuiting arc welding, the short-circuit and arc are instantly controlled in accordance with the detected arc length or wire-supplying speed. This ensures the separation of the molten droplet and its transfer onto the base metal in regular manner. As a result, the growth and separation of molten droplet is not affected by magnetic blow of arc but is controllable.
    • 在电弧焊接或短路转移型电弧焊接的脉冲焊接装置中,其中利用线电极的尖端产生的脉冲放电来进行焊接,当在线电极的尖端上产生的熔融液滴迟到时, 由于焊接条件和外部干扰的变化引起的电线,将焊丝供给到焊接区域的焊丝供给速度变化,导致底切。 为了防止这种情况,提供给贱金属的脉冲电流被分成多个脉冲组,并且在开始输出脉冲之后的预定时间内平均电流达到最大峰值,并且脉冲电流组是小时 - 根据熔滴的分离现象形成其包络线,并且脉冲电流组被布置为具有不同的脉冲周期,脉冲宽度和脉冲间隔。 在分选电弧焊接中,根据检测到的电弧长度或电线供电速度立即控制短路和电弧。 这样可以确保熔融液滴的分离及其以规则的方式转移到贱金属上。 结果,熔滴的生长和分离不受电弧的磁力冲击的影响,但是是可控的。
    • 2. 发明授权
    • Pulse welding apparatus
    • 脉冲焊接设备
    • US5495091A
    • 1996-02-27
    • US279069
    • 1994-07-22
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatoOsamu Nagano
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatoOsamu Nagano
    • B23K9/09G05F1/08
    • B23K9/092B23K9/093G05F1/08
    • In pulse welding apparatus of arc welding or short-circuit transfer type arc welding in which a pulse discharge created on the tip of a wire electrode is utilized to perform welding, when a molten droplet produced on the tip of wire electrode is late to separate from the wire due to variations of welding conditions and external disturbances. The wire-supplying speed at which the wire is supplied to the weld zone changes. This causes undercut, i.e., a defect in welding bead-shape that presents adverse effect to welding quality. To prevent this problem, pulse current supplied to the base metal is divided into a plurality of pulse groups and the average current reaches the maximum peak value at a predetermined time after beginning of outputting the pulses, and the group of pulse currents is of a hill-shape in its envelope in accordance with the separation phenomenon of molten droplet, and the group of pulse currents is arranged to have different pulse period, pulse width, and pulse interval. In the sort-circuiting arc welding, the short-circuit and arc are instantly controlled in accordance with the detected arc length or wire-supplying speed.
    • 在电弧焊接或短路转移型电弧焊接的脉冲焊接装置中,其中利用线电极的尖端产生的脉冲放电进行焊接,当在线电极的尖端上产生的熔融液滴迟到时, 由于焊接条件和外部干扰的变化引起的电线。 将焊丝供给到焊接区域的焊丝供给速度发生变化。 这导致底切,即焊接珠形状的缺陷,其对焊接质量产生不利影响。 为了防止这种问题,提供给母材的脉冲电流被分成多个脉冲组,并且在开始输出脉冲之后的预定时间内平均电流达到最大峰值,并且脉冲电流组是小山 根据熔滴的分离现象在其信封中设置,并且脉冲电流组被布置为具有不同的脉冲周期,脉冲宽度和脉冲间隔。 在分选电弧焊接中,短路和电弧根据检测到的电弧长度或电线供电速度立即进行控制。
    • 3. 发明授权
    • Pulse welding apparatus
    • 脉冲焊接设备
    • US5317116A
    • 1994-05-31
    • US668519
    • 1991-03-27
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • B23K9/073B23K9/09B23K9/095B23K9/10G05F1/08
    • B23K9/1062B23K9/0734B23K9/092B23K9/0953G05F1/08
    • A pulse welding apparatus using a pulse discharge such as a pulse arc welding apparatus and a short-circuit transfer arc welding apparatus. A pulse current waveform control circuit, which controls the pulse arc current so that a desired pulse arc current is supplied to the arc welding power supply for outputting the pulse arc current to the welding load unit, is constructed such that the optimum welding operation may be performed without having to adjust circuit components and modify circuit design. The pulse current waveform control circuit is in the form of a microcomputerized digital circuit which operates under a program to provide a desired pulse arc current. A modification of the program can provide any desired pulse arc currents without changing circuits. The optimum welding current waveform parameters or a target arc length signal is learned in the first welding stage and stored into a memory. An arc length feedback control or a current waveform control is performed under the control of program on the basis of the optimum welding current waveform parameters or the target arc length signal so as to control the faulty separation of globules when magnetic blow occurs and so as to reduce the variation of arc length due to external disturbances occurring at the welding torch so that improved welding quality is ensured under various environments.
    • PCT No.PCT / JP90 / 00246 Sec。 371日期1991年3月27日 102(e)1991年3月27日PCT提交1990年2月27日PCT公布。 公开号WO91 / 01842 日期:1991年2月21日。一种使用脉冲放电的脉冲焊接装置,例如脉冲电弧焊接装置和短路转移电弧焊接装置。 控制脉冲电弧电流的脉冲电流波形控制电路被构造为使得最佳焊接操作可以是最佳焊接操作,该脉冲电流波形控制电路控制脉冲电弧电流,使得向焊接电源提供期望的脉冲电弧电流以向焊接负载单元输出脉冲电弧电流 执行而不必调整电路组件并修改电路设计。 脉冲电流波形控制电路是在程序下操作以提供期望的脉冲电弧电流的微计算机数字电路的形式。 该程序的修改可以提供任何期望的脉冲电弧电流而不改变电路。 在第一焊接阶段学习最佳焊接电流波形参数或目标电弧长度信号,并存储到存储器中。 基于最佳焊接电流波形参数或目标电弧长度信号,在程序控制下执行电弧长度反馈控制或电流波形控制,以便在发生磁场发生时控制球的故障分离,从而 减少由焊枪发生的外部干扰引起的电弧长度的变化,从而确保在各种环境下提高焊接质量。
    • 4. 发明授权
    • Pulsed arc welding equipment
    • 脉冲电弧焊设备
    • US5406052A
    • 1995-04-11
    • US602232
    • 1990-10-26
    • Masanori MizunoYoshiaki KatouOsamu NaganoYoichiro TabataShigeo UeguriYoshihiro Ueda
    • Masanori MizunoYoshiaki KatouOsamu NaganoYoichiro TabataShigeo UeguriYoshihiro Ueda
    • B23K9/09
    • B23K9/092
    • The welding equipment according to the present invention divides the pulsed electric current fed to a base metal in the course of a welding process into a plural number of pulse groups, performing instantaneous control over the base electric current period and the base electric current value applied to each of the pulse intervals of the individual pulses within such a group of pulsed electric currents and to each of the groups of pulsed electric currents, the pulse peak value and pulse width of each pulse, and such instantaneous control over a short circuit period and an arc period in the course of performance of the short circuiting transfer arc welding process, in accordance with the detected arc length, in such a manner that an ideal target arc length is thereby achieved. The welding equipment is capable of achieving the separation and transfer of molten globules to the base metal with regularity and also reducing the fluctuations in the short circuit period and the arc period in the short circuiting transfer arc welding process, offering the advantage that the equipment can control the growth and separation of molten globules without being affected by the phenomenon of magnetic arc blow of the arc and can achieve improvements on the quality of weldments even if fluctuations should occur in the shape of welded joints and in the position of the earthing point in operation with the actual arc.
    • PCT No.PCT / JP90 / 00244 Sec。 371 1990年10月26日第 102(e)1990年10月26日PCT PCT 1990年2月27日PCT公布。 出版物WO90 / 09856 1990年9月7日。根据本发明的焊接设备将在焊接过程中馈送到母材的脉冲电流分成多个脉冲组,对基本电流周期进行瞬时控制, 施加到这样一组脉冲电流内的各个脉冲的每个脉冲间隔的基极电流值以及脉冲电流组中的每一组脉冲峰值和每个脉冲的脉冲宽度,以及这种瞬时控制 在短路转移电弧焊接工序的过程中,根据检测出的电弧长度,由此实现理想的目标电弧长度。 焊接设备能够有规律地实现熔池与基体金属的分离和转移,并且还可以减少短路转移电弧焊接过程中短路周期和电弧周期的波动,提供设备可以 控制熔融球的生长和分离,而不受电弧磁弧冲击现象的影响,即使在焊接接头的形状和接地点的位置发生波动也可以提高焊接质量 操作与实际弧。
    • 5. 发明授权
    • Pulse welding apparatus
    • 脉冲焊接设备
    • US5416299A
    • 1995-05-16
    • US194743
    • 1994-02-09
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • B23K9/073B23K9/09B23K9/095B23K9/10G05F1/08
    • B23K9/1062B23K9/0734B23K9/092B23K9/0953G05F1/08
    • A pulse welding apparatus using a pulse discharge such as a pulse arc welding apparatus and a short-circuit transfer arc welding apparatus. A pulse current waveform control circuit, which controls the pulse arc current so that a desired pulse arc current is supplied to the arc welding power supply for outputting the pulse arc current to the welding load unit, is constructed such that the optimum welding operation may be performed without having to adjust circuit components and modify circuit design. The pulse current waveform control circuit is in the form of a microcomputerized digital circuit which operates under a program to provide a desired pulse arc current. A modification of the program can provide any desired pulse arc currents without changing circuits. The optimum welding current waveform parameters or a target arc length signal is learned in the first welding stage and stored into a memory. An arc length feedback control or a current waveform control is performed under the control of program on the basis of the optimum welding current waveform parameters or the target arc length signal so as to control the faulty separation of globules when magnetic blow occurs and so as to reduce the variation of arc length due to external disturbances occurring at the welding torch so that improved welding quality is ensured under various environment.
    • 使用脉冲放电的脉冲焊接装置,例如脉冲电弧焊接装置和短路转移电弧焊接装置。 控制脉冲电弧电流的脉冲电流波形控制电路被构造为使得最佳焊接操作可以是最佳焊接操作,该脉冲电流波形控制电路控制脉冲电弧电流,使得向焊接电源提供期望的脉冲电弧电流以向焊接负载单元输出脉冲电弧电流 执行而不必调整电路组件并修改电路设计。 脉冲电流波形控制电路是在程序下操作以提供期望的脉冲电弧电流的微计算机数字电路的形式。 该程序的修改可以提供任何期望的脉冲电弧电流而不改变电路。 在第一焊接阶段学习最佳焊接电流波形参数或目标电弧长度信号,并存储到存储器中。 基于最佳焊接电流波形参数或目标电弧长度信号,在程序控制下执行电弧长度反馈控制或电流波形控制,以便在发生磁场发生时控制球的故障分离,从而 减少由焊枪发生的外部干扰引起的电弧长度的变化,从而确保在各种环境下提高焊接质量。
    • 6. 发明授权
    • Pulsed arc welding apparatus
    • 脉冲电弧焊机
    • US5281791A
    • 1994-01-25
    • US601723
    • 1990-12-27
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • Yoichiro TabataShigeo UeguriYoshihiro UedaMasanori MizunoYoshiaki KatouOsamu Nagano
    • B23K9/073B23K9/09
    • B23K9/0732B23K9/0735B23K9/092
    • A pulsed arc welding for carrying out arc welding or short-circuit transfer type arc welding by utilizing the pulsed discharge generated at the tip of a wire electrode. The propensity of wire electrode curvature causes irregular changes in the contact point of the wire electrode and variations in the arc length between the wire electrode tip and workpieces. Consequently, the invention detects arc voltage and current and checks the instantaneous variation in the arc length. The arc voltage value thus detected is converted to a reference arc voltage variable. Then the detected arc voltage value is compared with the reference value to compute a true arc length. A simulation arc length signal, which varies as welding proceeds, and a reference simulation welding current waveform are set, to compare the simulation arc length signal with the computed arc length signal. The reference simulation welding current waveform is corrected according to this difference signal to form and output a welding current waveform, which is controllable instantaneously to provide an ideal target arc length. Welding can be carried out with stability since the wire electrode is allowed to hold the simulation arc length during each welding process.
    • PCT No.PCT / JP90 / 00245 Sec。 371日期1990年12月27日第 102(e)1990年12月27日PCT PCT 1990年2月27日提交PCT公布。 公开号WO90 / 09857 1990年9月7日。一种脉冲弧焊,用于通过利用在线电极尖端产生的脉冲放电进行电弧焊或短路转移型电弧焊。 线电极弯曲的倾向导致线电极的接触点的不规则变化和线电极末端和工件之间的电弧长度的变化。 因此,本发明检测电弧电压和电流并检查电弧长度的瞬时变化。 这样检测的电弧电压值被转换为参考电弧电压变量。 然后将检测到的电弧电压值与参考值进行比较,以计算真正的电弧长度。 设定随着焊接进行而变化的模拟弧长信号和参考模拟焊接电流波形,将模拟电弧长度信号与计算出的电弧长度信号进行比较。 根据该差分信号对参考模拟焊接电流波形进行校正,形成并输出可瞬时控制的焊接电流波形,提供理想的目标电弧长度。 可以稳定地进行焊接,因为允许线电极在每个焊接过程期间保持模拟电弧长度。
    • 7. 发明授权
    • Apparatus for and method of controlling the output of a laser source
    • 用于控制激光源输出的装置和方法
    • US5408482A
    • 1995-04-18
    • US8622
    • 1993-01-25
    • Osamu NaganoMasanori MizunoTsukasa Fukushima
    • Osamu NaganoMasanori MizunoTsukasa Fukushima
    • B23K26/42H01S3/00H01S3/10H01S3/104H01S3/105H01S3/131H01S3/133
    • H01S3/1312B23K26/702H01S3/10
    • An apparatus for and a method of controlling a laser oscillator for use as a laser source in a machining operation or the like is disclosed. In particular, the present invention compensates for a deviation of an actual input/output characteristic of a laser oscillator from a normal (expected) input/output characteristic due to, for example, aging and the like. The present invention approximates the actual input/output characteristic and stores the characteristic as a pattern in a storage device. In response to a detection of the actual laser output and an external intensity command signal, the present invention refers to the input/output characteristic pattern thus approximated and generates an input intensity command signal for controlling the laser oscillator to accurately produce the desired laser beam intensity irrespective of the deviation between the actual input/output characteristic and the normal characteristic.
    • 公开了一种在加工操作等中控制用作激光源的激光振荡器的装置和方法。 特别地,本发明由于例如老化等而补偿激光振荡器的实际输入/输出特性与正常(预期)输入/输出特性的偏差。 本发明近似于实际的输入/输出特性,并将特征作为图案存储在存储装置中。 响应于实际激光输出的检测和外部强度指令信号,本发明参考如此近似的输入/输出特性图案,并且产生用于控制激光振荡器以精确地产生所需激光束强度的输入强度指令信号 而与实际输入/输出特性与正常特性之间的偏差无关。
    • 10. 发明申请
    • Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device
    • 带电粒子束光刻系统,图案绘制方法和制造半导体器件的方法
    • US20050109955A1
    • 2005-05-26
    • US10959508
    • 2004-10-07
    • Osamu NaganoAtsushi Ando
    • Osamu NaganoAtsushi Ando
    • G03F7/20A61N5/00H01J37/147H01J37/305H01J37/317H01L21/027
    • B82Y10/00B82Y40/00H01J37/3174
    • A charged particle beam lithography system includes: a charged particle beam source which generates a charged particle beam and irradiates a substrate therewith; an aperture in which has been formed a pattern of a shape corresponding to an arbitrary pattern to be drawn; an illuminator which adjusts the diameter of the charged particle beam and illuminates the aperture with the charged particle beam; a first deflector which deflects the charged particle beam by an electrical field to cause the charged particle beam to be incident on an arbitrary pattern, allowing the charged particle beam to pass through the aperture and be reflected back along the optical axis; a first demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has passed through the aperture with the use of an electrical field or electromagnetic field; a second demagnification optical projection system which demagnifies the aperture image of the charged particle beam which has been demagnified by the first demagnification projection optical system, with the use of an electrical field or electromagnetic field to form an image on the substrate; and a beam diameter adjuster which adjusts the illuminator in such a manner that the beam diameter at crossovers of the charged particle beam, formed between the aperture and the first demagnification optical projection system and within the second demagnification optical projection system, is greater than the size of the pattern.
    • 带电粒子束光刻系统包括:带电粒子束源,其产生带电粒子束并照射衬底; 已经形成了与要拉制的任意图案相对应的形状的图案的孔; 照明器,其调节带电粒子束的直径并用带电粒子束照射孔径; 第一偏转器,其通过电场使带电粒子束偏转,以使带电粒子束入射到任意图案上,允许带电粒子束通过孔径并沿光轴反射回; 第一缩小光学投影系统,其通过使用电场或电磁场来对通过所述孔径的带电粒子束的孔径图像进行缩小; 第二缩小光学投影系统,其通过使用电场或电磁场在所述基板上形成图像来对由所述第一缩尺投影光学系统进行了缩小的带电粒子束的孔径图像进行缩小; 以及光束直径调节器,其以这样的方式调节照明器,使得形成在孔和第一缩小光学投影系统之间并且在第二缩小光学投影系统内的带电粒子束的交叉处的光束直径大于尺寸 的模式。