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    • 1. 发明申请
    • CLEANING EQUIPMENT AND CLEANING METHOD OF DEPOSITION MASK
    • 清洗设备和清洁方法沉积掩模
    • US20100101601A1
    • 2010-04-29
    • US12551821
    • 2009-09-01
    • Yoichi TAKAHARAFumio KataokaKenji YumibaKenji KatagiriRyo Izaki
    • Yoichi TAKAHARAFumio KataokaKenji YumibaKenji KatagiriRyo Izaki
    • B08B3/00B08B7/04
    • H01L21/67028
    • Equipment is realized which is capable of increasing the frequency of use of a deposition mask of an organic EL element and the recycle of an adhesive agent by efficiently cleaning the deposition mask with little damage and efficiently collecting the adhesive agent. A pulse laser is irradiated to a deposition mask to separate the deposition agent from the deposition mask. The separated deposition agent is sucked by a suction nozzle, and the deposition agent is separated from air by a cyclone and deposited on a bottom of the cyclone. Thereafter, a first valve is opened to collect the deposition agent in a deposition agent collection section. Then a second valve is opened to move the deposition agent to a deposition agent refining section to be refined. A third valve is opened to store the refined deposition agent in a deposition agent storage section. The deposition mask may be cleaned without being damaged to collect the deposition agent with high efficiency.
    • 实现了能够通过有效地清洁沉积掩模并且有效地收集粘合剂来增加有机EL元件的沉积掩模的使用频率和粘合剂的再循环的设备。 将脉冲激光照射到沉积掩模以将沉积剂与沉积掩模分离。 分离的沉积剂通过吸嘴吸入,并且沉积剂通过旋风分离器与空气分离并沉积在旋风分离器的底部。 此后,打开第一阀门以将沉积剂收集在沉积剂收集部分中。 然后打开第二个阀,以将沉积剂移动到要精炼的沉积剂精炼部分。 第三阀被打开以将精制的沉积剂存储在沉积剂储存部分中。 可以清洁沉积掩模而不损坏以高效率收集沉积剂。
    • 2. 发明授权
    • Cleaning equipment and cleaning method of deposition mask
    • 清洗设备和沉积掩模的清洗方法
    • US08182610B2
    • 2012-05-22
    • US12551821
    • 2009-09-01
    • Yoichi TakaharaFumio KataokaKenji YumibaKenji KatagiriRyo Izaki
    • Yoichi TakaharaFumio KataokaKenji YumibaKenji KatagiriRyo Izaki
    • B08B5/04
    • H01L21/67028
    • Equipment is realized which is capable of increasing the frequency of use of a deposition mask of an organic EL element and the recycle of an adhesive agent by efficiently cleaning the deposition mask with little damage and efficiently collecting the adhesive agent. A pulse laser is irradiated to a deposition mask to separate the deposition agent from the deposition mask. The separated deposition agent is sucked by a suction nozzle, and the deposition agent is separated from air by a cyclone and deposited on a bottom of the cyclone. Thereafter, a first valve is opened to collect the deposition agent in a deposition agent collection section. Then a second valve is opened to move the deposition agent to a deposition agent refining section to be refined. A third valve is opened to store the refined deposition agent in a deposition agent storage section. The deposition mask may be cleaned without being damaged to collect the deposition agent with high efficiency.
    • 实现了能够通过有效地清洁沉积掩模并且有效地收集粘合剂来增加有机EL元件的沉积掩模的使用频率和粘合剂的再循环的设备。 将脉冲激光照射到沉积掩模以将沉积剂与沉积掩模分离。 分离的沉积剂通过吸嘴吸入,并且沉积剂通过旋风分离器与空气分离并沉积在旋风分离器的底部。 此后,打开第一阀门以将沉积剂收集在沉积剂收集部分中。 然后打开第二个阀,以将沉积剂移动到要精炼的沉积剂精炼部分。 第三阀被打开以将精制的沉积剂存储在沉积剂储存部分中。 可以清洁沉积掩模而不损坏以高效率收集沉积剂。
    • 3. 发明授权
    • Photosensitive resin composition and method for forming fine patterns
with said composition
    • 光敏树脂组合物和用所述组合物形成精细图案的方法
    • US4554237A
    • 1985-11-19
    • US452198
    • 1982-12-22
    • Fumio KataokaFusaji ShojiHitoshi YokonoDaisuke MakinoShigeru KoibuchiAsao Isobe
    • Fumio KataokaFusaji ShojiHitoshi YokonoDaisuke MakinoShigeru KoibuchiAsao Isobe
    • G03C1/72G03F7/008G03C1/52G03C1/60G03C5/16
    • G03F7/008Y10S430/128
    • Disclosed are photosensitive resin composition useful for formation of fine patterns on semiconductor devices, magnetic bubble devices, etc. which is highly sensitive and is excellent in developability and which has no problem such as precipitation of azide compounds and remaining azide particles after development and a method for forming fine patterns with said composition.Said photosensitive resin composition comprises (a) at least one polymer compound selected from the group consisting of a novolak resin and a polyhydroxystyrene resin and (b) an azide compound represented by the general formula (1): ##STR1## [wherein X is --N.sub.3 or --SO.sub.2 N.sub.3, Y is ##STR2## R.sup.1 is a lower alkylene such as --CH.sub.2 CH.sub.2 --, --CH.sub.2 CH.sub.2 CH.sub.2 --, or --CH.sub.2 CH.sub.2 OCH.sub.2 CH.sub.2 CH.sub.2 --, a hydroxyalkylene or an aminoalkylene such as ##STR3## (wherein R.sup.4 and R.sup.5 are lower alkyl or hydrogen, R.sup.6 -R.sup.8 are lower alkyl groups, R.sup.3 is hydrogen, a lower alkyl group or --CH.sub.2 CH.sub.2 O).sub.n R.sup.9 wherein n is an integer of 3 or less and R.sup.9 is hydrogen or a lower alkyl group)].
    • 公开了用于在半导体器件上形成精细图案的光敏树脂组合物,具有高度敏感性和显影性优异的并且没有问题,例如显影后的叠氮化合物和剩余的叠氮化物颗粒的沉淀,以及方法 用于用所述组合物形成精细图案。 所述光敏树脂组合物包含(a)至少一种选自酚醛清漆树脂和聚羟基苯乙烯树脂的聚合物化合物和(b)由通式(1)表示的叠氮化合物:其中 X是-N3或-SO2N3,Y是低级亚烷基,例如-CH2CH2-,-CH2CH2CH2-或-CH2CH2OCH2CH2CH2-,羟基亚烷基或氨基亚烷基,例如
    • 9. 发明授权
    • Limited slip differential gear mechanism
    • 有限滑差差齿轮机构
    • US4667534A
    • 1987-05-26
    • US788970
    • 1985-10-18
    • Fumio Kataoka
    • Fumio Kataoka
    • F16D7/02F16D13/64F16D13/74F16H20060101F16H48/22F16H
    • F16H48/22F16H48/08
    • A limited slip differential gear mechanism includes a pinion shaft rotating integrally with a differential gear casing, pinion gears attached rotatably to the pinion shaft, side gears engaged with the pinion gears and splined to axles, and a plurality of first and second clutch plates alternately disposed between the side gears and the differential gear casing. A lug portion provided on the inner surface of each first clutch plate engages with the outer surface of the side gear, while a lug portion provided on the outer surface of each second clutch plate engages with the inner surface of the differential gear casing. Concave portions or projections are formed between the first and second plates in contact with each other to define gaps for retaining lubricating oil.
    • 限滑差速齿轮机构包括与差速齿轮箱整体旋转的小齿轮轴,可旋转地附接到小齿轮轴的小齿轮,与小齿轮啮合并与花键轴相配合的侧齿轮,以及交替布置的多个第一和第二离合器板 在侧齿轮和差速齿轮箱之间。 设置在每个第一离合器片的内表面上的凸耳部分与侧齿轮的外表面接合,而设置在每个第二离合器片的外表面上的凸耳部分与差速齿轮箱的内表面接合。 在第一和第二板之间形成凹陷部分或突起以彼此接触以限定用于保持润滑油的间隙。