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1. 发明授权

US08162286B2 Piezoelectric driven control valve 有权
标题翻译：压电式控制阀
公开(公告)号：US08162286B2
公开(公告)日：2012-04-24
申请号：US12593580
申请日：2008-03-13
申请人： Yohei Sawada , Kaoru Hirata , Ryosuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Yohei Sawada , Kaoru Hirata , Ryosuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/02
CPC分类号： F16K31/007 , F16K7/14
摘要： Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.
摘要翻译：即使在高温环境下，当压电致动器缩回时，通过减轻施加到压电元件的张力来实现稳定的流量控制。因此，压电驱动控制阀包括：具有阀座的主体; 金属隔膜与阀座接触并分离; 一个致动器箱，可以上下方式支撑在主体上; 固定在身体上的分裂基座; 盘簧弹簧向下推动执行器箱，使金属隔膜与阀座接触; 以及压电致动器，其容纳在致动器箱内部并且通过施加电压向上延伸以克服盘簧的弹性力向上推动致动器盒;以及预压机构，用于将压缩力恒定地施加到压电致动器中的压电元件，设置在分离基座和压电致动器之间。

2. 发明授权

US07059363B2 Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system 有权
标题翻译：从配备有流量控制系统的气体供给装置向腔室供给分割气体的方法
公开(公告)号：US07059363B2
公开(公告)日：2006-06-13
申请号：US10495641
申请日：2003-01-20
申请人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryosuke Dohi , Toyomi Uenoyama
发明人： Kazuhiko Sugiyama , Nobukazu Ikeda , Kouji Nishino , Ryosuke Dohi , Toyomi Uenoyama
IPC分类号： B65B1/04
CPC分类号： G05D7/0664 , Y10T137/7759 , Y10T137/7761
摘要： A method for supplying a specified quantity Q of processing gas while dividing at a desired flow rate ratio Q1/Q2 accurately and quickly from a gas supply facility equipped with a flow controller into a chamber. When a specified quantity Q of gas is supplied while being divided at a desired flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller into a reduced pressure chamber C through a plurality of branch supply lines and shower plates fixed to the ends thereof, pressure type division quantity controllers FV1 and FV2 are provided in the plurality of branch supply lines GL1 and GL2. Opening control of both division quantity controllers FV1 and FV2 is started by an initial flow rate set signal from a division quantity control board FRC for fully opening the control valve CV of the pressure type division quantity controller having a higher flow rate and pressures P3′ and P3″ on the downstream side of the control valve CV are regulated thus supplying a total quantity Q=Q1+Q2 of gas while dividing into the chamber C through orifice holes (3a, 4a) made in shower plates (3, 4) at desired division quantities Q1 and Q2 represented by formulas Q1=C1P3′ and Q2=C2P3″ (where, C1 and C2 are constants dependent on the cross-sectional area of the orifice hole or the gas temperature on the upstream side thereof).
摘要翻译：一种用于提供规定量的处理气体的方法，同时从装备有流量的气体供应设备精确而快速地分离所需流量比Q 1 / Q 2 2 控制器进入一个房间。当从设置有流量控制器的气体供给设备以期望的流量比Q 1 / Q 2 2分配被指定量的气体供给时，压力室C通过固定在其端部的多个分支供给管线和淋浴板，压力分离量控制器FV 1和FV 2 2设置在多个分支供应线GL＆lt; 1＆gt;和GL＆gt; 2＆lt; 2＆gt ;. 通过来自分割量控制板FRC的初始流量设定信号开始两个分割量控制器FV 1和FV 2 2的打开控制，以完全打开控制阀CV 在控制阀CV的下游侧具有较高的流量和压力P 3 3和P 3 3“的压力型分配量控制器被调节，从而提供总计数量Q = Q 1/2 + Q 2 2，同时通过在淋浴板（3,4）中制成的孔口（3a，4a）分成腔室C 由式Q 1表示的期望分割量Q 1和Q 2 2由下式表示：C 1＆lt; 1＆gt;＆lt; 3＆ /＆gt;和＆lt; 2＆gt; 2＆gt; 2＆lt; 3＆gt;＆lt; 3＆gt;（其中，C 1和C < SUB> 2 是取决于孔口的横截面积或其上游侧的气体温度的常数）。

3. 发明授权

US06394415B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06394415B1
公开(公告)日：2002-05-28
申请号：US09627784
申请日：2000-07-27
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

4. 发明授权

US06193212B1 Fluid control valve and fluid supply/exhaust system 有权
标题翻译：流体控制阀和流体供应/排气系统
公开(公告)号：US06193212B1
公开(公告)日：2001-02-27
申请号：US09308922
申请日：1999-07-23
申请人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
发明人： Tadahiro Ohmi , Migaku Takahashi , Michio Yamaji , Tsuyoshi Tanikawa , Nobukazu Ikeda , Ryosuke Dohi , Kouji Nishino , Naofumi Yasumoto , Hiroyuki Fukuda , Tomio Uno , Yasuyuki Yanai
IPC分类号： F16K3102
CPC分类号： F16K31/082 , F16K7/14 , F16K31/0655 , F16K31/0672 , Y10T137/8242
摘要： A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm2, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member “a” fixed around the rod-shaped shaft. The member “a” is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member “a” up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.
摘要翻译：可以控制具有10kg / cm 2量级的压力的流体的流体控制阀具有大约几毫秒数量级的响应时间，并且可以使得提供较少气体的流体供应/排出系统在使用多个阀的情况下的逆流。本发明的流体控制阀通过使用驱动单元闭合和打开阀座和阀座之间的部分来控制在阀体中移动的流体。驱动单元具有用于通过阀座和阀保持器施加压力的杆状轴和围绕杆状轴固定的构件“a”。构件“a”由磁性材料制成，并且在其与轴之间具有空间。平行于轴设置的线圈通过电磁感应使组件“a”上下移动，并利用弹簧力来封闭和打开阀座与阀座之间的一部分。

5. 发明授权

US5981905A System for supervising piping work 失效
公开(公告)号：US5981905A
公开(公告)日：1999-11-09
申请号：US865767
申请日：1997-05-30
申请人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16L13/02 , B23K9/095 , B23K31/12 , F16L1/00
CPC分类号： B23K9/0953 , B23K31/12 , B23K2201/06
摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.

6. 发明授权

US06116092A Fluid pressure detector using a diaphragm 失效
标题翻译：使用隔膜的流体压力检测器
公开(公告)号：US06116092A
公开(公告)日：2000-09-12
申请号：US919110
申请日：1997-08-28
申请人： Tadahiro Ohmi , Ryosuke Dohi , Koji Nishino , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Ryosuke Dohi , Koji Nishino , Nobukazu Ikeda
IPC分类号： G01L9/04 , G01L9/00 , G01L19/00 , G01L19/06 , G01L7/08
CPC分类号： G01L19/0084 , G01L19/0645 , G01L19/143
摘要： A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.
摘要翻译：在使用传感器芯片的压力检测器的膜片的气体接触面上形成优质的被动状态膜，以防止气体接触面的腐蚀或水分含量的排出或催化作用，从而改善生产质量在半导体制造过程和提供高精度的压力检测。当隔膜安装在隔膜基座上时，被动态膜形成在隔膜的气体接触面上。然后将隔膜基座牢固地固定到传感器基座上，在传感器基座中容纳传感器芯片，并且压力传递介质被密封在传感器基座和隔膜基座之间的间隙中。

7. 发明授权

US5791369A Pressure type flow rate control apparatus 失效
标题翻译：压力式流量控制装置
公开(公告)号：US5791369A
公开(公告)日：1998-08-11
申请号：US812330
申请日：1997-03-05
申请人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
发明人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
IPC分类号： F16K17/22 , F16K31/02 , G05D7/06 , G05D16/20 , H01L21/3065 , E03B11/00
CPC分类号： G05D7/0635 , Y10T137/5109 , Y10T137/7737 , Y10T137/7759 , Y10T137/7761 , Y10T137/777 , Y10T137/87917
摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
摘要翻译：用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出，控制阀的驱动单元。通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

8. 发明授权

US5669408A Pressure type flow rate control apparatus 失效
标题翻译：压力式流量控制装置
公开(公告)号：US5669408A
公开(公告)日：1997-09-23
申请号：US661181
申请日：1996-06-10
申请人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
发明人： Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
IPC分类号： F16K17/22 , F16K31/02 , G05D7/06 , G05D16/20 , H01L21/3065 , F16K31/12
CPC分类号： G05D7/0635 , Y10T137/5109 , Y10T137/7737 , Y10T137/7759 , Y10T137/7761 , Y10T137/777 , Y10T137/87917
摘要： A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc=KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
摘要翻译：用于控制流体流量的压力型流量控制装置（1）将孔口的上游侧压力P1保持在下游侧压力P2的大约两倍。除了孔口形成构件（5）之外，装置还包括设置在孔口上游侧的控制阀（2），设置在控制阀和孔之间的压力检测器（3）和操作控制装置 6），用于从Qc = KP1（K为常数）的压力检测器的检测压力P1计算流量Qc，并将差作为流量指令信号Qs与计算出的流量Qc之间的控制信号Qy发出，控制阀的驱动单元。通过打开和关闭控制阀来调节孔口上游侧压力P1，从而控制孔口下游侧流速。

9. 发明授权

US6018136A System for supervising piping work 失效
标题翻译：管道工程监理系统
公开(公告)号：US6018136A
公开(公告)日：2000-01-25
申请号：US315338
申请日：1999-05-20
申请人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Ryosuke Dohi , Eiji Ideta , Hiroyuki Fukuda , Hiroshi Morokoshi , Nobukazu Ikeda
IPC分类号： F16L13/02 , B23K9/095 , B23K31/12 , F16L1/00
CPC分类号： B23K9/0953 , B23K31/12 , B23K2201/06
摘要： A system of the invention for supervising piping work comprises a machine for performing piping work such as welding of pipes or tightening of pipe joints under predetermined conditions, check means for checking whether the piping work has been executed properly based on predetermined values of piping work conditions and actual piping work data, a host computer for accumulating the predetermined values of piping work conditions, the actual piping work data and the result of checking, and communication means for transmitting the predetermined values of piping work conditions, the actual piping work data and the result of checking.
摘要翻译：用于监督管道工作的本发明的系统包括用于在预定条件下执行管道焊接或管接头的管道工作的机器，用于根据管道工作条件的预定值检查管道工作是否已被正确执行的检查装置实际管道工作数据，用于累积管道工作条件的预定值的主计算机，实际管道工作数据和检查结果，以及用于发送管道工作条件的预定值的通信装置，实际管道工作数据和检查结果。

10. 发明授权

US5816285A Pressure type flow rate control apparatus 失效
标题翻译：压力式流量控制装置
公开(公告)号：US5816285A
公开(公告)日：1998-10-06
申请号：US907951
申请日：1997-08-11
申请人： Tadahiro Ohmi , Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
发明人： Tadahiro Ohmi , Koji Nishino , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Koji Kawada , Ryosuke Dohi , Hiroyuki Fukuda
IPC分类号： G05D7/06 , G05D16/20 , F16K31/12
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc=KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.
摘要翻译：压力式流量控制装置（1）控制在孔口上游侧的绝对压力P1和孔口下游侧的绝对压力P2之间的P2 / P1的比例的环境中的流体流量保持在小于约0.7的值。该装置包括：用于形成孔口（5）的板; 位于孔口上游的控制阀（2）; 位于孔口（5）下游的孔对应阀（9）; 位于控制阀（2）和孔（5）之间的主要压力检测器（3）; 位于孔口（5）下游的二次压力检测器（11）; 计算控制装置（6），用于通过公式Qc = KP1（K为常数）计算基于所测量的主压力检测器（3）的压力P1的流量Qc，并且作为控制信号Qy输出差在流量指令信号Qs和计算出的流量信号Qc之间，与控制阀2的驱动单元（14）之间; 以及压力比较计算装置（10），用于计算一次压力检测器（3）的检测压力P1与二次压力检测器（11）的检测压力P2之间的P2 / P1的比。通过控制信号Qy打开和关闭控制阀来调节孔口上游的压力P1，从而控制孔口下游的流速。

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