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    • 1. 发明授权
    • Pressure type flow rate control apparatus
    • 压力式流量控制装置
    • US5816285A
    • 1998-10-06
    • US907951
    • 1997-08-11
    • Tadahiro OhmiKoji NishinoNobukazu IkedaAkihiro MorimotoYukio MinamiKoji KawadaRyosuke DohiHiroyuki Fukuda
    • Tadahiro OhmiKoji NishinoNobukazu IkedaAkihiro MorimotoYukio MinamiKoji KawadaRyosuke DohiHiroyuki Fukuda
    • G05D7/06G05D16/20F16K31/12
    • G05D7/0635Y10T137/7759Y10T137/7761
    • A pressure type flow rate control apparatus (1) controls flow rate of a fluid in an environment where a ratio of P2/P1 between an absolute pressure P1 at an upstream side of an orifice and an absolute pressure P2 at a downstream side of the orifice is maintained at a value less than about 0.7. The apparatus comprises: a plate for forming the orifice (5); a control valve (2) positioned upstream of the orifice; an orifice corresponding valve (9) positioned downstream of the orifice (5); a primary pressure detector (3) positioned between the control valve (2) and the orifice (5); a secondary pressure detector (11) positioned downstream of the orifice (5); a calculation control device (6) for calculating flow rate Qc on the basis of the measured pressure P1 of the primary pressure detector (3) by a formula Qc=KP1 (K being a constant) and for outputting as a control signal Qy a difference between a flow rate command signal Qs and the calculated flow rate signal Qc to a drive unit (14) of the control valve 2; and a pressure comparing, calculating apparatus (10) for calculating the ratio of P2/P1 between the detected pressure P1 of the primary pressure detector (3) and the detected pressure P2 of the secondary pressure detector (11). The pressure P1 upstream of the orifice is adjusted by opening and closing the control valve by the control signal Qy, thereby controlling the flow rate downstream of the orifice.
    • 压力式流量控制装置(1)控制在孔口上游侧的绝对压力P1和孔口下游侧的绝对压力P2之间的P2 / P1的比例的环境中的流体流量 保持在小于约0.7的值。 该装置包括:用于形成孔口(5)的板; 位于孔口上游的控制阀(2); 位于孔口(5)下游的孔对应阀(9); 位于控制阀(2)和孔(5)之间的主要压力检测器(3); 位于孔口(5)下游的二次压力检测器(11); 计算控制装置(6),用于通过公式Qc = KP1(K为常数)计算基于所测量的主压力检测器(3)的压力P1的流量Qc,并且作为控制信号Qy输出差 在流量指令信号Qs和计算出的流量信号Qc之间,与控制阀2的驱动单元(14)之间; 以及压力比较计算装置(10),用于计算一次压力检测器(3)的检测压力P1与二次压力检测器(11)的检测压力P2之间的P2 / P1的比。 通过控制信号Qy打开和关闭控制阀来调节孔口上游的压力P1,从而控制孔口下游的流速。