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1. 发明授权

US09631777B2 Raw material vaporizing and supplying apparatus equipped with raw material concentration 有权
公开(公告)号：US09631777B2
公开(公告)日：2017-04-25
申请号：US14343226
申请日：2012-07-17
申请人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
发明人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
IPC分类号： F17D3/00 , C23C16/448 , G05D11/13 , C23C16/455
CPC分类号： F17D3/00 , C23C16/4482 , C23C16/45561 , G05D11/135 , Y10T137/8158
摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

2. 发明授权

US08587180B2 Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function 有权
标题翻译：压力式流量控制装置的压力控制阀驱动电路具有流量自我诊断功能
公开(公告)号：US08587180B2
公开(公告)日：2013-11-19
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： H01L41/09
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

3. 发明申请

US20120273061A1 Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device 有权
标题翻译：压电驱动阀和压电驱动流量控制装置
公开(公告)号：US20120273061A1
公开(公告)日：2012-11-01
申请号：US13505620
申请日：2010-11-04
申请人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： F16K49/00 , F16K31/02
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.
摘要翻译：提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

4. 发明申请

US20110120566A1 DISCONTINUOUS SWITCHING FLUID FLOW RATE CONTROL METHOD USING PRESSURE TYPE FLOW RATE CONTROL DEVICE 审中-公开
标题翻译：使用压力式流量控制装置的不连续切换流体流量控制方法
公开(公告)号：US20110120566A1
公开(公告)日：2011-05-26
申请号：US12950798
申请日：2010-11-19
申请人： Tadahiro OHMI , Kouji NISHINO , Ryousuke DOHI , Masaaki NAGASE , Katsuyuki SUGITA , Kaoru HIRATA , Takashi HIROSE , Tsutomu SHINOHARA , Nobukazu IKEDA , Toshihide YOSHIDA , Hisashi TANAKA
发明人： Tadahiro OHMI , Kouji NISHINO , Ryousuke DOHI , Masaaki NAGASE , Katsuyuki SUGITA , Kaoru HIRATA , Takashi HIROSE , Tsutomu SHINOHARA , Nobukazu IKEDA , Toshihide YOSHIDA , Hisashi TANAKA
IPC分类号： F17D1/00
CPC分类号： G05D7/0635 , G01F1/42 , G01F7/005 , Y10T137/0379
摘要： A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate.
摘要翻译：提供了一种流体流量控制方法，其使用流量范围可变型压力型流量控制装置，该流量范围可变型压力型流量控制装置设置有至少两个或更多个平行的流体通道，该流体通道设置在控制装置的控制阀的下游侧与流体供给管具有不同流体流速特性的通道和孔分别插入在平行的流体通道中，以使第一流量区域中的流体通过一个孔口用于流量控制，并使第二流量区域中的流体通过至少另一个孔口，流量控制。选择相应孔口的流量特性，使得在低流量下第一流量区域中的流体的最大可控流量小于第二流量区域在高流速下的最大可控流量的10％。

5. 发明授权

US07654137B2 Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed 失效
标题翻译：用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
公开(公告)号：US07654137B2
公开(公告)日：2010-02-02
申请号：US10598290
申请日：2005-01-13
申请人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
发明人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F1/68
CPC分类号： G01L19/0023 , G01F1/6842 , G01F1/6845 , Y10T137/7761
摘要： The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
摘要翻译：本发明提供了用于流体的耐腐蚀金属制传感器和使用该传感器的流体供应装置。更具体地说，用于流体的耐腐蚀金属制传感器配备有耐腐蚀金属基板，包含耐腐蚀金属基板的质量流量传感器部件，形成温度传感器的薄膜和安装在背面上的加热器耐压金属基板的流体接触面的一侧，以及包含形成安装在耐腐蚀金属基板的流体接触面的背面侧的应变传感器元件的薄膜的压力传感器部，以及传感器如此构成，即测量流体的质量流量和压力。

6. 发明申请

US20100012026A1 EVAPORATION SUPPLY APPARATUS FOR RAW MATERIAL AND AUTOMATIC PRESSURE REGULATING DEVICE USED THEREWITH 有权
标题翻译：用于原材料和自动压力调节装置的蒸发供应装置
公开(公告)号：US20100012026A1
公开(公告)日：2010-01-21
申请号：US12306904
申请日：2007-06-13
申请人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/52 , F16K17/38
CPC分类号： C23C16/4481 , C23C16/52 , G05D16/2013 , Y10T137/7737
摘要： An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4 and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0 to regulate the cross-sectional area of the passage through which the mixed gas G0 is distributed so as to hold the pressure of the mixed gas G0 inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0 is supplied to a process chamber while controlling the pressure inside the source tank.
摘要翻译：用于半导体制造的原料的蒸发供给装置包括：原料汇集在其中的源罐; 流量控制装置，其以规定的流量将载气供给到所述源罐; 用于供给由原料蒸气G4和载气G1组成的混合气体G0的主要管路，基于混合气体G0的压力和温度的检测值来调节控制阀的自动调压装置，以调节十字混合气体G0通过其分配的通道的截面积，以将混合气体G0的压力保持在源箱内部恒定; 以及用于将源罐加热到设定温度的恒温加热单元，其中将混合气体G0供给到处理室，同时控制源罐内的压力。

7. 发明授权

US06938489B2 Oscillatory type pressure sensor 有权
标题翻译：振荡式压力传感器
公开(公告)号：US06938489B2
公开(公告)日：2005-09-06
申请号：US10486331
申请日：2003-01-20
申请人： Masayoshi Esashi , Kaoru Hirata
发明人： Masayoshi Esashi , Kaoru Hirata
IPC分类号： G01L9/00 , G01L11/00
CPC分类号： G01L9/0017
摘要： A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration device (57) can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
摘要翻译：一种高灵敏度和高精度的振动式压力传感器（1），其允许直接施加腐蚀性气体压力，具有耐热性，并且不具有混合振动器的噪声的空间，包括不锈钢压力接收膜片（ 4），用于在后表面侧接收流体压力P，形成在压力接收膜（4）的前表面侧上的振动器（12），围绕振动器的周边设置的壁体（8）（12）和用于通过封闭所述壁体（8）中的开口部（8a）而将存在所述振动器（12）的内部空间改变为真空室（10）的透光性透过部（20）），由于隔膜（4）由具有耐腐蚀性的不锈钢形成，所以传感器也可以应用于腐蚀性流体，因为电路布线从振动器（12）中消除并且振动器被隔离地设置在真空中室（1 0），可以消除电磁噪声的混合，并且由于振动器（12）的共振频率fn通过非接触状态下的光学测量进行，因此可以进行极高灵敏度和高精度的检测。强制振动装置（57）也可以通过压电驱动和静电驱动从外部操作而不产生噪声。

8. 发明授权

US09163743B2 Piezoelectrically driven valve and piezoelectrically driven flow rate control device 有权
标题翻译：压电阀和压电驱动流量控制装置
公开(公告)号：US09163743B2
公开(公告)日：2015-10-20
申请号：US13505620
申请日：2010-11-04
申请人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06 , F16K31/00 , F16K7/14 , F16K25/00
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.
摘要翻译：提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

9. 发明申请

US20140299206A1 RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS EQUIPPED WITH RAW MATERIAL CONCENTRATION 有权
标题翻译：原料气化装置与原料浓缩装置
公开(公告)号：US20140299206A1
公开(公告)日：2014-10-09
申请号：US14343226
申请日：2012-07-17
申请人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
发明人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
IPC分类号： F17D3/00
CPC分类号： F17D3/00 , C23C16/4482 , C23C16/45561 , G05D11/135 , Y10T137/8158
摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.
摘要翻译：能够精确稳定地调节载气和原料气体的混合气体中的原料浓度的装置，以高精度地控制流量，将混合气体供给到处理室，从而检测蒸发浓度混合气体中的原料气体容易且高精度地实时显示浓度，而不使用昂贵的浓度计等。

10. 发明授权

US07945414B2 Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor 有权
标题翻译：使用带压力传感器的流体控制装置检测流体供应管线异常的方法
公开(公告)号：US07945414B2
公开(公告)日：2011-05-17
申请号：US12065438
申请日：2006-08-28
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G06F3/48
CPC分类号： G01F1/42 , F16K37/0091 , G05D7/0635
摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
摘要翻译：提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常操作具有压力传感器的流量控制装置。具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测安装有流量控制装置并且在其上游侧和下游侧。

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