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    • 1. 发明申请
    • METHOD FOR MANUFACTURING METALLIZED CERAMIC SUBSTRATE CHIP
    • 用于制造金属化陶瓷衬底芯片的方法
    • US20100065310A1
    • 2010-03-18
    • US12516394
    • 2007-11-29
    • Yasuyuki YamamotoKouichi YamamotoMasakatsu Maeda
    • Yasuyuki YamamotoKouichi YamamotoMasakatsu Maeda
    • H05K1/03H01R43/00
    • H05K3/0052H01L23/13H01L2924/0002H05K1/0306H05K2201/09036H05K2201/0909H05K2203/0228Y10T29/49117Y10T29/49124H01L2924/00
    • A method for manufacturing a substrate chip including the steps of: setting the thickness of at least a part of a metal wiring pattern unit provided on the raw substrate to be 0.1 μm to 5 μm; forming a groove for creating at least a crack in the surface of the ceramic substrate along a planned cutting line which passes through the part of the metal wiring pattern unit by using a cutting wheel having a cutter blade being formed into substantially V shape in cross section along the circumferential portion of the disk rotating wheel; and cutting the raw substrate by giving load from just behind of the groove. When manufacturing metallized ceramic substrate chips by cutting (dividing) the ceramic substrate on the surface of which wiring patterns made of a metal film is formed, the method is capable of effectively using the base material, inhibiting defects in the metallized portion, and efficiently manufacturing the substrate chips in high yield.
    • 一种用于制造衬底芯片的方法,包括以下步骤:将设置在原始衬底上的金属布线图案单元的至少一部分的厚度设定为0.1μm至5μm; 形成用于沿着规划的切割线在陶瓷基板的表面中至少形成裂纹的槽,该切割线穿过金属布线图案单元的一部分,通过使用具有切割刀的切割轮,该切割轮具有大致V形截面 沿着盘旋转轮的圆周部分; 并通过从凹槽的后面施加载荷来切割原始基底。 当通过在形成由金属膜制成的布线图案的表面上切割(分割)陶瓷基板来制造金属化陶瓷基板芯片时,该方法能够有效地使用基材,抑制金属化部分中的缺陷并有效地制造 基片芯片产量高。