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1. 发明授权

US5483311A Projection exposure apparatus 失效
标题翻译：投影曝光装置
公开(公告)号：US5483311A
公开(公告)日：1996-01-09
申请号：US249988
申请日：1994-05-27
申请人： Yasuyuki Sakakibara , Susumu Makinouchi , Nobutaka Magome , Naomasa Shiraishi
发明人： Yasuyuki Sakakibara , Susumu Makinouchi , Nobutaka Magome , Naomasa Shiraishi
IPC分类号： G03F7/20 , G03F7/207 , G03B27/42
CPC分类号： G03F7/70883 , G03F7/70241 , G03F7/70333 , G03F7/70358 , G03F7/7055 , G03F7/70725 , G03F7/70858
摘要： In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.
摘要翻译：在投影曝光装置中，当通过投影光学系统将形成有预定图案的掩模通过快门投影到放置在平台上的感光基板上时，台沿光轴方向移动的投影曝光装置中，基于快门的操作特性和舞台的操作特性（特别是速度特性），舞台的快门和控制装置彼此互锁，使得相对于感光体的移动的存在概率的分布基板从打开操作开始时间到关闭操作完成时间点相对于光轴的方向可以在光轴方向上的至少两个位置处呈现基本相等的最大值。

2. 发明授权

US5343270A Projection exposure apparatus 失效
标题翻译：投影曝光装置
公开(公告)号：US5343270A
公开(公告)日：1994-08-30
申请号：US986630
申请日：1992-12-07
申请人： Yasuyuki Sakakibara , Susumu Makinouchi , Nobutaka Magome , Naomasa Shiraishi
发明人： Yasuyuki Sakakibara , Susumu Makinouchi , Nobutaka Magome , Naomasa Shiraishi
IPC分类号： G03F7/20 , G03F7/207 , G03B27/42
CPC分类号： G03F7/70883 , G03F7/70241 , G03F7/70333 , G03F7/70358 , G03F7/7055 , G03F7/70725 , G03F7/70858
摘要： In a projection exposure apparatus wherein a stage is moved in the direction of optic axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system, the operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.
摘要翻译：在投影曝光装置中，当通过投影光学系统将形成有预定图案的掩模通过快门投影到放置在平台上的感光基板上时，台沿光轴方向移动的投影曝光装置中，基于快门的操作特性和舞台的操作特性（特别是速度特性），舞台的快门和控制装置彼此互锁，使得相对于感光体的移动的存在概率的分布基板从打开操作开始时间到关闭操作完成时间点相对于光轴的方向可以在光轴方向上的至少两个位置处呈现基本相等的最大值。

3. 发明授权

US08451424B2 Exposure apparatus, method for producing device, and method for controlling exposure apparatus 有权
标题翻译：曝光装置，制造装置的方法以及曝光装置的控制方法
公开(公告)号：US08451424B2
公开(公告)日：2013-05-28
申请号：US11338661
申请日：2006-01-25
申请人： Nobutaka Magome , Naoyuki Kobayashi , Yasuyuki Sakakibara , Hiroaki Takaiwa , Hisatsune Kadota
发明人： Nobutaka Magome , Naoyuki Kobayashi , Yasuyuki Sakakibara , Hiroaki Takaiwa , Hisatsune Kadota
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/70866 , G03F7/70341 , G03F7/70525 , G03F7/70725 , G03F7/70858 , G03F7/709
摘要： An exposure apparatus (EX) exposes a substrate (P) by projecting an image of a pattern on the substrate (P) via a projection optical system (PL) and a liquid (1). The exposure device (EX) has a liquid supply mechanism (10) which supplies the liquid (1) between the projection optical system (PL) and the substrate (P). The liquid feeding mechanism (10) stops the supply of the liquid (1) when abnormality is detected. This suppresses influence to devices and members in the periphery of the substrate caused by leakage of the liquid forming a liquid immersion area, thereby realizing satisfactory exposure processing.
摘要翻译：曝光装置（EX）通过投影光学系统（PL）和液体（1）将基板（P）上的图案的图像投射到基板（P）上。曝光装置（EX）具有在投影光学系统（PL）和基板（P）之间供给液体（1）的液体供给机构（10）。当检测到异常时，液体供给机构（10）停止供给液体（1）。这抑制了由于形成液浸区域的液体的泄漏而导致的衬底周边的器件和构件的影响，从而实现令人满意的曝光处理。

4. 发明申请

US20060132737A1 Exposure apparatus, method for producing device, and method for controlling exposure apparatus 有权
标题翻译：曝光装置，制造装置的方法以及曝光装置的控制方法
公开(公告)号：US20060132737A1
公开(公告)日：2006-06-22
申请号：US11338661
申请日：2006-01-25
申请人： Nobutaka Magome , Naoyuki Kobayashi , Yasuyuki Sakakibara , Hiroaki Takaiwa
发明人： Nobutaka Magome , Naoyuki Kobayashi , Yasuyuki Sakakibara , Hiroaki Takaiwa
IPC分类号： G03B27/42
CPC分类号： G03F7/70866 , G03F7/70341 , G03F7/70525 , G03F7/70725 , G03F7/70858 , G03F7/709
摘要： An exposure apparatus (EX) exposes a substrate (P) by projecting an image of a pattern on the substrate (P) via a projection optical system (PL) and a liquid (1). The exposure device (EX) has a liquid supply mechanism (10) which supplies the liquid (1) between the projection optical system (PL) and the substrate (P). The liquid feeding mechanism (10) stops the supply of the liquid (1) when abnormality is detected. This suppresses influence to devices and members in the periphery of the substrate caused by leakage of the liquid forming a liquid immersion area, thereby realizing satisfactory exposure processing.
摘要翻译：曝光装置（EX）通过投影光学系统（PL）和液体（1）将基板（P）上的图案的图像投射到基板（P）上。曝光装置（EX）具有在投影光学系统（PL）和基板（P）之间供给液体（1）的液体供给机构（10）。当检测到异常时，液体供给机构（10）停止供给液体（1）。这抑制了由于形成液浸区域的液体的泄漏而导致的衬底周边的器件和构件的影响，从而实现令人满意的曝光处理。

5. 外观设计

USD716116S1 Cover for brushcutter 有权
标题翻译：盖子为刷子
公开(公告)号：USD716116S1
公开(公告)日：2014-10-28
申请号：US29417318
申请日：2012-04-02
申请人： Yuji Yamamoto , Yuki Nakamura , Yasuyuki Sakakibara , Ya Li Zhou , Zhi Qiang Lu
设计人： Yuji Yamamoto , Yuki Nakamura , Yasuyuki Sakakibara , Ya Li Zhou , Zhi Qiang Lu

6. 发明授权

US08646418B2 Four-stroke engine and working machine using the same 有权
标题翻译：四冲程发动机和工作机使用相同
公开(公告)号：US08646418B2
公开(公告)日：2014-02-11
申请号：US13105461
申请日：2011-05-11
申请人： Yuki Nakamura , Yasuyuki Sakakibara
发明人： Yuki Nakamura , Yasuyuki Sakakibara
IPC分类号： F01P7/04 , F02B75/32
CPC分类号： F02B63/02 , F01M1/04 , F01M11/0004 , F01M2011/0025 , F01N1/00 , F01N13/1888 , F01N2340/04 , F01N2590/06 , F01P1/06 , F16N7/32
摘要： A reduced size four-stroke engine and a working machine using the same are provided. A fuel tank is disposed in the space below a carburetor and an engine base is integrally formed with a fuel tank. By this means, the fuel tank is disposed in the space below the carburetor, and therefore the oil tank is not required to be disposed below the oil tank, so that it is possible to reduce the size.
摘要翻译：提供了一种减小尺寸的四冲程发动机和使用该四冲程发动机的工作机。燃料箱设置在化油器下面的空间中，发动机基座与燃料箱一体形成。通过这种方式，燃料箱设置在化油器下方的空间内，因此油箱不需要设置在油箱下方，因此能够减小尺寸。

7. 发明授权

US4732129A Control apparatus for electroexpansive actuator enabling variation of stroke 失效
标题翻译：用于电动膨胀致动器的控制装置，能够改变行程
公开(公告)号：US4732129A
公开(公告)日：1988-03-22
申请号：US850696
申请日：1986-04-11
申请人： Masahiro Takigawa , Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe
发明人： Masahiro Takigawa , Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe
IPC分类号： F02B1/04 , F02B75/02 , F02D41/20 , F02M47/06 , F02M63/00 , H01L41/04 , H01L41/08 , B05B3/14
CPC分类号： F02M47/06 , F02D41/2096 , F02B1/04 , F02B2075/027 , F02D2041/2003 , F02D2041/2006 , F02D2041/201 , F02D2041/2013 , F02D2041/2075 , F02M2200/21 , H02N2/06 , H02N2/067
摘要： A color apparatus includes an electroexpansive actuator, a unit for supplying a charge to the electroexpansive actuator, and a unit for controlling an amount of charge discharged from the electroexpansive actuator, and a stroke of the electroexpansive actuator is controlled in accordance with the amount of charge discharged therefrom. When such an electroexpansive actuator is applied to a control apparatus for a fuel injection valve, a fuel injection amount per ON/OFF operation of the fuel injection valve or a fuel injection rate can be freely controlled.
摘要翻译：彩色装置包括电膨胀致动器，用于向电膨胀致动器提供电荷的单元和用于控制从电膨胀致动器排出的电荷量的单元，并且电膨胀致动器的行程根据电荷量来控制从中排出。当这种电膨胀式致动器被施加到用于燃料喷射阀的控制装置时，可以自由地控制燃料喷射阀的每次ON / OFF操作的燃料喷射量或燃料喷射速率。

8. 发明授权

US4730585A Diesel engine fuel injection system with a rate-of-injection control arrangement 失效
标题翻译：柴油发动机燃油喷射系统具有喷射速率控制装置
公开(公告)号：US4730585A
公开(公告)日：1988-03-15
申请号：US878772
申请日：1986-06-25
申请人： Seiko Abe , Toshihiko Igashira , Yasuyuki Sakakibara , Akihiro Izawa , Kiyonori Sekiguchi
发明人： Seiko Abe , Toshihiko Igashira , Yasuyuki Sakakibara , Akihiro Izawa , Kiyonori Sekiguchi
IPC分类号： F02D1/02 , F02B3/06 , F02D41/20 , F02D41/40 , F02M41/12 , F02M59/22 , H01L41/04 , F02M39/00
CPC分类号： F02D41/403 , F02D41/2096 , F02M41/126 , F02M59/22 , H02N2/06 , H02N2/067 , F02B3/06 , F02D41/402 , F02D41/408 , Y02T10/44
摘要： A fuel injection system comprising a fuel injection pump, at least one fuel injection nozzle connected thereto, and a control device for varying the rate of injection of the system according to varying engine parameters. The control device has a variable volume chamber, the volume of which is varied by a piston located by a piezoelectric actuator. The variable volume chamber and a pumping chamber of the pump is intermittently connected by a passage which is specifically designed in such a manner that the fluid communication between the chambers, during the delivery stroke of a pump plunger, is provided only for an initial stage of the delivery stroke. A rate of injection is controlled in the initial stage to perform a pilot injection. In the subsequent stage, in which there is no need for rate-of-injection control, the variable volume chamber is isolated from the pumping chamber in order to relieve the piezoelectric actuator from an excessively high fuel pressure that would cause degradation of the piezoelectric elements.
摘要翻译：一种燃料喷射系统，包括燃料喷射泵，连接到其上的至少一个燃料喷射喷嘴和用于根据变化的发动机参数改变系统的喷射速率的控制装置。控制装置具有可变容积室，其体积由通过压电致动器定位的活塞变化。泵的可变容积室和泵送室通过通道进行间歇地连接，该通道被特别设计成使得在泵柱塞的输送冲程期间，腔室之间的流体连通仅在初始阶段输送中风。在初始阶段控制喷射速率以进行引燃喷射。在不需要喷射速率控制的后续阶段中，可变容积室与泵送室隔离，以便使压电致动器免于过高的燃料压力，这将导致压电元件的劣化。

9. 发明授权

US4728074A Piezoelectric flow control valve 失效
标题翻译：压电流量控制阀
公开(公告)号：US4728074A
公开(公告)日：1988-03-01
申请号：US925251
申请日：1986-10-31
申请人： Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe , Nobuyuki Murate
发明人： Toshihiko Igashira , Yasuyuki Sakakibara , Kazuhide Watanabe , Nobuyuki Murate
IPC分类号： F02M51/06 , F02D41/20 , F02D41/24 , F02D41/40 , F02M45/06 , F02M47/02 , F02M51/04 , F02M63/00 , F02M63/04 , F16K21/12 , H02N2/02
CPC分类号： F02D41/2096 , F02D41/2406 , F02D41/40 , F02M45/06 , F02M51/04 , F02M63/04 , F02M2200/21 , Y02T10/44
摘要： A piezoelectric flow control valve comprising a slidable closure member (22) for controlling a flow of fluid through a fluid passage (42) between a fluid inlet (40) and a fluid outlet (32). The closure member (22) is biased toward a normally closed position by a plunger (70) responsive to a hydraulic pressure in a pressure chamber (78) which is in fluid communication with the fluid inlet (40) through a restriction and with a pumping chamber (96) of a piezoelectric pump (72). In order to prevent fluid leakage under situations wherein the fluid pressure at the fluid inlet (40) is not high enough to ensure closure of the member (22), the present invention provides spring biased pressure mechanism (106) for biasing the closure member (22) toward the normally closed position and override means (130) for overriding the pressure mechanism (106) in response to a predetermined pressure at the fluid inlet (40).
摘要翻译：一种压电流量控制阀，包括用于控制流体流过流体入口（40）和流体出口（32）之间的流体通道（42）的可滑动闭合构件（22）。响应于压力室（78）中的液压，封闭构件（22）通过柱塞（70）被朝向常闭位置偏置，压力室（78）通过限制和泵送与流体入口（40）流体连通压电泵（72）的室（96）。为了在流体入口（40）处的流体压力不足以确保构件（22）的闭合的情况下防止流体泄漏，本发明提供了用于偏压闭合构件的弹簧偏置压力机构（106） 22）朝向常闭位置，并且用于响应于流体入口（40）处的预定压力来超压压力机构（106）的超驰装置（130）。

10. 发明授权

US4603671A Fuel injector for an internal combustion engine 失效
标题翻译：用于内燃机的燃油喷射器
公开(公告)号：US4603671A
公开(公告)日：1986-08-05
申请号：US639433
申请日：1984-08-10
申请人： Toru Yoshinaga , Toshihiko Igashira , Yasuyuki Sakakibara , Yukihiro Natsuyama
发明人： Toru Yoshinaga , Toshihiko Igashira , Yasuyuki Sakakibara , Yukihiro Natsuyama
IPC分类号： F02M47/02 , F02M47/04 , F02M59/10 , F02M39/00
CPC分类号： F02M59/105 , F02M47/027 , F02M47/043
摘要： An electronically controllable, ultra-high pressure fuel injector comprises a differential pressure type injection nozzle which is opened and closed by an actuating element operated by a hydraulic power cylinder including a piston received in a working chamber. Working fuel to the working chamber of the power cylinder is ON/OFF controlled by an electronically controllable solenoid valve which when energized releases the pressure in the working chamber to open the injection nozzle. In order to ensure that the power cylinder is controlled by a compact, high response solenoid valve, the construction of the power cylinder and the injection nozzle is such that the force applied to the power cylinder piston by the working fuel pressure in the working chamber is substantially greater than the force applied to the actuating element by the fuel pressure in the pressure chamber in the injection nozzle or the fuel pressure in the passage for supplying the working fuel. Preferably, the fuel injector is provided with an injection rate control arrangement such as a flow control arrangement for limiting the flow rate of working fuel as it enters the working chamber and for increasing the flow rate of the working fuel as it is released therefrom, so that the rate of injection increases gradually at the outset of fuel injection but rapidly drops at the completion of the injection.
摘要翻译：电子可控的超高压燃料喷射器包括压差式喷射喷嘴，其通过由包括接收在工作室中的活塞的液压动力油缸操作的致动元件而打开和关闭。通过电子可控电磁阀控制动力缸工作室的工作燃油，当通电时释放工作室中的压力以打开喷嘴。为了确保动力缸由紧凑，高响应的电磁阀控制，动力缸和注射喷嘴的结构使得通过工作室中的工作燃料压力施加到动力缸活塞的力是明显大于通过喷射喷嘴中的压力室中的燃料压力或用于供应工作燃料的通道中的燃料压力施加到致动元件的力。优选地，燃料喷射器设置有喷射速率控制装置，例如用于限制工作燃料进入工作室的流量的流量控制装置，并且用于当工作燃料从其释放时增加工作燃料的流量，因此注射速率在燃料喷射开始时逐渐增加，但在注射完成时迅速下降。

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