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    • 3. 发明授权
    • RF microelectromechanical systems device
    • 射频微机电系统装置
    • US06713695B2
    • 2004-03-30
    • US10372697
    • 2003-02-24
    • Hiroshi KawaiShinji KobayashiYoshihiro Konaka
    • Hiroshi KawaiShinji KobayashiYoshihiro Konaka
    • H01P110
    • H01P1/127H01G5/16H01G5/40H01H59/0009
    • An RF-MEMS device includes a substrate, a coplanar line arranged on the substrate, a movable element disposed above the coplanar line, and a movable electrode arranged on the movable element so as to face the coplanar line. The movable element includes a high-resistivity semiconductor functioning as an insulator for an RF signal and functioning as an electrode for a low-frequency signal and a DC signal. Electrostatic attraction caused by a DC voltage applied between the movable element functioning as the electrode and a fixed electrode displaces the movable element towards the fixed electrode, thereby varying the capacitance between the movable electrode and the coplanar line. The movable element made of a high-resistivity semiconductor has dielectric loss characteristics in which the dielectric loss decreases as the frequency of a signal increases, thus readily reducing the dielectric loss of an RF signal.
    • RF-MEMS器件包括衬底,布置在衬底上的共面线,设置在共面线上方的可移动元件以及布置在可移动元件上以面向共面线的可动电极。 可移动元件包括用作RF信号的绝缘体并用作低频信号和DC信号的电极的高电阻率半导体。 由施加在用作电极的可动元件和固定电极之间的DC电压引起的静电吸引使可动元件朝向固定电极移动,由此改变可动电极和共面线之间的电容。 由高电阻率半导体制成的可移动元件具有介电损耗特性,其中介电损耗随着信号频率的增加而减小,从而容易降低RF信号的介电损耗。
    • 6. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US06240780B1
    • 2001-06-05
    • US09257852
    • 1999-02-25
    • Yosuhiro NegoroKazufumi MoriyaYoshihiro KonakaShinji Kobayashi
    • Yosuhiro NegoroKazufumi MoriyaYoshihiro KonakaShinji Kobayashi
    • G01P904
    • G01C19/5719
    • An angular velocity sensor includes a board, a first vibrator, a second vibrator, a vibration generator, a displacement detector and a frequency adjuster. The first vibrator is supported on the board through first supporting beams and arranged so as to be vibrated in the direction of a first axis. The second vibrator is supported on the first vibrator through second supporting beams and arranged so as to be vibrated in the direction of the first axis and in the direction of a second axis at a right angle to the direction of the first axis. The vibration generator cause the first vibrator to vibrate in the direction of the first axis. The displacement detector detects a displacement of the second vibrator in the direction to the second axis when an angular velocity has been applied around a third axis at right angles with the first and second axes. The frequency adjuster adjusts a vibrating side resonance frequency at the time when the first vibrator is vibrated in the direction of the first axis and adjusts a detecting side resonance frequency at the time when the second vibrator is vibrated in the direction of the second axis by an angular velocity applied around the third axis.
    • 角速度传感器包括板,第一振动器,第二振动器,振动发生器,位移检测器和频率调节器。 第一振动器通过第一支撑梁支撑在板上,并且布置成沿第一轴线的方向振动。 第二振动器通过第二支撑梁支撑在第一振动器上,并且被布置成在第一轴线的方向上和沿与第一轴线的方向成直角的第二轴线的方向上振动。 振动发生器使第一振动器沿第一轴线的方向振动。 位移检测器在与第一轴和第二轴成直角地围绕第三轴施加角速度时,检测第二振动体在朝向第二轴的方向上的位移。 频率调节器调节第一振动器沿着第一轴方向振动时的振动侧共振频率,并且在第二振动器沿第二轴方向振动时调整检测侧共振频率 施加在第三轴周围的角速度。