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1. 发明授权

US08277884B2 Coating and processing apparatus and method 有权
标题翻译：涂装加工设备及方法
公开(公告)号：US08277884B2
公开(公告)日：2012-10-02
申请号：US12569988
申请日：2009-09-30
申请人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
发明人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
IPC分类号： B05D3/12 , B05D1/40
CPC分类号： H01L21/68721 , B05D1/005 , G03F7/162 , H01L21/6715 , H01L21/68735 , H01L21/6875
摘要： There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.
摘要翻译：提供一种涂布处理装置，其包括水平保持四边形基板并旋转基板在水平面中的旋转卡盘，用于将涂布溶液供给到由旋转卡盘水平保持的基板的前表面的涂布溶液喷嘴，以及溶剂供给机构，设置在旋转卡盘中，用于向基板的背面供给溶剂，其中供给到基板的背面的溶剂被允许到达基板的每个角部的背面和侧面通过离心力，从而除去附着的涂布溶液。

2. 发明授权

US07615117B2 Coating and processing apparatus and method 有权
标题翻译：涂装加工设备及方法
公开(公告)号：US07615117B2
公开(公告)日：2009-11-10
申请号：US10795269
申请日：2004-03-09
申请人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
发明人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada , Masatoshi Kaneda
IPC分类号： B05C11/02 , B05B1/28
CPC分类号： H01L21/68721 , B05D1/005 , G03F7/162 , H01L21/6715 , H01L21/68735 , H01L21/6875
摘要： There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.
摘要翻译：提供一种涂布处理装置，其包括水平保持四边形基板并旋转基板在水平面中的旋转卡盘，用于将涂布溶液供给到由旋转卡盘水平保持的基板的前表面的涂布溶液喷嘴，以及溶剂供给机构，设置在旋转卡盘中，用于向基板的背面供给溶剂，其中供给到基板的背面的溶剂被允许到达基板的每个角部的背面和侧面通过离心力，从而除去附着的涂布溶液。

3. 发明授权

US07566365B2 Liquid processing apparatus and liquid processing method 有权
标题翻译：液体处理装置和液体处理方法
公开(公告)号：US07566365B2
公开(公告)日：2009-07-28
申请号：US10796179
申请日：2004-03-10
申请人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada
发明人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada
IPC分类号： B05C5/02
CPC分类号： H01L21/68721 , B05C11/08 , B05D1/005 , H01L21/6715 , H01L21/68735 , H01L21/6875
摘要： In a liquid processing apparatus for forming a coating film on a polygonal substrate by spin coating in an ambient with a descending clean air flow, a spin chuck includes a support plate for substantially horizontally supporting the substrate thereon. Air flow control members are provided on the spin chuck such that the air flow control member being disposed adjacent to a periphery of the polygonal substrate supported on the spin chuck, wherein the air flow control member is not provided near corner portions of the substrate supported on the spin chuck. The liquid processing apparatus may includes an air flow regulation ring which is provided with an air inlet having an opening surrounding an outer periphery of the air flow control member, wherein the air inlet communicates with the exhaust unit.
摘要翻译：在用于通过在下降的清洁空气流中在环境中旋涂在多边形基板上形成涂膜的液体处理装置中，旋转卡盘包括用于在其上大致水平地支撑基板的支撑板。空气流量控制构件设置在旋转卡盘上，使得气流控制构件邻近支撑在旋转卡盘上的多边形基板的周边设置，其中气流控制构件不设置在支撑在基座上的基板的拐角部分附近旋转卡盘。液体处理装置可以包括气流调节环，该气流调节环设置有具有围绕空气流量控制构件的外周的开口的空气入口，其中空气入口与排气单元连通。

4. 发明授权

US07927657B2 Liquid processing apparatus and liquid processing method 有权
标题翻译：液体处理装置和液体处理方法
公开(公告)号：US07927657B2
公开(公告)日：2011-04-19
申请号：US12492650
申请日：2009-06-26
申请人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada
发明人： Shinji Kobayashi , Tetsushi Miyamoto , Masahito Hamada
IPC分类号： B05D3/12
CPC分类号： H01L21/68721 , B05C11/08 , B05D1/005 , H01L21/6715 , H01L21/68735 , H01L21/6875
摘要： In a liquid processing apparatus for forming a coating film on a polygonal substrate by spin coating in an ambient with a descending clean air flow, a spin chuck includes a support plate for substantially horizontally supporting the substrate thereon. Air flow control members are provided on the spin chuck such that the air flow control member being disposed adjacent to a periphery of the polygonal substrate supported on the spin chuck, wherein the air flow control member is not provided near corner portions of the substrate supported on the spin chuck. The liquid processing apparatus may includes an air flow regulation ring which is provided with an air inlet having an opening surrounding an outer periphery of the air flow control member, wherein the air inlet communicates with the exhaust unit.
摘要翻译：在用于通过在下降的清洁空气流中在环境中旋涂在多边形基板上形成涂膜的液体处理装置中，旋转卡盘包括用于在其上大致水平地支撑基板的支撑板。空气流量控制构件设置在旋转卡盘上，使得气流控制构件邻近支撑在旋转卡盘上的多边形基板的周边设置，其中气流控制构件不设置在支撑在基座上的基板的拐角部分附近旋转卡盘。液体处理装置可以包括气流调节环，该气流调节环设置有具有围绕空气流量控制构件的外周的开口的空气入口，其中空气入口与排气单元连通。

5. 发明授权

US07553374B2 Coating treatment apparatus and coating treatment method 失效
标题翻译：涂层处理装置和涂层处理方法
公开(公告)号：US07553374B2
公开(公告)日：2009-06-30
申请号：US11047600
申请日：2005-02-02
申请人： Masahito Hamada , Fumio Hirota , Shinji Kobayashi
发明人： Masahito Hamada , Fumio Hirota , Shinji Kobayashi
IPC分类号： B05C11/06 , B05C11/00 , B05C11/02 , B05C11/10 , B05B7/06
CPC分类号： H01L21/6715
摘要： In the present invention, a gas flow restraining ring facing corner portions of the front face of a substrate horizontally held on a substrate holding unit and movable up and down, is set to a predetermined height in accordance with a coating treatment. Then, a coating solution containing a coating film forming component and a solvent is applied to the front face of the substrate and spread into a thin film state by a so-called spin coating method, and thereafter the substrate is rotated at a high speed so that the coating solution is dried. In this case, it is possible to control fresh gas flow from above the substrate to decrease the difference in evaporation rate of the solvent between the coating solution on the corner portions of the substrate and the coating solution inside them, thus enabling the coating treatment uniform within a plane on the substrate.
摘要翻译：在本发明中，根据涂布处理，将水平保持在基板保持单元上并可上下移动的基板的前面的角部的气流限制环设定为规定的高度。然后，将含有涂膜形成成分和溶剂的涂布溶液涂布在基板的正面，通过所谓的旋涂法扩展成薄膜状态，然后高速旋转基板使涂层溶液干燥。在这种情况下，可以控制从基板上方的新鲜气体流动，以减少基板的角部上的涂布液与其内部的涂布液之间的溶剂的蒸发速率差，从而能够使涂布处理均匀在基板上的平面内。

6. 发明申请

US20050181127A1 Coating treatment apparatus and coating treatment method 失效
标题翻译：涂层处理装置和涂层处理方法
公开(公告)号：US20050181127A1
公开(公告)日：2005-08-18
申请号：US11047600
申请日：2005-02-02
申请人： Masahito Hamada , Fumio Hirota , Shinji Kobayashi
发明人： Masahito Hamada , Fumio Hirota , Shinji Kobayashi
IPC分类号： B05D1/40 , B05C5/00 , B05C11/00 , B05C11/08 , B05D3/12 , H01L21/00 , H01L21/027
CPC分类号： H01L21/6715
摘要： In the present invention, a gas flow restraining ring facing corner portions of the front face of a substrate horizontally held on a substrate holding unit and movable up and down, is set to a predetermined height in accordance with a coating treatment. Then, a coating solution containing a coating film forming component and a solvent is applied to the front face of the substrate and spread into a thin film state by a so-called spin coating method, and thereafter the substrate is rotated at a high speed so that the coating solution is dried. In this case, it is possible to control fresh gas flow from above the substrate to decrease the difference in evaporation rate of the solvent between the coating solution on the corner portions of the substrate and the coating solution inside them, thus enabling the coating treatment uniform within a plane on the substrate.
摘要翻译：在本发明中，根据涂布处理，将水平保持在基板保持单元上并可上下移动的基板的前面的角部的气流限制环设定为规定的高度。然后，将含有涂膜形成成分和溶剂的涂布溶液涂布在基板的正面，通过所谓的旋涂法扩展成薄膜状态，然后高速旋转基板使涂层溶液干燥。在这种情况下，可以控制从基板上方的新鲜气体流动，以减少基板的角部上的涂布液与其内部的涂布液之间的溶剂的蒸发速率差，从而能够使涂布处理均匀在基板上的平面内。

7. 外观设计

USD810193S1 Photoconductor cartridge 有权
公开(公告)号：USD810193S1
公开(公告)日：2018-02-13
申请号：US29556018
申请日：2016-02-26
申请人： Takuya Etoh , Shinji Kobayashi , Fei Zhang , Lei Al
设计人： Takuya Etoh , Shinji Kobayashi , Fei Zhang , Lei Al

8. 发明授权

US08939130B2 Evaporated fuel treatment device for vehicle 有权
标题翻译：车用蒸发燃料处理装置
公开(公告)号：US08939130B2
公开(公告)日：2015-01-27
申请号：US13401403
申请日：2012-02-21
申请人： Takeshi Shimura , Shinji Kobayashi , Ikuo Hara , Takuma Koishikawa , Satoshi Okayama , Takeshi Uemae
发明人： Takeshi Shimura , Shinji Kobayashi , Ikuo Hara , Takuma Koishikawa , Satoshi Okayama , Takeshi Uemae
IPC分类号： F02M33/02 , B60K15/04 , B60K15/035 , F02M25/08
CPC分类号： B60K15/0406 , B60K15/03519 , F02M25/0836 , F02M25/089
摘要： An evaporated fuel treatment device is provided to treat evaporated fuel by using a fuel supply cap with a small size while the flowout of fuel can also be suitably prevented. The evaporated fuel treatment device includes a positive pressure adjusting valve which opens when an inner pressure of a fuel tank becomes a predetermined pressure or more, and a spherical rollover valve which closes the positive pressure adjusting valve when the fuel tank is inclined at an angle equal to or larger than a predetermined angle. The positive pressure adjusting valve and the spherical rollover valve are mounted on one cylindrical portion formed on a fuel supply cap.
摘要翻译：提供蒸发燃料处理装置以通过使用具有小尺寸的燃料供给盖来处理蒸发的燃料，同时也可以适当地防止燃料的流出。蒸发燃料处理装置包括：当燃料箱的内部压力变为预定压力以上时打开的正压调节阀;以及当燃料箱以等角度倾斜时关闭正压调节阀的球形翻转阀达到或大于预定角度。正压调节阀和球形翻转阀安装在形成在燃料供给盖上的一个圆筒部上。

9. 发明授权

US08552395B2 Ultraviolet irradiation system 有权
标题翻译：紫外线照射系统
公开(公告)号：US08552395B2
公开(公告)日：2013-10-08
申请号：US12969077
申请日：2010-12-15
申请人： Shinji Kobayashi , Norimitsu Abe , Takahiro Soma , Akihiko Shirota
发明人： Shinji Kobayashi , Norimitsu Abe , Takahiro Soma , Akihiko Shirota
IPC分类号： G01J1/42
CPC分类号： C02F1/325 , C02F1/283 , C02F1/52 , C02F1/76 , C02F2201/3223 , C02F2201/3227 , C02F2201/324 , C02F2201/326 , C02F2209/40 , C02F2209/44 , C02F2301/08 , C02F2303/04
摘要： According to one embodiment, an ultraviolet irradiation system that sterilizes, disinfects, and inactivates raw water such as city water or underground water, includes a plurality of ultraviolet irradiation devices connected in series, and a controller configured to control output and non-output of the ultraviolet irradiation devices. The ultraviolet irradiation device includes a water processing vessel through which the raw water flows, an ultraviolet lamp configured to irradiate the raw water in the water processing vessel with ultraviolet rays, and an ultraviolet sensor configured to measure an amount of ultraviolet rays emitted from the ultraviolet lamp.
摘要翻译：根据一个实施例，对诸如城市用水或地下水等原水进行灭菌，消毒，灭活的紫外线照射系统包括串联连接的多个紫外线照射装置，以及控制器，其被配置为控制所述紫外线照射系统的输出和非输出紫外线照射装置。紫外线照射装置包括：原水流过的水处理容器，配置成对水处理容器内的原水进行紫外线照射的紫外线灯;以及紫外线传感器，其被配置为测定从紫外线照射的紫外线的量灯。

10. 发明申请

US20120240904A1 EVAPORATED FUEL TREATMENT DEVICE FOR VEHICLE 有权
标题翻译：蒸汽燃料处理装置
公开(公告)号：US20120240904A1
公开(公告)日：2012-09-27
申请号：US13397418
申请日：2012-02-15
申请人： Takeshi Shimura , Ikuo Hara , Tadaaki Nagata , Shinji Kobayashi , Takahiro Imamura
发明人： Takeshi Shimura , Ikuo Hara , Tadaaki Nagata , Shinji Kobayashi , Takahiro Imamura
IPC分类号： F02M33/04
CPC分类号： B60K15/03504 , B60K2015/03514 , B60K2015/0561 , Y10T137/6855
摘要： An evaporated fuel treatment device for a vehicle is provided to suppress the flowout of evaporated fuel into atmospheric air. In the evaporated fuel treatment device, a communication chamber is formed in a fuel supply cap, allowing communication between a charge passage and the inside of a fuel tank in a closed state. In the communication chamber, a positive pressure adjusting valve is openable to supply evaporated fuel in the fuel tank to an evaporated fuel storage unit through the communication chamber and the charge passage, and a negative pressure adjusting valve is openable to supply atmospheric air to the fuel tank from the evaporated fuel storage unit through the communication chamber and the charge passage. An interlocking member is provided between the key cover and the negative pressure adjusting valve, and opens the negative pressure adjusting valve in an interlocking manner with an operation of opening the key cover.
摘要翻译：提供一种用于车辆的蒸发燃料处理装置，以抑制蒸发的燃料流入大气中。在蒸发燃料处理装置中，连通室形成在燃料供给盖中，允许在关闭状态下在充电通道和燃料箱内部之间连通。在通信室中，正压调节阀可打开，以通过连通室和充气通道将燃料箱中的蒸发燃料供应到蒸发燃料存储单元，负压调节阀可打开以向燃料供应大气来自蒸发的燃料存储单元的罐通过通信室和充电通道。在键盖和负压调节阀之间设置有互锁构件，并且通过打开钥匙盖的操作以互锁的方式打开负压调节阀。

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