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    • 10. 发明授权
    • Magnetoresistive element and method for producing the same, as well as magnetic head, magnetic memory and magnetic recording device using the same
    • 磁阻元件及其制造方法以及使用该磁阻元件的磁头,磁存储器和磁记录装置
    • US06943041B2
    • 2005-09-13
    • US10719412
    • 2003-11-21
    • Yasunari SugitaAkihiro OdagawaNozomu MatsukawaYoshio KawashimaYasunori Morinaga
    • Yasunari SugitaAkihiro OdagawaNozomu MatsukawaYoshio KawashimaYasunori Morinaga
    • G01R33/09G11B5/39G11C11/16H01F10/32H01F41/30H01L27/22H01L43/08H01L43/12H01L21/00
    • H01L27/228B82Y10/00B82Y25/00B82Y40/00G01R33/093G11B5/3903G11B5/3909G11B5/3916G11B2005/3996G11C11/16H01F10/3254H01F10/3268H01F41/302H01L43/08H01L43/12
    • The present invention provides a method for producing a magnetoresistive element including a tunnel insulating layer, and a first magnetic layer and a second magnetic layer that are laminated so as to sandwich the tunnel insulating layer, wherein a resistance value varies depending on a relative angle between magnetization directions of the first magnetic layer and the second magnetic layer. The method includes the steps of: (i) laminating a first magnetic layer, a third magnetic layer and an Al layer successively on a substrate; (ii) forming a tunnel insulating layer containing at least one compound selected from the group consisting of an oxide, nitride and oxynitride of Al by performing at least one reaction selected from the group consisting of oxidation, nitriding and oxynitriding of the Al layer; and (iii) forming a laminate including the first magnetic layer, the tunnel insulating layer and a second magnetic layer by laminating the second magnetic layer in such a manner that the tunnel insulating layer is sandwiched by the first magnetic layer and the second magnetic layer. The third magnetic layer has at least one crystal structure selected from the group consisting of a face-centered cubic crystal structure and a face-centered tetragonal crystal structure and is (111) oriented parallel to a film plane of the third magnetic layer. According to this production method, it is possible to produce a magnetoresistive element with excellent properties and thermal stability.
    • 本发明提供了一种制造磁阻元件的方法,该磁阻元件包括隧道绝缘层,以及第一磁性层和第二磁性层,其被层压以夹住隧道绝缘层,其中电阻值根据相对角度而变化 第一磁性层和第二磁性层的磁化方向。 该方法包括以下步骤:(i)在衬底上依次层叠第一磁性层,第三磁性层和Al层; (ii)通过进行选自Al层的氧化,氮化和氮氧化的至少一种反应,形成包含至少一种选自Al的氧化物,氮化物和氮氧化物的化合物的隧道绝缘层; 以及(iii)通过层叠所述第二磁性层来形成包括所述第一磁性层,所述隧道绝缘层和第二磁性层的层压体,使得所述隧道绝缘层被所述第一磁性层和所述第二磁性层夹在中间。 第三磁性层具有至少一种选自面心立方晶体结构和面心四边形晶体结构的晶体结构,并且(111)取向为平行于第三磁性层的膜平面。 根据该制造方法,可以制造出具有优异性能和热稳定性的磁阻元件。