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    • 8. 发明授权
    • Method of manufacturing semiconductor laser
    • 制造半导体激光器的方法
    • US5143863A
    • 1992-09-01
    • US683181
    • 1991-04-09
    • Kiyoshi OhnakaMototsugu Ogura
    • Kiyoshi OhnakaMototsugu Ogura
    • H01S5/22H01S5/223H01S5/227H01S5/323
    • H01S5/227H01S5/2231H01S5/2205H01S5/2209H01S5/221H01S5/2211H01S5/2214H01S5/2216H01S5/2275H01S5/32325
    • According to the structure of the invention, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, and an insulating film, AlGaInP or amorphous layer smaller in refractive index than the AlGaInP cladding layer are formed at both sides of the stripes, wherein the light can be confined and guided also in the direction parallel to the active layer, and the light can be index-guided both in the direction parallel to the active layer and in the direction vertical thereto, so that a laser having an extremely smaller astigmatism may be presented. What is more, the current blocking layer disposed at the outer side of the insulating film, AlGaInP or amorphous layer is high in thermal conductivity, and the heat generated in the vicinity of the active layer may be efficiently released.The invention also relates to the method of fabricating the laser composed in such structure.
    • 根据本发明的结构,在GaAs衬底上形成厚度较大的一种导电类型,有源层和其它导电类型的AlGaInP包层的AlGaInP包层,并且将绝缘膜AlGaInP或非晶 在条纹的两侧形成折射率比AlGaInP包覆层小的层,其中光可以在与有源层平行的方向上被限制和引导,并且光可以沿着平行的方向被引导引导 到有源层和垂直于其的方向,使得可以呈现具有非常小的散光的激光。 此外,设置在绝缘膜的外侧的电流阻挡层AlGaInP或非晶层的导热性高,并且可以有效地释放在活性层附近产生的热量。 本发明还涉及以这种结构构成的激光器的制造方法。