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    • 2. 发明授权
    • Method for manufacturing microlens
    • 微透镜制造方法
    • US07575854B2
    • 2009-08-18
    • US11828489
    • 2007-07-26
    • Katsutoshi SuzukiMasaaki Kurihara
    • Katsutoshi SuzukiMasaaki Kurihara
    • H01L27/14G02B3/00
    • G02B3/0018G03F7/0005G03F7/2022
    • A main object of the present invention is to provide a method for manufacturing a microlens that can easily form a microlens having a smooth shape, in which a maximum thickness position is different from a gravity center position. To attain the object, the present invention provides a method for manufacturing a microlens comprising processes of: a basic shape forming-exposure process for performing exposure by using a microlens basic shape-forming mask to a photosensitive resin layer formed on a substrate; and a deforming-exposure process for performing exposure, with a unit cell-exposure profile different from that of the exposure performed in the basic shape forming-exposure process, to the photosensitive resin layer by using a microlens-shape-adjusting mask, wherein a microlens, having a maximum thickness position different from a gravity center position is formed.
    • 本发明的主要目的在于提供一种能够容易地形成平滑形状的微透镜的微透镜的制造方法,其中最大厚度位置与重心位置不同。 为了达到上述目的,本发明提供一种微透镜的制造方法,其特征在于,包括以下工序的工序:将形成在基板上的感光性树脂层使用微透镜基体形成用掩模进行曝光的基本形状曝光工序; 以及通过使用微透镜形状调节掩模将感光性树脂层的单位细胞曝光图案与基本形状形成曝光处理中的曝光图形不同的曝光进行变形曝光的工序,其中, 形成具有与重心位置不同的最大厚度位置的微透镜。
    • 4. 发明授权
    • Lithographic printing original plates and platemaking process using the
same
    • 平版印刷原版和制版工艺使用相同
    • US5569573A
    • 1996-10-29
    • US349158
    • 1994-12-02
    • Gensho TakahashiMasaaki Kurihara
    • Gensho TakahashiMasaaki Kurihara
    • B41C1/10G03F7/00B41N1/00
    • B41C1/1041Y10S430/165
    • The present invention relates to a thermosensitive lithographic printing original plate comprising a substrate, a hydrophilic layer containing a hydrophilic binder polymer, and a microcapsuled oleophilic material which forms an image area by heating; the hydrophilic binder polymer having a three-dimensional cross-link and a functional group which chemically combines with the oleophilic material in the microcapsule when the microcapsule is decomposed, and the microcapsuled oleophilic material having a functional group which chemically combines with the hydrophilic binder polymer when the microcapsule is decomposed.The thermosensitive lithographic printing original plate of the present invention is excellent in printing durability and storage property and provides prints having clear images because the plate does not collect scumming. Further, development is not required in the platemaking process so that there are no problems with waste treatment and the like. Consequently, the original plate can be practically applied not only to a light printing such as a printing in offices but also to a rotary press of newspaper, form printing and the like.
    • 本发明涉及一种热敏平版印刷原版,其包括基材,含有亲水性粘合剂聚合物的亲水层和通过加热形成图像区域的微胶囊亲油性材料; 具有三维交联的亲水性粘合剂聚合物和当微胶囊分解时与微胶囊中的亲油性物质化学结合的官能团,以及具有与亲水性粘合剂聚合物化学结合的官能团的微胶囊亲油性材料, 微胶囊分解。 本发明的热敏平版印刷原版具有优异的印刷耐久性和储存性,并提供具有清晰图像的印刷品,因为印版不会收集浮渣。 此外,在制版过程中不需要开发,因此不存在废物处理等问题。 因此,原版可以实际上不仅适用于办公室中的印刷等轻型印刷,还可以用于报纸,印刷等的旋转印刷机。
    • 5. 发明申请
    • Solid-state image sensor and method for producing the same
    • 固态图像传感器及其制造方法
    • US20070080375A1
    • 2007-04-12
    • US11527032
    • 2006-09-26
    • Masaaki KuriharaMakoto AbeKatsutoshi Suzuki
    • Masaaki KuriharaMakoto AbeKatsutoshi Suzuki
    • H01L27/148
    • H01L27/14627H01L27/14685
    • A main object of the present invention is to provide a solid-state image sensor capable of efficiently collecting a light beam when the central position of the light receiving element and the central position of the micro lens do not coincide with each other in the plan view owing to a plural pixel sharing structure. To achieve the object, the present invention provides a solid-state image sensor comprising at least: a light receiving element for receiving a subject light to convert into a light signal; a micro lens for improving the light collecting rate to the light receiving element; and a signal readout circuit for reading a light signal generated from the light receiving element, such that the central position of the light receiving element and the central position of the micro lens do not coincide with each other in the plan view for having a plural pixel sharing structure with the single signal readout circuit shared by a plurality of the light receiving elements, wherein the micro lens having the maximum film thickness position different from the central position is provided such that the focus position of the micro lens with respect to a parallel ray is on the light receiving element.
    • 本发明的主要目的是提供一种在平面图中当光接收元件的中心位置和微透镜的中心位置不一致时能够有效地收集光束的固态图像传感器 由于多个像素共享结构。 为了实现该目的,本发明提供一种固态图像传感器,至少包括:用于接收被摄体光以转换为光信号的光接收元件; 用于提高对光接收元件的光收集率的微透镜; 以及用于读取从光接收元件产生的光信号的信号读出电路,使得在具有多个像素的平面图中,光接收元件的中心位置和微透镜的中心位置彼此不一致 具有由多个光接收元件共享的单信号读出电路的共享结构,其中具有与中心位置不同的最大膜厚度位置的微透镜设置成使得微透镜相对于平行光线的聚焦位置 在光接收元件上。
    • 7. 发明授权
    • Phase mask for processing optical fibers and method of manufacturing the same
    • 用于处理光纤的相位掩模及其制造方法
    • US06214495B1
    • 2001-04-10
    • US09254086
    • 1999-04-13
    • Toshikazu SegawaMasaaki Kurihara
    • Toshikazu SegawaMasaaki Kurihara
    • G03F900
    • G03F1/34G02B6/02138G03F7/001
    • The invention relates to an optical fiber-processing phase mask which enables a phase mask with a groove pitch varying in a position-dependent manner to be easily obtained by electron beam writing, and its fabrication method. In the optical fiber-processing phase mask comprising on one surface of a transparent substrate a repetitive pattern of grooves (26) and strips (27) located in a grating form, so that an optical fiber is irradiated with diffracted light according to the repetitive pattern to make a diffraction grating in said optical fiber by an interference fringe of diffracted light of different orders, a plurality of patterns (A1 to A3) having a linearly or nonlinearly increasing or decreasing pitch are juxtaposed, with a constant width ratio between the grooves (26) and the strips (27). The phase mask is fabricated by carrying out writing while the groove-and-strip patterns with a different pitch are juxtaposed.
    • 本发明涉及一种能够通过电子束写入容易地获得具有以位置相关方式变化的槽间距的相位掩模及其制造方法的光纤加工相位掩模。 在光纤加工相位掩模中,在透明基板的一个表面上形成重复图案的凹槽(26)和位于光栅形状的条带(27),使得根据重复图案向衍射光照射光纤 为了通过不同阶数的衍射光的干涉条纹在所述光纤中形成衍射光栅,将具有线性或非线性增加或减小间距的多个图案(A1至A3)并置,并且凹槽之间具有恒定的宽度比( 26)和条带(27)。 通过执行写入来制造相位掩模,而具有不同间距的凹槽和带状图案并置。
    • 8. 发明授权
    • Production method of a phase shift photomask having a phase shift layer
comprising SOG
    • 具有包括SOG的相移层的相移光掩模的制造方法
    • US5882825A
    • 1999-03-16
    • US695024
    • 1996-08-09
    • Masaaki Kurihara
    • Masaaki Kurihara
    • G03F1/26G03F1/30G03F1/40G03F1/68H01L21/027G03F9/00
    • G03F1/30
    • The present invention is directed to a method of producing a phase shift photomask having a shifter pattern comprising SOG having a transmittance high-enough to be usable with ultraviolet radaition such as KrF (of 248 nm wavelength) used for transfer onto wafers by forming an acid generator-containing SOG directly into plate to form an SOG shifter pattern. This production method at least comprises steps of coating an acid generator-containing SOG on a photomask substrate, selectively irradiating the thus coated SOG layer with ionizing radiation, and developing the SOG layer with a suitable solvent to form a shifter pattern comprising said SOG, and further includes a step of irradiating the overall surface of the thus formed SOG shifter pattern with ultraviolet radiation and/or heating the thus formed SOG shifter pattern at a high temperature to decompose a photosensitive group absorbing ultraviolet radiation, thereby making the SOG layer transparent to ultraviolet radiation used to transfer said SOG layer onto a wafer.
    • 本发明涉及一种具有移相光掩模的方法,该移相光掩模具有包含SOG的移动器图案,其具有足够高的透射率,可用于紫外线辐射,例如KrF(波长248nm)用于通过形成酸而转移到晶片上 发生器SOG直接进入板形成SOG移位器模式。 该制造方法至少包括在光掩模基板上涂布含酸产生剂的SOG的步骤,用电离辐射选择性地照射如此涂覆的SOG层,并用合适的溶剂显影SOG层以形成包含所述SOG的移动器图案,以及 进一步包括用紫外线照射这样形成的SOG移位器图案的整个表面和/或在高温下加热由此形成的SOG移位器图案以分解吸收紫外线辐射的感光体的步骤,从而使SOG层对紫外线透明 用于将所述SOG层转移到晶片上的辐射。
    • 9. 发明授权
    • Solid-state image sensor and method for producing the same
    • 固态图像传感器及其制造方法
    • US07884397B2
    • 2011-02-08
    • US11527032
    • 2006-09-26
    • Masaaki KuriharaMakoto AbeKatsutoshi Suzuki
    • Masaaki KuriharaMakoto AbeKatsutoshi Suzuki
    • H01L27/148
    • H01L27/14627H01L27/14685
    • A main object of the present invention is to provide a solid-state image sensor capable of efficiently collecting a light beam when the central position of the light receiving element and the central position of the micro lens do not coincide with each other in the plan view owing to a plural pixel sharing structure. To achieve the object, the present invention provides a solid-state image sensor comprising at least: a light receiving element for receiving a subject light to convert into a light signal; a micro lens for improving the light collecting rate to the light receiving element; and a signal readout circuit for reading a light signal generated from the light receiving element, such that the central position of the light receiving element and the central position of the micro lens do not coincide with each other in the plan view for having a plural pixel sharing structure with the single signal readout circuit shared by a plurality of the light receiving elements, wherein the micro lens having the maximum film thickness position different from the central position is provided such that the focus position of the micro lens with respect to a parallel ray is on the light receiving element.
    • 本发明的主要目的是提供一种当平面图中的光接收元件的中心位置和微透镜的中心位置不一致时能够有效地收集光束的固态图像传感器 由于多个像素共享结构。 为了实现该目的,本发明提供一种固态图像传感器,至少包括:用于接收被摄体光以转换为光信号的光接收元件; 用于提高对光接收元件的光收集率的微透镜; 以及用于读取从光接收元件产生的光信号的信号读出电路,使得在具有多个像素的平面图中,光接收元件的中心位置和微透镜的中心位置彼此不一致 具有由多个光接收元件共享的单信号读出电路的共享结构,其中具有与中心位置不同的最大膜厚度位置的微透镜设置成使得微透镜相对于平行光线的聚焦位置 在光接收元件上。