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1. 发明授权

US6087696A Stacked tunneling dielectric technology for improving data retention of EEPROM cell 失效
标题翻译：堆叠隧道电介质技术，用于改善EEPROM单元的数据保留
公开(公告)号：US6087696A
公开(公告)日：2000-07-11
申请号：US86437
申请日：1998-05-28
申请人： Xiao-Yu Li , Qi Xiang , Sunil D. Mehta
发明人： Xiao-Yu Li , Qi Xiang , Sunil D. Mehta
IPC分类号： H01L21/28 , H01L21/8247 , H01L29/51 , H01L29/788
CPC分类号： H01L21/28194 , H01L21/28273 , H01L27/11521 , H01L27/11558 , H01L29/513 , H01L29/517 , H01L21/28202 , H01L21/28211 , H01L29/518
摘要： An improved EEPROM cell structure and a method of fabricating the same is provided so as to improve data retention. The EEPROM cell includes a stacked dielectric structure consisting of a thin tunnel oxide layer and a high-k dielectric layer to function as the tunneling dielectric barrier so as to suppress leakage current.
摘要翻译：提供了改进的EEPROM单元结构及其制造方法，以便改善数据保留。 EEPROM单元包括由薄的隧道氧化物层和高k电介质层构成的叠层电介质结构，用作隧道电介质势垒，以便抑制漏电流。

2. 发明授权

US06255169B1 Process for fabricating a high-endurance non-volatile memory device 失效
标题翻译：制造高耐久性非易失性存储器件的方法
公开(公告)号：US06255169B1
公开(公告)日：2001-07-03
申请号：US09255053
申请日：1999-02-22
申请人： Xiao-Yu Li , Qi Xiang , Sunil D. Mehta
发明人： Xiao-Yu Li , Qi Xiang , Sunil D. Mehta
IPC分类号： H01L218247
CPC分类号： H01L27/11521 , H01L27/11558
摘要： A process for fabricating a non-volatile memory device includes the step of forming a nitrogen region in a semiconductor substrate prior to carrying out a thermal oxidation process to form a tunnel oxide layer. In a preferred process, nitrogen atoms are ion implanted into a silicon substrate to form a nitrogen region at the substrate surface. Then, a thermal oxidation process is carried out to grow a thin tunnel oxide layer overlying the surface of the nitrogen region. During the oxidation process, nitrogen is incorporated into the growing tunnel oxide layer. A floating-gate electrode is formed overlying the tunnel oxide layer and receives electrical charge transferred from a charge control region of the substrate through the tunnel oxide layer. The tunnel oxide layer is capable of undergoing repeated programming and erasing operations while exhibiting reduced effects from stress induced current leakage. In another aspect of the invention, an MOS transistor having enhanced carrier mobility is obtained by forming a gate oxide layer over a nitrogen region of a silicon substrate. The thermal oxidation process of the invention also provides both tunnel oxide layers and gate oxide layers having a reduced thickness for a given set of thermal oxidation conditions.
摘要翻译：一种用于制造非易失性存储器件的方法包括在进行热氧化工艺以形成隧道氧化物层之前在半导体衬底中形成氮区的步骤。在优选的方法中，将氮原子离子注入到硅衬底中以在衬底表面形成氮区。然后，进行热氧化处理，以生长覆盖在氮区域的表面上的薄的隧道氧化物层。在氧化过程中，将氮气掺入生长的隧道氧化物层中。在隧道氧化物层上形成浮栅电极，并接收通过隧道氧化物层从衬底的电荷控制区转移的电荷。隧道氧化物层能够经受重复的编程和擦除操作，同时表现出应力感应电流泄漏的减小的影响。在本发明的另一方面，通过在硅衬底的氮区上形成栅极氧化层，获得具有增强的载流子迁移率的MOS晶体管。本发明的热氧化方法还为给定的一组热氧化条件提供具有减小的厚度的隧道氧化物层和栅极氧化物层。

3. 发明授权

US06172392B2 Boron doped silicon capacitor plate 失效
标题翻译：硼掺杂硅电容器板
公开(公告)号：US06172392B2
公开(公告)日：2001-01-09
申请号：US09280887
申请日：1999-03-29
申请人： Christopher O. Schmidt , Sunil D. Mehta , Xiao-Yu Li
发明人： Christopher O. Schmidt , Sunil D. Mehta , Xiao-Yu Li
IPC分类号： H01L29788
CPC分类号： H01L27/11558 , H01L27/115 , H01L27/11521
摘要： A nonvolatile memory device utilizing a program junction region of a p-type impurity and oxide grown thereon. In one aspect, the device comprises a programming structure and a program junction separated from said programming structure by a field oxide region. A program junction oxide layer overlies said program junction region. A floating gate is provided over the oxide which covers said programming structure, said program junction oxide layer, and in some embodiments the gate oxide of a sense transistor.
摘要翻译：一种利用p型杂质的程序结区域和在其上生长的氧化物的非易失性存储器件。一方面，该装置包括编程结构和通过场氧化物区与所述编程结构分离的程序结。程序结氧化物层覆盖所述程序结区域。在覆盖所述编程结构，所述程序结氧化物层的氧化物上提供浮置栅极，并且在一些实施例中，提供感测晶体管的栅极氧化物。

4. 发明授权

US6075293A Semiconductor device having a multi-layer metal interconnect structure 有权
标题翻译：具有多层金属互连结构的半导体器件
公开(公告)号：US6075293A
公开(公告)日：2000-06-13
申请号：US263412
申请日：1999-03-05
申请人： Xiao-Yu Li , Sunil D. Mehta , Van H. Pham , Amit P. Marathe
发明人： Xiao-Yu Li , Sunil D. Mehta , Van H. Pham , Amit P. Marathe
IPC分类号： H01L23/532 , H01L23/48
CPC分类号： H01L23/53223 , H01L2924/0002
摘要： A multi-level metal interconnect structure in a semiconductor device includes a plurality of overlying metal layers separated by ILD layers and electrically connected by filled vias in the ILD layers. Each metal layer includes a relatively thick antireflective layer for improved electromigration resistance. Each metal layer also includes a metal lining layer and a metal interconnect layer overlying the metal lining layer. Enhanced electromigration resistance is obtained by forming the antireflective layer to a thickness of no less than the thickness of the metal lining layer. In a preferred embodiment of the invention, the antireflective layer has a thickness of about 1000 angstroms.
摘要翻译：半导体器件中的多级金属互连结构包括由ILD层分离并由ILD层中的填充通孔电连接的多个上覆金属层。每个金属层包括相对较厚的抗反射层，用于改善电迁移阻力。每个金属层还包括覆盖金属衬里层的金属衬里层和金属互连层。通过将抗反射层形成为不小于金属衬里层的厚度的厚度来获得增强的电迁移电阻。在本发明的优选实施例中，抗反射层的厚度为约1000埃。

5. 发明授权

US06309942B1 STI punch-through defects and stress reduction by high temperature oxide reflow process 有权
标题翻译： STI穿透缺陷和通过高温氧化物回流工艺的应力降低
公开(公告)号：US06309942B1
公开(公告)日：2001-10-30
申请号：US09245161
申请日：1999-02-04
申请人： Ting Y. Tsui , Robert H. Tu , Xiao-Yu Li , Sunil D. Mehta
发明人： Ting Y. Tsui , Robert H. Tu , Xiao-Yu Li , Sunil D. Mehta
IPC分类号： H01L2176
CPC分类号： H01L21/76229
摘要： A method of manufacturing a semiconductor device with reduced shallow trench isolation defects and stress is disclosed. The disclosed method begins by providing a silicon substrate including a capping layer. A plurality of isolation trenches are then etched through the capping layer and into the silicon substrate to form a plurality of isolation regions in the silicon substrate. The isolation trenches are then filled with an oxide layer. The oxide layer and the capping layer are then polished back using techniques known in the art. After polishing, the semiconductor device is annealed between a temperature range of about 1150° C. to about 1200° C.
摘要翻译：公开了一种制造具有减小的浅沟槽隔离缺陷和应力的半导体器件的方法。所公开的方法开始于提供包括封盖层的硅衬底。然后通过覆盖层蚀刻多个隔离沟槽并进入硅衬底，以在硅衬底中形成多个隔离区域。然后用氧化物层填充隔离沟槽。然后使用本领域已知的技术将氧化物层和覆盖层进行抛光。在抛光之后，半导体器件在约1150℃至约1200℃的温度范围内退火

6. 发明授权

US06261944B1 Method for forming a semiconductor device having high reliability passivation overlying a multi-level interconnect 有权
标题翻译：用于形成具有高可靠性钝化的半导体器件的方法，覆盖多层互连
公开(公告)号：US06261944B1
公开(公告)日：2001-07-17
申请号：US09200395
申请日：1998-11-24
申请人： Sunil D. Mehta , Xiao-Yu Li
发明人： Sunil D. Mehta , Xiao-Yu Li
IPC分类号： H01L214763
CPC分类号： H01L21/316 , H01L21/76819 , H01L21/76825 , H01L23/3192 , H01L24/48 , H01L2224/05599 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/85399 , H01L2924/00014 , H01L2924/01013 , H01L2924/01029 , H01L2924/13091 , H01L2924/14 , H01L2924/181 , H01L2924/00 , H01L2224/45015 , H01L2924/207 , H01L2224/45099 , H01L2924/00012
摘要： A semiconductor device having a high reliability passivation includes a planarization layer overlying a multi-level interconnect layer. The passivation layer has a planar surface upon which additional passivation layers are formed. Openings in the overlying passivation layers and the planarization layer expose bonding pads in the multi-level interconnect layer. In a process for fabricating the device, the planarization layer is preferably formed by dispensing a siloxane spin-on-glass (SOG) material onto the surface of the multi-level interconnect layer. The SOG is subsequently planarized to form a substantially planar surface.
摘要翻译：具有高可靠性钝化的半导体器件包括覆盖多层互连层的平坦化层。钝化层具有平坦表面，在其上形成附加的钝化层。上覆钝化层和平坦化层中的开口暴露多层互连层中的焊盘。在制造该器件的过程中，平坦化层优选通过将硅氧烷旋涂玻璃（SOG）材料分配到多层互连层的表面上而形成。 SOG随后被平坦化以形成基本平坦的表面。

7. 发明授权

US06207989B1 Non-volatile memory device having a high-reliability composite insulation layer 失效
标题翻译：具有高可靠性复合绝缘层的非易失性存储器件
公开(公告)号：US06207989B1
公开(公告)日：2001-03-27
申请号：US09268897
申请日：1999-03-16
申请人： Xiao-Yu Li , Sunil D. Mehta
发明人： Xiao-Yu Li , Sunil D. Mehta
IPC分类号： H01L2976
CPC分类号： H01L27/11521 , H01L27/115 , H01L27/11558
摘要： A non-volatile memory device includes a floating-gate electrode overlying a tunnel oxide layer. A portion of the floating-gate electrode forms the control gate electrode for a sense transistor that is used to determine the presence of charge on the floating-gate electrode. A composite insulation layer overlies the floating-gate electrode. The composite insulation layer includes a dielectric layer, a doped insulating layer overlying the dielectric layer, and a planarization layer overlying the doped insulating layer. The thicknesses of the dielectric layer and the doped insulating layer are precisely determined, such that the doped insulating layer getters mobile ions, such as hydrogen ions, away from the floating-gate electrode, while not capacitively coupling with the floating-gate electrode. In a preferred embodiment of the invention, the dielectric layer has a thickness of about 450 to about 550 Å, and the doped insulating layer has a thickness of about 2900 to about 3100 Å, and the planarization layer has a thickness of about 6000 to 8000 Å.
摘要翻译：非易失性存储器件包括覆盖隧道氧化物层的浮栅电极。浮栅电极的一部分形成用于确定浮栅电极上电荷存在的读出晶体管的控制栅电极。复合绝缘层覆盖浮栅电极。复合绝缘层包括电介质层，覆盖电介质层的掺杂绝缘层和覆盖掺杂绝缘层的平坦化层。电介质层和掺杂绝缘层的厚度被精确地确定，使得掺杂的绝缘层在不与浮栅电极电容耦合的同时将诸如氢离子的移动离子吸引到浮栅电极。在本发明的优选实施例中，电介质层的厚度为约450至约550，掺杂绝缘层的厚度为约2900至约3100，平坦化层的厚度为约6000至8000 一个。

8. 发明授权

US6040019A Method of selectively annealing damaged doped regions 失效
标题翻译：选择性退火损伤掺杂区域的方法
公开(公告)号：US6040019A
公开(公告)日：2000-03-21
申请号：US799230
申请日：1997-02-14
申请人： Emi Ishida , Xiao-Yu Li , Sunil D. Mehta
发明人： Emi Ishida , Xiao-Yu Li , Sunil D. Mehta
IPC分类号： H01L21/265 , H01L21/268 , H01L21/8247 , C23C14/00 , B05D3/06 , H01L21/263
CPC分类号： H01L27/11521 , H01L21/26506 , H01L21/26513 , H01L21/268 , H01L27/11558
摘要： A method of forming a region of impurity in a semiconductor substrate with minimal damage. The method includes the steps of: forming a reaction-inhibiting impurity region in the semiconductor substrate to a depth below the semiconductor substrate; and applying laser energy to the semiconductor substrate at a sufficient magnitude to liquify the semiconductor substrate in the region.
摘要翻译：一种以最小的损伤在半导体衬底中形成杂质区域的方法。该方法包括以下步骤：在半导体衬底的深度下方形成反应抑制杂质区; 以及将激光能量以足够大的量施加到所述半导体衬底以在所述区域中液化所述半导体衬底。

9. 发明授权

US6009033A Method of programming and erasing an EEPROM device under an elevated temperature and apparatus thereof 失效
标题翻译：在高温下对EEPROM器件进行编程和擦除的方法及其装置
公开(公告)号：US6009033A
公开(公告)日：1999-12-28
申请号：US198653
申请日：1998-11-24
申请人： Xiao-Yu Li , Sunil D. Mehta
发明人： Xiao-Yu Li , Sunil D. Mehta
IPC分类号： G11C16/10 , G11C16/14 , G11C7/04 , G11C16/06
CPC分类号： G11C16/10 , G11C16/14
摘要： A semiconductor device having an EEPROM array includes resistive elements capable of elevating the temperature of the EEPROM array during programming and erasing operations. The resistive elements are located in close proximity to individual EEPROM cells within an EEPROM array. By elevating the temperature of the EEPROM cell during programming and erasing operations, data errors associated with shifting threshold voltages of floating-gate devices within the EEPROM is reduced. An operating method for improving the long term reliability of an EEPROM device includes the step of providing thermal energy during programming and erasing sufficient to raise the temperature of the EEPROM device to at least about 70.degree. C.
摘要翻译：具有EEPROM阵列的半导体器件包括能够在编程和擦除操作期间提升EEPROM阵列的温度的电阻元件。电阻元件靠近EEPROM阵列内的各个EEPROM单元。通过在编程和擦除操作期间升高EEPROM单元的温度，减少与EEPROM内的浮动栅极器件的阈值电压移位相关的数据错误。用于提高EEPROM器件的长期可靠性的操作方法包括在编程和擦除期间提供热能足以将EEPROM器件的温度升高至至少约70℃的步骤。

10. 发明授权

US5999449A Two transistor EEPROM cell using P-well for tunneling across a channel 失效
标题翻译：使用P阱的两个晶体管EEPROM单元用于跨通道的隧道
公开(公告)号：US5999449A
公开(公告)日：1999-12-07
申请号：US239072
申请日：1999-01-27
申请人： Sunil D. Mehta , Xiao-Yu Li
发明人： Sunil D. Mehta , Xiao-Yu Li
IPC分类号： G11C16/04 , G11C11/34
CPC分类号： G11C16/0441
摘要： A two transistor EEPROM cell is described that is programmed and erased by electron tunneling across a tunneling channel in a P-well. The EEPROM cell has two transistors formed in a semiconductor substrate. The two transistors are a tunneling transistor (NMOS) and a read transistor (NMOS). Electron tunneling occurs to program and erase the EEPROM cell through a tunnel oxide layer by electron tunneling across an entire portion of a tunneling channel upon incurrence of a sufficient voltage potential between a floating gate and the tunnel channel
摘要翻译：描述了通过P阱中的隧道通道的电子隧道编程和擦除的两个晶体管EEPROM单元。 EEPROM单元具有形成在半导体衬底中的两个晶体管。两个晶体管是隧道晶体管（NMOS）和读取晶体管（NMOS）。发生电子隧穿，以在浮动栅极和隧道通道之间发生足够的电压电势时通过隧道氧化物层通过电子隧穿跨越隧道通道的整个部分来编程和擦除EEPROM单元

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