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1. 发明授权

US06532806B1 Scanning evanescent electro-magnetic microscope 失效
标题翻译：扫描渐逝电磁显微镜
公开(公告)号：US06532806B1
公开(公告)日：2003-03-18
申请号：US09695508
申请日：2000-10-23
申请人： Xiao-Dong Xiang , Chen Gao , Peter G. Schultz , Tao Wei
发明人： Xiao-Dong Xiang , Chen Gao , Peter G. Schultz , Tao Wei
IPC分类号： G01B734
CPC分类号： G01Q60/22 , Y10S977/86 , Y10S977/864 , Y10S977/865 , Y10S977/869
摘要： A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.
摘要翻译：描述了一种新颖的扫描显微镜，其使用近场渐逝电磁波来探测样品特性。该新型显微镜能够对样品的电性能进行高分辨率成像和定量测量。本发明的扫描瞬逝波电磁显微镜（SEMM）可以绘制材料的介电常数，切线损耗，电导率，复电阻抗等电参数。定量图对应于成像细节。新型显微镜可用于测量电介质和导电材料的电学性能。

2. 发明授权

US5821410A Scanning tip microwave near field microscope 失效
标题翻译：扫描尖端微波近场显微镜
公开(公告)号：US5821410A
公开(公告)日：1998-10-13
申请号：US717321
申请日：1996-09-20
申请人： Xiao-Dong Xiang , Peter G. Schultz , Tao Wei
发明人： Xiao-Dong Xiang , Peter G. Schultz , Tao Wei
IPC分类号： G01Q30/06 , G01Q60/18 , G01Q60/22 , G01Q60/24 , G01Q70/14 , H01J37/20 , G01B7/34
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , Y10S977/862
摘要： A microwave near field microscope has a novel microwave probe structure wherein the probing field of evanescent radiation is emitted from a sharpened metal tip instead of an aperture or gap. This sharpened tip, which is electrically and mechanically connected to a central electrode, extends through and beyond an aperture in an endwall of a microwave resonating device such as a microwave cavity resonator or a microwave stripline resonator. Since the field intensity at the tip increases as the tip sharpens, the total energy which is radiated from the tip and absorbed by the sample increases as the tip sharpens. The result is improved spatial resolution without sacrificing sensitivity.
摘要翻译：微波近场显微镜具有新颖的微波探测器结构，其中ev逝辐射的探测场从尖锐的金属尖端而不是孔或间隙发射。这种锋利的尖端，其电和机械地连接到中心电极延伸穿过微波谐振装置例如微波谐振器或微波带状线谐振器的端壁中的孔。由于尖端处的场强度随着尖端锐化而增加，从尖端辐射并被样品吸收的总能量随着尖端锐化而增加。结果是在不牺牲灵敏度的情况下改善了空间分辨率。

3. 发明授权

US06660414B1 Tungsten-doped thin film materials 失效
标题翻译：钨掺杂薄膜材料
公开(公告)号：US06660414B1
公开(公告)日：2003-12-09
申请号：US09299805
申请日：1999-04-26
申请人： Xiao-Dong Xiang , Hauyee Chang , Chen Gao , Ichiro Takeuchi , Peter G. Schultz
发明人： Xiao-Dong Xiang , Hauyee Chang , Chen Gao , Ichiro Takeuchi , Peter G. Schultz
IPC分类号： B32B900
CPC分类号： C23C14/5806 , B01J2219/0043 , B01J2219/00745 , B01J2219/00754 , C01G23/006 , C01P2002/72 , C01P2006/40 , C04B35/4682 , C04B35/47 , C04B2235/3206 , C04B2235/3213 , C04B2235/3215 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3241 , C04B2235/3258 , C04B2235/3262 , C04B2235/3272 , C23C14/088 , C40B60/14 , H01L21/31691
摘要： A dielectric thin film material for high frequency use, including use as a capacitor, and having a low dielectric loss factor is provided, the film comprising a composition of tungsten-doped barium strontium titanate of the general formula (BaxSr1−x)TiO3, where X is between about 0.5 and about 1.0. Also provided is a method for making a dielectric thin film of the general formula (BaxSr1−x)TiO3 and doped with W, where X is between about 0.5 and about 1.0, a substrate is provided, TiO2, the W dopant, Ba, and optionally Sr are deposited on the substrate, and the substrate containing TiO2, the W dopant, Ba, and optionally Sr is heated to form a low loss dielectric thin film.
摘要翻译：提供了一种用于高频用途的电介质薄膜材料，包括用作电容器并且具有低介电损耗因子，该薄膜包括通式（BaxSr1-x）TiO3的掺杂钨的钛酸钡锶组合物，其中 X在约0.5至约1.0之间。还提供了制备通式（BaxSr1-x）TiO3的电介质薄膜并掺杂W的方法，其中X为约0.5至约1.0，提供基底，TiO 2，W掺杂剂，Ba和任选的Sr沉积在衬底上，并且将含有TiO 2，W掺杂剂，Ba和任选的Sr的衬底加热以形成低损耗介电薄膜。

4. 发明授权

US07767627B1 Combinatorial synthesis of inorganic or composite materials 失效
标题翻译：无机或复合材料的组合合成
公开(公告)号：US07767627B1
公开(公告)日：2010-08-03
申请号：US08847967
申请日：1997-04-22
申请人： Isy Goldwasser , Debra A. Ross , Peter G. Schultz , Xiao-Dong Xiang , Gabriel Briceño , Xian-Dong Sun , Kai-An Wang
发明人： Isy Goldwasser , Debra A. Ross , Peter G. Schultz , Xiao-Dong Xiang , Gabriel Briceño , Xian-Dong Sun , Kai-An Wang
IPC分类号： C40B40/18 , C40B50/04 , C40B20/02
CPC分类号： B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G3/006 , C01G21/006 , C01G29/006 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2004/84 , C01P2006/10 , C01P2006/32 , C01P2006/40 , C01P2006/42 , C01P2006/60 , C04B35/01 , C04B35/16 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B20/02 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F41/18 , H01F41/34 , H01L27/18 , Y10S436/809 , Y10T436/25
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials or, alternatively, allowing the components to interact to form at least two different materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, nonbiological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料，或者允许组分相互作用以形成至少两种不同的材料材料可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如无机物复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

5. 发明授权

US06794052B2 Polymer arrays from the combinatorial synthesis of novel materials 失效
标题翻译：聚合物阵列从新型材料的组合合成
公开(公告)号：US06794052B2
公开(公告)日：2004-09-21
申请号：US10226485
申请日：2002-08-22
申请人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceño , Xiao-Dong Sun
发明人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceño , Xiao-Dong Sun
IPC分类号： B32B2700
CPC分类号： C04B35/16 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2002/72 , C01P2006/40 , C01P2006/42 , C04B35/01 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , C40B80/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/1933 , H01F41/18 , H01F41/34 , H01L43/10 , Y10T428/24479 , Y10T428/24612 , Y10T428/2462 , Y10T428/31 , Y10T428/31645 , Y10T428/31855 , Y10T428/31931 , Y10T436/25 , Y10T436/2525 , Y10T436/255 , Y10T436/25875
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, non-biological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料来制备其上具有不同材料阵列的衬底。可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如，无机复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

6. 发明授权

US07320858B2 Formation of combinatorial arrays of materials using solution-based methodologies 有权
标题翻译：使用基于解决方案的方法形成材料组合阵列
公开(公告)号：US07320858B2
公开(公告)日：2008-01-22
申请号：US10404636
申请日：2003-03-31
申请人： Daniel M. Giaquinta , Martin Devenney , Keith A. Hall , Isy Goldwasser , Peter G. Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceño , Kai-An Wang
发明人： Daniel M. Giaquinta , Martin Devenney , Keith A. Hall , Isy Goldwasser , Peter G. Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceño , Kai-An Wang
IPC分类号： C12Q1/68
CPC分类号： C23C14/087 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00351 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00445 , B01J2219/00475 , B01J2219/00481 , B01J2219/00484 , B01J2219/00493 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00599 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/0065 , B01J2219/00657 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00702 , B01J2219/00707 , B01J2219/00711 , B01J2219/0072 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B01J2219/00756 , B82Y25/00 , B82Y30/00 , C01B13/185 , C01G51/006 , C01P2002/52 , C01P2004/54 , C01P2004/61 , C01P2004/84 , C01P2006/40 , C04B35/01 , C04B35/62218 , C09K11/08 , C09K11/7718 , C09K11/7774 , C09K11/7794 , C23C14/042 , C23C16/042 , C40B30/08 , C40B40/18 , C40B50/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/193 , H01F41/18 , H01F41/34 , Y10T436/11 , Y10T436/15 , Y10T436/20 , Y10T436/2575
摘要： A combinatorial method for discovering or optimizing materials is disclosed. The method uses solution-based components that are mixed and dispensed into regions on a substrate for drying and/or heat-treating. The drying and/or heat-treating produces materials that can be tested for a desired property.
摘要翻译：公开了用于发现或优化材料的组合方法。该方法使用基于溶液的组分，其混合并分配到基底上的区域用于干燥和/或热处理。干燥和/或热处理产生可以测试所需性质的材料。

7. 发明授权

US07034091B2 Combinatorial synthesis and screening of non-biological polymers 失效
标题翻译：非生物聚合物的组合合成和筛选
公开(公告)号：US07034091B2
公开(公告)日：2006-04-25
申请号：US10074745
申请日：2002-02-11
申请人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
发明人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
IPC分类号： C08F2/00 , C08F2/01 , B05D3/00
CPC分类号： C04B35/16 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2002/72 , C01P2006/40 , C01P2006/42 , C04B35/01 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , C40B80/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/1933 , H01F41/18 , H01F41/34 , H01L43/10 , Y10T428/24479 , Y10T428/24612 , Y10T428/2462 , Y10T428/31 , Y10T428/31645 , Y10T428/31855 , Y10T428/31931 , Y10T436/25 , Y10T436/2525 , Y10T436/255 , Y10T436/25875
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, non-biological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料来制备其上具有不同材料阵列的衬底。可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如，无机复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

8. 发明授权

US6048469A Advanced phosphors 失效
标题翻译：高级荧光粉
公开(公告)号：US6048469A
公开(公告)日：2000-04-11
申请号：US16577
申请日：1998-01-30
申请人： Xiao-Dong Xiang , Xiaodong Sun , Peter G. Schultz
发明人： Xiao-Dong Xiang , Xiaodong Sun , Peter G. Schultz
IPC分类号： C09K11/77 , C09K11/78 , C09K11/54 , C09K11/62 , C09K11/80 , C09K11/85
CPC分类号： C09K11/7773 , C09K11/7785 , C09K11/7792
摘要： This invention relates to new phosphor materials and to combinatorial methods of synthesizing and detecting the same. In addition, methods of using phosphors to generate luminescence are also disclosed.
摘要翻译：本发明涉及新的荧光体材料及其组合和检测方法。此外，还公开了使用磷光体产生发光的方法。

9. 发明授权

US08358141B2 Analytical scanning evanescent microwave microscope and control stage 失效
公开(公告)号：US08358141B2
公开(公告)日：2013-01-22
申请号：US12465022
申请日：2009-05-13
申请人： Xiao-Dong Xiang , Chen Gao , Fred Duewer , Hai Tao Yang , Yalin Lu
发明人： Xiao-Dong Xiang , Chen Gao , Fred Duewer , Hai Tao Yang , Yalin Lu
IPC分类号： G01R27/04 , G01R31/308
CPC分类号： G01Q60/22
摘要： A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.

10. 发明申请

US20090302866A1 ANALYTICAL SCANNING EVANESCENT MICROWAVE MICROSCOPE AND CONTROL STAGE 失效
标题翻译：分析扫描历史微波微波和控制阶段
公开(公告)号：US20090302866A1
公开(公告)日：2009-12-10
申请号：US12465022
申请日：2009-05-13
申请人： Xiao-Dong Xiang , Chen Gao , Fred Duewer , Hai Tao Yang , Yalin Lu
发明人： Xiao-Dong Xiang , Chen Gao , Fred Duewer , Hai Tao Yang , Yalin Lu
IPC分类号： G01R27/04 , G01R1/06
CPC分类号： G01Q60/22
摘要： A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.
摘要翻译：公开了一种使用近场瞬逝电磁波探测样品特性的扫描瞬逝微波显微镜（SEMM）。 SEMM能够对样品的电性能进行高分辨率成像和定量测量。 SEMM具有映射材料的介电常数，损耗角正切，电导率，电阻抗等电参数的能力。然后使用这种性质在扫描的ev逝微波探针的电介质和导电样品上在宽范围（从微米到纳米）之间提供距离控制，其能够实现电介质的定量非接触和亚微米空间分辨率地形和电阻抗分布，非线性介质和导电材料。本发明还允许使用由扫描的ev逝微波探测器获得的信号和准静态近似建模来定量估计微波阻抗。 SEMM可用于测量电介质和导电材料的电学性能。

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