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1. 发明授权

US07767627B1 Combinatorial synthesis of inorganic or composite materials 失效
标题翻译：无机或复合材料的组合合成
公开(公告)号：US07767627B1
公开(公告)日：2010-08-03
申请号：US08847967
申请日：1997-04-22
申请人： Isy Goldwasser , Debra A. Ross , Peter G. Schultz , Xiao-Dong Xiang , Gabriel Briceño , Xian-Dong Sun , Kai-An Wang
发明人： Isy Goldwasser , Debra A. Ross , Peter G. Schultz , Xiao-Dong Xiang , Gabriel Briceño , Xian-Dong Sun , Kai-An Wang
IPC分类号： C40B40/18 , C40B50/04 , C40B20/02
CPC分类号： B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G3/006 , C01G21/006 , C01G29/006 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2004/84 , C01P2006/10 , C01P2006/32 , C01P2006/40 , C01P2006/42 , C01P2006/60 , C04B35/01 , C04B35/16 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B20/02 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F41/18 , H01F41/34 , H01L27/18 , Y10S436/809 , Y10T436/25
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials or, alternatively, allowing the components to interact to form at least two different materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, nonbiological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料，或者允许组分相互作用以形成至少两种不同的材料材料可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如无机物复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

2. 发明授权

US07320858B2 Formation of combinatorial arrays of materials using solution-based methodologies 有权
标题翻译：使用基于解决方案的方法形成材料组合阵列
公开(公告)号：US07320858B2
公开(公告)日：2008-01-22
申请号：US10404636
申请日：2003-03-31
申请人： Daniel M. Giaquinta , Martin Devenney , Keith A. Hall , Isy Goldwasser , Peter G. Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceño , Kai-An Wang
发明人： Daniel M. Giaquinta , Martin Devenney , Keith A. Hall , Isy Goldwasser , Peter G. Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceño , Kai-An Wang
IPC分类号： C12Q1/68
CPC分类号： C23C14/087 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00351 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00445 , B01J2219/00475 , B01J2219/00481 , B01J2219/00484 , B01J2219/00493 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00599 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/0065 , B01J2219/00657 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00702 , B01J2219/00707 , B01J2219/00711 , B01J2219/0072 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B01J2219/00756 , B82Y25/00 , B82Y30/00 , C01B13/185 , C01G51/006 , C01P2002/52 , C01P2004/54 , C01P2004/61 , C01P2004/84 , C01P2006/40 , C04B35/01 , C04B35/62218 , C09K11/08 , C09K11/7718 , C09K11/7774 , C09K11/7794 , C23C14/042 , C23C16/042 , C40B30/08 , C40B40/18 , C40B50/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/193 , H01F41/18 , H01F41/34 , Y10T436/11 , Y10T436/15 , Y10T436/20 , Y10T436/2575
摘要： A combinatorial method for discovering or optimizing materials is disclosed. The method uses solution-based components that are mixed and dispensed into regions on a substrate for drying and/or heat-treating. The drying and/or heat-treating produces materials that can be tested for a desired property.
摘要翻译：公开了用于发现或优化材料的组合方法。该方法使用基于溶液的组分，其混合并分配到基底上的区域用于干燥和/或热处理。干燥和/或热处理产生可以测试所需性质的材料。

3. 发明授权

US07034091B2 Combinatorial synthesis and screening of non-biological polymers 失效
标题翻译：非生物聚合物的组合合成和筛选
公开(公告)号：US07034091B2
公开(公告)日：2006-04-25
申请号：US10074745
申请日：2002-02-11
申请人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
发明人： Peter G. Schultz , Xiao-Dong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
IPC分类号： C08F2/00 , C08F2/01 , B05D3/00
CPC分类号： C04B35/16 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2002/72 , C01P2006/40 , C01P2006/42 , C04B35/01 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , C40B80/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/1933 , H01F41/18 , H01F41/34 , H01L43/10 , Y10T428/24479 , Y10T428/24612 , Y10T428/2462 , Y10T428/31 , Y10T428/31645 , Y10T428/31855 , Y10T428/31931 , Y10T436/25 , Y10T436/2525 , Y10T436/255 , Y10T436/25875
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, non-biological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料来制备其上具有不同材料阵列的衬底。可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如，无机复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

4. 发明申请

US20050260332A1 Formation of combinatorial arrays of materials using solution-based methodologies 有权
标题翻译：使用基于解决方案的方法形成材料组合阵列
公开(公告)号：US20050260332A1
公开(公告)日：2005-11-24
申请号：US10404636
申请日：2003-03-31
申请人： Daniel Giaquinta , Martin Devenney , Keith Hall , Isy Goldwasser , Peter Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceno , Kai-An Wang
发明人： Daniel Giaquinta , Martin Devenney , Keith Hall , Isy Goldwasser , Peter Schultz , Xiao-Dong Xiang , Xiao-Dong Sun , Gabriel Briceno , Kai-An Wang
IPC分类号： B01J19/00 , B05D3/00 , C01B13/18 , C01G51/00 , C04B35/01 , C04B35/622 , C07B61/00 , C09K11/08 , C09K11/77 , C23C14/04 , C23C14/08 , C23C16/04 , C40B30/08 , C40B40/18 , C40B50/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F1/40 , H01F10/00 , H01F10/193 , H01F41/18 , H01F41/34 , H01L43/10
CPC分类号： C23C14/087 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00351 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00445 , B01J2219/00475 , B01J2219/00481 , B01J2219/00484 , B01J2219/00493 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00599 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/0065 , B01J2219/00657 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00702 , B01J2219/00707 , B01J2219/00711 , B01J2219/0072 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B01J2219/00756 , B82Y25/00 , B82Y30/00 , C01B13/185 , C01G51/006 , C01P2002/52 , C01P2004/54 , C01P2004/61 , C01P2004/84 , C01P2006/40 , C04B35/01 , C04B35/62218 , C09K11/08 , C09K11/7718 , C09K11/7774 , C09K11/7794 , C23C14/042 , C23C16/042 , C40B30/08 , C40B40/18 , C40B50/08 , C40B60/14 , C40B70/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/193 , H01F41/18 , H01F41/34 , Y10T436/11 , Y10T436/15 , Y10T436/20 , Y10T436/2575
摘要： A combinatorial method for discovering or optimizing materials is disclosed. The method uses solution-based components that are mixed and dispensed into regions on a substrate for drying and/or heat-treating. The drying and/or heat-treating produces materials that can be tested for a desired property.
摘要翻译：公开了用于发现或优化材料的组合方法。该方法使用基于溶液的组分，其混合并分配到基底上的区域用于干燥和/或热处理。干燥和/或热处理产生可以测试所需性质的材料。

5. 发明授权

US06864201B2 Preparation and screening of crystalline zeolite and hydrothermally-synthesized materials 失效
标题翻译：结晶沸石和水热合成材料的制备和筛选
公开(公告)号：US06864201B2
公开(公告)日：2005-03-08
申请号：US09881036
申请日：2001-06-13
申请人： Peter G. Schultz , Xiaodong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
发明人： Peter G. Schultz , Xiaodong Xiang , Isy Goldwasser , Gabriel Briceno , Xiao-Dong Sun , Kai-An Wang
IPC分类号： C01G1/00 , B01J19/00 , C01G51/00 , C04B35/01 , C04B35/45 , C04B35/622 , C07B61/00 , C23C14/04 , C23C14/08 , C23C16/04 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/14 , C40B70/00 , G01N27/00 , G01N35/02 , G01N37/00 , G01R33/16 , H01F1/40 , H01F10/00 , H01F10/18 , H01F10/193 , H01F41/18 , H01F41/34 , H01L43/10 , H01L43/12 , B01J29/06 , B01J33/00 , B05D1/06 , B05D1/36 , G01N31/10
CPC分类号： C04B35/16 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2002/72 , C01P2006/40 , C01P2006/42 , C04B35/01 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , C40B80/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/1933 , H01F41/18 , H01F41/34 , H01L43/10 , Y10T428/24479 , Y10T428/24612 , Y10T428/2462 , Y10T428/31 , Y10T428/31645 , Y10T428/31855 , Y10T428/31931 , Y10T436/25 , Y10T436/2525 , Y10T436/255 , Y10T436/25875
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, non-biological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料来制备其上具有不同材料阵列的衬底。可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如，无机复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

6. 发明授权

US07442665B2 Preparation and screening of crystalline inorganic materials 失效
标题翻译：结晶无机材料的制备和筛选
公开(公告)号：US07442665B2
公开(公告)日：2008-10-28
申请号：US10772894
申请日：2004-02-04
申请人： Peter G. Schultz , Xiaodong Xiang , Isy Goldwasser , Gabriel Brice{hacek over (n)}o , Xiao-Dong Sun , Kai-An Wang
发明人： Peter G. Schultz , Xiaodong Xiang , Isy Goldwasser , Gabriel Brice{hacek over (n)}o , Xiao-Dong Sun , Kai-An Wang
IPC分类号： B01J29/06 , B01J33/00 , B05D1/06 , B05D1/36 , G01N31/10
CPC分类号： C04B35/16 , B01J19/0046 , B01J2219/00313 , B01J2219/00317 , B01J2219/00378 , B01J2219/0043 , B01J2219/00432 , B01J2219/00436 , B01J2219/00441 , B01J2219/00443 , B01J2219/00475 , B01J2219/005 , B01J2219/00511 , B01J2219/00515 , B01J2219/0052 , B01J2219/00527 , B01J2219/00531 , B01J2219/00533 , B01J2219/00536 , B01J2219/0054 , B01J2219/00585 , B01J2219/0059 , B01J2219/00592 , B01J2219/00596 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00619 , B01J2219/00621 , B01J2219/00626 , B01J2219/00628 , B01J2219/0063 , B01J2219/00635 , B01J2219/00637 , B01J2219/00644 , B01J2219/00646 , B01J2219/00648 , B01J2219/00659 , B01J2219/00689 , B01J2219/00691 , B01J2219/00711 , B01J2219/0072 , B01J2219/00722 , B01J2219/00736 , B01J2219/00745 , B01J2219/00747 , B01J2219/00752 , B01J2219/00754 , B82Y25/00 , B82Y30/00 , C01G51/006 , C01G51/68 , C01P2002/34 , C01P2002/52 , C01P2002/72 , C01P2006/40 , C01P2006/42 , C04B35/01 , C04B35/4508 , C04B35/4521 , C04B35/4525 , C04B35/62218 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3262 , C04B2235/327 , C04B2235/3275 , C04B2235/3284 , C04B2235/3286 , C04B2235/3296 , C04B2235/3298 , C04B2235/3418 , C04B2235/3463 , C04B2235/656 , C04B2235/761 , C04B2235/762 , C04B2235/768 , C04B2235/96 , C23C14/042 , C23C14/087 , C23C16/042 , C40B30/08 , C40B40/14 , C40B40/18 , C40B60/08 , C40B60/14 , C40B70/00 , C40B80/00 , G01R33/16 , H01F1/401 , H01F1/407 , H01F10/007 , H01F10/1933 , H01F41/18 , H01F41/34 , H01L43/10 , Y10T428/24479 , Y10T428/24612 , Y10T428/2462 , Y10T428/31 , Y10T428/31645 , Y10T428/31855 , Y10T428/31931 , Y10T436/25 , Y10T436/2525 , Y10T436/255 , Y10T436/25875
摘要： Methods and apparatus for the preparation and use of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by delivering components of materials to predefined regions on a substrate, and simultaneously reacting the components to form at least two materials. Materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. More particularly, materials which can be prepared using the methods and apparatus of the present invention include, for example, inorganic materials, intermetallic materials, metal alloys, ceramic materials, organic materials, organometallic materials, non-biological organic polymers, composite materials (e.g., inorganic composites, organic composites, or combinations thereof), etc. Once prepared, these materials can be screened for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical, or other properties. Thus, the present invention provides methods for the parallel synthesis and analysis of novel materials having useful properties.
摘要翻译：用于制备和使用在其上的预定区域中具有不同材料阵列的基材的方法和装置。通常通过将材料的组分递送到衬底上的预定区域，并且同时使组分反应以形成至少两种材料来制备其上具有不同材料阵列的衬底。可以使用本发明的方法和装置制备的材料包括例如共价网络固体，离子固体和分子固体。更具体地，可以使用本发明的方法和装置制备的材料包括例如无机材料，金属间材料，金属合金，陶瓷材料，有机材料，有机金属材料，非生物有机聚合物，复合材料（例如，无机复合材料，有机复合材料或其组合）等。一旦制备，可以对这些材料进行筛选以获得有用的性质，包括例如电，热，机械，形态，光学，磁性，化学或其它性质。因此，本发明提供了用于并行合成和分析具有有用特性的新型材料的方法。

7. 发明授权

US06506289B2 Planar optical devices and methods for their manufacture 有权
公开(公告)号：US06506289B2
公开(公告)日：2003-01-14
申请号：US09903050
申请日：2001-07-10
申请人： Richard E. Demaray , Kai-An Wang , Ravi B. Mullapudi , Douglas P. Stadtler , Hongmei Zhang , Rajiv Pethe
发明人： Richard E. Demaray , Kai-An Wang , Ravi B. Mullapudi , Douglas P. Stadtler , Hongmei Zhang , Rajiv Pethe
IPC分类号： C23C1434
CPC分类号： C23C14/345 , C23C14/35 , G02B6/132 , G02B6/136 , G02B2006/12097 , G02B2006/12147 , G02B2006/1215 , Y10T156/10
摘要： Physical vapor deposition processes provide optical materials with controlled and uniform refractive index that meet the requirements for active and passive planar optical devices. All processes use radio frequency (RF) sputtering with a wide area target, larger in area than the substrate on which material is deposited, and uniform plasma conditions which provide uniform target erosion. In addition, a second RF frequency can be applied to the sputtering target and RF power can be applied to the substrate producing substrate bias. Multiple approaches for controlling refractive index are provided. The present RF sputtering methods for material deposition and refractive index control are combined with processes commonly used in semiconductor fabrication to produce planar optical devices such surface ridge devices, buried ridge devices and buried trench devices. A method for forming composite wide area targets from multiple tiles is also provided.

8. 发明授权

US06827826B2 Planar optical devices and methods for their manufacture 有权
标题翻译：平面光学器件及其制造方法
公开(公告)号：US06827826B2
公开(公告)日：2004-12-07
申请号：US10288278
申请日：2002-11-04
申请人： Richard E. Demaray , Kai-An Wang , Ravi B. Mullapudi , Douglas P. Stadtler , Hongmei Zhang , Rajiv Pethe
发明人： Richard E. Demaray , Kai-An Wang , Ravi B. Mullapudi , Douglas P. Stadtler , Hongmei Zhang , Rajiv Pethe
IPC分类号： C23C1434
CPC分类号： C23C14/345 , C23C14/35 , G02B6/132 , G02B6/136 , G02B2006/12097 , G02B2006/12147 , G02B2006/1215 , Y10T156/10
摘要： Physical vapor deposition processes provide optical materials with controlled and uniform refractive index that meet the requirements for active and passive planar optical devices. All processes use radio frequency (RF) sputtering with a wide area target, larger in area than the substrate on which material is deposited, and uniform plasma conditions which provide uniform target erosion. In addition, a second RF frequency can be applied to the sputtering target and RF power can be applied to the substrate producing substrate bias. Multiple approaches for controlling refractive index are provided. The present RF sputtering methods for material deposition and refractive index control are combined with processes commonly used in semiconductor fabrication to produce planar optical devices such surface ridge devices, buried ridge devices and buried trench devices. A method for forming composite wide area targets from multiple tiles is also provided.
摘要翻译：物理气相沉积工艺提供具有受控和均匀折射率的光学材料，以满足有源和无源平面光学器件的要求。所有工艺都使用射频（RF）溅射，其面积大于靶材的面积，面积大于沉积材料的衬底，以及提供均匀靶蚀的均匀等离子体条件。此外，第二RF频率可以应用于溅射靶，并且RF功率可以施加到产生衬底偏压的衬底。提供了多种控制折射率的方法。本发明的用于材料沉积和折射率控制的RF溅射方法与通常用于半导体制造中的工艺组合以产生诸如表面脊装置，埋脊装置和埋沟设备的平面光学装置。还提供了用于从多个瓦片形成复合广域目标的方法。

9. 发明授权

US07534080B2 Vacuum processing and transfer system 有权
标题翻译：真空加工转运系统
公开(公告)号：US07534080B2
公开(公告)日：2009-05-19
申请号：US11212142
申请日：2005-08-26
申请人： George Xinsheng Guo , Kai-An Wang
发明人： George Xinsheng Guo , Kai-An Wang
IPC分类号： H01L21/677
CPC分类号： H01L21/67751 , H01L21/6719 , H01L21/67196 , Y10S414/139
摘要： An apparatus for processing a work piece in a vacuum environment includes a master process chamber configured to be exhausted to a sub-atmospheric air pressure or to be filled with a desirable gas, a transfer chamber configured to receive the work piece from outside of the master process chamber, one or more processing stations inside the master process chamber, a rotation plate configured to receive the work piece and to move the work piece to receive one or more processing operations, and a first transport mechanism configured to transfer the work piece from the transfer chamber on to the rotation plate. The transfer chamber is at least partially enclosed in the master process chamber and can be vacuum sealed off from the master process chamber.
摘要翻译：一种用于在真空环境中处理工件的设备包括：主处理室，其被配置为排出到次大气压或者填充有所需的气体;传送室，被构造成从母板的外部接收工件处理室，主处理室内的一个或多个处理站，配置成接收工件并移动工件以接收一个或多个处理操作的旋转板，以及第一传送机构，其被配置为将工件从传送室到旋转板上。传送室至少部分地封闭在主处理室中，并且可以从主处理室真空密封。

10. 发明授权

US06533907B2 Method of producing amorphous silicon for hard mask and waveguide applications 有权
公开(公告)号：US06533907B2
公开(公告)日：2003-03-18
申请号：US09766463
申请日：2001-01-19
申请人： Richard E. Demaray , Jesse Shan , Kai-An Wang , Ravi B. Mullapudi
发明人： Richard E. Demaray , Jesse Shan , Kai-An Wang , Ravi B. Mullapudi
IPC分类号： C23C1434
CPC分类号： H01J37/3444 , C23C14/14 , C23C14/3414 , C23C14/35 , H01J37/3408
摘要： A specialized physical vapor deposition process provides dense amorphous semiconducting material with exceptionally smooth morphology. In particular, the process provides dense, smooth amorphous silicon useful as a hard mask for etching optical and semiconductor devices and as a high refractive index material in optical devices. DC sputtering of a planar target of intrinsic crystalline semiconducting material in the presence of a sputtering gas under a condition of uniform target erosion is used to deposit amorphous semiconducting material on a substrate. DC power that is modulated by AC power is applied to the target. The process provides dense, smooth amorphous silicon at high deposition rates. A method of patterning a material layer including forming a hard mask layer of amorphous silicon on a material layer according to the present DC sputtering process is also provided. The low average surface roughness of the amorphous silicon hard mask is reflected in the low average surface roughness of the sidewalls of the etched material layer. In addition, a method of forming optical devices in which the DC sputtered amorphous semiconductor materials are used as the high refractive index material is provided.

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