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1. 发明授权

US07522650B2 Gas discharge laser chamber improvements 有权
公开(公告)号：US07522650B2
公开(公告)日：2009-04-21
申请号：US10815387
申请日：2004-03-31
申请人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
发明人： William N. Partlo , Yoshiho Amada , James A. Carmichael , Timothy S. Dyer , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Curtis L. Rettig , Brian D. Strate , Thomas D. Steiger , Fedor Trintchouk , Richard C. Ujazdowski
IPC分类号： H01S3/22
CPC分类号： H01S3/036 , H01S3/0384 , H01S3/041 , H01S3/0971 , H01S3/225
摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

2. 发明授权

US07301980B2 Halogen gas discharge laser electrodes 有权
标题翻译：卤素气体放电激光电极
公开(公告)号：US07301980B2
公开(公告)日：2007-11-27
申请号：US10877737
申请日：2004-06-25
申请人： Thomas D. Steiger , Richard C. Ujazdowski , Timothy S. Dyer , Thomas P. Duffey , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Brian D. Strate
发明人： Thomas D. Steiger , Richard C. Ujazdowski , Timothy S. Dyer , Thomas P. Duffey , Walter D. Gillespie , Bryan G. Moosman , Richard G. Morton , Brian D. Strate
IPC分类号： H01S3/097
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.
摘要翻译：气体放电激光器包括含有卤素激光气体的激光室，限定阴极和阳极的两个电极元件，每个具有限定两个纵向边缘的放电接收区域，并且具有限定电极元件之间的放电宽度的区域宽度在激光气体中。阳极包括第一阳极部分，其包括限定第一阳极材料侵蚀速率的第一阳极材料，其完全位于放电接收区域内;一对第二阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，分别位于所述第一阳极部分的每一侧并且至少部分地在所述放电接收区域内; 与所述第一阳极部分成一体的电极中心基部; 并且其中相应的一对第二阳极部分中的每一个机械地结合到中心基部。

3. 发明授权

US08855166B2 6 KHz and above gas discharge laser system 有权
标题翻译： 6KHz及以上气体放电激光系统
公开(公告)号：US08855166B2
公开(公告)日：2014-10-07
申请号：US13352127
申请日：2012-01-17
申请人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
发明人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
IPC分类号： H01S3/08 , H01S3/036 , H01F38/10 , H01F3/10 , H01F27/22 , H01S3/041 , H01S3/225 , H01S3/097 , H01F27/26 , H01S3/04 , H01S3/23
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
摘要翻译：一种操作高重复率气体放电激光系统的系统和方法。该系统包括气体放电室，其具有通过气体放电激光室的操作加热的热室输出窗口，在热室窗口下游的输出激光束脉冲光束路径，包括环境温度窗口，冷却机构光束路径外壳在输出窗口和环境窗口之间。气体放电室可以包括纵向和轴向柔性接地棒，包括连接到第一室壁的第一端，连接到第二室壁的第二端，与第一室壁相对的第二室壁和形成为第一室壁的第一部分螺旋弹簧，接地棒提供机械支撑用于前置离子管。

4. 发明申请

US20120120974A1 6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM 有权
标题翻译： 6 KHZ及以上气体放电激光系统
公开(公告)号：US20120120974A1
公开(公告)日：2012-05-17
申请号：US13352127
申请日：2012-01-17
申请人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
发明人： Richard C. Ujazdowski , Richard M. Ness , J. Martin Algots , Vladimir B. Fleurov , Frederick A. Palenschat , Walter D. Gillespie , Bryan G. Moosman , Thomas D. Steiger , Brett D. Smith , Thomas E. McKelvey
IPC分类号： H01S3/041 , H01S3/03
CPC分类号： H01S3/036 , H01F3/10 , H01F27/22 , H01F27/266 , H01F38/10 , H01S3/0404 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/225 , H01S3/2308
摘要： A system and method of operating a high repetition rate gas discharge laser system. The system includes a gas discharge chamber having a hot chamber output window heated by the operation of the gas discharge laser chamber, an output laser light pulse beam path enclosure downstream of the hot chamber window and comprising an ambient temperature window, a cooling mechanism cooling the beam path enclosure intermediate the output window and the ambient window. The gas discharge chamber can include a longitudinally and axially compliant ground rod, including a first end connected to a first chamber wall, a second end connected to a second chamber wall, the second chamber wall opposite the first chamber wall and a first portion formed into a helical spring, the ground rod providing mechanical support for a preionizer tube.
摘要翻译：一种操作高重复率气体放电激光系统的系统和方法。该系统包括气体放电室，其具有通过气体放电激光室的操作加热的热室输出窗口，在热室窗口下游的输出激光束脉冲光束路径，包括环境温度窗口，冷却机构光束路径外壳在输出窗口和环境窗口之间。气体放电室可以包括纵向和轴向柔性接地棒，包括连接到第一室壁的第一端，连接到第二室壁的第二端，与第一室壁相对的第二室壁和形成为第一室壁的第一部分螺旋弹簧，接地棒提供机械支撑用于前置离子管。

5. 发明授权

US07068697B1 Adjustable flow guide to accommodate electrode erosion in a gas discharge laser 有权
标题翻译：可调导流板，适应气体放电激光器的电极腐蚀
公开(公告)号：US07068697B1
公开(公告)日：2006-06-27
申请号：US11239581
申请日：2005-09-28
申请人： Yoshiho Amada , Richard G. Morton , Bryan G. Moosman
发明人： Yoshiho Amada , Richard G. Morton , Bryan G. Moosman
IPC分类号： H01S3/22
CPC分类号： H01S3/097 , H01S3/036 , H01S3/038 , H01S3/225 , H01S3/2251
摘要： A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.
摘要翻译：一种用于操作激光器的激光器和方法，并公开。激光器可以包括位于距离第一电极一定距离的第一放电电极和第二放电电极。可激光气体可与循环系统一起设置，以将气体流入电极之间的空间。电压源可以连接到电极以在该空间中产生放电; 并且可以提供具有与气体接触的引导表面的流动引导件，其是相对于第一电极选择性地可移动的引导件，以引导气体流入空间。在一个实施方案中，流动引导件将流动引向第一电极的末端，并且可调节以使流向第一电极磨损时的末端流动。

6. 发明授权

US07995637B2 Gas discharge laser chamber 有权
标题翻译：气体放电激光室
公开(公告)号：US07995637B2
公开(公告)日：2011-08-09
申请号：US12603486
申请日：2009-10-21
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
IPC分类号： H01S3/22
CPC分类号： H01S3/036
摘要： One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.
摘要翻译：所公开的主题的一个方面描述了气体放电激光室。气体放电激光室包括形成在第一电极和第二电极之间的放电区域，用于使气体循环通过放电区域的切向风扇，其中风扇靠近放电区域的输入侧，输入侧隔音板接近到放电区域的输入侧。输入侧声挡板包括消失点前缘，消失点后缘，气流平滑偏移表面，使来自输入侧声挡板的表面的气流与放电区域中的阴极支撑体的输入侧对准，由多个沟槽分离的多个脊，其中所述多个脊和所述多个沟槽与通过所述放电区域的气体流动的方向对齐，并且其中所述多个脊具有约0.3和约0.7英寸之间的随机间距。

7. 发明申请

US20100142582A1 GAS DISCHARGE LASER CHAMBER 有权
标题翻译：气体放电激光室
公开(公告)号：US20100142582A1
公开(公告)日：2010-06-10
申请号：US12603486
申请日：2009-10-21
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Bryan G. Moosman , Tae H. Chung , Thomas P. Duffey , James J. Ferrell , Terance Hilsabeck
IPC分类号： H01S3/038 , H01S3/03
CPC分类号： H01S3/036
摘要： One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region, wherein the fan is proximate to an input side of the discharge region, an input side acoustic baffle proximate to the input side of the discharge region. The input side acoustic baffle includes a vanishing point leading edge, a vanishing point trailing edge, a gas flow smoothing offset surface aligning a gas flow from a surface of the input side acoustic baffle to an input side of a cathode support in the discharge region, a plurality of ridges separated by a plurality of trenches, wherein the plurality of ridges and the plurality of trenches are aligned with a direction of gas flow through the discharge region and wherein the plurality of ridges have a random pitch between about 0.3 and about 0.7 inch.
摘要翻译：所公开的主题的一个方面描述了气体放电激光室。气体放电激光室包括形成在第一电极和第二电极之间的放电区域，用于使气体循环通过放电区域的切向风扇，其中风扇靠近放电区域的输入侧，输入侧隔音板接近到放电区域的输入侧。输入侧声挡板包括消失点前缘，消失点后缘，气流平滑偏移表面，使来自输入侧声挡板的表面的气流与放电区域中的阴极支撑体的输入侧对准，由多个沟槽分开的多个脊，其中所述多个脊和所述多个沟槽与通过所述放电区域的气体流动方向对齐，并且其中所述多个脊具有约0.3和约0.7英寸之间的随机间距。

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