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1. 发明申请

US20070197062A1 ELECTRONIC DEVICE MANUFACTURING COMPONENT WITH AN EMBEDDED CHIP AND METHODS OF USING THE SAME 有权
标题翻译：具有嵌入芯片的电子设备制造组件及其使用方法
公开(公告)号：US20070197062A1
公开(公告)日：2007-08-23
申请号：US11672441
申请日：2007-02-07
申请人： William Bagley , Paohuei Lee , Suhail Anwar , Janusz Jozwiak
发明人： William Bagley , Paohuei Lee , Suhail Anwar , Janusz Jozwiak
IPC分类号： H01R13/648
CPC分类号： H01L21/67294 , Y10T29/5313
摘要： Systems, methods, and apparatus are provided for including a chip embedded in components of electronic device manufacturing systems adapted to sense, store, and/or update at least one of identification, operational-related and process-related information associated with the components. In other aspects of the invention, a processing chamber component having an embedded chip with storage capacity is adapted to record at least one of identification, operational-related and process-related information associated with the component; and to communicate the information from the chip to enable determination of an operational state of the component. Numerous other aspects are disclosed.
摘要翻译：提供了系统，方法和装置，用于包括嵌入在电子设备制造系统的组件中的芯片，其适于感测，存储和/或更新与组件相关联的识别，操作相关和与过程相关的信息中的至少一个。在本发明的其它方面，具有具有存储容量的嵌入式芯片的处理室组件适于记录与该组件相关联的识别，操作相关和与过程相关的信息中的至少一个; 并且从芯片传送信息以使得能够确定组件的操作状态。公开了许多其他方面。

2. 发明申请

US20060087647A1 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate 有权
标题翻译：用于动态检测基板破损和移动基板未对准的传感器
公开(公告)号：US20060087647A1
公开(公告)日：2006-04-27
申请号：US10973116
申请日：2004-10-26
申请人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
发明人： William Bagley , Paohuei Lee , Kyung-Tae Kim , Sam-Kyung Kim , Toshio Kiyotake , Sam Kim , Takayuki Matsumoto , Jonathan Larson , Makoto Inagawa , James Hoffman , Billy Leung
IPC分类号： G01N21/88
CPC分类号： H01L21/67265 , G01N21/9501
摘要： An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
摘要翻译：一种装置和方法，其结合有至少两个传感器，其沿着移动基板的至少两个平行边缘的长度检测基板缺陷的存在，例如断裂或未对准。在一个实施例中，用于检测衬底缺陷的装置包括传感器装置，其包括至少两个传感器，当衬底通过传感器时，至少两个传感器连续感测衬底的至少两个平行边缘附近的衬底。在另一个实施例中，一种用于检测衬底缺陷的装置包括具有衬底支撑表面的机器人，以及包括至少两个传感器的传感器装置，所述传感器装置包括至少两个传感器，所述至少两个传感器在衬底支承表面。在另一个实施例中，连续检测衬底缺陷的方法包括：当衬底通过传感器时，定位至少两个传感器以连续地感测衬底的至少两个平行边缘附近的衬底，并且从至少两个传感器涉及连续地监视来自至少两个传感器的信号以检测衬底缺陷的存在的控制器。

3. 发明申请

US20070256637A1 METHODS AND APPARATUS FOR USING A REINFORCED DIFFUSER IN SUBSTRATE PROCESSING 审中-公开
标题翻译：在基板加工中使用增强扩散器的方法和装置
公开(公告)号：US20070256637A1
公开(公告)日：2007-11-08
申请号：US11741745
申请日：2007-04-28
申请人： William Bagley , Toshio Kiyotake , Masahiko Kowaka
发明人： William Bagley , Toshio Kiyotake , Masahiko Kowaka
IPC分类号： C23C16/00
CPC分类号： C23C16/45565
摘要： The invention provides methods and apparatus for using a reinforced gas diffuser in substrate processing. A gas diffuser for use in a PECVD processes includes an aluminum plate with reinforcement material embedded within the aluminum plate. The reinforcement material is adapted to support the aluminum plate and maintain a flatness of the aluminum plate. Numerous other aspects are disclosed.
摘要翻译：本发明提供了在衬底处理中使用增强气体扩散器的方法和装置。用于PECVD工艺的气体扩散器包括铝板，其具有嵌入在铝板内的增强材料。加强材料适于支撑铝板并保持铝板的平整度。公开了许多其他方面。

4. 发明申请

US20070039942A1 Active cooling substrate support 有权
标题翻译：主动冷却基板支撑
公开(公告)号：US20070039942A1
公开(公告)日：2007-02-22
申请号：US11206245
申请日：2005-08-16
申请人： Samuel Leung , Su Ho Cho , William Bagley
发明人： Samuel Leung , Su Ho Cho , William Bagley
IPC分类号： F26B11/02 , H05B3/68 , C23C16/00
CPC分类号： C23C16/46 , C23C16/458 , C23C16/4582 , C23C16/4583 , C23C16/4586 , C23C16/463 , H01J37/32715 , H01J37/32724 , H01L21/67069 , H01L21/67103
摘要： A substrate support assembly and method for controlling the temperature of a substrate within a process chamber with a temperature uniformity of +/−5° C. are provided. A substrate support assembly includes a thermally conductive body comprising an aluminum material, a substrate support surface on the surface of the thermally conductive body and adapted to support the large area glass substrate thereon, one or more heating elements embedded within the thermally conductive body, and one or more cooling channels embedded within the thermally conductive body and positioned around the one or more heating elements. A process chamber comprising the substrate support assembly of the invention is also provided.
摘要翻译：提供了一种用于控制温度均匀度为+/- 5℃的处理室内的衬底的温度的衬底支撑组件和方法。衬底支撑组件包括导热体，该导热体包括铝材料，在导热体表面上的衬底支撑表面，并且适于支撑其上的大面积玻璃衬底，一个或多个嵌入导热体内的加热元件，以及一个或多个冷却通道嵌入在导热体内并围绕一个或多个加热元件定位。还提供了包括本发明的基板支撑组件的处理室。

5. 发明申请

US20070046189A1 Intermediate connector for a tandem OLED device 审中-公开
标题翻译：用于串联OLED器件的中间连接器
公开(公告)号：US20070046189A1
公开(公告)日：2007-03-01
申请号：US11217026
申请日：2005-08-31
申请人： Tukaram Hatwar , William Bagley
发明人： Tukaram Hatwar , William Bagley
IPC分类号： H01L51/52 , H01L51/54
CPC分类号： H01L51/5278 , H01L51/002 , H01L51/0054 , H01L51/0058 , H01L51/0081 , H01L51/5052
摘要： A tandem OLED device includes an anode, a cathode, at least first and second electroluminescent units disposed between the anode and the cathode. The electroluminescent units include an individually selected organic light-emitting layer and an intermediate connector disposed between the first and second electroluminescent units. The intermediate connector includes an n-type doped organic layer having an n-type dopant and an electron-transporting material. The electron-transporting material is a mixture of a first organic compound that has the lowest LUMO value of the compounds in the n-type doped organic layer, in an amount greater than or equal to 10% by volume and less than 100% by volume of the layer; at least one second organic compound exhibiting a higher LUMO value than the first organic compound.
摘要翻译：串联OLED器件包括阳极，阴极，设置在阳极和阴极之间的至少第一和第二电致发光单元。电致发光单元包括单独选择的有机发光层和设置在第一和第二电致发光单元之间的中间连接器。中间连接器包括具有n型掺杂剂和电子传输材料的n型掺杂有机层。电子传输材料是n型掺杂有机层中化合物的LUMO值最低的第一有机化合物的混合物，其量大于或等于10体积％且小于100体积％的层; 显示比第一有机化合物更高的LUMO值的至少一种第二有机化合物。

6. 发明授权

US3994190A Work support for shear 失效
标题翻译：剪切工作支持
公开(公告)号：US3994190A
公开(公告)日：1976-11-30
申请号：US608779
申请日：1975-08-28
申请人： William Bagley
发明人： William Bagley
IPC分类号： B21D43/00 , B21D43/28 , B26D7/06
CPC分类号： B21D43/003 , B21D43/287 , Y10T83/2198
摘要： A knife ram operated sliding work support attachment for a metal cutting shears.
摘要翻译：用于金属切割剪刀的滑动工具支撑附件。

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