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    • 1. 发明授权
    • Inductive inertial sensor architecture and fabrication in packaging build-up layers
    • 感应惯性传感器结构和制造在包装堆积层
    • US09429427B2
    • 2016-08-30
    • US13720876
    • 2012-12-19
    • Qing MaFeras EidKevin LinJohanna M. SwanWeng Hong TehValluri R. Rao
    • Qing MaFeras EidKevin LinJohanna M. SwanWeng Hong TehValluri R. Rao
    • G01C19/00G01C19/56G01C19/5776
    • G01C19/56G01C19/5776
    • This invention relates to inductive inertial sensors employing a magnetic drive and/or sense architecture. In embodiments, translational gyroscopes utilize a conductive coil made to vibrate in a first dimension as a function of a time varying current driven through the coil in the presence of a magnetic field. Sense coils register an inductance that varies as a function of an angular velocity in a second dimension. In embodiments, the vibrating coil causes first and second mutual inductances in the sense coils to deviate from each other as a function of the angular velocity. In embodiments, self-inductances associated with a pair of meandering coils vary as a function of an angular velocity in a second dimension. In embodiments, package build-up layers are utilized to fabricate the inductive inertial sensors, enabling package-level integrated inertial sensing advantageous in small form factor computing platforms, such as mobile devices.
    • 本发明涉及采用磁驱动和/或感测架构的感应惯性传感器。 在实施例中,平移陀螺仪利用在第一维度中制成的导电线圈作为在存在磁场的情况下驱动通过线圈的时变电流的函数。 感应线圈记录在第二维度上作为角速度的函数变化的电感。 在实施例中,振动线圈使得感测线圈中的第一和第二互感器作为角速度的函数彼此偏离。 在实施例中,与一对曲折线圈相关联的自感量作为第二维度中的角速度的函数而变化。 在实施例中,使用封装积层来制造感应惯性传感器,使得能够在诸如移动设备的小尺寸计算平台中有利的封装级集成惯性感测。