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1. 发明授权

US5679625A Method of making an oxide superconducting thin film 失效
标题翻译：制造氧化物超导薄膜的方法
公开(公告)号：US5679625A
公开(公告)日：1997-10-21
申请号：US563905
申请日：1995-11-22
申请人： Wataru Ito , Tadataka Morishita , Norio Homma , Yukihisa Yoshida
发明人： Wataru Ito , Tadataka Morishita , Norio Homma , Yukihisa Yoshida
IPC分类号： C01G1/00 , C01G3/00 , C23C14/08 , C23C14/35 , C23C14/46 , C30B29/22 , H01L39/24 , C23C14/34
CPC分类号： C23C14/35 , C23C14/087 , C23C14/46 , H01L39/2435 , Y10S505/731
摘要： A method of making a superconducting thin film of a Y--Ba--Cu--O series material by using a diode parallel plate type sputtering apparatus including a vacuum chamber, a substrate disposed within the vacuum chamber and having a substantially flat surface on which the superconducting thin film is to be formed, and a plate-shaped target functioning as a cathode and disposed within the vacuum chamber to parallelly face to the flat surface of the substrate, the target being made of the same material as the superconducting thin film, a plasma gas being introduced into the vacuum chamber, and a voltage being applied between the cathode and the substrate, wherein the method comprises the steps of applying a high frequency voltage having a frequency higher than 40 MHz between the cathode and the substrate to generate plasma of the introduced gas, superimposing a DC voltage (V) on the high frequency voltage in a polarity that the cathode becomes negative, and setting the DC voltage at a value where the DC voltage is substantially unchanged with variation of a cathode current flowing through the target when adjusting the DC voltage and controlling a value of the DC current while maintaining the DC voltage substantially at the set value.
摘要翻译：通过使用包括真空室的二极管平行板型溅射装置制造Y-Ba-Cu-O系材料的超导薄膜的方法，设置在真空室内的基板，并具有基本平坦的表面，超导要形成薄膜，并且一个板状靶用作阴极并且设置在真空室内以平行地面对基板的平坦表面，靶由与超导薄膜相同的材料制成，等离子体气体被引入真空室中，并且施加在阴极和衬底之间的电压，其中该方法包括在阴极和衬底之间施加频率高于40MHz的高频电压以产生等离子体的步骤引入气体，以与阴极变为负极性的高频电压叠加直流电压（V），将直流电压设定为当调节直流电压并控制直流电流的值同时保持直流电压基本上处于设定值时，直流电压随着流经目标的阴极电流的变化而基本上不变。

2. 发明授权

US5466665A Method of manufacturing Y-Ba-Cu-O superconducting thin film 失效
标题翻译：制造Y-Ba-Cu-O超导薄膜的方法
公开(公告)号：US5466665A
公开(公告)日：1995-11-14
申请号：US263957
申请日：1994-06-16
申请人： Yukihisa Yoshida , Wataru Ito , Tadataka Morishita
发明人： Yukihisa Yoshida , Wataru Ito , Tadataka Morishita
IPC分类号： C23C14/34 , C23C14/08 , C23C14/35 , C23C14/44 , C30B23/08 , H01L39/24
CPC分类号： C23C14/3435 , C23C14/087 , C23C14/35 , H01L39/2435
摘要： A method of manufacturing YBCO superconducting thin films is obtained which is capable of providing superconducting thin films having excellent crystallinity in a high yield by introducing a new film formation parameter in a hybrid plasma sputtering method. When a Y--Ba--Cu--O type superconducting thin film is formed by using a parallel plate sputtering method, a high-frequency voltage generated by a high-frequency power source is superimposed on a DC voltage generated by a DC power source and applied to the cathode electrode at the same time, an electrically conductive YBCO target is placed on the cathode, and the film formation conditions are controlled on the basis of the difference between the voltage drops in each ion sheath formed on the substrate and directly on the target by applying a DC voltage to a substrate holder from the DC power source.
摘要翻译：获得制造YBCO超导薄膜的方法，其能够通过在复合等离子体溅射法中引入新的成膜参数，以高产率提供具有优异结晶性的超导薄膜。当使用平行板溅射法形成Y-Ba-Cu-O型超导薄膜时，将由高频电源产生的高频电压叠加在由直流电源产生的直流电压上并施加同时向阴极施加导电YBCO靶，并且基于形成在基板上的每个离子鞘中的直接在目标上的电压降之间的差值来控制成膜条件通过从DC电源向基板保持器施加DC电压。

3. 发明申请

US20120168082A1 PLASMA GENERATING APPARATUS 审中-公开
标题翻译：等离子体发生装置
公开(公告)号：US20120168082A1
公开(公告)日：2012-07-05
申请号：US13394015
申请日：2010-07-15
申请人： Shinichi Izuo , Yukihisa Yoshida , Takaaki Murakami
发明人： Shinichi Izuo , Yukihisa Yoshida , Takaaki Murakami
IPC分类号： H01L21/3065 , H01J61/28 , C23C16/50
CPC分类号： H01J37/32541 , C23C16/24 , C23C16/452 , C23C16/509 , H01J37/3244 , H01J37/32449 , H01J37/3255 , H01J37/32816
摘要： A plasma generating apparatus irradiates plasma on a treatment object. The plasma is generated under gas pressure equal to or higher than 100 pascals and equal to or lower than atmospheric pressure in an inter-electrode gap between a first electrode to which a power supply is connected and a second electrode arranged to be opposed to the first electrode and grounded. The first electrode has a structure in which the first electrode is retained on a grounded conductive retaining member via a solid dielectric provided on a surface not opposed to the second electrode, and a conductive film is continuously provided on a surface in a predetermined range in contact with the conductive retaining member and a surface in a predetermined range not in contact with the conductive retaining member on a surface of the solid dielectric.
摘要翻译：等离子体发生装置将等离子体照射在处理对象上。在连接有电源的第一电极和布置成与第一电极相对的第二电极之间的电极间间隙中，在等于或高于100pascals且等于或低于大气压力的气体压力下产生等离子体电极接地。第一电极具有这样的结构，其中第一电极经由设置在不与第二电极相对的表面上的固体电介质保持在接地的导电保持构件上，并且导电膜在预定的接触范围内的表面上连续地设置导电保持构件和在固体电介质的表面上与导电保持构件不接触的预定范围的表面。

4. 发明申请

US20070290517A1 Non-Contact Transport Apparatus 审中-公开
标题翻译：非接触运输装置
公开(公告)号：US20070290517A1
公开(公告)日：2007-12-20
申请号：US11754964
申请日：2007-05-29
申请人： Shigekazu Nagai , Akio Saitoh , Masahiko Someya , Masaru Saitoh , Yukihisa Yoshida
发明人： Shigekazu Nagai , Akio Saitoh , Masahiko Someya , Masaru Saitoh , Yukihisa Yoshida
IPC分类号： B65H29/00 , B65G49/07
CPC分类号： H01L21/6838 , H01L21/67784
摘要： A non-contact transport apparatus comprises a top plate with a supply port for supplying air thereto, a diffuser plate having a plurality of discharge holes for discharging air, and a sheet-shaped nozzle plate interposed between the top plate and the diffuser plate and having a plurality of nozzles therein. The top plate, the nozzle plate and the diffuser plate are stacked and integrally connected to one another through a plurality of connecting bolts. Air is supplied from the supply port and via flow passages to the plurality of nozzles. Air is directed to the outside from the plurality of discharge holes, via radially formed nozzles oriented in a radially outward direction.
摘要翻译：非接触输送装置包括：具有用于向其供给空气的供给口的顶板，具有多个用于排出空气的排出孔的扩散板，以及插入在顶板和扩散板之间的片状喷嘴板，多个喷嘴。顶板，喷嘴板和扩散板通过多个连接螺栓彼此堆叠并且一体地连接。空气从供给口供给，通过流路向多个喷嘴供给。空气通过沿径向向外的方向定向的径向形成的喷嘴从多个排出孔引导到外部。

5. 发明申请

US20130309416A1 ATMOSPHERIC PRESSURE PLASMA TREATMENT APPARATUS AND ATMOSPHERIC PRESSURE PLASMA TREATMENT METHOD 审中-公开
标题翻译：大气压力等离子体处理装置和大气压力等离子体处理方法
公开(公告)号：US20130309416A1
公开(公告)日：2013-11-21
申请号：US13981424
申请日：2011-11-21
申请人： Yoshinori Yokoyama , Shinichi Izuo , Yukihisa Yoshida , Takaaki Murakami
发明人： Yoshinori Yokoyama , Shinichi Izuo , Yukihisa Yoshida , Takaaki Murakami
IPC分类号： C23C16/50
CPC分类号： C23C16/50 , C23C16/4412 , C23C16/45519 , C23C16/45595 , H05H1/2406 , H05H2001/2412 , H05H2240/10
摘要： An atmospheric pressure plasma treatment apparatus includes a moving unit configured to relatively move an atmospheric pressure plasma treatment head and member to be treated, gas supply units configured to supply a reaction gas and a curtain gas, and a control unit. When the atmospheric pressure plasma treatment head and the member are relatively moved, the control unit performs control to increase a flow rate of the reaction gas and the curtain gas from an opposite direction side of a relative moving direction of the member with respect to the atmospheric pressure plasma treatment head and reduce a flow rate of the reaction gas and the curtain gas in the relative moving direction side of the member compared with the flow rates of the reaction gas and the curtain gas flowing when the atmospheric pressure plasma treatment head and the member are not relatively moved.
摘要翻译：大气压等离子体处理装置包括移动单元，其构造成相对移动大气压等离子体处理头和待处理构件，构造成供应反应气体和帘式气体的气体供应单元以及控制单元。当大气压等离子体处理头和构件相对移动时，控制单元执行控制，以增加反作用气体和帘式气体相对于大气的相对移动方向的相对方向侧的流量与当大气压等离子体处理头和构件的流体流动的反应气体和帘式气体的流量相比，降低了构件的相对移动方向侧的反应气体和帘式气体的流量，不相对移动

6. 发明授权

US07894205B2 Variable device circuit and method for manufacturing the same 失效
标题翻译：可变装置电路及其制造方法
公开(公告)号：US07894205B2
公开(公告)日：2011-02-22
申请号：US12052396
申请日：2008-03-20
申请人： Sangseok Lee , Yukihisa Yoshida , Tamotsu Nishino , Hiromoto Inoue , Shinnosuke Soda , Moriyasu Miyazaki
发明人： Sangseok Lee , Yukihisa Yoshida , Tamotsu Nishino , Hiromoto Inoue , Shinnosuke Soda , Moriyasu Miyazaki
IPC分类号： H05K7/00
CPC分类号： H03H7/0115 , H01G5/16 , H01G5/40 , H01L27/016 , H01L27/13 , H03H7/175 , H03H2001/0064 , H03H2007/008 , Y10T29/4913
摘要： There is provided a variable device circuit according to the present invention, including: a substrate; at least one movable switch device formed on a first principal surface of the substrate; at least one fixed capacitor device formed on the first principal surface of the substrate; at least one variable capacitor device formed on the first principal surface of the substrate; at least one variable inductor device formed on the first principal surface of the substrate; and wiring lines for electrically connecting the devices to one another, the wiring lines being formed on the first principal surface of the substrate; wherein electrical connections among the devices can be selected by operation of the movable switch device, whereby achieving stable, low-loss circuit characteristics with lower manufacturing cost.
摘要翻译：提供了根据本发明的可变器件电路，包括：衬底; 形成在所述基板的第一主表面上的至少一个可动开关装置; 形成在所述基板的所述第一主表面上的至少一个固定电容器件; 形成在所述基板的所述第一主表面上的至少一个可变电容器件; 形成在所述基板的所述第一主表面上的至少一个可变电感器件; 以及用于将所述装置彼此电连接的布线，所述布线形成在所述基板的所述第一主表面上; 其中可以通过可移动开关装置的操作来选择装置之间的电连接，从而以较低的制造成本实现稳定的低损耗电路特性。

7. 发明申请

US20090027138A1 Switch Circuit 审中-公开
标题翻译：开关电路
公开(公告)号：US20090027138A1
公开(公告)日：2009-01-29
申请号：US11886589
申请日：2005-03-29
申请人： Tamotsu Nishino , Masatake Hangai , Yukihisa Yoshida , Shinichi Izuo , Hirokazu Taketomi , Tomohiro Takahashi , Kenichiro Kodama , Kazushi Nishizawa , Yoko Koga , Araki Ohno , Shinnosuke Soda , Moriyasu Miyazaki , Kenichi Miyaguchi
发明人： Tamotsu Nishino , Masatake Hangai , Yukihisa Yoshida , Shinichi Izuo , Hirokazu Taketomi , Tomohiro Takahashi , Kenichiro Kodama , Kazushi Nishizawa , Yoko Koga , Araki Ohno , Shinnosuke Soda , Moriyasu Miyazaki , Kenichi Miyaguchi
IPC分类号： H01P1/10
CPC分类号： H01P1/127 , H01P1/184 , H01Q7/00 , H01Q9/14 , H01Q9/16
摘要： A switch circuit including: a plurality of MEMS switches connected in parallel or in series, which have different drive voltages; and a single voltage supply for driving the plurality of MEMS switches by the plurality of drive voltages, is used for a microwave circuit or an antenna circuit, to vary a configuration of the microwave circuit or the antenna circuit based on the drive voltage value. That is, the configuration of the microwave circuit or the antenna circuit can be varied based on the drive voltage value by using the switch circuit including the MEMS switches having the different drive voltages for the microwave circuit or the antenna circuit.
摘要翻译：一种开关电路，包括：并联或串联连接的多个MEMS开关，其具有不同的驱动电压; 并且用于通过多个驱动电压驱动多个MEMS开关的单个电压源用于微波电路或天线电路，以基于驱动电压值改变微波电路或天线电路的配置。也就是说，微波电路或天线电路的配置可以通过使用包括具有用于微波电路或天线电路的不同驱动电压的MEMS开关的开关电路，基于驱动电压值而变化。

8. 发明申请

US20070188264A1 Phase shift circuit, high frequency switch, and phase shifter 有权
标题翻译：移相电路，高频开关和移相器
公开(公告)号：US20070188264A1
公开(公告)日：2007-08-16
申请号：US10584187
申请日：2004-03-26
申请人： Kenichi Miyaguchi , Morishige Hieda , Tamotsu Nishino , Masatake Hangai , Moriyasu Miyazaki , Norihiro Yunoue , Hideki Hatakeyama , Yukihisa Yoshida , Tadashi Takagi
发明人： Kenichi Miyaguchi , Morishige Hieda , Tamotsu Nishino , Masatake Hangai , Moriyasu Miyazaki , Norihiro Yunoue , Hideki Hatakeyama , Yukihisa Yoshida , Tadashi Takagi
IPC分类号： H01P1/18
CPC分类号： H01P1/15 , H01P1/18 , H03H7/20
摘要： Provided is a small-size phase shift circuit having a broad band characteristic. The phase shift circuit includes: a first switching element for switching between a through path and a capacitance capacity; a second switching element for switching the capacitance capacity for the through path and the ground; and a first and a second inductor having inductance. One end of the first switching element is connected to one end of the second switching element by the first inductor while the other ends of the first and the second switching element are connected to each other by the second inductor. One end of the first switching element is connected to a high-frequency signal input terminal while the other end of the first switching element is connected to a high-frequency signal output terminal. Thus, it is possible to constitute a phase device satisfying a predetermined condition.
摘要翻译：提供了具有宽带特性的小尺寸相移电路。相移电路包括：用于在通路和电容容量之间切换的第一开关元件; 用于切换通路和地面的电容容量的第二开关元件; 以及具有电感的第一和第二电感器。第一开关元件的一端通过第一电感器连接到第二开关元件的一端，而第一和第二开关元件的另一端通过第二电感器相互连接。第一开关元件的一端连接到高频信号输入端子，而第一开关元件的另一端连接到高频信号输出端子。因此，可以构成满足预定条件的相位装置。

9. 发明授权

US07541894B2 Phase-shifting circuit and multibit phase shifter 有权
标题翻译：移相电路和多位移相器
公开(公告)号：US07541894B2
公开(公告)日：2009-06-02
申请号：US10594009
申请日：2004-07-27
申请人： Kenichi Miyaguchi , Morishige Hieda , Tamotsu Nishino , Masatake Hangai , Moriyasu Miyazaki , Yukihisa Yoshida , Tadashi Takagi , Mikio Hatamoto
发明人： Kenichi Miyaguchi , Morishige Hieda , Tamotsu Nishino , Masatake Hangai , Moriyasu Miyazaki , Yukihisa Yoshida , Tadashi Takagi , Mikio Hatamoto
IPC分类号： H01P9/00
CPC分类号： H01P1/185 , H03H11/20 , H03H11/48 , H03H19/008
摘要： A phase-shifting circuit includes: a first parallel circuit which is connected across input and output terminals of a high frequency signal, composed of a first inductor and a first switching element that exhibits a through state in an ON state and a capacitive property in an OFF state, and produces parallel resonance at a prescribed frequency when the first switching element is in the OFF state; a series circuit composed of a second inductor and a third inductor and connected in parallel with the first parallel circuit; a capacitor having its first terminal connected to a point of connection of the second and third inductors; and a second parallel circuit which is connected across a second terminal of the capacitor and a ground, composed of a fourth inductor and a second switching element that exhibits a through state in an ON state and a capacitive property in an OFF state, and produces parallel resonance at a prescribed frequency when the second switching element is in the OFF state. The phase-shifting circuit establishes by switching an operation mode of setting the first switching element at the ON state and the second switching element at the OFF state, or an operation mode of setting the first switching element at the OFF state and the second switching element at the ON state.
摘要翻译：一种移相电路包括：第一并联电路，其连接在高频信号的输入和输出端上，该第一并联电路由第一电感器和第一开关元件组成，该第一电感器和第一开关元件呈现导通状态的通态， OFF状态，并且当所述第一开关元件处于OFF状态时，以规定频率产生并联谐振; 串联电路，由第二电感器和第三电感器组成，并与第一并联电路并联; 电容器，其第一端子连接到第二和第三电感器的连接点; 以及连接在电容器的第二端子和地之间的第二并联电路，由第四电感器和第二开关元件构成，该第四电感器和第二开关元件呈现处于导通状态的通状态和处于断开状态的电容性质，并且产生并联当第二开关元件处于断开状态时以规定频率进行谐振。移相电路通过切换将处于导通状态的第一开关元件设定为OFF状态的操作模式，或者将第一开关元件设定为OFF状态的操作模式和第二开关元件在ON状态。

10. 发明申请

US20080247115A1 VARIABLE DEVICE CIRCUIT AND METHOD FOR MANUFACTURING THE SAME 失效
标题翻译：可变装置电路及其制造方法
公开(公告)号：US20080247115A1
公开(公告)日：2008-10-09
申请号：US12052396
申请日：2008-03-20
申请人： Sangseok LEE , Yukihisa Yoshida , Tamotsu Nishino , Hiromoto Inoue , Shinnosuke Soda , Moriyasu Miyazaki
发明人： Sangseok LEE , Yukihisa Yoshida , Tamotsu Nishino , Hiromoto Inoue , Shinnosuke Soda , Moriyasu Miyazaki
IPC分类号： H01G7/00 , H05K7/02 , H05K3/30 , H01G4/00
CPC分类号： H03H7/0115 , H01G5/16 , H01G5/40 , H01L27/016 , H01L27/13 , H03H7/175 , H03H2001/0064 , H03H2007/008 , Y10T29/4913
摘要： There is provided a variable device circuit according to the present invention, including: a substrate; at least one movable switch device formed on a first principal surface of the substrate; at least one fixed capacitor device formed on the first principal surface of the substrate; at least one variable capacitor device formed on the first principal surface of the substrate; at least one variable inductor device formed on the first principal surface of the substrate; and wiring lines for electrically connecting the devices to one another, the wiring lines being formed on the first principal surface of the substrate; wherein electrical connections among the devices can be selected by operation of the movable switch device, whereby achieving stable, low-loss circuit characteristics with lower manufacturing cost.
摘要翻译：提供了根据本发明的可变器件电路，包括：衬底; 形成在所述基板的第一主表面上的至少一个可动开关装置; 形成在所述基板的所述第一主表面上的至少一个固定电容器件; 形成在所述基板的所述第一主表面上的至少一个可变电容器件; 形成在所述基板的所述第一主表面上的至少一个可变电感器件; 以及用于将所述装置彼此电连接的布线，所述布线形成在所述基板的所述第一主表面上; 其中可以通过可移动开关装置的操作来选择装置之间的电连接，从而以较低的制造成本实现稳定的低损耗电路特性。

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