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    • 1. 发明授权
    • Method and apparatus for locating and aligning flimsy sheets
    • 用于定位和对齐脆弱片材的方法和装置
    • US4186918A
    • 1980-02-05
    • US859777
    • 1977-12-12
    • Walter W. FickerDavid E. LonserWilliam G. RanceAlfred A. StrickerWalter von Kaenel
    • Walter W. FickerDavid E. LonserWilliam G. RanceAlfred A. StrickerWalter von Kaenel
    • H05K13/02B28B1/30B32B15/04H01L21/67H01L21/677H01L21/68H05K3/46B65H5/22B65H9/08
    • H01L21/68H01L21/67H01L21/67787
    • A method and apparatus permitting accurate and repeatable steps of location and alignment of flimsy sheets during their transfer. A preferred embodiment comprises a sheet handler and method for aligning unfired ceramic green sheets used in multi-layer ceramic semiconductor packages. The thin flexible sheets are square or rectangular in shape and are provided with holes accurately punched in each corner thereof for alignment purposes. The sheets are moved by a vacuum input transfer head into orientation with a porous registration surface of an alignment fixture. The sheet is then trapped between opposed pressure zones emanating from the input transfer head and through the porous registration surface, respectively. With the sheet stabilized between the pressure zones four bullet-nosed alignment pins are raised from the registration surface into contact with the holes in the corners of the green sheet, thereby accurately aligning the sheet with respect to the alignment fixture. The input transfer head is then withdrawn and an output transfer head picks up the aligned sheet via vacuum means and transfers it to other processing locations. In an alternate embodiment the pressure zones are created between the output transfer head and the registration surface of the alignment fixture.
    • 一种方法和装置,允许脆弱片在其转移期间的位置和对准的精确和可重复的步骤。 优选实施例包括用于对准在多层陶瓷半导体封装中使用的未焙烧陶瓷生片的片处理器和方法。 薄的柔性片的形状为方形或矩形,并且在其每个拐角处设有准确冲孔的孔用于对准目的。 纸张通过真空输入转印头移动到具有对准夹具的多孔对准表面的方向上。 然后将片材分别从输入转印头发出的相对的压力区域和多孔配准表面之间分配。 当片材在压力区域之间稳定时,四个子弹对准销从对准表面升高成与生片的角部接触,从而使片材相对于对准夹具精确对准。 然后输入传送头被抽出,输出传送头通过真空装置拾取对准的片材并将其传送到其它处理位置。 在替代实施例中,在输出转印头和对准夹具的配准表面之间产生压力区。
    • 2. 发明授权
    • Pick up and placement head for green sheet and spacer
    • 拾取和放置头为绿色和间隔
    • US4185814A
    • 1980-01-29
    • US859778
    • 1977-12-12
    • Albert H. BuchmannThomas J. CochranWalter W. FickerAlfred A. StrickerWalter von Kaenel
    • Albert H. BuchmannThomas J. CochranWalter W. FickerAlfred A. StrickerWalter von Kaenel
    • B65H5/14B25J15/06B65G47/91B65H3/08H01L21/683B65H7/02
    • H01L21/6838B25J15/0076B25J15/0246B65G47/91B65H3/0883
    • A vacuum pick up and transfer head adapted for handling flimsy sheets of material such as spacer sheet and uncured ceramic sheet commonly referred to as green sheet. The vacuum transfer head is of generally rectangular configuration having a sheet contacting lip having vacuum slots formed through the periphery thereof to hold the sheets in place by vacuum pressure. The center of the sheet contacting face is recessed whereby, with a sheet in place and acting as a diaphragm, a central vacuum chamber is also defined. A series of check valves are provided to control application of vacuum and positive pressure to the green sheet for picking the sheet up, retaining it and stripping it. A plurality of probes are provided in the handling head, adapted to selectively project through the sheet contacting surface for detecting green sheet and/or spacer sheet utilized inbetween layers of green sheet. These probes also can act as positive strippers when the head enters a green sheet spacer tray in the process of removing a sheet of spacer or green sheet.
    • 真空拾取和转印头,适用于处理通常称为生片的隔离片和未固化的陶瓷片等薄片材料。 真空转印头通常为矩形,其具有通过其周边形成有真空槽的片接触唇缘,以通过真空压力将片保持在适当位置。 片接触面的中心是凹陷的,由此,当片材在适当位置并且用作隔膜时,还限定了中央真空室。 提供一系列止回阀,以控制对生片的真空和正压施加,以拾取纸张,保持并剥离纸张。 多个探针设置在处理头中,适于选择性地突出通过片接触表面,用于检测在生片之间使用的生片和/或间隔片。 在去除间隔物或生片的过程中,当头部进入绿色片间隔托盘时,这些探针也可以作为正剥离器。