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1. 发明授权

US07476593B2 Semiconductor device and method of forming the same 有权
标题翻译：半导体器件及其形成方法
公开(公告)号：US07476593B2
公开(公告)日：2009-01-13
申请号：US11426815
申请日：2006-06-27
申请人： Ronghua Zhu , Amitava Bose , Vishnu K. Khemka , Vijay Parthasarathy
发明人： Ronghua Zhu , Amitava Bose , Vishnu K. Khemka , Vijay Parthasarathy
IPC分类号： H01L21/8222
CPC分类号： H01L29/7391 , H01L29/861
摘要： In one embodiment, semiconductor device 10 comprises a diode which uses isolation regions (34, 16, and 13) and a plurality of dopant concentrations (30, 20, 24, and 26) which may be used to limit the parasitic current that is injected into the semiconductor substrate (12). Various biases on the isolation regions (34, 16, and 13) may be used to affect the behavior of semiconductor device (10). In addition, a conductive layer (28) may be formed overlying the junction between anode (42) and cathode (40). This conductive layer (28) may decrease the electric field in selected regions in order to increase the maximum voltage that may be applied to cathode (40).
摘要翻译：在一个实施例中，半导体器件10包括使用隔离区域（34,16和13）和多个掺杂剂浓度（30,20,24和26）的二极管，其可用于限制注入的寄生电流进入半导体基板（12）。可以使用隔离区域（34,16和13）上的各种偏压来影响半导体器件（10）的行为。此外，可以形成覆盖在阳极（42）和阴极（40）之间的连接处的导电层（28）。为了增加施加到阴极（40）的最大电压，该导电层（28）可以减小选定区域中的电场。

2. 发明授权

US07095092B2 Semiconductor device and method of forming the same 有权
标题翻译：半导体器件及其形成方法
公开(公告)号：US07095092B2
公开(公告)日：2006-08-22
申请号：US10836170
申请日：2004-04-30
申请人： Ronghua Zhu , Amitava Bose , Vishnu K. Khemka , Vijay Parthasarathy
发明人： Ronghua Zhu , Amitava Bose , Vishnu K. Khemka , Vijay Parthasarathy
IPC分类号： H01L29/00
CPC分类号： H01L29/7391 , H01L29/861
摘要： In one embodiment, semiconductor device 10 comprises a diode which uses isolation regions (34, 16, and 13) and a plurality of dopant concentrations (30, 20, 24, and 26) which may be used to limit the parasitic current that is injected into the semiconductor substrate (12). Various biases on the isolation regions (34, 16, and 13) may be used to affect the behavior of semiconductor device (10). In addition, a conductive layer (28) may be formed overlying the junction between anode (42) and cathode (40). This conductive layer (28) may decrease the electric field in selected regions in order to increase the maximum voltage that may be applied to cathode (40).
摘要翻译：在一个实施例中，半导体器件10包括使用隔离区域（34,16和13）和多个掺杂剂浓度（30,20,24和26）的二极管，其可用于限制注入的寄生电流进入半导体基板（12）。可以使用隔离区域（34,16和13）上的各种偏压来影响半导体器件（10）的行为。此外，可以形成覆盖在阳极（42）和阴极（40）之间的连接处的导电层（28）。为了增加施加到阴极（40）的最大电压，该导电层（28）可以减小选定区域中的电场。

3. 发明授权

US07282386B2 Schottky device and method of forming 有权
标题翻译：肖特基器件和成型方法
公开(公告)号：US07282386B2
公开(公告)日：2007-10-16
申请号：US11117996
申请日：2005-04-29
申请人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
发明人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
IPC分类号： H01L21/00
CPC分类号： H01L29/872 , H01L29/063 , H01L29/0692 , H01L29/66136 , H01L29/66143 , H01L29/8611
摘要： A Schottky device having a plurality of unit cells, each having a Schottky contact portion, surrounded by a termination structure that causes depletion regions to form in a vertical and horizontal direction, relative to a surface of the device, during a reverse bias voltage condition.
摘要翻译：肖特基器件具有多个单元电池，每个单元电池具有肖特基接触部分，由反向偏置电压条件期间相对于器件的表面在垂直和水平方向上形成耗尽区域的端接结构包围。

4. 发明授权

US06573562B2 Semiconductor component and method of operation 有权
标题翻译：半导体元件及其操作方法
公开(公告)号：US06573562B2
公开(公告)日：2003-06-03
申请号：US10004186
申请日：2001-10-31
申请人： Vijay Parthasarathy , Ronghua Zhu , Vishnu K. Khemka , Amitava Bose
发明人： Vijay Parthasarathy , Ronghua Zhu , Vishnu K. Khemka , Amitava Bose
IPC分类号： H01L2976
CPC分类号： H03K17/08 , H01L21/761 , H01L27/0629 , H01L27/0635 , H01L27/0664 , H01L27/0676 , H01L27/0814 , H01L29/1083 , H01L29/1087 , H01L29/7835 , H01L29/8611 , H01L29/866
摘要： A semiconductor component includes a semiconductor substrate (110) having first and second portions (111, 112) with a first conductivity type, a transistor (120) at least partially located in the semiconductor substrate, and a switching circuit (150, 350, 650, 850). The transistor includes (i) a first doped region in the first portion of the semiconductor substrate and having the first conductivity type (ii) a terminal, which includes a second doped region having a second conductivity type and located in the first portion of the semiconductor substrate and over the first doped region, and (iii) a third doped region having the second conductivity type and located in the semiconductor substrate below the first portion of the semiconductor substrate and above the second portion of the semiconductor substrate. The switching circuit is electrically coupled to the third doped region to adjust the bias of the third doped region.
摘要翻译：半导体元件包括具有第一导电类型的第一和第二部分（111,112）的半导体衬底（110），至少部分地位于半导体衬底中的晶体管（120）和开关电路（150,350,650 ，850）。晶体管包括（i）半导体衬底的第一部分中的第一掺杂区域，并具有第一导电类型（ii）端子，其包括具有第二导电类型并位于半导体的第一部分中的第二掺杂区域衬底并且在第一掺杂区域上方，以及（iii）具有第二导电类型并且位于半导体衬底的第一部分下方并位于半导体衬底的第二部分之下的第三掺杂区域。开关电路电耦合到第三掺杂区域以调节第三掺杂区域的偏置。

5. 发明授权

US06528849B1 Dual-gate resurf superjunction lateral DMOSFET 失效
标题翻译：双栅极复合超导型DMOSFET
公开(公告)号：US06528849B1
公开(公告)日：2003-03-04
申请号：US09652813
申请日：2000-08-31
申请人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
发明人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
IPC分类号： H01L2978
CPC分类号： H01L29/7816 , H01L29/0634 , H01L29/7393 , H01L29/7831
摘要： A MOSFET includes a source region, a first channel region proximate to the source region, a first gate region adjacent to the first base region, a drain region, a second channel region proximate to the drain region, and a second gate region adjacent to the second channel region. A first channel is formed within the first channel region in dependence upon a first voltage applied to the first gate region with respect to at least a first portion of the source region, and a second channel is formed within the second channel region in dependence upon a second voltage applied to the second gate region with respect to at least a second portion of the drain region. The MOSFET further includes a drift region coupled between the first channel region and the second channel region, where the drift region includes a set of alternating columns, each of which is also coupled between the first base region and the second base region. The set of alternating columns includes a plurality of columns doped with N− type impurities alternating with a plurality columns doped with P− type impurities.
摘要翻译： MOSFET包括源极区域，靠近源极区域的第一沟道区域，与第一基极区域相邻的第一栅极区域，漏极区域，靠近漏极区域的第二沟道区域以及与漏极区域相邻的第二栅极区域第二通道区域。根据相对于源区域的至少第一部分施加到第一栅极区域的第一电压，在第一沟道区域内形成第一沟道，并且第二沟道形成在第二沟道区内，依赖于相对于漏极区域的至少第二部分施加到第二栅极区域的第二电压。 MOSFET还包括耦合在第一沟道区域和第二沟道区域之间的漂移区域，其中漂移区域包括一组交替的列，其中每一个也耦合在第一基极区域和第二基极区域之间。这组交替的列包括掺杂有多个掺杂有P-型杂质的列的N型杂质的多个列。

6. 发明授权

US07355260B2 Schottky device and method of forming 有权
标题翻译：肖特基器件和成型方法
公开(公告)号：US07355260B2
公开(公告)日：2008-04-08
申请号：US10881678
申请日：2004-06-30
申请人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
发明人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
IPC分类号： H01L27/095 , H01L29/47
CPC分类号： H01L29/66143 , H01L29/812 , H01L29/872
摘要： A conductive layer includes a first portion that forms a Schottky region with an underlying first region having a first conductivity type. A second region of a second conductivity type underlies the first region, where the second conductivity type is opposite the first conductivity type. A third region of the first conductivity type immediately underlies the second region and is electrically coupled to a cathode of the device.
摘要翻译：导电层包括形成具有第一导电类型的下面的第一区域的肖特基区域的第一部分。第二导电类型的第二区域位于第一区域的正下方，其中第二导电类型与第一导电类型相反。第一导电类型的第三区域刚好在第二区域的下面，并且电耦合到器件的阴极。

7. 发明授权

US07141860B2 LDMOS transistor 有权
标题翻译： LDMOS晶体管
公开(公告)号：US07141860B2
公开(公告)日：2006-11-28
申请号：US10875105
申请日：2004-06-23
申请人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
发明人： Vishnu K. Khemka , Vijay Parthasarathy , Ronghua Zhu , Amitava Bose
IPC分类号： H01L27/95 , H01L29/47
CPC分类号： H01L29/782 , H01L27/0727 , H01L29/0619 , H01L29/0653 , H01L29/47 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要： An LDMOS transistor has a Schottky diode inserted at the center of a doped region of the LDMOS transistor. A Typical LDMOS transistor has a drift region in the center. In this case a Schottky diode is inserted at the center of this drift region which has the effect of providing a Schottky diode connected from source to drain in the forward direction so that the drain voltage is clamped to a voltage that is lower than the PN junction threshold, thereby avoiding forward biasing the PN junction. An alternative is to insert the Schottky diode at the well in which the source is formed, which is on the periphery of the LDMOS transistor. In such case the Schottky diode is formed differently but still is connected from source to drain in the forward direction to achieve the desired voltage clamping at the drain.
摘要翻译： LDMOS晶体管具有插入在LDMOS晶体管的掺杂区域的中心处的肖特基二极管。典型的LDMOS晶体管在中心具有漂移区域。在这种情况下，肖特基二极管被插入该漂移区的中心，其具有在正向上提供从源极到漏极连接的肖特基二极管的作用，使得漏极电压被钳位到低于PN结的电压阈值，从而避免正向偏置PN结。一种替代方案是将肖特基二极管插入其中形成源的阱，其位于LDMOS晶体管的外围。在这种情况下，肖特基二极管的形成方式不同，但仍然在正向方向上从源极到漏极连接，以在漏极处实现所需的电压钳位。

8. 发明授权

US07071518B2 Schottky device 失效
标题翻译：肖特基装置
公开(公告)号：US07071518B2
公开(公告)日：2006-07-04
申请号：US10856602
申请日：2004-05-28
申请人： Vijay Parthasarathy , Vishnu K. Khemka , Ronghua Zhu , Amitava Bose
发明人： Vijay Parthasarathy , Vishnu K. Khemka , Ronghua Zhu , Amitava Bose
IPC分类号： H01L27/772
CPC分类号： H01L27/0727 , H01L27/0629
摘要： A regular Schottky diode or a device that has a Schottky diode characteristic and an MOS transistor are coupled in series to provide a significant improvement in leakage current and breakdown voltage with only a small degradation in forward current. In the reverse bias case, there is a small reverse bias current but the voltage across the Schottky diode remains small due the MOS transistor. Nearly all of the reverse bias voltage is across the MOS transistor until the MOS transistor breaks down. This transistor breakdown, however, is not initially destructive because the Schottky diode limits the current. As the reverse bias voltage continues to increase the Schottky diodes begins to absorb more of the voltage. This increases the leakage current but the breakdown voltage is a somewhat additive between the transistor and the Schottky diode.
摘要翻译：正交肖特基二极管或具有肖特基二极管特性和MOS晶体管的器件串联耦合以提供泄漏电流和击穿电压的显着改进，只有正向电流的降低很小。在反向偏置情况下，存在小的反向偏置电流，但由于MOS晶体管，肖特基二极管两端的电压保持较小。几乎所有的反向偏置电压都跨越MOS晶体管，直到MOS晶体管故障。然而，该晶体管击穿不是最初的破坏性，因为肖特基二极管限制了电流。随着反向偏压持续增加，肖特基二极管开始吸收更多的电压。这增加了漏电流，但是在晶体管和肖特基二极管之间的击穿电压稍微相加。

9. 发明申请

US20050242371A1 High current MOS device with avalanche protection and method of operation 审中-公开
标题翻译：大电流MOS器件具有雪崩保护和操作方法
公开(公告)号：US20050242371A1
公开(公告)日：2005-11-03
申请号：US10836730
申请日：2004-04-30
申请人： Vishnu Khemka , Amitava Bose , Vijay Parthasarathy , Ronghua Zhu
发明人： Vishnu Khemka , Amitava Bose , Vijay Parthasarathy , Ronghua Zhu
IPC分类号： H01L27/07 , H01L29/08 , H01L29/423 , H01L29/78 , H01L31/113
CPC分类号： H01L29/0847 , H01L27/0722 , H01L29/42368 , H01L29/7835
摘要： Particularly in high current applications, impact ionization induced electron-hole pairs are generated in the drain of an MOS transistor that can cause a parasitic bipolar transistor to become destructively conductive. The holes pass through the body region of the MOS transistor, which has intrinsic resistance, to the source, which is typically held at a relatively low voltage, such as ground. The hole current causes a voltage to develop in the body region, which acts as the base. This increased base voltage is what can cause the parasitic bipolar transistor to become conductive. The likelihood of this is greatly reduced by developing a voltage between the source, which acts as the emitter, and the body region by passing the channel current through an impedance between the source and the body region. This causes the emitter voltage to increase as the base voltage is increased and thereby prevent the parasitic bipolar transistor from becoming conductive.
摘要翻译：特别是在高电流应用中，在MOS晶体管的漏极中产生电子 - 电子碰撞的碰撞对，这可使寄生双极晶体管变得具有破坏性的导电性。这些孔通过具有固有电阻的MOS晶体管的体区通向保持在较低电压（例如地）的源极。空穴电流导致在作为基底的身体区域中产生电压。这种增加的基极电压可以导致寄生双极晶体管导通。通过使通道电流通过源极和体区之间的阻抗，在作为发射极的源与体区之间形成电压，大大降低了这种可能性。这导致发射极电压随着基极电压的增加而增加，从而防止寄生双极晶体管导通。

10. 发明授权

US06930027B2 Method of manufacturing a semiconductor component 有权
标题翻译：制造半导体部件的方法
公开(公告)号：US06930027B2
公开(公告)日：2005-08-16
申请号：US10369874
申请日：2003-02-18
申请人： Vijay Parthasarathy , Vishnu Khemka , Ronghua Zhu , Amitava Bose , Todd Roggenbauer , Paul Hui , Michael C. Butner
发明人： Vijay Parthasarathy , Vishnu Khemka , Ronghua Zhu , Amitava Bose , Todd Roggenbauer , Paul Hui , Michael C. Butner
IPC分类号： H01L21/308 , H01L21/762 , H01L21/425
CPC分类号： H01L21/3081 , H01L21/76229
摘要： A method of manufacturing a semiconductor component includes forming a first electrically insulating layer (120) and a second electrically insulating layer (130) over a semiconductor substrate (110). The method further includes etching a first trench (140) and a second trench (150) through the first and second electrically insulating layers and into the semiconductor substrate, and etching a third trench (610) through a bottom surface of the second trench and into the semiconductor substrate. The third trench has a first portion (920) and a second portion (930) interior to the first portion. The method still further includes forming a third electrically insulating layer (910) filling the first trench and the first portion of the third trench without filling the second portion of the third trench, and also includes forming a plug layer (1010) in the second portion of the third trench.
摘要翻译：制造半导体部件的方法包括在半导体衬底（110）上形成第一电绝缘层（120）和第二电绝缘层（130）。该方法还包括通过第一和第二电绝缘层蚀刻第一沟槽（140）和第二沟槽（150）并进入半导体衬底，以及通过第二沟槽的底表面蚀刻第三沟槽（610）并且进入半导体衬底。第三沟槽在第一部分内部具有第一部分（920）和第二部分（930）。该方法还包括形成填充第一沟槽和第三沟槽的第一部分的第三电绝缘层（910），而不填充第三沟槽的第二部分，并且还包括在第二部分中形成插塞层（1010）的第三沟。

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