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    • 1. 发明授权
    • Structure and method for RESURF LDMOSFET with a current diverter
    • 具有电流分流器的RESURF LDMOSFET的结构和方法
    • US07439584B2
    • 2008-10-21
    • US11363901
    • 2006-02-28
    • Vishnu K. KhemkaAmitava BoseTodd C. RoggenbauerRonghua Zhu
    • Vishnu K. KhemkaAmitava BoseTodd C. RoggenbauerRonghua Zhu
    • H01L29/76H01L29/94
    • H01L29/8611H01L29/063H01L29/0653H01L29/1045H01L29/1083H01L29/7835
    • Methods and apparatus are provided for reducing substrate leakage current of RESURF LDMOSFET devices. A semiconductor device comprises a semiconductor substrate (22) of a first type; first and second terminals (39,63) laterally spaced-apart on a surface (35) above the substrate; a first semiconductor region (32) of the first type overlying the substrate and ohmically coupled to the first terminal (39); a second semiconductor region (48) of a second opposite type in proximity to the first region and ohmically coupled to the first terminal; a third semiconductor region (30) of the second type overlying the substrate and ohmically coupled to the second terminal (63) and laterally arranged with respect to the first region; a parasitic vertical device comprising the first region and the substrate, the parasitic vertical device for permitting leakage current to flow from the first terminal to the substrate; a fourth semiconductor region (62) of the first type in proximity to the third region and ohmically coupled to the second terminal, thereby forming in combination with the third region a shorted base-collector region of a lateral transistor extending between the first and second terminals to provide diode action; a channel region (27) of the first type separating the first and third regions at the surface; a gate insulator (43) overlying the channel region; and a gate electrode (42) overlying the gate insulator.
    • 提供了减少RESURF LDMOSFET器件的衬底漏电流的方法和装置。 半导体器件包括第一类型的半导体衬底(22) 在衬底上方的表面(35)上横向间隔开的第一和第二端子(39,63) 第一类型的第一半导体区域(32),覆盖衬底并欧姆耦合到第一端子(39); 邻近第一区域的第二相对类型的第二半导体区域(48),并且欧姆耦合到第一端子; 第二类型的第三半导体区域(30),覆盖在所述衬底上并且欧姆耦合到所述第二端子(63)并且相对于所述第一区域横向布置; 包括第一区域和衬底的寄生垂直器件,用于允许漏电流从第一端子流到衬底的寄生垂直器件; 第一类型的第四半导体区域(62),邻近第三区域并且欧姆耦合到第二端子,从而与第三区域组合形成在第一和第二端子之间延伸的横向晶体管的短路基极集电极区域 提供二极管动作; 所述第一类型的沟道区域(27)在所述表面处分隔所述第一和第三区域; 栅极绝缘体(43),覆盖所述沟道区域; 以及覆盖栅极绝缘体的栅电极(42)。
    • 2. 发明授权
    • Dotted channel MOSFET and method
    • 点通道MOSFET及方法
    • US07405128B1
    • 2008-07-29
    • US11674888
    • 2007-02-14
    • Vishnu K. KhemkaAmitava BoseTodd C. RoggenbauerRonghua Zhu
    • Vishnu K. KhemkaAmitava BoseTodd C. RoggenbauerRonghua Zhu
    • H01L21/336
    • H01L29/7835H01L29/0692H01L29/1045H01L29/1087H01L29/4238H01L29/66659H01L29/78
    • A improved MOSFET (50, 51, 75, 215) has a source (60) and drain (62) in a semiconductor body (56), surmounted by an insulated control gate (66) located over the body (56) between the source (60) and drain (62) and adapted to control a conductive channel (55) extending between the source (60) and drain (62). The insulated gate (66) is perforated by a series of openings (61) through which highly doped regions (69) in the form of a series of (e.g., square) dots (69) of the same conductivity type as the body (56) are provided, located in the channel (55), spaced apart from each other and from the source (60) and drain (62). These channel dots (69) are desirably electrically coupled to a highly doped contact (64) to the body (56). The resulting device (50, 51, 75, 215) has a greater SOA, higher breakdown voltage and higher HBM stress resistance than equivalent prior art devices (20) without the dotted channel. Threshold voltage is not affected.
    • 改进的MOSFET(50,51,75,215)在半导体本体(56)中具有源极(60)和漏极(62),其被位于源极(56)之间的绝缘控制栅极(66)所覆盖, (60)和漏极(62),并且适于控制在源极(60)和漏极(62)之间延伸的导电通道(55)。 绝缘栅极(66)由一系列开口(61)穿孔,通过该开口(61),与体(56)相同导电类型的一系列(例如,正方形)点(69)形式的高度掺杂区域(69)穿过该开口 )设置在通道(55)中,彼此间隔开并且与源(60)和排水口(62)间隔开。 这些通道点(69)期望地电耦合到主体(56)的高度掺杂的触点(64)。 所得到的器件(50,51,75,215)具有比没有点通道的等效现有技术器件(20)更大的SOA,更高的击穿电压和更高的HBM应力电阻。 阈值电压不受影响。
    • 7. 发明授权
    • Dual-gate resurf superjunction lateral DMOSFET
    • 双栅极复合超导型DMOSFET
    • US06528849B1
    • 2003-03-04
    • US09652813
    • 2000-08-31
    • Vishnu K. KhemkaVijay ParthasarathyRonghua ZhuAmitava Bose
    • Vishnu K. KhemkaVijay ParthasarathyRonghua ZhuAmitava Bose
    • H01L2978
    • H01L29/7816H01L29/0634H01L29/7393H01L29/7831
    • A MOSFET includes a source region, a first channel region proximate to the source region, a first gate region adjacent to the first base region, a drain region, a second channel region proximate to the drain region, and a second gate region adjacent to the second channel region. A first channel is formed within the first channel region in dependence upon a first voltage applied to the first gate region with respect to at least a first portion of the source region, and a second channel is formed within the second channel region in dependence upon a second voltage applied to the second gate region with respect to at least a second portion of the drain region. The MOSFET further includes a drift region coupled between the first channel region and the second channel region, where the drift region includes a set of alternating columns, each of which is also coupled between the first base region and the second base region. The set of alternating columns includes a plurality of columns doped with N− type impurities alternating with a plurality columns doped with P− type impurities.
    • MOSFET包括源极区域,靠近源极区域的第一沟道区域,与第一基极区域相邻的第一栅极区域,漏极区域,靠近漏极区域的第二沟道区域以及与漏极区域相邻的第二栅极区域 第二通道区域。 根据相对于源区域的至少第一部分施加到第一栅极区域的第一电压,在第一沟道区域内形成第一沟道,并且第二沟道形成在第二沟道区内,依赖于 相对于漏极区域的至少第二部分施加到第二栅极区域的第二电压。 MOSFET还包括耦合在第一沟道区域和第二沟道区域之间的漂移区域,其中漂移区域包括一组交替的列,其中每一个也耦合在第一基极区域和第二基极区域之间。 这组交替的列包括掺杂有多个掺杂有P-型杂质的列的N型杂质的多个列。
    • 8. 发明授权
    • Laterally diffused metal oxide semiconductor device
    • 横向扩散金属氧化物半导体器件
    • US08384184B2
    • 2013-02-26
    • US12882899
    • 2010-09-15
    • Tahir A. KhanBernhard H. GroteVishnu K. KhemkaRonghua Zhu
    • Tahir A. KhanBernhard H. GroteVishnu K. KhemkaRonghua Zhu
    • H01L29/78
    • H01L29/66681H01L21/02107H01L29/0634H01L29/0653H01L29/0847H01L29/1045H01L29/1083H01L29/66659H01L29/7835
    • A semiconductor device and a related fabrication process are presented here. The device includes a support substrate, a buried oxide layer overlying the support substrate, a first semiconductor region located above the buried oxide layer and having a first conductivity type. The device also includes second, third, fourth, and fifth semiconductor regions. The second semiconductor region is located above the first semiconductor region, and it has a second conductivity type. The third semiconductor region is located above the second semiconductor region, and it has the first conductivity type. The fourth semiconductor region is located above the third semiconductor region, and it has the second conductivity type. The fifth semiconductor region extends through the fourth semiconductor region and the third semiconductor region to the second semiconductor region, and it has the second conductivity type.
    • 这里介绍一种半导体器件和相关的制造工艺。 该器件包括支撑衬底,覆盖在支撑衬底上的掩埋氧化物层,位于掩埋氧化物层上方并具有第一导电类型的第一半导体区域。 该器件还包括第二,第三,第四和第五半导体区域。 第二半导体区域位于第一半导体区域的上方,具有第二导电型。 第三半导体区域位于第二半导体区域的上方,具有第一导电型。 第四半导体区域位于第三半导体区域的上方,具有第二导电型。 第五半导体区域延伸穿过第四半导体区域和第三半导体区域到第二半导体区域,并且具有第二导电类型。