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    • 1. 发明申请
    • Pressure sensor
    • 压力传感器
    • US20070028696A1
    • 2007-02-08
    • US10566364
    • 2004-07-16
    • Ulfert DrewesKarl FloegelFrank HegnerThomas UehlinRainer Martin
    • Ulfert DrewesKarl FloegelFrank HegnerThomas UehlinRainer Martin
    • G01L7/00
    • G01L19/003
    • A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.
    • 一种压力传感器,包括:压力测量单元,其具有可与介质一起装载的端面; 壳体,其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中,并且密封装置位于支承表面和端面之间,并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上,第二密封元件位于支承表面上,并且解耦环被轴向夹紧在第一和第二密封元件之间。
    • 2. 发明授权
    • Pressure sensor having a pressure measuring cell with a platform and a measuring membrane
    • 压力传感器具有带有平台和测量膜的压力测量单元
    • US07448274B2
    • 2008-11-11
    • US10566364
    • 2004-07-16
    • Ulfert DrewesKarl FloegelFrank HegnerThomas UehlinRainer Martin
    • Ulfert DrewesKarl FloegelFrank HegnerThomas UehlinRainer Martin
    • G01L7/00
    • G01L19/003
    • A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.
    • 一种压力传感器,包括:压力测量单元,其具有可与介质一起装载的端面; 壳体,其具有介质开口和围绕介质开口的环形的轴向支承表面; 夹紧装置; 和环形密封装置。 压力测量单元位于壳体中,并且密封装置位于支承表面和端面之间,并且密封装置以及压力测量单元被轴向地夹紧在支承表面和夹紧装置之间。 密封装置包括脱钩环以及第一和第二环形密封元件。 第一密封元件靠在端面上,第二密封元件位于支承表面上,并且解耦环被轴向夹紧在第一和第二密封元件之间。
    • 7. 发明申请
    • Pressure transducer
    • 压力传感器
    • US20090211363A1
    • 2009-08-27
    • US11631036
    • 2005-06-14
    • Ulfert DrewesFrank Hegner
    • Ulfert DrewesFrank Hegner
    • G01L9/00
    • G01L19/145G01L19/147
    • A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface, sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial claimping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping formce is transmitted through the misalignment accommodating arrangement from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.
    • 一种压力传感器,包括具有壳体轴线的壳体和限定在壳体中的测量室室。 测量池室可通过开口暴露于压力。 开口被环形的第一密封表面包围。 一种压力测量单元,具有面向开口的第二密封表面和背离密封表面的支承表面,密封环; 并且提供与壳体接合的夹紧装置。 压力测量单元和密封环借助于夹紧装置和第一密封表面之间的这种方式被夹紧,密封环压紧地设置在第一密封表面和第二密封表面之间 。 压力传感器还包括不对准容纳装置,其包括朝向开口的第一传动体,以及远离开口的第二传递体。 轴向夹紧通过不对准容纳装置从夹紧装置传递到压力测量单元,并且第一传动体相对于第二传动体绕两个相互垂直的轴线倾斜。
    • 8. 发明授权
    • Capacitive pressure sensor or capacitive differential pressure sensor
    • 电容式压力传感器或电容差压传感器
    • US06374680B1
    • 2002-04-23
    • US09511723
    • 2000-02-21
    • Ulfert DrewesAndreas RossbergElke SchmidtFrank HegnerThomas Velten
    • Ulfert DrewesAndreas RossbergElke SchmidtFrank HegnerThomas Velten
    • G01L912
    • G01L9/0075
    • The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
    • 这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成:压力传感器(10)具有基板(1)和第一主表面(11),第二主表面(12) )和圆周表面(13)。导电材料的板状电极(14)以高耐压和高真空密封的方式固定在主表面(11)的凹部(15)中,由 连接材料(16),从电极(14)穿过基板(1)到主表面(12)或圆周表面(13)提供贯通连接件(17),陶瓷的隔膜(2) 玻璃或单晶材料通过接合材料(26)沿着接头(18)附接到凹部(15)外部的基板(1)上,并且在其上面形成另外的电极或被覆盖在面向 电极(14),具有通过接头(18)接触的另一个电极(24)。基板和隔膜 t的陶瓷,玻璃或单晶材料。 各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。