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    • 2. 发明申请
    • DRIVING AGENT VACUUM PUMP
    • 驱动代理真空泵
    • US20090311110A1
    • 2009-12-17
    • US12486300
    • 2009-06-17
    • Marco DomsJorg Muller
    • Marco DomsJorg Muller
    • F04F9/00
    • F04B19/006F04F5/20F04F5/46F04F9/00
    • A driving agent vacuum pump configured as a micropump is presented. The vacuum pump includes an evaporation chamber and a pumping chamber, which are separated by a jet arrangement. The jet arrangement includes a planar arrangement of at least one jet running vertically in depth between two plates. The two plates cover the evaporation chamber and the pumping chamber about the jet arrangement. An opening is provided in the pumping chamber above the jet arrangement for taking in an agent to be pumped. A second opening is provided for driving out a compressed gas below the jet arrangement. A connection is provided between the evaporation chamber and the pumping chamber through which a condensed driving agent is returned.
    • 提出了配置为微型泵的驱动剂真空泵。 真空泵包括由喷射装置分离的蒸发室和泵送室。 喷射装置包括在两个板之间深度垂直延伸的至少一个射流的平面布置。 两个板围绕喷射装置覆盖蒸发室和泵送室。 在喷射装置上方的泵送室中设置有用于吸入被泵送的试剂的开口。 提供第二开口用于驱动喷射装置下方的压缩气体。 在蒸发室和泵送室之间提供连接,通过该连接冷凝驱动剂返回。
    • 3. 发明授权
    • Driving agent vacuum pump
    • 驾驶代理真空泵
    • US08172548B2
    • 2012-05-08
    • US12486300
    • 2009-06-17
    • Marco DomsJorg Muller
    • Marco DomsJorg Muller
    • F04F9/00
    • F04B19/006F04F5/20F04F5/46F04F9/00
    • A driving agent vacuum pump configured as a micropump is presented. The vacuum pump includes an evaporation chamber and a pumping chamber, which are separated by a jet arrangement. The jet arrangement includes a planar arrangement of at least one jet running vertically in depth between two plates. The two plates cover the evaporation chamber and the pumping chamber about the jet arrangement. An opening is provided in the pumping chamber above the jet arrangement for taking in an agent to be pumped. A second opening is provided for driving out a compressed gas below the jet arrangement. A connection is provided between the evaporation chamber and the pumping chamber through which a condensed driving agent is returned.
    • 提出了配置为微型泵的驱动剂真空泵。 真空泵包括由喷射装置分离的蒸发室和泵送室。 喷射装置包括在两个板之间深度垂直延伸的至少一个射流的平面布置。 两个板围绕喷射装置覆盖蒸发室和泵送室。 在喷射装置上方的泵送室中设置有用于吸入被泵送的试剂的开口。 提供第二开口用于驱动喷射装置下方的压缩气体。 在蒸发室和泵送室之间提供连接,通过该连接冷凝驱动剂返回。
    • 5. 发明申请
    • Motivating fluid vacuum pump
    • 激励流体真空泵
    • US20080075613A1
    • 2008-03-27
    • US11796505
    • 2007-04-27
    • Marco DomsJorg Muller
    • Marco DomsJorg Muller
    • F04B43/14
    • F04F9/00F04B19/006F04F5/20F04F5/46
    • The invention relates to a driving agent vacuum pump used in microsystems technology, comprising an evaporator chamber and a pump chamber that are separated by a jet arrangement. The design of the driving agent vacuum pump is improved by: a planar arrangement of at least one jet, which extends vertically in depth and which is situated between two, in particular, parallel plates, these plates closing the evaporator chamber and the pump chamber; an opening in the pump chamber, preferably above the jet arrangement, for drawing in a medium to be pumped, and; an opening for expelling a preferably compressed gas underneath the jet arrangement.
    • 本发明涉及用于微系统技术的驱动剂真空泵,包括由喷射装置分离的蒸发室和泵室。 驱动剂真空泵的设计通过以下方式改进:至少一个喷射器的平面布置,该喷射器在深度上垂直延伸并且位于两个平行板之间,这些板关闭蒸发器室和泵室; 在泵室中的开口,优选地在喷射装置上方,用于吸入要泵送的介质中; 用于排出喷射装置下方的优选压缩气体的开口。