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1. 发明授权

US08727708B2 Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component 有权
标题翻译：反射装置，连通管，排气泵，排气系统，清洁系统的方法，用于实施该方法的存储介质存储程序，基板处理装置和颗粒捕获部件
公开(公告)号：US08727708B2
公开(公告)日：2014-05-20
申请号：US13047370
申请日：2011-03-14
申请人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
发明人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
IPC分类号： F04D29/70 , F04D19/04
CPC分类号： F04D19/042 , F04D29/701 , F05D2260/607 , Y10T137/794
摘要： A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump.
摘要翻译：能够防止颗粒渗入处理室的反射装置。反射装置设置在连通管中。连通管允许基板处理装置和排气泵的处理室彼此连通。排气泵具有至少一个旋转叶片。反射装置包括至少一个反射表面。至少一个反射表面被定向到排气泵。

2. 发明申请

US20110162678A1 REFLECTING DEVICE, COMMUNICATING PIPE, EXHAUSTING PUMP, EXHAUST SYSTEM, METHOD FOR CLEANING THE SYSTEM, STORAGE MEDIUM STORING PROGRAM FOR IMPLEMENTING THE METHOD, SUBSTRATE PROCESSING APPARATUS, AND PARTICLE CAPTURING COMPONENT 有权
标题翻译：反射装置，通信管，排气泵，排气系统，清洁系统的方法，用于实施方法的储存中间储存程序，基板处理装置和颗粒捕获部件
公开(公告)号：US20110162678A1
公开(公告)日：2011-07-07
申请号：US13047370
申请日：2011-03-14
申请人： Tsuyoshi MORIYA , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
发明人： Tsuyoshi MORIYA , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
IPC分类号： F04D29/70 , F04D29/54 , B08B5/04
CPC分类号： F04D19/042 , F04D29/701 , F05D2260/607 , Y10T137/794
摘要： A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump.
摘要翻译：能够防止颗粒渗入处理室的反射装置。反射装置设置在连通管中。连通管允许基板处理装置和排气泵的处理室彼此连通。排气泵具有至少一个旋转叶片。反射装置包括至少一个反射表面。至少一个反射表面被定向到排气泵。

3. 发明授权

US07927066B2 Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component 有权
标题翻译：反射装置，连通管，排气泵，排气系统，清洁系统的方法，用于实施该方法的存储介质存储程序，基板处理装置和颗粒捕获部件
公开(公告)号：US07927066B2
公开(公告)日：2011-04-19
申请号：US11365682
申请日：2006-03-02
申请人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
发明人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
IPC分类号： F01D1/36 , F01D5/12 , F01D25/00 , F03B5/00 , F03B3/12 , F03B11/00 , F03D11/00
CPC分类号： F04D19/042 , F04D29/701 , F05D2260/607 , Y10T137/794
摘要： A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump.
摘要翻译：能够防止颗粒渗入处理室的反射装置。反射装置设置在连通管中。连通管允许基板处理装置和排气泵的处理室彼此连通。排气泵具有至少一个旋转叶片。反射装置包括至少一个反射表面。至少一个反射表面被定向到排气泵。

4. 发明申请

US20060257243A1 Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component 有权
标题翻译：反射装置，连通管，排气泵，排气系统，清洁系统的方法，用于实施该方法的存储介质存储程序，基板处理装置和颗粒捕获部件
公开(公告)号：US20060257243A1
公开(公告)日：2006-11-16
申请号：US11365682
申请日：2006-03-02
申请人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
发明人： Tsuyoshi Moriya , Takahiro Murakami , Yoshiyuki Kobayashi , Tetsuji Sato , Eiichi Sugawara , Shosuke Endoh , Masaki Fujimori
IPC分类号： F01D1/36
CPC分类号： F04D19/042 , F04D29/701 , F05D2260/607 , Y10T137/794
摘要： A reflecting device that enables to prevent infiltration of particles into a processing chamber. The reflecting device is disposed in a communicating pipe. The communicating pipe allows the processing chamber of a substrate processing apparatus and an exhaust pump to communicate with each other. The exhaust pump has at least one rotary blade. The reflecting device comprises at least one reflecting surface. The at least one reflecting surface is oriented to the exhausting pump.
摘要翻译：能够防止颗粒渗入处理室的反射装置。反射装置设置在连通管中。连通管允许基板处理装置和排气泵的处理室彼此连通。排气泵具有至少一个旋转叶片。反射装置包括至少一个反射表面。至少一个反射表面被定向到排气泵。

5. 发明申请

US20110293401A1 TURBOMOLECULAR PUMP, AND PARTICLE TRAP FOR TURBOMOLECULAR PUMP 有权
标题翻译：涡轮分子泵和用于涡轮分子泵的颗粒捕获
公开(公告)号：US20110293401A1
公开(公告)日：2011-12-01
申请号：US13146497
申请日：2010-02-05
申请人： Yukiteru Sekita , Kazuma Kubota , Tsuyoshi Moriya , Eiichi Sugawara
发明人： Yukiteru Sekita , Kazuma Kubota , Tsuyoshi Moriya , Eiichi Sugawara
IPC分类号： F01D1/36 , B01D46/00 , B01D50/00 , F04D19/04
CPC分类号： F04D29/701 , F04D19/042
摘要： A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).
摘要翻译：涡轮分子泵包括：转子（30），其形成有多级的旋转叶片（32），并且高速旋转; 沿所述泵的轴向布置成相对于所述旋转叶片（32）交替的多个固定叶片（33）。包含旋转叶片（32）和固定叶片（33）的泵壳体（34），并形成有入口开口（21a）; 设置在所述转子（30）的入口附近的圆盘（150），并且与所述旋转叶片的根部径向向内配置成与所述转子（30）的表面相对; 以及设置在入口开口（21a）和转子（30）之间并通过交织细线制成的圆柱形网状结构（153a，153b）。撞击转子和反弹的颗粒被内部捕获在网状结构（153a，153b）中。

6. 发明申请

US20080236629A1 CLEANING METHOD FOR TURBO MOLECULAR PUMP 有权
标题翻译：涡轮分子泵清洗方法
公开(公告)号：US20080236629A1
公开(公告)日：2008-10-02
申请号：US12053880
申请日：2008-03-24
申请人： Eiichi Sugawara , Tsuyoshi Moriya
发明人： Eiichi Sugawara , Tsuyoshi Moriya
IPC分类号： B08B5/00 , B08B9/032 , B08B7/02
CPC分类号： B08B7/00 , B08B5/02 , B08B7/0057 , B08B9/00 , F04D19/042 , F04D29/701 , F05D2260/607
摘要： A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter.
摘要翻译：一种用于涡轮分子泵的清洁方法，其能够恢复涡轮分子泵的排气能力，而不会降低基板处理装置的生产率。将附着于涡轮分子泵的内表面的异物气化的汽化气体向异物供给。

7. 发明授权

US08062432B2 Cleaning method for turbo molecular pump 有权
标题翻译：涡轮分子泵清洗方法
公开(公告)号：US08062432B2
公开(公告)日：2011-11-22
申请号：US12053880
申请日：2008-03-24
申请人： Eiichi Sugawara , Tsuyoshi Moriya
发明人： Eiichi Sugawara , Tsuyoshi Moriya
IPC分类号： B08B9/00
CPC分类号： B08B7/00 , B08B5/02 , B08B7/0057 , B08B9/00 , F04D19/042 , F04D29/701 , F05D2260/607
摘要： A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter.
摘要翻译：一种用于涡轮分子泵的清洁方法，其能够恢复涡轮分子泵的排气能力，而不会降低基板处理装置的生产率。将附着于涡轮分子泵的内表面的异物气化的汽化气体向异物供给。

8. 发明授权

US08894355B2 Turbomolecular pump, and particle trap for turbomolecular pump 有权
标题翻译：涡轮分子泵和用于涡轮分子泵的颗粒捕集器
公开(公告)号：US08894355B2
公开(公告)日：2014-11-25
申请号：US13146497
申请日：2010-02-05
申请人： Yukiteru Sekita , Kazuma Kubota , Tsuyoshi Moriya , Eiichi Sugawara
发明人： Yukiteru Sekita , Kazuma Kubota , Tsuyoshi Moriya , Eiichi Sugawara
IPC分类号： F04D19/04 , F04D29/70
CPC分类号： F04D29/701 , F04D19/042
摘要： A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).
摘要翻译：涡轮分子泵包括：转子（30），其形成有多级的旋转叶片（32），并且高速旋转; 沿所述泵的轴向布置成相对于所述旋转叶片（32）交替的多个固定叶片（33）。包含旋转叶片（32）和固定叶片（33）的泵壳体（34），并形成有入口开口（21a）; 设置在所述转子（30）的入口附近的圆盘（150），并且与所述旋转叶片的根部径向向内配置成与所述转子（30）的表面相对; 以及设置在入口开口（21a）和转子（30）之间并通过交织细线制成的圆柱形网状结构（153a，153b）。撞击转子和反弹的颗粒被内部捕获在网状结构（153a，153b）中。

9. 发明授权

US08356970B2 Exhaust pump, communicating pipe, and exhaust system 有权
标题翻译：排气泵，连通管和排气系统
公开(公告)号：US08356970B2
公开(公告)日：2013-01-22
申请号：US12053819
申请日：2008-03-24
申请人： Eiichi Sugawara , Tsuyoshi Moriya
发明人： Eiichi Sugawara , Tsuyoshi Moriya
IPC分类号： F04D5/00 , F04D19/04 , F04D29/70
CPC分类号： F04D19/042 , F04D19/04 , F04D27/003 , F04D29/701
摘要： An exhaust pump that prevents particles from entering a processing chamber of a substrate processing apparatus. The exhaust pump connected to the processing chamber has rotary blades and an air intake portion disposed on the processing chamber side of the rotary blades. A shielding unit is disposed inside the air intake portion and shields the rotary blades when the air intake portion is viewed from the processing chamber side.
摘要翻译：一种防止颗粒进入基板处理装置的处理室的排气泵。连接到处理室的排气泵具有旋转叶片和设置在旋转叶片的处理室侧的进气部分。当从处理室侧观察进气部分时，屏蔽单元设置在进气部内部并遮蔽旋转叶片。

10. 发明申请

US20100043894A1 VALVE ELEMENT, PARTICLE ENTRY PREVENTIVE MECHANISM, EXHAUST CONTROL APPARATUS, AND SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：阀元件，颗粒入口防止机构，排气控制装置和基板处理装置
公开(公告)号：US20100043894A1
公开(公告)日：2010-02-25
申请号：US12511721
申请日：2009-07-29
申请人： Tsuyoshi Moriya , Eiichi Sugawara , Morihiro Takanashi
发明人： Tsuyoshi Moriya , Eiichi Sugawara , Morihiro Takanashi
IPC分类号： F16K51/00
CPC分类号： H01L21/67011 , F16K51/02 , H01L21/67017 , Y10T137/794
摘要： A valve element that can prevent particles rebounding from an exhausting pump from entering a chamber and also prevent a decrease in exhaust efficiency. The valve element has a through hole that penetrates the valve element along an exhaust flow in an exhaust flow passage between the chamber in which a substrate is subjected to predetermined processing and the exhausting pump having rotary blades rotating at high speed, and a particle trap that covers the through hole. The particle trap has a plurality of preventive members that are arranged such as to obstruct particles rebounding from the exhausting pump. The ratio of openings of the particle trap to the exhaust flow in the exhaust flow passage is not less than a predetermined value.
摘要翻译：可以防止颗粒从排气泵反弹的阀元件进入腔室并且还防止排气效率的降低。阀元件具有贯通孔，该通孔沿着排气流通道，该排气流在其中经受预定处理的基板和具有高速旋转的旋转刀片的排气泵之间的排气流通道中，以及颗粒捕集器覆盖通孔。颗粒捕集器具有多个防止构件，其布置成阻止从排气泵反弹的颗粒。颗粒捕集器的开口与排气流路中的排气流量的比率不小于预定值。

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