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    • 3. 发明授权
    • Semiconductor process pumping arrangements
    • 半导体工艺泵送布置
    • US09336990B2
    • 2016-05-10
    • US14013744
    • 2013-08-29
    • Varian Semiconductor Equipment Associates, Inc.
    • Steven C. Borichevsky
    • F01D1/36F03B5/00F04B35/04F04B35/00H01J37/317F04D19/04F04D29/64
    • H01J37/3171F04D19/042F04D29/644H01J2237/006H01J2237/1825
    • A semiconductor process pump configured to mitigate losses in pump speed during operation. The semiconductor process pump may include a housing having an inlet port for receiving gas molecules therethrough, wherein a forward-most terminus of the inlet port defines an inlet face, one or more working surfaces disposed within the housing, and a mounting flange disposed on an exterior of the housing for facilitating attachment of the pump to a gas enclosure, wherein a forward-most terminus of the mounting flange defines a flange face. The flange face may be offset from the inlet face rearwardly along the housing by a distance d. Thus, when the semiconductor process pump is mounted to a wall of a gas enclosure, the housing may extend into the wall and the inlet face may be disposed within or immediately adjacent the interior of the gas enclosure.
    • 一种半导体工艺泵,其配置为在运行期间减轻泵速度的损耗。 半导体工艺泵可以包括具有用于接收通过其中的气体分子的入口的壳体,其中入口端口的最前端限定入口面,设置在壳体内的一个或多个工作表面和设置在壳体上的安装凸缘 壳体的外部,以便于将泵附接到气体外壳,其中安装凸缘的最前端限定凸缘面。 凸缘面可以沿着壳体向后偏离入口面一段距离d。 因此,当半导体工艺泵安装到气体外壳的壁上时,壳体可以延伸到壁中,并且入口面可以设置在气体外壳内部或紧邻气体外壳的内部。
    • 7. 发明授权
    • Device for containing catastrophic failure of a turbomolecular pump
    • 包含涡轮分子泵的灾难性故障的装置
    • US07767023B2
    • 2010-08-03
    • US11691165
    • 2007-03-26
    • Jeffrey Burgess
    • Jeffrey Burgess
    • C23C16/00F01D1/36F03B5/00F04B35/04C23F1/00H01L21/306
    • F04D19/042F04D27/0292F04D29/601Y10S414/141
    • A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum processing system at an inlet end. The TMP includes a longitudinal axis substantially parallel to an axis of rotation of the TMP and a first lateral axis substantially perpendicular to the longitudinal axis. The vacuum system also includes a containment device configured to mitigate the catastrophic failure of the TMP by impeding only one translational degree of freedom (DOF) and only one rotational DOF of the movement of the TMP. Impeding only one translational DOF includes impeding translational motion of the TMP in a first lateral direction substantially parallel to the first lateral axis. Impeding only one rotational DOF includes impeding rotation of the TMP about the longitudinal axis.
    • 描述了一种用于容纳真空泵系统的灾难性故障的装置。 真空泵系统包括涡轮分子泵(TMP),其构造成在入口端处耦合到真空处理系统。 TMP包括基本上平行于TMP的旋转轴线的纵向轴线和基本上垂直于纵向轴线的第一横向轴线。 真空系统还包括一个容纳装置,其配置成通过仅阻止一个平移自由度(DOF)和仅TMP运动的一个旋转自由度来减轻TMP的灾难性故障。 仅阻挡一个平移DOF包括阻止TMP在基本上平行于第一横向轴线的第一横向方向上的平移运动。 仅阻挡一个旋转DOF包括阻止TMP围绕纵向轴线的旋转。
    • 8. 发明申请
    • Molten Metal Pump
    • 熔融金属泵
    • US20080253905A1
    • 2008-10-16
    • US11631885
    • 2005-07-07
    • Jorge A. MorandoJon TiptonGeorge S. MordueMark BrightLennard LutesRichard S. HendersonChris T. Vild
    • Jorge A. MorandoJon TiptonGeorge S. MordueMark BrightLennard LutesRichard S. HendersonChris T. Vild
    • F04B17/00F16B7/00F04B53/00F03B5/00F16B35/00
    • F04D7/065F04D29/628F16D1/0882F16D1/0894Y10T403/39
    • A molten metal pump includes an impeller, a pump base housing at least partially enclosing the impeller, a shaft connected to the impeller, a motor connected to the shaft, a motor mount plate for supporting the motor; and a post for connecting the motor mount plate to the pump base housing. The molten metal pump can include a connector that connects the post to the motor mount plate. The molten metal pump can include a socket for connecting the shaft to the motor. The shaft can comprise an assembly including an elongated metal rod having a first end and a second end and a metal non-circular drive member attached at the second end of the elongated metal rod. The impeller can include a cap member having a plurality of generally polygonally shaped inlet openings communicating with internal passages of the impeller, each inlet opening having an inner wall and an outer wall, the outer wall being longer than the inner wall, each inlet opening also including a leading wall and a trailing wall, the leading wall and the trailing wall each interconnecting the inner wall and the outer wall and each being inclined such that an uppermost edge of each wall precedes a lowermost edge of each wall in a first rotational direction.
    • 熔融金属泵包括叶轮,至少部分地包围叶轮的泵基壳体,连接到叶轮的轴,连接到轴的马达,用于支撑马达的马达安装板; 以及用于将马达安装板连接到泵基座壳体的柱。 熔融金属泵可以包括将柱连接到电动机安装板的连接器。 熔融金属泵可以包括用于将轴连接到电动机的插座。 该轴可以包括一个组件,该组件包括具有第一端和第二端的细长金属杆和连接在细长金属杆的第二端的金属非圆形驱动构件。 叶轮可以包括盖构件,其具有与叶轮的内部通道连通的多个大致多边形的入口,每个入口具有内壁和外壁,外壁比内壁长,每个入口开口也 包括前导壁和后壁,前导壁和后壁各自互连内壁和外壁,并且每个都倾斜使得每个壁的最上边缘在第一旋转方向上在每个壁的最下边缘之前。
    • 10. 发明授权
    • High performance turbomolecular vacuum pumps
    • 高性能涡轮分子真空泵
    • US5498125A
    • 1996-03-12
    • US467500
    • 1995-06-06
    • Marsbed Hablanian
    • Marsbed Hablanian
    • F04D1/06F04D17/12F04D17/16F04D19/04F04D23/00F04D29/54F03B5/00
    • F04D19/042F04D17/168F04D19/04F04D19/046F04D23/008F04D29/542
    • Turbomolecular vacuum pumps having structures which provide increased pumping speed, increased discharge pressure and decreased operating power in comparison with prior art turbomolecular vacuum pumps. In a first embodiment, the stators of one or more axial flow vacuum pumping stages in proximity to the exhaust port of the vacuum pump have progressively lower conductance so that the bulk velocity of the gas being pumped is increased. In a second embodiment, one or more stages near the inlet port of the vacuum pump are provided with a peripheral channel to utilize the centrifugal component of the gas being pumped. In a third embodiment, one or more stages in the vacuum pump are molecular drag stages, each including a disk rotor. One or more pumping channels in the stator adjacent to the upper surface of the disk are connected in series with one or more pumping channels adjacent to the lower surface of the disk. In a fourth embodiment, one or more stages of the vacuum pump are regenerative stages, each including a regenerative impeller. Pumping channels in the upper and lower portions of the stator are connected in series. The stator channels can be provided with fixed, spaced-apart ribs for improved performance.
    • 涡轮分子真空泵具有与现有技术的涡轮分子真空泵相比提供增加的泵送速度,增加的排出压力和降低的操作功率的结构。 在第一实施例中,在真空泵的排气口附近的一个或多个轴流式真空抽吸级的定子具有逐渐降低的电导,使得被泵送的气体的体积速度增加。 在第二实施例中,在真空泵的入口附近的一个或多个阶段设置有周边通道以利用被泵送的气体的离心分量。 在第三实施例中,真空泵中的一个或多个阶段是分子拖曳阶段,每个阶段包括盘转子。 与盘的上表面相邻的定子中的一个或多个泵送通道与邻近盘的下表面的一个或多个泵送通道串联连接。 在第四实施例中,真空泵的一个或多个阶段是再生级,每个阶段包括再生叶轮。 定子的上部和下部的泵送通道串联连接。 定子通道可以设置有固定的间隔开的肋,以提高性能。