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    • 1. 发明授权
    • Electron beam irradiating apparatus
    • 电子束照射装置
    • US07518131B2
    • 2009-04-14
    • US11385483
    • 2006-03-21
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • A61N5/00
    • G21K5/04H01J37/317H01L21/67005
    • An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.
    • 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。
    • 2. 发明申请
    • Electron beam irradiating apparatus
    • 电子束照射装置
    • US20070040130A1
    • 2007-02-22
    • US11385483
    • 2006-03-21
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • Tsutomu NanatakiIwao OhwadaYuki BesshoTakayoshi Akao
    • A61N5/00
    • G21K5/04H01J37/317H01L21/67005
    • An electron beam irradiating apparatus includes a chamber being kept under vacuum, and housing a planar electron emitting element and a positioning unit and an object to be irradiated is directly irradiated with an electron beam emitted from the element. The planar electron emitting element includes: an emitter portion composed of a dielectric material; and a first electrode and a second electrode applied with a driving voltage for emitting electrons, and the first electrode is formed on a first surface of the emitter portion and has a plurality of through-holes where the emitter portion is exposed, a surface of the first electrode facing to the emitter portion around the through-holes is separated from the emitter portion, and the electron beam is emitted from the first surface of the emitter portion through the through-holes.
    • 电子束照射装置包括保持在真空下的室,并容纳平面电子发射元件和定位单元,并且被照射物体直接用从元件发射的电子束照射。 平面电子发射元件包括:由电介质材料构成的发射极部分; 以及施加有用于发射电子的驱动电压的第一电极和第二电极,并且所述第一电极形成在所述发射极部分的第一表面上,并且具有多个通过所述发射极部分露出的通孔, 面向通孔周围的发射极部分的第一电极与发射极部分分离,并且电子束通过通孔从发射器部分的第一表面发射。
    • 9. 发明授权
    • Manufacturing method of piezoelectric/electrostrictive film type device
    • 压电/电致伸缩薄膜型器件的制造方法
    • US07267840B2
    • 2007-09-11
    • US10630887
    • 2003-07-30
    • Takao OhnishiMasahiro MurasatoYuki BesshoNobuo Takahashi
    • Takao OhnishiMasahiro MurasatoYuki BesshoNobuo Takahashi
    • B05D5/12
    • H01L41/314H01L41/0973H01L41/273
    • A method is provided for manufacturing a piezoelectric/electrostrictive film device including a ceramic substrate and a piezoelectric/electrostrictive operation portion including a lower electrode, a piezoelectric/electrostrictive layer, and upper electrode stacked on the substrate. The piezoelectric/electrostrictive layer is formed to extend beyond at least one of electrodes to form projected portions at its ends. The method includes the steps of forming the piezoelectric/electrostrictive layer so that ends of the piezoelectric/electrostrictive layer are projected to extend beyond ends of at least one electrode, applying a coating liquid in a sufficient amount so that the coating liquid permeates through a gap between at least the projected end portion of the piezoelectric/electrostrictive layer and the substrate, and so as to coat a predetermined portion of the at least one electrode, and drying the applied coating liquid to form a coupling member to couple the projected end portions of the piezoelectric/electrostrictive layer to the substrate.
    • 提供一种用于制造包括陶瓷基板和压电/电致伸缩操作部分的压电/电致伸缩膜装置的方法,该压电/电致伸缩操作部分包括堆叠在基板上的下电极,压电/电致伸缩层和上电极。 压电/电致伸缩层被形成为延伸超过至少一个电极以在其端部处形成突出部分。 该方法包括以下步骤:形成压电/电致伸缩层,使得压电/电致伸缩层的端部突出延伸超过至少一个电极的端部,施加足够量的涂覆液体,使得涂布液体渗透通过间隙 在压电/电致伸缩层的至少突出的端部与基板之间,并且涂覆至少一个电极的预定部分,并干燥所施加的涂覆液体以形成耦合部件,以将突出的端部 压电/电致伸缩层到基板。