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1. 发明授权

US5998320A Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member 失效
标题翻译：氮化铝烧结体，金属构件，静电吸盘，氮化铝烧结体的制造方法以及金属构成体的制造方法
公开(公告)号：US5998320A
公开(公告)日：1999-12-07
申请号：US744774
申请日：1996-11-01
申请人： Naohito Yamada , Yukimasa Mori , Yuki Bessho , Hiromichi Kobayashi
发明人： Naohito Yamada , Yukimasa Mori , Yuki Bessho , Hiromichi Kobayashi
IPC分类号： B23Q3/15 , C04B35/581 , C04B35/626 , C04B35/74 , C04B37/02 , H01L21/683
CPC分类号： C04B35/581 , C04B37/021 , C04B2237/366 , C04B2237/40 , C04B2237/402 , C04B2237/403 , C04B2237/404 , C04B2237/408 , C04B2237/62 , C04B2237/704 , C04B2237/706 , Y10T279/23 , Y10T428/22 , Y10T428/31678
摘要： An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0.times.10.sup.9 .OMEGA..multidot.cm and is smaller than 1.0.times.10.sup.13 .OMEGA..multidot.cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.
摘要翻译：氮化铝烧结体具有以下特性：铝以外的总金属元素的量小于100ppm，室温下的体积电阻率大于1.0×10 9欧姆×xcm，小于1.0×10 13欧姆×xcm。包含金属的构件具有金属构件嵌入在上述氮化铝烧结体中的结构。由上述金属构成的静电卡盘构成。在上述金属构件中，金属构件嵌入上述的氮化铝烧结体中，其体积电阻率可以在氮化铝不添加低电阻材料的情况下进行控制。

2. 发明授权

US06174583B1 Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member 有权
标题翻译：氮化铝烧结体，金属构件，静电吸盘，氮化铝烧结体的制造方法以及金属构成体的制造方法
公开(公告)号：US06174583B1
公开(公告)日：2001-01-16
申请号：US09391381
申请日：1999-09-08
申请人： Naohito Yamada , Yukimasa Mori , Yuki Bessho , Hiromichi Kobayashi
发明人： Naohito Yamada , Yukimasa Mori , Yuki Bessho , Hiromichi Kobayashi
IPC分类号： B32B1500
CPC分类号： C04B35/581 , C04B37/021 , C04B2237/366 , C04B2237/40 , C04B2237/402 , C04B2237/403 , C04B2237/404 , C04B2237/408 , C04B2237/62 , C04B2237/704 , C04B2237/706 , Y10T279/23 , Y10T428/22 , Y10T428/31678
摘要： An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0×109 &OHgr;·cm and is smaller than 1.0×1013 &OHgr;·cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.
摘要翻译：氮化铝烧结体具有以下特性：除了铝以外的总金属元素的量小于100ppm，室温下的体积电阻率大于1.0×10 9欧米汞厘米，小于1.0×10 13欧姆·厘米。包含金属的构件具有金属构件嵌入在上述氮化铝烧结体中的结构。由上述金属构成的静电卡盘构成。在上述金属构件中，金属构件嵌入上述的氮化铝烧结体中，其体积电阻率可以在氮化铝不添加低电阻材料的情况下进行控制。

3. 发明授权

US5728635A Aluminum nitride sintered bodies 失效
标题翻译：氮化铝烧结体
公开(公告)号：US5728635A
公开(公告)日：1998-03-17
申请号：US691915
申请日：1996-08-01
申请人： Hiromichi Kobayashi , Yuki Bessho , Yukimasa Mori
发明人： Hiromichi Kobayashi , Yuki Bessho , Yukimasa Mori
IPC分类号： C04B35/581 , H01L23/15
CPC分类号： H01L23/15 , C04B35/581 , H01L2924/0002 , H01L2924/09701 , Y10S156/914
摘要： An aluminum nitride sintered body is characterized by having a g-value of an unpaired electron in a spectrum of an electron spin resonance being not less than 2.0010. The aluminum nitride sintered body is produced by sintering a raw material composed of powdery aluminum nitride at a temperature of not less than 1730.degree. C. to not more than 1920.degree. under a pressure of not less than 80 kg/cm.sup.2.
摘要翻译：氮化铝烧结体的特征在于在电子自旋共振谱中具有不成对电子的g值不小于2.0010。氮化铝烧结体通过在不低于80kg / cm 2的压力下在不低于1730℃至不超过1920℃的温度下烧结由氮化铝粉末组成的原料来制备。

4. 发明授权

US5908799A Apparatus for producing semiconductor using aluminum nitride bodies as substrates 失效
标题翻译：使用氮化铝体作为基板来制造半导体的装置
公开(公告)号：US5908799A
公开(公告)日：1999-06-01
申请号：US922023
申请日：1997-09-02
申请人： Hiromichi Kobayashi , Yuki Bessho , Yukimasa Mori
发明人： Hiromichi Kobayashi , Yuki Bessho , Yukimasa Mori
IPC分类号： C04B35/581 , H01L23/15
CPC分类号： H01L23/15 , C04B35/581 , H01L2924/0002 , H01L2924/09701 , Y10S156/914
摘要： An aluminum nitride sintered body is characterized by having a g-value of an unpaired electron in a spectrum of an electron spin resonance being not less than 2.0010. The aluminum nitride sintered body is produced by sintering a raw material composed of powdery aluminum nitride at a temperature of not less than 1730.degree. C. to not more than 1920.degree. under a pressure of not less than 80 kg/cm.sup.2.
摘要翻译：氮化铝烧结体的特征在于在电子自旋共振谱中具有不成对电子的g值不小于2.0010。氮化铝烧结体通过在不低于80kg / cm 2的压力下在不低于1730℃至不超过1920℃的温度下烧结由氮化铝粉末组成的原料来制备。

5. 发明授权

US6001760A Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 失效
标题翻译：氮化铝烧结体，金属嵌入制品，电子功能材料和静电吸盘
公开(公告)号：US6001760A
公开(公告)日：1999-12-14
申请号：US824560
申请日：1997-03-25
申请人： Yuji Katsuda , Yukimasa Mori , Michio Takahashi , Yuki Bessho
发明人： Yuji Katsuda , Yukimasa Mori , Michio Takahashi , Yuki Bessho
IPC分类号： C04B35/581 , H01L21/683
CPC分类号： C04B35/581 , H01L21/6833 , Y10T279/23
摘要： In AlN crystal grains constituting a sintered body, is contained: 150 ppm-0.5 wt. %, preferably at most 0.1 wt.%, of at least one rare earth element (as oxide thereof); at most 900 ppm, preferably at most 500 ppm of at least one metal impurity except rare earth elements; and preferably at least 0.5 wt. % of oxygen measured by an electron probe X-ray microanalyzer. The grains have an average grain diameter of preferably at least 3.0 .mu.m and show a main peak in the wavelength range of 350-370 nm of spectrum obtained by a cathode luminescence method. The sintered body composed of AlN crystal grains has a volume resistivity at room temperature of at most 1.0.times.10.sup.12 .OMEGA..multidot.cm.
摘要翻译：在构成烧结体的AlN晶粒中含有150ppm-0.5wt。％，优选至多0.1重量％的至少一种稀土元素（作为其氧化物）; 至少一个金属杂质除了稀土元素之外，最多900ppm，优选至多500ppm; 优选至少0.5wt。通过电子探针X射线微量分析仪测量的氧的百分比。晶粒的平均粒径优选为3.0μm以上，在通过阴极发光法得到的光谱的350〜370nm的波长范围内呈现主峰。由AlN晶粒构成的烧结体的体积电阻率在室温下为1.0×10 12Ω以下，OMEGA×cm。

6. 发明申请

US20100243447A1 PUMPING ELECTRODE OF GAS SENSOR, METHOD OF MANUFACTURING CONDUCTIVE PASTE, AND GAS SENSOR 有权
标题翻译：气体传感器的抽吸电极，制造导电胶浆的方法和气体传感器
公开(公告)号：US20100243447A1
公开(公告)日：2010-09-30
申请号：US12732298
申请日：2010-03-26
申请人： Shinji FUJISAKI , Aya Sato , Yukimasa Mori , Sumiko Horisaka
发明人： Shinji FUJISAKI , Aya Sato , Yukimasa Mori , Sumiko Horisaka
IPC分类号： G01N27/26 , H01B1/12
CPC分类号： G01N27/4075
摘要： A gas sensor including a pump electrode and a method for manufacturing a conductive paste for forming the pump electrode. When the pump electrode constituting an electrochemical pump cell for adjusting an oxygen partial pressure inside a gas sensor to measure a concentration of a gas component in a measurement gas by a current-limiting method is formed of a cermet of a noble metal and an oxide having oxygen ion conductivity, the noble metal contains a first noble metal having a catalytic activity, and a second noble metal having a catalytic activity suppressing ability to suppress the catalytic activity of the first noble metal with respect to an oxide gas except for oxygen, and an abundance ratio of the second noble metal with respect to the first noble metal in a particle surface of the first noble metal existing in the pump electrode is to be 0.01 to 0.3.
摘要翻译：一种气体传感器，包括泵电极和用于制造用于形成泵电极的导电浆料的方法。当构成用于调节气体传感器内部氧分压的电极泵电极通过限流法测量测量气体中的气体成分的浓度由贵金属和氧化物的金属陶瓷形成时，氧离子传导性，贵金属含有具有催化活性的第一贵金属和具有抑制第一贵金属相对于除了氧之外的氧化物气体的催化活性的催化活性抑制能力的第二贵金属，以及在泵电极中存在的第一贵金属的粒子表面中的第二贵金属相对于第一贵金属的丰度比为0.01〜0.3。

7. 发明申请

US20070210696A1 ELECTRON-EMITTING DEVICE AND METHOD OF MANUFACTURING THE ELECTRON-EMITTING DEVICE 审中-公开
标题翻译：电子发射装置和制造电子发射装置的方法
公开(公告)号：US20070210696A1
公开(公告)日：2007-09-13
申请号：US11561528
申请日：2006-11-20
申请人： Shuichi Ozawa , Yukimasa Mori
发明人： Shuichi Ozawa , Yukimasa Mori
IPC分类号： H01J63/04 , H01J1/62
CPC分类号： H01J9/022 , B82Y10/00 , H01J1/312
摘要： An electron-emitting device includes a lower electrode, an emitter section formed from a dielectric material, and an upper electrode having fine through holes formed therein. When a drive voltage is applied between the lower electrode and the upper electrode, the electron-emitting device emits electrons from the emitter section through the fine through holes of the upper electrode. A protective film of oxide (e.g., silicon oxide) is formed on the upper surface of the emitter section. Thus, the upper surface of the emitter section is protected from attack of ionized gas molecules produced during electron-emitting operations. As a result, the upper surface of the emitter section becomes unlikely to be metalized, and thus, the amount of emitted electrons is unlikely to drop with the number of electron-emitting operations.
摘要翻译：电子发射器件包括下电极，由介电材料形成的发射极部分和形成有细通孔的上电极。当在下电极和上电极之间施加驱动电压时，电子发射器件通过上电极的细通孔从发射极发射电子。在发射极部分的上表面上形成氧化物保护膜（例如氧化硅）。因此，发射极部分的上表面被保护免受电子发射操作期间产生的电离气体分子的侵袭。结果，发射极部分的上表面变得不可能被金属化，因此发射的电子的量不太可能随着电子发射操作的数量而下降。

8. 发明授权

US08366893B2 Pumping electrode of gas sensor, method of manufacturing conductive paste, and gas sensor 有权
标题翻译：气体传感器的抽吸电极，导电膏的制造方法和气体传感器
公开(公告)号：US08366893B2
公开(公告)日：2013-02-05
申请号：US12732298
申请日：2010-03-26
申请人： Shinji Fujisaki , Aya Sato , Yukimasa Mori , Sumiko Horisaka
发明人： Shinji Fujisaki , Aya Sato , Yukimasa Mori , Sumiko Horisaka
IPC分类号： G01N27/26
CPC分类号： G01N27/4075
摘要： A gas sensor including a pump electrode and a method for manufacturing a conductive paste for forming the pump electrode. When the pump electrode constituting an electrochemical pump cell for adjusting an oxygen partial pressure inside a gas sensor to measure a concentration of a gas component in a measurement gas by a current-limiting method is formed of a cermet of a noble metal and an oxide having oxygen ion conductivity, the noble metal contains a first noble metal having a catalytic activity, and a second noble metal having a catalytic activity suppressing ability to suppress the catalytic activity of the first noble metal with respect to an oxide gas except for oxygen, and an abundance ratio of the second noble metal with respect to the first noble metal in a particle surface of the first noble metal existing in the pump electrode is to be 0.01 to 0.3.
摘要翻译：一种气体传感器，包括泵电极和用于制造用于形成泵电极的导电浆料的方法。当构成用于调节气体传感器内部氧分压的电极泵电极通过限流法测量测量气体中的气体成分的浓度由贵金属和氧化物的金属陶瓷形成时，氧离子传导性，贵金属含有具有催化活性的第一贵金属和具有抑制第一贵金属相对于除了氧之外的氧化物气体的催化活性的催化活性抑制能力的第二贵金属，以及在泵电极中存在的第一贵金属的粒子表面中的第二贵金属相对于第一贵金属的丰度比为0.01〜0.3。

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